WO2007105431A1 - 基板処理装置および基板処理方法 - Google Patents
基板処理装置および基板処理方法 Download PDFInfo
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- WO2007105431A1 WO2007105431A1 PCT/JP2007/053151 JP2007053151W WO2007105431A1 WO 2007105431 A1 WO2007105431 A1 WO 2007105431A1 JP 2007053151 W JP2007053151 W JP 2007053151W WO 2007105431 A1 WO2007105431 A1 WO 2007105431A1
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- temperature
- substrate
- processing
- cooling
- cooling gas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
Definitions
- the present invention relates to a substrate processing apparatus and a substrate processing method for processing a substrate such as a semiconductor wafer.
- Patent Document 1 describes the deviation between the temperature at the edge of the substrate and the temperature at the center that occurs when the heating temperature of the substrate is changed within a predetermined time, the temperature at the edge of the substrate, and the center.
- the change temperature amount N to achieve the desired average temperature deviation M is obtained using the steady-state deviation from the temperature of the substrate, and the heating temperature for the substrate is controlled to make the film thickness formed on the substrate uniform.
- a substrate processing apparatus is disclosed.
- Patent Document 1 Pamphlet of International Publication No. 2005/008755
- An object of the present invention is to provide a substrate processing apparatus and a substrate processing method capable of controlling the uniformity of the thickness of a film formed on a substrate.
- a substrate processing apparatus includes a processing chamber for processing a substrate, a heating device for optically heating the substrate accommodated in the processing chamber on the outer peripheral side of the substrate, A cooling device that cools the outer peripheral side of the substrate by flowing a fluid near the outer periphery of the substrate that is heated by the heating device, a temperature detection unit that detects the temperature in the processing chamber, and a temperature that is detected by the temperature detection unit. And a heating control unit for controlling the heating device and the cooling device so as to provide a temperature difference between the central portion and the end portion of the substrate while maintaining the temperature of the central portion of the substrate at a predetermined temperature.
- FIG. 1 is a diagram showing an overall configuration of a semiconductor processing apparatus to which the present invention can be applied.
- FIG. 2 is a diagram illustrating a processing chamber in a state where the boat and wafer shown in FIG. 1 are accommodated.
- FIG. 3 is a diagram showing the configuration of a peripheral portion of the processing chamber shown in FIGS. 1 and 2 and a configuration of a first control program for controlling the processing chamber.
- FIG. 4 is a diagram showing a configuration of a control unit shown in FIG.
- FIG. 5 is a diagram illustrating the shape of a wafer to be processed in a semiconductor processing apparatus.
- FIG. 6 is a diagram exemplifying a state where an L type temperature sensor (L type TC) is provided for a processing chamber containing a boat and a boat.
- L type TC L type temperature sensor
- FIG. 7 is a flowchart showing a method for correcting the temperature measurement value of the internal temperature sensor, which changes as the cooling gas passes through the cooling gas flow path, for each position in the substrate surface.
- FIG. 8 is a graph showing an example of the relationship between the temperature set when the semiconductor processing apparatus forms a film on a substrate such as a wafer and the film thickness, and (A) shows the set temperature relative to the in-plane position of the substrate. It is a graph which shows an Example, (B) is a graph which shows the film thickness formed according to the preset temperature shown to (A).
- FIG. 9 is a graph showing a comparative example of the relationship between the temperature set when the semiconductor processing apparatus forms a film on a substrate such as a wafer and the film thickness, and (A) shows the set temperature relative to the in-plane position of the substrate. It is a graph which shows a comparative example, (B) is a graph which shows the film thickness formed according to the preset temperature shown to (A).
- FIG. 10 is a view showing a first modification of the processing chamber.
- FIG. 11 is a view showing a second modification of the processing chamber.
- FIG. 12 is a view showing a third modification of the processing chamber.
- FIG. 1 is a diagram showing an overall configuration of a semiconductor processing apparatus 1 to which the present invention can be applied.
- FIG. 2 is a diagram showing an example of the processing chamber 3 in which the boat 14 and the wafer 12 shown in FIG. 1 are accommodated.
- FIG. 3 is a diagram showing the configuration of the peripheral components of the processing chamber 3 shown in FIGS. 1 and 2 and the configuration of the first control program 40 that controls the processing chamber 3.
