WO2011040329A1 - 素子収納用パッケージおよび実装構造体 - Google Patents
素子収納用パッケージおよび実装構造体 Download PDFInfo
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- WO2011040329A1 WO2011040329A1 PCT/JP2010/066550 JP2010066550W WO2011040329A1 WO 2011040329 A1 WO2011040329 A1 WO 2011040329A1 JP 2010066550 W JP2010066550 W JP 2010066550W WO 2011040329 A1 WO2011040329 A1 WO 2011040329A1
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- H01P5/00—Coupling devices of the waveguide type
- H01P5/02—Coupling devices of the waveguide type with invariable factor of coupling
- H01P5/022—Transitions between lines of the same kind and shape, but with different dimensions
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- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
- H01L23/057—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads being parallel to the base
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Definitions
- the present invention relates to an element storage package and a mounting structure using the element storage package.
- an element storage package having an input / output terminal in which a signal line is formed on one main surface of a dielectric layer and a ground layer is formed on the other main surface of the dielectric layer is known (for example, Japanese Patent Laid-Open No. Hei 8). -227949).
- An object of the present invention is to provide an element storage package having excellent high-frequency transmission characteristics, and a mounting structure using the element storage package.
- An element storage package includes a substrate having an element mounting region on an upper surface, a frame provided on the substrate along the outer periphery of the mounting region, and having a through hole in a part thereof Has a body. Further, the element storage package is provided in the through hole, and extends to the inside and outside of the frame body, and is formed on the first dielectric layer to electrically connect the inside and outside of the frame body.
- an input / output terminal having a layer The metal layer is formed to be connected to the first ground layer and the second ground layer from the second dielectric layer to the first dielectric layer, and is provided apart from the signal line. It is characterized by being able to.
- the mounting structure according to the second embodiment of the present invention is characterized by including the element storage package and an element mounted on the element storage package.
- FIG. 3 is a cross-sectional view of an input / output terminal along X-X ′ shown in FIG. 2. It is a permeation
- FIG. 5A is an exploded perspective view of the first dielectric layer
- FIG. 5B is an exploded perspective view of the second dielectric layer. It is a perspective view which shows the external appearance of the input / output terminal which concerns on one modification.
- FIG. 5A is an exploded perspective view of the first dielectric layer
- FIG. 5B is an exploded perspective view of the second dielectric layer. It is a perspective view which shows the external appearance of the input / output terminal which concerns on one modification.
- FIG. 7 is a cross-sectional view of the input / output terminals along Y-Y ′ shown in FIG. 6. It is a perspective view which shows the external appearance of the input / output terminal which concerns on one modification.
- FIG. 9 is a cross-sectional view of the first dielectric layer along Z-Z ′ shown in FIG. 8. It is a perspective view which shows the external appearance of the input / output terminal which concerns on one modification. It is a perspective view which shows the external appearance of the input / output terminal which concerns on one modification.
- FIG. 12 is a cross-sectional view of the input / output terminals along Yx-Y′x shown in FIG. 11. It is sectional drawing of the input / output terminal which concerns on one modification.
- FIG. 17 is a cross-sectional view of the input / output terminals along Yy-Y′y shown in FIG. 16.
- FIG. 1 is a schematic perspective view showing an element storage package 1 according to the present embodiment.
- FIG. 2 is a schematic perspective view of input / output terminals used in the element storage package 1 of FIG.
- the element storage package 1 is used for an electronic device. In particular, it is used for a high-frequency circuit of an electronic device used at a high frequency such as a microwave and a millimeter wave.
- the element storage package 1 is used to mount an element 2 made of an active element such as a semiconductor element, an optical semiconductor element, a transistor, a diode, or a thyristor, or a passive element such as a resistor or a capacitor.
- an active element such as a semiconductor element, an optical semiconductor element, a transistor, a diode, or a thyristor, or a passive element such as a resistor or a capacitor.
- a mounting structure 1X what mounted the element 2 in the element storage package 1 is defined as a mounting structure 1X.
- the element storage package 1 includes a substrate 3 having a mounting region R of the element 2 on the upper surface, a frame 4 provided on the substrate 3 along the outer periphery of the mounting region R, and having a through hole H in a part thereof.
- the input / output terminal 5 is provided in the through hole H and electrically connects the inside and outside of the frame body 4.
- the substrate 3 is a member formed in a square shape when viewed from above.
- the substrate 3 is made of, for example, a metal material such as copper, iron, tungsten, molybdenum, nickel, or cobalt, or an alloy containing these metal materials.
- the substrate 3 has a function of improving heat conductivity and dissipating heat generated from the element 2 mounted in the mounting region R to the outside efficiently through the substrate 3.
- the thermal conductivity of the substrate 3 is set to 15 W / (m ⁇ K) or more and 450 W / (m ⁇ K) or less, for example.
- the substrate 3 is manufactured in a predetermined shape by using a conventionally known metal working method such as rolling or punching for an ingot obtained by casting a molten metal material into a mold and solidifying it.
- the length of one side of the substrate 3 is set to 3 mm or more and 50 mm or less, for example.
- substrate 3 is set to 0.3 mm or more and 5 mm or less, for example.
