WO2008133312A1 - 感光性組成物、隔壁、ブラックマトリックス、カラーフィルタの製造方法 - Google Patents

感光性組成物、隔壁、ブラックマトリックス、カラーフィルタの製造方法 Download PDF

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Publication number
WO2008133312A1
WO2008133312A1 PCT/JP2008/057982 JP2008057982W WO2008133312A1 WO 2008133312 A1 WO2008133312 A1 WO 2008133312A1 JP 2008057982 W JP2008057982 W JP 2008057982W WO 2008133312 A1 WO2008133312 A1 WO 2008133312A1
Authority
WO
WIPO (PCT)
Prior art keywords
photosensitive composition
partition wall
black matrix
color filter
producing color
Prior art date
Application number
PCT/JP2008/057982
Other languages
English (en)
French (fr)
Inventor
Kenji Ishizeki
Kazushi Kobayashi
Hideyuki Takahashi
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to JP2009511911A priority Critical patent/JP5126222B2/ja
Priority to KR1020097019438A priority patent/KR101412857B1/ko
Priority to CN2008800134634A priority patent/CN101669070B/zh
Publication of WO2008133312A1 publication Critical patent/WO2008133312A1/ja
Priority to US12/578,625 priority patent/US20100035166A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Electroluminescent Light Sources (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)

Abstract

　光に対する感度が高く、撥液性に優れた隔壁（ブラックマトリックス）とインクの膜厚均一性に優れた画素とを形成することを可能とする感光性組成物の提供。 　１分子内に－（ＣＦ２）６Ｆ等の基を有する側鎖と、エチレン性二重結合を有する側鎖とを有する含フッ素重合体（Ａ）、アルカリ可溶感光性樹脂（Ｂ）、光重合開始剤（Ｃ）、黒色顔料（Ｄ）、塩基性官能基を有する高分子分散剤（Ｅ）、および黒色顔料（Ｄ）以外の微粒子（Ｆ）を含むことを特徴とする感光性組成物。  
PCT/JP2008/057982 2007-04-25 2008-04-24 感光性組成物、隔壁、ブラックマトリックス、カラーフィルタの製造方法 WO2008133312A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009511911A JP5126222B2 (ja) 2007-04-25 2008-04-24 感光性組成物、隔壁、ブラックマトリックス、カラーフィルタの製造方法
KR1020097019438A KR101412857B1 (ko) 2007-04-25 2008-04-24 감광성 조성물, 격벽, 블랙 매트릭스, 컬러 필터의 제조 방법
CN2008800134634A CN101669070B (zh) 2007-04-25 2008-04-24 感光性组合物、间隔壁、黑色矩阵、彩色滤光片的制造方法
US12/578,625 US20100035166A1 (en) 2007-04-25 2009-10-14 Photosensitive composition, partition walls, black matrix and process for producing color filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007115726 2007-04-25
JP2007-115726 2007-04-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/578,625 Continuation US20100035166A1 (en) 2007-04-25 2009-10-14 Photosensitive composition, partition walls, black matrix and process for producing color filter

Publications (1)

Publication Number Publication Date
WO2008133312A1 true WO2008133312A1 (ja) 2008-11-06

Family

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Family Applications (1)

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PCT/JP2008/057982 WO2008133312A1 (ja) 2007-04-25 2008-04-24 感光性組成物、隔壁、ブラックマトリックス、カラーフィルタの製造方法

Country Status (6)