- the semiconductor processing apparatus 1 is a so-called low pressure CVD apparatus for processing a substrate such as a semiconductor.
- the semiconductor processing apparatus 1 includes a cassette delivery unit 100, a cassette stocker 102 provided on the back side of the cassette delivery unit 100, a buffer cassette stocker 104 provided above the cassette stocker 102, and a cassette stocker.
- the wafer mover 106 provided on the back side of 102, the boat elevator 108 provided on the back side of the wafer mover 106 and carrying the boat 14 on which the wafer 12 is set, and provided above the wafer mover 106. It consists of a processing chamber 3 and a control unit 2.
- the processing chamber 3 shown in FIG. From other components (described later with reference to FIG. 3) such as shaft 348, such as stainless steel 350, O-ring 351, cooling gas flow path 352, exhaust path 354, exhaust section 355, and processing gas flow rate control device. Constructed, the side is covered with heat insulating material 300-1, and the upper part is covered with heat insulating material 300-2.
- a plurality of heat insulating plates 140 are provided at the lower part of the boat 14.
- the outer tube 360 also has, for example, a quartz force that transmits light, and is formed in a cylindrical shape having an opening in the lower part.
- the inner tube 362 has a quartz force that transmits light, for example, is formed in a cylindrical shape, and is disposed on the inner side of the water tube 360 on a concentric circle thereof. Accordingly, a cylindrical space is formed between the outer tube 360 and the inner tube 362.
- the heater 32 is disposed between four temperature control parts (U, CU, CL, L) 320-1 to 320-4 and the water tube 360, each of which can set and adjust the temperature.
- External temperature sensors such as thermocouples
- Internal temperature sensors such as thermocouples (furnace) arranged in the outer tube 360 corresponding to the temperature adjustment parts 320-1 to 322-4 and the temperature adjustment parts 320-1 to 320-20-4 (Including TC) 324-1 to 324-4.
- the internal temperature sensors 324-1 to 324-4 may be provided inside the inner tube 362, or may be provided between the inner tube 362 and the outer tube 360, and the temperature adjustment portion 320-1 to 320 — It may be provided so as to detect the temperature at the center of the wafer between the wafer 12 and the wafer 12 by being bent every four.
- Each of the temperature adjustment portions 320-1 to 320-4 of the heater 32 emits, for example, light for optically heating the wafer 12 from the periphery of the outer tube 360, passes through the outer tube 360, and is absorbed by the wafer 12.
- the wafer 12 is heated (heated) by light.
- the cooling gas passage 352 is formed between the heat insulating material 300-1 and the outer tube 360 so as to allow a fluid such as cooling gas to pass through, and is provided at the lower end of the heat insulating material 300-1.
- the cooling gas supplied from the suction holes 353 is passed upward of the water tube 360.
- the cooling gas is, for example, air or nitrogen (N2).
- cooling gas flow path 352 is configured such that the cooling gas is blown out toward the counter tube 360 between each of the temperature adjustment portions 320-1 to 320-4.
- the cooling gas cools the water tube 360, and the cooled water tube 360 cools the wafer 12 set in the boat 14 from the circumferential direction (outer peripheral side).
- the cooling gas passing through the cooling gas flow path 352 cools the outer tube 360 and the wafer 12 set in the boat 14 from the circumferential direction (outer peripheral side).
- An exhaust passage 354 is provided above the cooling gas passage 352.
- the exhaust passage 354 guides the cooling gas supplied from the intake hole 353 and passing upward through the cooling gas passage 352 to the outside of the heat insulating material 300-2. [0018] Further, the exhaust passage 354 is provided with an exhaust section 355 for exhausting the cooling gas.
- the exhaust unit 355 includes a cooling gas exhaust device 356 such as a blower and a radiator 357, and exhausts the cooling gas guided to the outside of the heat insulating material 300-2 through the exhaust hole 358 through the exhaust path 354.
- a cooling gas exhaust device 356 such as a blower and a radiator 357
- the radiator 357 cools the cooling gas heated by cooling the outer tube 360 and the wafer 12 in the processing chamber 3 with cooling water or the like.
- a shirter 359 is provided in the vicinity of the intake hole 353 and the radiator 357, and the opening and closing of the cooling gas passage 352 and the exhaust passage 354 are controlled by a not-shown shirter control unit.