- the mounting region R of the substrate 3 is a region that is not connected to the frame body 4 when the frame body 4 is connected to the upper surface of the substrate 3.
- the substrate 3 has a quadrangular shape.
- the shape of the substrate 3 is not limited to a quadrangular shape and may be a polygonal shape or an elliptical shape as long as an element can be mounted.
- the frame body 4 is a member that is connected along the outer periphery of the mounting region R of the substrate 3 and protects elements mounted on the mounting region R from the outside. Further, the frame body 4 is formed with a through hole H provided with the input / output terminal 5 in a part of the side surface.
- the frame 4 is brazed to the substrate 3 via a brazing material.
- the brazing material is made of, for example, silver, copper, gold, aluminum, or magnesium, and may contain an additive such as nickel, cadmium, or phosphorus.
- the frame 4 is made of, for example, a metal material such as copper, iron, tungsten, molybdenum, nickel, or cobalt, or an alloy containing these metal materials.
- the frame body 4 has a function of efficiently dissipating heat generated from the element 2 to the outside of the frame body 4 in a state where the element 2 is mounted in the mounting region R.
- the thermal conductivity of the frame 4 is set to, for example, 15 W / (m ⁇ K) or more and 450 W / (m ⁇ K) or less.
- a lid body 6 is provided on the frame body 4, a lid body 6 is provided in a state where the element 2 is mounted in the mounting region R.
- the lid body 6 has a function of sealing a space surrounded by the substrate 2 and the frame body 4.
- the lid body 6 is brazed onto the frame body 4 via a brazing material, for example.
- the lid 6 is made of, for example, a metal material such as copper, iron, tungsten, molybdenum, nickel, or cobalt, or an alloy containing these metal materials.
- FIG. 3 is a cross-sectional view of the input / output terminal 5 along X-X ′ shown in FIG. 2.
- 4 is a transparent perspective view showing the positional relationship between the signal line and the metal layer shown in FIG.
- the input / output terminal 5 provided in the through hole H is electrically connected between the first dielectric layer 7 extending inside and outside the frame body 4 and the inside and outside of the frame body 4 formed on the first dielectric layer 7.
- a metal layer 11 extending to the end.
- the first ground layer 9a and the second ground layer 9b are collectively referred to as the ground layer 9.
- the signal line 8 and the ground layer 9 are paired and function as a high-frequency transmission line.
- the signal line 8 has a function of transmitting a predetermined electric signal.
- the signal line 8 is used as, for example, a microstrip line or a coplanar line.
- the signal line 8 is made of, for example, a metal material such as tungsten, molybdenum, manganese, copper, silver, gold, aluminum, nickel, or chromium, a mixture thereof, or an alloy thereof.
- the line width of the signal line 8 is 1 ⁇ 4 or less of the wavelength of the signal transmitted to the signal line 8, and is set to, for example, 0.05 mm or more and 0.5 mm or less.
- a lead terminal 12 is formed on the signal line 8.
- the lead terminal 12 is a member for electrically connecting an external electronic device or the like to the element 2.
- the lead terminal 12 is connected to the signal line 8 via a brazing material. Then, the signal line 8 and the lead terminal 12 are electrically connected.
- the first ground layer 9 a is formed on the lower surface of the first dielectric layer 7.
- the first ground layer 9 a is formed from the lower surface of the first dielectric layer 7 to the side surface of the second dielectric layer 10 through the side surface of the first dielectric layer 7.
- the second dielectric layer 10 is connected to the second ground layer 9 b formed on the upper surface of the second dielectric layer 10 from the side surface of the second dielectric layer 10.
- the ground layer 9 is formed on the outer surfaces of the first dielectric layer 7 and the second dielectric layer 10 as shown in FIG. 2 or FIG.
- the ground layer 9 has a function of setting a common potential, for example, a ground potential.
- the ground layer 9 is made of, for example, a metal material such as copper, silver, tungsten, molybdenum, manganese, gold, aluminum, nickel, or chromium, diamond, a mixture thereof, an alloy thereof, or the like.
- the ground layer 9 is formed in a region overlapping the signal line 8 in plan view.
- the frame 4 is made of a metal material, and the ground layer 9 and the frame 4 are electrically connected.
- the first dielectric layer 7 and the second dielectric layer 10 are insulating substrates, for example, inorganic materials such as aluminum oxide, aluminum nitride, or silicon nitride, or organic materials such as epoxy resin, polyimide resin, or ethylene resin. It is made of a material, a ceramic material such as alumina or mullite, or a glass ceramic material. Or it consists of a composite material which mixed several materials among these materials.
- the thicknesses of the first dielectric layer 7 and the second dielectric layer 10 are less than or equal to half of the wavelength of the signal transmitted to the signal line 8 and are set to, for example, 0.1 mm or more and 1.0 mm or less. ing.
- the first dielectric layer 7 or the second dielectric layer 10 may contain a large number of fillers.
- the first dielectric layer 7 or the second dielectric layer 10 contains a filler so that the first dielectric layer 7 or The viscosity of the second dielectric layer 10 before curing can be adjusted, and the thickness dimension of the first dielectric layer 7 or the second dielectric layer 10 can be brought close to a desired value.