Country Link
US (1) US20100035166A1 (ja)
JP (1) JP5126222B2 (ja)
KR (1) KR101412857B1 (ja)
CN (1) CN101669070B (ja)
TW (1) TWI431424B (ja)
WO (1) WO2008133312A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008304583A (ja) * 2007-06-06 2008-12-18 Nippon Steel Chem Co Ltd ブラックレジスト用感光性樹脂組成物及びこれを用いた遮光膜並びにカラーフィルター
JP2010186175A (ja) * 2009-01-16 2010-08-26 Mitsubishi Chemicals Corp カラーフィルター用着色組成物、カラーフィルター及びその用途
JP2010186174A (ja) * 2009-01-16 2010-08-26 Mitsubishi Chemicals Corp カラーフィルターの製造方法、カラーフィルター及びその用途
JP2010196044A (ja) * 2009-01-30 2010-09-09 Dic Corp 含フッ素ラジカル重合性共重合体、それを用いた活性エネルギー線硬化型樹脂組成物及び含フッ素ラジカル重合性共重合体の製造方法
JP2011528385A (ja) * 2008-07-18 2011-11-17 エボニック デグサ ゲーエムベーハー 疎水化二酸化ケイ素粒子及びその顆粒の分散液
WO2012086610A1 (ja) * 2010-12-20 2012-06-28 旭硝子株式会社 感光性樹脂組成物、隔壁、カラーフィルタおよび有機ｅｌ素子
KR20140061426A (ko) 2011-08-30 2014-05-21 아사히 가라스 가부시키가이샤 네거티브형 감광성 수지 조성물, 격벽, 블랙 매트릭스 및 광학 소자
JP2014111734A (ja) * 2012-11-01 2014-06-19 Fujifilm Corp 感光性組成物、これを用いた灰色硬化膜、灰色画素及び固体撮像素子
JP2015161815A (ja) * 2014-02-27 2015-09-07 凸版印刷株式会社 黒色感光性樹脂組成物、ブラックマトリクス、カラーフィルタ、液晶表示装置及び有機エレクトロルミネッセンス表示装置
JP2019046790A (ja) * 2017-09-05 2019-03-22 Jsr株式会社 表示素子形成用感光性組成物、硬化膜および表示素子
JPWO2021059977A1 (ja) * 2019-09-26 2021-04-01

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EP2309330A4 (en) * 2008-07-03 2012-01-18 Asahi Glass Co Ltd PHOTOSENSITIVE COMPOSITION, SEPARATION WALL, COLOR FILTER, AND ORGANIC ELECTROLUMINESCENCE DEVICE
WO2011129210A1 (ja) * 2010-04-14 2011-10-20 東レ株式会社 ネガ型感光性樹脂組成物、それを用いた保護膜およびタッチパネル部材
CN102199263B (zh) * 2011-04-12 2013-04-10 中科院广州化学有限公司 一种双疏性含氟可交联嵌段共聚物及其制备方法与应用
KR20140141339A (ko) * 2013-05-31 2014-12-10 제일모직주식회사 감광성 수지 조성물, 이를 이용한 블랙 스페이서, 및 상기 블랙 스페이서를 포함하는 컬러필터
ITBS20130110A1 (it) * 2013-07-22 2015-01-23 Guarniflon S P A Polimero fluorurato
TWI563030B (en) * 2014-10-01 2016-12-21 Chi Mei Corp Photosensitive resin composition for black matrix, black matrix, color filter and method for manufacturing the same, and liquid crystal display apparatus
CN106462069B (zh) * 2014-04-25 2019-10-18 Ａｇｃ株式会社 负型感光性树脂组合物、分隔壁及光学元件
KR102303994B1 (ko) * 2014-10-20 2021-09-23 삼성디스플레이 주식회사 유기발광 표시기판의 제조방법
WO2017038587A1 (ja) * 2015-08-31 2017-03-09 富士フイルム株式会社 硬化性組成物、硬化膜の製造方法、カラーフィルタ、遮光膜、固体撮像素子及び画像表示装置
CN108089400B (zh) * 2017-12-28 2020-06-05 深圳市华星光电技术有限公司 光刻胶及其制备方法
JP7084985B2 (ja) * 2018-04-19 2022-06-15 富士フイルム株式会社 パターンの製造方法、光学フィルタの製造方法、固体撮像素子の製造方法、画像表示装置の製造方法、光硬化性組成物および膜