- the processing chamber 3 includes a temperature control device 370, a temperature measurement device 372, a processing gas flow control device (mass flow controller; MFC) 374, a boat elevator control device (elevator controller).
- EC mass flow controller
- MFC mass flow controller
- Elevator controller boat elevator control device
- EC pressure sensor
- PS pressure regulator
- API Auto Pressure Control
- EP process gas exhaust
- inverter 384 inverter
- the temperature control device 370 includes temperature adjustment portions 320-1 to 320 according to control from the control unit 2.
- the temperature measuring device 372 detects the temperature of each of the temperature sensors 322-1 to 322-4, 324-1 to 324-4, and outputs them to the control unit 2 as temperature measurement values.
- the boat elevator control device (EC) 376 drives the boat elevator 108 in accordance with the control from the control unit 2.
- APC pressure adjusting device
- N2 ballast controller N2 ballast controller
- EP382 a vacuum pump etc. are used, for example.
- the inverter 384 controls the rotation speed of the cooling gas exhaust device 356 as a blower.
- FIG. 4 is a diagram showing a configuration of the control unit 2 shown in FIG.
- control unit 2 includes a CPU 200, a memory 204, a display device, a touch panel and a keyboard / display unit 22 including a mouse, and a recording unit 24 such as an HD 'CD. Consists of
- control unit 2 includes a configuration part as a general computer that can control the semiconductor processing apparatus 1.
- the control unit 2 uses these components to execute a control program for reduced-pressure CVD processing (for example, the control program 40 shown in FIG. 3), and controls each component of the semiconductor processing apparatus 1 to control the semiconductor wafer 12. In contrast, the reduced pressure CVD process described below is executed.
- a control program for reduced-pressure CVD processing for example, the control program 40 shown in FIG. 3
- the reduced pressure CVD process described below is executed.
- the control program 40 includes a process control unit 400, a temperature control unit 410, a process gas flow rate control unit 412, a drive control unit 414, a pressure control unit 416, a process gas exhaust device control unit 418, and a temperature. It comprises a measuring unit 420, a cooling gas flow rate control unit 422, and a temperature set value storage unit 424.
- control program 40 is supplied to the control unit 2 via the recording medium 240 (FIG. 4), loaded into the memory 204, and executed.
- the temperature setting value storage unit 424 stores the temperature setting value of the processing recipe for the wafer 12 and outputs it to the process control unit 400.
- the process control unit 400 displays each component of the control program 40 according to the user operation on the input unit 22 (Fig. 4) or the processing procedure (processing recipe) recorded in the recording unit 24.
- the portion is controlled, and a low pressure CVD process is performed on the wafer 12 as will be described later.
- the temperature measurement unit 420 receives the temperature measurement values of the temperature sensors 322 and 324 via the temperature measurement device 372 and outputs the temperature measurement values to the process control unit 400.
- the temperature control unit 410 receives the temperature set value and the temperature measurement values of the temperature sensors 322 and 3 24 from the process control unit 400, and feedback controls the power supplied to the temperature adjustment unit 320 to heat the inside of the water tube 360.
- the wafer 12 is brought to a desired temperature.
- the processing gas flow rate control unit 412 controls the MFC 374 and adjusts the flow rate of the processing gas or inert gas supplied into the water tube 360.
- the drive controller 414 controls the boat elevator 108 to hold the boat 14 and this The lifted wafer 12 is moved up and down.
- the drive control unit 414 controls the boat elevator 108 to rotate the boat 14 and the wafer 12 held by the boat 14 via the rotation shaft 348.
- the pressure control unit 416 receives the measured pressure value of the processing gas in the water tube 360 by the PS 378, controls the APC 380, and sets the processing gas in the water tube 360 to a desired pressure.
- the processing gas exhaust device control unit 418 controls the EP 382 to exhaust the processing gas or the inert gas inside the water tube 360.
- the cooling gas flow rate control unit 422 controls the flow rate of the cooling gas exhausted by the cooling gas exhaust device 356 via the inverter 384.
- the number of component parts such as the temperature adjustment parts 320-1 to 320-4 may be indicated.
- the number of component parts is illustrated for the purpose of clarifying the description. However, it is not intended to limit the technical scope of the present invention.
- An O-ring 351 is disposed between 344 and the lower opening of the hold 350, so that the air tube 360 and the hold 350 are hermetically sealed.