- the filler is spherical, the filler diameter is set to, for example, 0.05 ⁇ m to 6 ⁇ m, and the coefficient of thermal expansion is, for example, ⁇ 5 ppm / ° C. to 5 ppm / ° C.
- the filler is made of, for example, silicon oxide, silicon carbide, aluminum oxide, aluminum nitride, or aluminum hydroxide.
- the relative dielectric constant of the filler contained in the first dielectric layer 7 or the second dielectric layer 10 is smaller than the relative dielectric constant of the material constituting the first dielectric layer 7 or the second dielectric layer 10. Can be set.
- a low dielectric constant filler smaller than the relative dielectric constant of the first dielectric layer 7 or the second dielectric layer 10 the entire dielectric layer can be further reduced in dielectric constant, The transmission efficiency of the signal transmitted to the line 8 can be improved.
- the filler can be an insulating filler. By making the filler insulative, the influence on the characteristic impedance of the signal transmitted to the signal line 8 can be reduced.
- a metal layer 11 is provided in the second dielectric layer 10.
- the metal layer 11 extends from the inside of the frame body 4 to the outside of the frame body 4 along the signal line 8.
- the metal layer 11 is formed from the inner wall surface of the second dielectric layer 10 to the outer wall surface of the second dielectric layer 10. That is, the metal layer 11 is formed from the space surrounded by the frame body 4 to the outside of the space not surrounded by the frame body 4.
- the metal layer 11 is made of, for example, a metal material such as copper, silver, tungsten, molybdenum, or manganese, diamond, a mixture thereof, an alloy thereof, or the like.
- the thermal conductivity of the metal layer 11 is set to, for example, 20 W / m ⁇ K or more and 500 W / m ⁇ K or less.
- the thickness of the metal layer 11 is set to 0.01 mm or more and 0.5 mm or less, for example.
- the inside of the frame 4 is likely to be hotter than the outside of the frame 4 due to heat generated from the element 2.
- the signal line may become high temperature due to the high frequency. Therefore, there is a possibility that the temperature of the element 2 in the frame 4 rises and the electrical characteristics of the element 2 change.
- heat is transferred from the inside of the frame body 4, and the transferred heat is dissipated out of the frame body 4. As a result, heat generated from the element 2 can be suppressed from being trapped in the frame body 4.
- the metal layers 11 are formed on both sides of the signal line 8 when the input / output terminals 5 are transmitted through the plane.
- the signal line 8 generates heat when generating a high frequency wave such as a microwave or a millimeter wave.
- the heat generated in the signal line 8 is dissipated around the signal line 8 when viewed in cross section, and the heat generated in the signal line 8 may be trapped in the frame 4. Therefore, by providing the metal layers 11 on both sides of the signal line 8, heat generated in the signal line 8 can be efficiently transferred to the metal layer 11.
- the metal layer 11 is formed so as to be connected to both the second dielectric layer 10 to the second dielectric layer 10.
- the metal layer 11 is provided away from the signal line 8.
- the metal layer 11 is formed in a plate shape along the signal line 8, so that heat is effectively transmitted from the signal line 8.
- the metal layer 11 extends from the lower end of the second dielectric layer 10 to the second ground layer 9b through the first dielectric layer 7.
- the metal layer 11 extends to the upper end of the second dielectric layer 10 and is also connected to the second ground layer 9 b located on the upper surface of the second dielectric layer 10. Then, the metal layer 11 is connected to the ground layer 9 to have, for example, an earth potential. Therefore, the metal layer 11 can shield the electric field generated based on the high frequency signal of the signal line 8. As described above, by providing the metal layer 11 with an electric field shielding effect, it is possible to suppress the high-frequency transmission characteristics of the element 2 from being changed due to the electric field generated from the signal line 8.
- the mounting structure 1X can be configured by flip-chip mounting the element 2 on the element storage package 1 via bumps such as solder.
- a semiconductor element such as an IC or LSI is mounted, for example, silicon, germanium, gallium arsenide, gallium arsenide phosphorus, gallium nitride, or silicon carbide can be used as the semiconductor element.
- the metal layer 11 extending to the inside and outside of the frame body 4 along the signal line 8
- the heat inside the frame body 4 is transmitted to the outside of the frame body 4, and the inside of the frame body 4 It is possible to suppress the temperature from becoming higher than the temperature outside the frame body 4, and it is possible to provide an element housing package excellent in heat dissipation and a mounting structure using the element housing package.
- the metal layer 11 is divided without forming the metal layer 11 continuously from one end to the other end of the second dielectric layer 10 when viewed in plan. Then, it is assumed that the metal layer 11 is changed to a plurality of metal pillars functioning as a ground layer. In such a case, the signal transmitted to the signal line 8 is reflected from the metal column and passes between the adjacent metal columns and the side surface of the first dielectric layer 7 or the second dielectric layer 10. In some cases, the light travels by being reflected from the ground layer 9 formed on the surface.
- a signal transmitted to the signal line 8 at a high frequency such as a microwave or a millimeter wave frequently undergoes signal mode conversion and has a large amount of electromagnetic wave leakage. End up.