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WO2004042474A1 (ja) * 2002-11-06 2004-05-21 Asahi Glass Company, Limited ネガ型感光性樹脂組成物
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JP2003105226A (ja) * 2001-09-28 2003-04-09 Toda Kogyo Corp ブラックマトリックス用着色材料及び該ブラックマトリックス用着色材料を含むブラックマトリックス用着色組成物並びにカラーフィルター
JP2004151618A (ja) * 2002-11-01 2004-05-27 Asahi Glass Co Ltd 感光性樹脂およびネガ型感光性樹脂組成物
WO2004042474A1 (ja) * 2002-11-06 2004-05-21 Asahi Glass Company, Limited ネガ型感光性樹脂組成物
WO2004079454A1 (ja) * 2003-03-07 2004-09-16 Asahi Glass Company Limited 感光性樹脂組成物及びその塗膜硬化物
JP2006163233A (ja) * 2004-12-10 2006-06-22 Toppan Printing Co Ltd カラーフィルタ基板及びその製造方法
JP2007056218A (ja) * 2005-08-26 2007-03-08 Jsr Corp 重合体、カラーフィルタ用感放射線性組成物、カラーフィルタおよびカラー液晶表示パネル

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008304583A (ja) * 2007-06-06 2008-12-18 Nippon Steel Chem Co Ltd ブラックレジスト用感光性樹脂組成物及びこれを用いた遮光膜並びにカラーフィルター
JP2011528385A (ja) * 2008-07-18 2011-11-17 エボニック デグサ ゲーエムベーハー 疎水化二酸化ケイ素粒子及びその顆粒の分散液
JP2010186175A (ja) * 2009-01-16 2010-08-26 Mitsubishi Chemicals Corp カラーフィルター用着色組成物、カラーフィルター及びその用途
JP2010186174A (ja) * 2009-01-16 2010-08-26 Mitsubishi Chemicals Corp カラーフィルターの製造方法、カラーフィルター及びその用途
JP2010196044A (ja) * 2009-01-30 2010-09-09 Dic Corp 含フッ素ラジカル重合性共重合体、それを用いた活性エネルギー線硬化型樹脂組成物及び含フッ素ラジカル重合性共重合体の製造方法
JP5880445B2 (ja) * 2010-12-20 2016-03-09 旭硝子株式会社 感光性樹脂組成物、隔壁、カラーフィルタおよび有機ｅｌ素子
WO2012086610A1 (ja) * 2010-12-20 2012-06-28 旭硝子株式会社 感光性樹脂組成物、隔壁、カラーフィルタおよび有機ｅｌ素子
KR20140061426A (ko) 2011-08-30 2014-05-21 아사히 가라스 가부시키가이샤 네거티브형 감광성 수지 조성물, 격벽, 블랙 매트릭스 및 광학 소자
JP2014111734A (ja) * 2012-11-01 2014-06-19 Fujifilm Corp 感光性組成物、これを用いた灰色硬化膜、灰色画素及び固体撮像素子
JP2015161815A (ja) * 2014-02-27 2015-09-07 凸版印刷株式会社 黒色感光性樹脂組成物、ブラックマトリクス、カラーフィルタ、液晶表示装置及び有機エレクトロルミネッセンス表示装置
JP2019046790A (ja) * 2017-09-05 2019-03-22 Jsr株式会社 表示素子形成用感光性組成物、硬化膜および表示素子
JP7047642B2 (ja) 2017-09-05 2022-04-05 Jsr株式会社 隔壁形成用感光性組成物、隔壁および表示素子
JPWO2021059977A1 (ja) * 2019-09-26 2021-04-01
WO2021059977A1 (ja) * 2019-09-26 2021-04-01 富士フイルム株式会社 硬化性組成物、硬化膜、カラーフィルタ、固体撮像素子及び画像表示装置
JP7423646B2 (ja) 2019-09-26 2024-01-29 富士フイルム株式会社 硬化性組成物、硬化膜、カラーフィルタ、固体撮像素子及び画像表示装置

Also Published As

Publication number Publication date
JP5126222B2 (ja) 2013-01-23
JPWO2008133312A1 (ja) 2010-07-29
TW200912537A (en) 2009-03-16
TWI431424B (zh) 2014-03-21
CN101669070A (zh) 2010-03-10
CN101669070B (zh) 2012-08-29
US20100035166A1 (en) 2010-02-11
KR101412857B1 (ko) 2014-06-26
KR20100014448A (ko) 2010-02-10

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