- An inert gas or a processing gas is introduced into the water tube 360 through a gas introduction nozzle 340 located below the water tube 360.
- a trachea 346 (Fig. 2) connected to PS378, APC380 and EP382.
- the processing gas flowing between the water tube 360 and the inner tube 362 is exhaust pipe 346,
- the APC 380 controls the pressure so that the inside of the water tube 360 becomes a preset desired pressure. Adjust according to the instructions of Obe 416.
- the APC 380 adjusts according to the instruction of the pressure control unit 416 so that the inside of the water tube 360 becomes normal pressure when the inert gas is to be introduced so that the inside of the water tube 360 becomes normal pressure, or the water tube 360
- the inside of the water tube 360 is adjusted according to the instruction of the pressure control unit 416.
- a boat 14 holding a large number of semiconductor substrates (wafers) 12 is connected to a lower rotating shaft 348 of the boat 14.
- the rotating shaft 348 is connected to the boat elevator 108 (FIG. 1), and the boat elevator 108 raises and lowers the boat 14 at a predetermined speed according to the control via the EC 376. Further, the boat elevator 108 rotates the wafer 12 and the boat 14 at a predetermined speed via the rotation shaft 348.
- the wafer 12 to be processed is transported in a state of being loaded in the wafer cassette 490 (FIG. 1) and transferred to the cassette transfer unit 100.
- the cassette transfer unit 100 transfers this Weno cup 12 to the cassette stocker 102 or the buffer force set stocker 104.
- the wafer mover 106 takes out the wafers 12 from the cassette stocker 102 and loads them into the boat 14 in multiple stages in a horizontal state.
- the boat elevator 108 raises the boat 14 loaded with the wafers 12 and guides the boat 14 into the processing chamber 3.
- the boat elevator 108 lowers the boat 14 loaded with the processed wafers 12 and removes it from the processing chamber 3.
- FIG. 5 is a diagram illustrating the shape of the wafer 12 to be processed in the semiconductor processing apparatus 1 (FIG. 1).
- the surface of the wafer 12 (hereinafter, the surface of the wafer 12 is also simply referred to as the wafer 12) has a shape as shown in FIG.
- the wafer 12 is irradiated with the temperature adjustment portions 320-1 to 320-4, and the water tube 36 is irradiated.
- the ambient force of the water tube 360 is also heated by the light transmitted through 0.
- the temperature at the end of the surface of the wafer 12 is higher than the temperature at the center. Become higher.
- the temperature adjustment part 320-1 to 320-4 applied the edge force center of the wafer 12 such that the closer to the outer periphery of the wafer 12, the higher the temperature becomes, and the lower the temperature, the lower the temperature. A mortar-shaped temperature deviation will occur in the wafer 12.
- a processing gas such as a reaction gas is also supplied from the outer peripheral side of the wafer 12, depending on the type of film formed on the wafer 12, the reaction rate between the end portion and the center portion of the wafer 12 is increased. There are different things.
- a processing gas such as a reaction gas is consumed at the edge of the wafer 12 and then reaches the center of the wafer 12, so that the concentration of the processing gas is higher at the center of the wafer 12 than at the edge of the wafer 12. Becomes low.
- the film formed on the wafer 12 is caused by the supply of the reaction gas from the outer peripheral force of the wafer 12.
- the thickness may be uneven at the end and the center.
- the processing chamber 3 heats the temperature of the central portion of the wafer 12 to a predetermined set temperature (processing temperature) by the temperature adjustment portion 320 and passes the cooling gas through the cooling gas flow path 352 to pass through the wafers 12 and 12.
- processing temperature processing temperature
- heating control is performed to adjust the film thickness in accordance with the reaction rate at which the film is formed on the wafer 12. Etc.).
- FIG. 6 is a diagram illustrating a state in which an L-type temperature sensor (L-type TC) 390 is provided for the processing chamber 3 in which the boat 14 and the wafer 12 are accommodated.
- L-type TC L-type temperature sensor
- the control unit 2 uses the temperature measurement value of the internal temperature sensor 324, for example, the end of the wafer 12 The temperature and center temperature (temperature relative to the position in the substrate surface) are calculated, and the flow rate of the cooling gas passing through the temperature adjustment section 320 and the cooling gas flow path 352 may be controlled.
- the internal temperature sensor 324 is provided between the boat 14 and the inner tube 362.