- the metal layer 11 when the metal layer 11 is replaced with a plurality of metal pillars, a plurality of via holes are formed in each of the first dielectric layer 7 and the second dielectric layer 10, and then a metal paste is formed in the via holes.
- a metal paste is formed in the via holes.
- both layers are baked integrally.
- the via hole if an attempt is made to form a metal column that can handle high frequencies such as millimeter waves, the via hole must be very fine. In such a case, the diameter of the via hole is, for example, 0.01 mm or more and 0.5 mm or less, and it is very difficult to mechanically provide the via hole using a punch. It is envisaged to use holes. However, even if a laser beam is used, the diameter of the via holes becomes very small. Therefore, by controlling the place where the via holes are provided, a plurality of via holes are provided in a line on the line in plan view. It is difficult.
- the via holes provided in the first dielectric layer 7 and the second dielectric layer 10 are slightly displaced from the desired locations, and the metal pillars in the first dielectric layer 7 and the second dielectric layer 10. There is a possibility that the metal pillars inside are not connected, and the structure easily leaks electromagnetic waves. Further, if the via hole has a very fine size, it becomes difficult to fill the via hole with a conductor paste or the like, and a conduction failure tends to occur in the metal column. In the present embodiment, the input / output terminal 5 is very small.
- the thicknesses of the first dielectric layer 7 and the second dielectric layer 10 are set to 0.1 mm or more and 1.0 mm or less.
- the input / output terminal 5 may be deformed by the heat that opens the via hole.
- the structure changed to a plurality of metal pillars complicates the manufacturing process and decreases the manufacturing yield.
- the coaxial mode state of the signal can be kept long, and the electromagnetic wave It is possible to provide an element housing package with excellent electrical characteristics that is less likely to leak, and a mounting structure using the element housing package.
- the 1st dielectric material layer 7 and the 2nd dielectric material layer 10 can be produced by integrally baking with the metal layer 11, and while simplifying a manufacturing process, a manufacturing yield can be improved.
- each of the substrate 3 and the frame 4 is prepared.
- Each of the substrate 3 and the frame 4 is manufactured in a predetermined shape by using a metal processing method on a solidified ingot obtained by casting a molten metal material into a mold.
- the input / output terminal 5 is prepared.
- the method for producing the input / output terminal 5 when the material of the first dielectric layer 7 and the second dielectric layer 10 is an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, or the like. Will be described.
- the material of the first dielectric layer 7 and the second dielectric layer 10 is made of an aluminum oxide sintered body
- the raw material powder such as aluminum oxide, silicon oxide, magnesium oxide and calcium oxide is used.
- An organic binder, a plasticizer or a solvent is added and mixed to form a slurry.
- the first dielectric layer 7 is decomposed into three. Three of them are: a first base body 7a in which a signal line 8 is formed on the upper surface and a ground layer 9 is formed on the lower surface; a second base body 7b in which a metal layer 11 is formed so as to sandwich both sides of the signal line 8; 3 bases 7c.
- the form of the first dielectric layer 7 is a form of each of the first base 7a, the second base 7b, and the third base 7c. Then, the mold is filled with a slurry-like aluminum oxide material, and the first base 7a, the second base 7b, and the third base 7c before being sintered are taken out.
- the second dielectric layer 10 is decomposed into three as shown in FIG.
- the three are composed of a fourth base 10a provided on the first base 7a, a fifth base 10b provided on the second base 7b, and a sixth base 10c provided on the third base 7c.
- the form of the second dielectric layer 10 is a form of each of the fourth base 10a, the fifth base 10b, and the sixth base 10c.
- the mold is filled with a slurry-like aluminum oxide material, and the fourth base body 10a, the fifth base body 10b, and the sixth base body 10c before being sintered are taken out.
- a high melting point metal powder such as tungsten or molybdenum is prepared, and an organic binder, a plasticizer, a solvent or the like is added to and mixed with the powder to obtain a metal paste.
- the second dielectric layer 10 of the precursor is placed on the first dielectric layer 7 of the precursor and pressed to be brought into close contact with each other. Then, by firing at a temperature of about 1600 ° C., the input / output terminal 5 made of ceramics can be produced.
- the input / output terminal 5 is connected to the through hole H of the prepared frame body 4 by brazing via a brazing material. In this way, the element storage package 1 can be manufactured.
- the mounting structure 1 ⁇ / b> X can be manufactured by mounting the element 2 on the element storing package 1 via solder and providing the lid 6 on the frame 4.
- ⁇ Modification 1> 6 is a schematic perspective view of an input / output terminal according to the first modification.
- FIG. 7 is a cross-sectional view of the input / output terminal taken along line YY ′ of FIG.
- the metal layer 11 is provided in a region that does not overlap with the signal line 8, but the present invention is not limited to this.
- a heat transfer layer 13 may be additionally provided in a region overlapping the signal line 8.
- the heat transfer layer 13 is provided in the first dielectric layer 7.
- the heat transfer layer 13 extends from the inside of the frame body 4 to the outside of the frame body 4, and has a function of transferring the heat inside the frame body 4 to the outside of the frame body 4.
- the heat transfer layer 13 is formed in a direction along the upper surface of the signal line 8.
- the heat transfer layer 13 is connected to the metal layer 11 in the first dielectric layer 7 and further connected to the ground layer 9 formed on the side surface of the first dielectric layer 7. In this modification, the heat dissipation effect can be improved by adding the heat transfer layer 13 in addition to the metal layer 11.
- FIG. 8 is a schematic perspective view of an input / output terminal according to Modification 2.
- FIG. 9 is a cross-sectional view of the input / output terminal taken along the line ZZ ′ of FIG.
- the metal layer 11 may extend from the wall surface of the second dielectric layer 10 to the upper surface of the first dielectric layer 7. Since the part 11a of the metal layer 11 extends to the upper surface of the first dielectric layer 7, the exposed area of the metal layer 11 outside the frame body 4 can be increased. The heat dissipation effect can be improved.
- a part 11 a of the metal layer 11 extends from the first dielectric layer 7 that overlaps the second dielectric layer 10 in plan view to the first dielectric layer 7 that does not overlap the second dielectric layer 10. Exists. And by arranging the signal line 8 between the pair of metal layers 11, the change in the electric field shielding around the signal line 8 can be gradually changed. As a result, it is possible to suppress changes in electrical characteristics of signals transmitted in the signal line 8.
- the time during which the signal is reflected from the layer functioning as the ground can be shortened, and a higher frequency signal can be obtained.
- the metal layer 11 functioning as the ground surrounding the signal line 8 overlaps the second dielectric layer 10 in the first dielectric layer 7 when seen in plan view.
- the first dielectric layer 7 does not extend into the first dielectric layer 7 that does not overlap with the layer 10, the first dielectric layer 7 that overlaps the second dielectric layer 10 when viewed in plan, and the second dielectric layer An electric field is generated from the signal line 8 toward the ground layer 9 formed on the side surface of the first dielectric layer 7 or the second dielectric layer 10 at the boundary with the first dielectric layer 7 that does not overlap with the first dielectric layer 7.
- FIG. 10 is a schematic perspective view of an input / output terminal according to Modification 3, and is a transparent perspective view of the signal line 8 interposed between the first dielectric layer 7 and the second dielectric layer 10.
- the planar thickness of the signal line 8 in a region where the second dielectric layer 10 and the first dielectric layer 7 overlap in plan view may be changed.
- the electrical characteristics of the signal transmitted in the signal line 8 can be set to desired characteristics.
- ⁇ Modification 4> 11 is a schematic perspective view of an input / output terminal according to Modification 4.
- FIG. 12 is a cross-sectional view of the input / output terminal along Yx-Y′x in FIG.
- the first dielectric layer 7 or the second dielectric layer 10 is made to contain a filler and the relative dielectric constant is set small.
- the present invention is not limited to this. As shown in FIG. 12, for example, the dielectric constant of the member m1 positioned around the signal line 8 in a cross-sectional view is set smaller than that of the member m2 positioned on the outer periphery of the member m1.
- the member m1 exists in a region sandwiched between the pair of metal layers 11 in a cross-sectional view, as shown in FIG. Moreover, the member m1 is located between the 1st heat transfer layer 13a and the 2nd heat transfer layer 13b which are located in the upper and lower sides mentioned later.
- the member m1 can be made to have a lower dielectric constant than the member m2 by using a porous material containing a larger number of closed pores than the member m2. Further, by selecting a material having a lower dielectric constant than that of the member m2, the member m1 can be reduced in dielectric constant.
- the member m1 can be made of, for example, a glass ceramic material that is a low dielectric constant material. Note that the input / output terminal according to this modification is composed of a plurality of members. For example, after metallizing or plating the joints between the members, the two members are integrated by brazing, soldering, or the like. Can be
- the distance between the signal line 8 and the metal layer 11 must be reduced to reduce the size of the member m1, but the member m1 By reducing the dielectric constant, it is possible to increase the space between the metal layers 11 even when the signal transmitted to the signal line 8 is a high frequency, and the size of the member m1 can be increased. It is easy to handle and assemble parts of the input / output terminals.
- a first heat transfer layer 13 a as a heat transfer layer is provided in the first dielectric layer 7
- a second heat transfer layer 13 b as a heat transfer layer is provided in the second dielectric layer 10.
- the first heat transfer layer 13 a and the second heat transfer layer 13 b extend from the inside of the frame body 4 to the outside of the frame body 4, and have a function of transferring the heat inside the frame body 4 to the outside of the frame body 4. Yes.
- a plurality of ground layers 9 located on the lower surface of the input / output terminal and the first heat transfer layer 13a, or between the ground layer 9 located on the upper surface of the input / output terminal and the second heat transfer layer 13b.
- Via conductors 14 may be provided to improve the ground function characteristics of the ground layer 9 and the heat transfer layer 13a or the ground layer 9 and the heat transfer layer 13b.
- the via conductor 14 can be formed by forming a via hole in a ceramic green sheet with a laser beam and printing the conductor thereon.
- the input / output terminal 5 has the first dielectric layer 7 located below the first heat transfer layer 13a. A part and a part of the second dielectric layer 10 located above the second heat transfer layer 13b may be removed.
- FIG. 13 is a cross-sectional view of an input / output terminal according to Modification 5.