- the internal temperature sensor 324 may be provided between the inner tube 362 and the water tube 360.
- the actual end temperature, center temperature, and cooling gas of the wafer 12 pass through the cooling gas flow path 352.
- the change in the temperature measurement value of the internal temperature sensor 324 due to the passage it is necessary to correct the change in the temperature measurement value of the internal temperature sensor 324 as the cooling gas passes through the cooling gas flow path 352.
- the L-type temperature sensor 390 is a thermocouple formed in, for example, a plurality of character shapes in order to measure the temperature in the vicinity of the center portion of the wafer 12 that is substantially the same height as the internal temperature sensor 324. The measured value is output to control unit 2.
- the L-type temperature sensor 390 measures the temperature near the center of the wafer 12 at a plurality of locations before the semiconductor processing apparatus 1 starts processing the wafer 12, and the semiconductor processing apparatus 1 performs processing on the wafer 12. If you do, it will be removed.
- the L-type temperature sensor 390 is hermetically sealed with a joint interposed in the furnace opening lid 344.
- the temperature detected by the L-type temperature sensor 390 is regarded as the temperature at the center of the wafer 12, and the temperature detected by the internal temperature sensor 324 is regarded as the temperature at the end of the wafer 12 to control the temperature.
- the temperature control is performed by regarding the difference between the temperature detected by the L-type temperature sensor 390 and the temperature detected by the internal temperature sensor 324 as a temperature deviation within the wafer surface.
- FIG. 7 is a flowchart (S 10) showing a method for correcting the temperature measurement value of the internal temperature sensor 324 that changes as the cooling gas passes through the cooling gas flow path 352 for each position in the substrate surface. .
- step 100 the control unit 2 performs cooling with the cooling gas.
- the temperature is controlled so that the temperature detected by the L-type temperature sensor 390 matches the predetermined set temperature (processing temperature).
- the detection result of the internal temperature sensor (in-furnace TC) 324 for the predetermined set temperature (process temperature) is acquired. .
- step 102 the control unit 2 sets the cooling gas flow rate passing through the cooling gas flow path 352 (that is, the flow rate of the cooling gas exhausted by the cooling gas exhaust device 356) to a constant flow rate.
- Temperature force detected by the L-type temperature sensor 390 The temperature is controlled so that it matches the specified set temperature (processing temperature).
- the detection result of the internal temperature sensor (in-furnace TC) 324 for the predetermined set temperature (process temperature) is acquired. .
- the flow rate of the cooling gas passing through the cooling gas flow path 352 is changed, and the temperature detected by the L-type temperature sensor 390 matches the predetermined set temperature (processing temperature) while keeping the changed flow rate constant. To control the temperature.
- the detection result of the internal temperature sensor (in-furnace TC) 324 for the predetermined set temperature (process temperature) is acquired. .
- the control unit 2 performs step 202 (S202) between the flow rate of the cooling gas passing through the cooling gas flow path 352, the predetermined set temperature (the temperature detected by the L-type temperature sensor 390), and the temperature detected by the internal temperature sensor 324. Repeat a certain number of times to clarify the relationship.
- step 104 the control unit 2 determines the temperature correction value (depending on the cooling gas) of the internal temperature sensor 324 with respect to the cooling gas flow rate when the predetermined set temperature (the temperature detected by the L type temperature sensor 390) is reached. The value corresponding to the change in the temperature measurement value) is calculated.
- step 106 the control unit 2 correlates the temperature correction value calculated in the process of S204 with the cooling gas flow rate as a correlation at a predetermined set temperature (process temperature), for example, It is stored as additional information in the temperature set value storage unit 424 or the like.
- the controller 2 removes the L-type temperature sensor 390 when processing the wafer 12. Then, by using the temperature correction value stored in the process of S106, the temperature measurement value of the internal temperature sensor 324 is corrected, and the cooling gas flow rate passing through the cooling gas flow path 352 corresponding to the temperature correction value (i.e., Set the temperature of the temperature adjustment section 320 so that the measured temperature value of the corrected internal temperature sensor 324 matches the desired set temperature (processing temperature). Control.
- the L-type temperature sensor 390 has been described as a thermocouple having a plurality of locations formed in an L shape so that the temperature near the center of the wafer 12 can be measured at a plurality of locations. It is also possible to use a thermocouple formed in a one-point force shape so that the temperature near the center can be measured at one location, and obtain the relationship between the temperature correction value of the internal temperature sensor 324 and the cooling gas flow rate.