- the dielectric constant of the member m1 positioned between the pair of metal layers 11 is set to be smaller than the dielectric constant around the member m1, but the present invention is not limited to this.
- each of the first dielectric layer 7 and the second dielectric layer 10 is composed of a plurality of layers, and the dielectric constant of the layer located in the vicinity of the signal line 8 is located in the vicinity thereof. Set smaller than the layer.
- connection layer such as metallization or plating is applied to the boundaries in advance, A single connection can be made through the connection layer.
- the first dielectric layer 7 is a single layer, and the first dielectric layer 7 and the dielectric under the second heat transfer layer 13b of the second dielectric layer 10 are provided.
- the rate may be set smaller than the dielectric constant of the first dielectric layer 7 above the second heat transfer layer 13b.
- the second dielectric layer 10 is a single layer, and the dielectric constant of the second dielectric layer 10 and the first dielectric layer 7 above the first heat transfer layer 13a is the first transfer layer. You may set smaller than the dielectric constant of the lower part of the heat
- ⁇ Modification 6> 16 is a schematic perspective view of an input / output terminal according to Modification 6.
- FIG. 17 is a cross-sectional view of the input / output terminal taken along Yy-Y′y in FIG.
- a first ground layer 9 a is formed on the lower surface of the first dielectric layer 7.
- a first heat transfer layer 13 a is formed on the upper surface of the first dielectric layer 7. Therefore, the first dielectric layer 7 is divided into an upper part and a lower part on the basis of the first heat transfer layer 13a. Also, as shown in FIG. 17, a via conductor 14 is formed below the first heat transfer layer 13a so as to conduct the lower part of the first heat transfer layer 13a up and down.
- a case where a metal plate having a thickness corresponding to the thickness of the first dielectric layer 7 is used instead of the first dielectric layer 7 will be described.
- An input / output terminal through which a high frequency such as a microwave or a millimeter wave flows needs to be very small in order to suppress the influence of electromagnetic waves. Therefore, when a metal plate is used instead of the first dielectric layer 7, the second dielectric layer 10 peels from the metal plate due to the difference in thermal expansion coefficient between the metal plate and the second dielectric layer 10. There is great fear. As described above, the second dielectric layer 10 is easily peeled off from the metal plate so as to warp against the metal plate.
- the first dielectric layer 7 made of a ceramic material having a similar thermal expansion coefficient as the second dielectric layer 10 is used on the lower surface of the second dielectric layer 10 instead of the metal body.
- the thermal expansion coefficients of both layers are approximated, so that the first dielectric layer 7 and the second dielectric layer It can suppress that the layer 10 peels.
- the sixth modification by providing a plurality of via conductors 14 in the entire surface of the first dielectric layer 7 and in the first dielectric layer 7, the ground function of the first dielectric layer 7 is maintained, and The first dielectric layer 7 can be prevented from being peeled from the second dielectric layer 10.
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Abstract
Description
図1は、本実施形態に係る素子収納用パッケージ1を示す概観斜視図である。図2は、図1の素子収納用パッケージ1に用いられる入出力端子の概観斜視図である。素子収納用パッケージ1は、電子機器に用いるものである。特に、マイクロ波、ミリ波等の高周波で用いられる電子機器の高周波回路に用いられる。
ここで、図1に示す素子収納用パッケージ1および実装構造体1Xの製造方法を説明する。
本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。ここで、上述した実施形態に係る変形例について説明する。なお、本実施形態の変形例に係る素子収納用パッケージのうち、本実施形態に係る素子収納用パッケージと同様な部分については、同一の符号を付して適宜説明を省略する。
図6は、変形例1に係る入出力端子の概観斜視図であって、図7は、図6のY-Y’に沿った入出力端子の断面図である。
図8は、変形例2に係る入出力端子の概観斜視図であって、図9は、図8のZ-Z’に沿った入出力端子の断面図である。
図10は、変形例3に係る入出力端子の概観斜視図であって、第1誘電体層7と第2誘電体層10との間に介在される信号線路8の透過斜視図である。
図11は、変形例4に係る入出力端子の概観斜視図であって、図12は、図11のYx-Y’xに沿った入出力端子の断面図である。
図13は、変形例5に係る入出力端子の断面図である。変形例4では、一対の金属層11の間に位置する部材m1の誘電率が、その周囲の誘電率よりも小さく設定されていたが、これに限られない。図13に示すように、例えば、第1誘電体層7と第2誘電体層10をそれぞれ複数の層から構成するとともに、信号線路8近傍に位置する層の誘電率を、その周囲に位置する層よりも小さく設定する。
図16は、変形例6に係る入出力端子の概観斜視図であって、図17は、図16のYy-Y’yに沿った入出力端子の断面図である。
Claims (8)
- 上面に素子の実装領域を有する基板と、
前記基板上であって前記実装領域の外周に沿って設けられ、一部に貫通孔を有する枠体と、
前記貫通孔に設けられ、前記枠体の内外に延在する第1誘電体層と、前記第1誘電体層上に形成され前記枠体の内外を電気的に接続する信号線路と、前記第1誘電体層の下面に形成される第1グランド層と、平面透視して前記枠体と重なる領域であって前記信号線路上に形成される第2誘電体層と、前記第2誘電体層の上面に形成される第2グランド層と、前記第2誘電体層内に設けられ前記信号線路に沿って前記枠体内から前記枠体外にまで延在される金属層と、を有する入出力端子と、を備え、
前記金属層は、前記第2誘電体層から前記第1誘電体層にまで前記第1グランド層および前記第2グランド層に接続して形成されるとともに、前記信号線路と離間して設けられている素子収納用パッケージ。 - 請求項1に記載の素子収納用パッケージであって、
前記金属層は、前記枠体内にて露出する前記第2誘電体層の内壁面から、前記枠体外にて露出する前記第2誘電体層の外壁面にまで形成されていることを特徴とする素子収納用パッケージ。 - 請求項1に記載の素子収納用パッケージであって、
前記金属層は、平面透視して前記信号線路の両側にそれぞれ形成されていることを特徴とする素子収納用パッケージ。 - 請求項3に記載の素子収納用パッケージであって、
前記第1誘電体層および前記第2誘電体層はそれぞれ複数部材からなり、
前記第1誘電体層の内部および前記第2誘電体層の内部には、前記第1グランド層および前記第2グランド層の少なくとも一方に電気的に接続される伝熱層がそれぞれ設けられており、
断面視して前記一対の伝熱層と前記一対の金属層とで囲まれる領域の誘電率は、前記一対の伝熱層と前記一対の金属層とで囲まれる領域の外部に位置する前記第1誘電体層および前記第2誘電体層の部材よりも誘電率が小さいことを特徴とする素子収納用パッケージ。 - 請求項3に記載の素子収納用パッケージであって、
前記第1誘電体層および前記第2誘電体層はそれぞれ複数部材からなり、
前記第1誘電体層の内部および前記第2誘電体層の内部には、前記第1グランド層および前記第2グランド層の少なくとも一方に電気的に接続される伝熱層がそれぞれ設けられており、
前記伝熱層と前記第1誘電体層の下面との間、あるいは前記伝熱層と前記第2誘電体層の上面との間には、複数のビア導体が設けられていることを特徴とする素子収納用パッケージ。 - 請求項1に記載の素子収納用パッケージであって、
前記第1誘電体層は複数層からなり、
前記第1誘電体層の内部には、前記第1グランド層および前記第2グランド層の少なくとも一方に電気的に接続される伝熱層が設けられており、
前記伝熱層より上層の前記第1誘電体層の誘電率は、前記伝熱層より下層の前記第1誘電体層の誘電率よりも小さいことを特徴とする素子収納用パッケージ。 - 請求項1に記載の素子収納用パッケージであって、
前記第2誘電体層は複数層からなり、
前記第2誘電体層の内部には、前記第1グランド層および前記第2グランド層の少なくとも一方に電気的に接続される伝熱層が設けられており、
前記伝熱層より下層の前記第2誘電体層の誘電率は、前記伝熱層より上層の前記第2誘電体層の誘電率よりも小さいことを特徴とする素子収納用パッケージ。 - 請求項1乃至請求項7のいずれかに記載の素子収納用パッケージと、
前記素子収納用パッケージに実装された素子を備えたことを特徴とする実装構造体。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170080648A (ko) * | 2014-10-31 | 2017-07-10 | 제네럴 일렉트릭 컴퍼니 | 비자성 패키지를 실링하기 위한 리드 및 방법 |
JP2017216269A (ja) * | 2016-05-30 | 2017-12-07 | 京セラ株式会社 | 半導体パッケージおよび半導体装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5902825B2 (ja) * | 2012-10-29 | 2016-04-13 | 京セラ株式会社 | 素子収納用パッケージおよび実装構造体 |
CN104428888B (zh) * | 2012-10-30 | 2017-09-22 | 京瓷株式会社 | 电子部件收纳用容器以及电子装置 |
JP5700187B2 (ja) * | 2013-02-13 | 2015-04-15 | 株式会社村田製作所 | 高周波信号伝送線路、電子機器及び高周波信号伝送線路の製造方法 |
JP2015084378A (ja) * | 2013-10-25 | 2015-04-30 | キヤノン株式会社 | 電子部品、電子機器、実装部材の製造方法、電子部品の製造方法 |
WO2015137489A1 (ja) * | 2014-03-13 | 2015-09-17 | 京セラ株式会社 | 電子部品収納用パッケージおよび電子装置 |
JP2015192097A (ja) * | 2014-03-28 | 2015-11-02 | 住友電工デバイス・イノベーション株式会社 | 電子部品搭載用パッケージ |
CN106463464B (zh) * | 2014-07-30 | 2019-02-22 | 京瓷株式会社 | 电子部件收纳用封装件以及具备其的电子装置 |
CN105140609B (zh) * | 2015-07-13 | 2019-05-24 | 上海安费诺永亿通讯电子有限公司 | 一种低损耗扁平传输线 |
CN105025671B (zh) * | 2015-07-28 | 2016-09-28 | 南京南瑞继保电气有限公司 | 晶闸管触发单元的外壳结构 |
JP2017054757A (ja) * | 2015-09-11 | 2017-03-16 | オムロン株式会社 | 磁気シールド構造 |
JP7085908B2 (ja) * | 2018-06-13 | 2022-06-17 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11176988A (ja) * | 1997-12-15 | 1999-07-02 | Kyocera Corp | 高周波用入出力端子ならびに高周波用半導体素子収納用パッケージ |
JP2003100922A (ja) * | 2001-09-27 | 2003-04-04 | Kyocera Corp | 入出力端子および半導体素子収納用パッケージ |
JP2004349568A (ja) * | 2003-02-17 | 2004-12-09 | Kyocera Corp | 入出力端子および半導体素子収納用パッケージならびに半導体装置 |
JP2009010149A (ja) * | 2007-06-28 | 2009-01-15 | Kyocera Corp | 接続端子及びこれを用いたパッケージ並びに電子装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2655195B1 (fr) * | 1989-11-24 | 1997-07-18 | Mitsubishi Electric Corp | Dispositif a semiconducteurs comportant un blindage contre le rayonnement electromagnetique et procede de fabrication. |
JP3065416B2 (ja) * | 1991-12-24 | 2000-07-17 | 新光電気工業株式会社 | メタルウォールパッケージ |
JP3185837B2 (ja) * | 1994-02-21 | 2001-07-11 | 日本電信電話株式会社 | 高周波線路 |
JPH08227949A (ja) | 1995-02-21 | 1996-09-03 | Sumitomo Electric Ind Ltd | 高周波端子付メタルパッケージ |
JP3500268B2 (ja) * | 1997-02-27 | 2004-02-23 | 京セラ株式会社 | 高周波用入出力端子ならびにそれを用いた高周波用半導体素子収納用パッケージ |
JPH1174396A (ja) * | 1997-08-28 | 1999-03-16 | Kyocera Corp | 高周波用入出力端子ならびに高周波用半導体素子収納用パッケージ |
JP2001016007A (ja) * | 1999-06-29 | 2001-01-19 | Ngk Spark Plug Co Ltd | 伝送線路を有する配線基板 |
JP2001077608A (ja) * | 1999-09-06 | 2001-03-23 | Toyota Motor Corp | 伝送線路 |
JP2003521127A (ja) * | 2000-01-28 | 2003-07-08 | エリクソン インコーポレイテッド | 多重アース信号路ldmos電力用パッケージ |
JP2003008155A (ja) * | 2001-06-19 | 2003-01-10 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
US6992250B2 (en) * | 2004-02-26 | 2006-01-31 | Kyocera Corporation | Electronic component housing package and electronic apparatus |
JP4822820B2 (ja) * | 2005-11-29 | 2011-11-24 | 京セラ株式会社 | 半導体素子収納用パッケージおよび半導体装置 |
US8344259B2 (en) * | 2007-10-30 | 2013-01-01 | Kyocera Corporation | Connection terminal, package using the same, and electronic apparatus |
-
2010
- 2010-09-24 CN CN201080035011.3A patent/CN102473686B/zh not_active Expired - Fee Related
- 2010-09-24 US US13/391,807 patent/US8653649B2/en not_active Expired - Fee Related
- 2010-09-24 JP JP2011534219A patent/JP5518086B2/ja active Active
- 2010-09-24 EP EP10820447.0A patent/EP2485253B1/en active Active
- 2010-09-24 WO PCT/JP2010/066550 patent/WO2011040329A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11176988A (ja) * | 1997-12-15 | 1999-07-02 | Kyocera Corp | 高周波用入出力端子ならびに高周波用半導体素子収納用パッケージ |
JP2003100922A (ja) * | 2001-09-27 | 2003-04-04 | Kyocera Corp | 入出力端子および半導体素子収納用パッケージ |
JP2004349568A (ja) * | 2003-02-17 | 2004-12-09 | Kyocera Corp | 入出力端子および半導体素子収納用パッケージならびに半導体装置 |
JP2009010149A (ja) * | 2007-06-28 | 2009-01-15 | Kyocera Corp | 接続端子及びこれを用いたパッケージ並びに電子装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20170080648A (ko) * | 2014-10-31 | 2017-07-10 | 제네럴 일렉트릭 컴퍼니 | 비자성 패키지를 실링하기 위한 리드 및 방법 |
JP2017535947A (ja) * | 2014-10-31 | 2017-11-30 | ゼネラル・エレクトリック・カンパニイ | 非磁性パッケージをシールするための蓋および方法 |
KR102446571B1 (ko) * | 2014-10-31 | 2022-09-22 | 제네럴 일렉트릭 컴퍼니 | 비자성 패키지를 실링하기 위한 리드 및 방법 |
JP2017216269A (ja) * | 2016-05-30 | 2017-12-07 | 京セラ株式会社 | 半導体パッケージおよび半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2485253B1 (en) | 2019-12-18 |
US8653649B2 (en) | 2014-02-18 |
CN102473686B (zh) | 2014-07-30 |
EP2485253A4 (en) | 2015-01-07 |
CN102473686A (zh) | 2012-05-23 |
JP5518086B2 (ja) | 2014-06-11 |
JPWO2011040329A1 (ja) | 2013-02-28 |
US20120147539A1 (en) | 2012-06-14 |
EP2485253A1 (en) | 2012-08-08 |
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