- the number of L-type temperature sensors 390 installed may be different from the number of internal temperature sensors 324.
- thermocouple embedded in the center of the wafer
- the semiconductor processing apparatus 1 controls the semiconductor wafers 12 arranged at predetermined intervals in the processing chamber 3 under the control of the control program 40 (FIG. 3) executed on the control unit 2 (FIGS. 1 and 4).
- Si3N4 film, Si02 film, polysilicon (Poly-Si) film, etc. are formed by CVD.
- the boat elevator 108 lowers the boat 14.
- a desired number of wafers 12 to be processed are set in the lowered boat 14, and the boat 14 holds the set wafers 12.
- each of the four temperature control portions 320-1 to 320-4 of the heater 32 heats the inside of the water tube 360 according to the setting, and the central portion of the wafer 12 is set to a predetermined constant. Heat to temperature.
- the cooling gas flows through the cooling gas flow path 352 according to the setting, and the water tube 360 and the wafer 12 set in the boat 14 are cooled from the circumferential direction (outer peripheral side).
- the MFC 374 adjusts the flow rate of the introduced gas through the gas introduction nozzle 340 (Fig. 2). Introduce and fill the inert tube 360 with inert gas.
- the boat elevator 108 raises the boat 14 and moves it into the water tube 360 in a state in which an inert gas having a desired processing temperature is filled.
- the inert gas in the water tube 360 is exhausted by the EP 382, the inside of the water tube 360 is evacuated, and the boat 14 and the wafer 12 held by the boat 14 are rotated via the rotating shaft 348. It is done.
- EP382 exhausts the processing gas from the inside of the water tube 360 during the low-pressure CVD process via the exhaust pipe 346, and the APC 380 sets the processing gas in the water tube 360 to a desired pressure.
- the low pressure CVD process is performed on the wafer 12 for a predetermined time.
- the process gas inside the Veguta tube 360 that moves to the process for the next wafer 12 is replaced with an inert gas, and the pressure is further increased to normal pressure. Further, a cooling gas is caused to flow through the cooling gas flow path 352 to cool the inside of the water tube 360 to a predetermined temperature.
- the boat elevator 108 raises the boat 14 holding the wafer 12 to be subjected to the reduced pressure CVD process, and sets the boat 14 in the outer tube 360.
- the following reduced-pressure CVD process is performed on the wafer 12 set in this way.
- the cooling gas is a force that can control the film thickness if the pre-processing force of the wafer 12 is allowed to flow until the processing is completed.
- FIG. 8 is a graph showing an example of the relationship between the temperature and the film thickness set when the semiconductor processing apparatus 1 forms a film on a substrate such as the wafer 12, and (A) is a setting for the position in the substrate plane. It is a graph which shows the Example of temperature, (B) is a graph which shows the film thickness formed according to the preset temperature shown to (A).
- FIG. 9 is a graph showing a comparative example of the relationship between the temperature and the film thickness set when the semiconductor processing apparatus 1 forms a film on a substrate such as the wafer 12, and (A) is a setting for the position in the substrate plane. It is a graph which shows the comparative example of temperature, (B) is a graph which shows the film thickness formed according to the preset temperature shown to (A).
- the control unit 2 has a temperature adjustment portion so that the center of the substrate has a predetermined set temperature (processing temperature) and the end of the substrate is lower than the processing temperature.
- processing temperature processing temperature
- the temperature of 320 and the flow rate of the cooling gas passing through the cooling gas flow path 352 are controlled, the film thickness formed on the substrate is almost uniform at the center and the edge of the substrate as shown in FIG. become.
- the temperature of the end portion of the substrate is lower than the temperature of the central portion of the substrate.
- the control unit 2 controls the temperature of the temperature adjustment part 320 so that the center part and the end part of the substrate have a predetermined set temperature (processing temperature). If (for example, the cooling gas does not flow into the cooling gas flow path 352), as shown in FIG. 9B, the thickness of the film formed at the end of the substrate is the thickness of the film formed at the center of the substrate. Thicker than the thickness.
- the cooling gas is flowed so that the substrate temperature and the temperature of the water tube 360 are equal, the temperature at the center of the substrate and the temperature at the end of the substrate are equal.
- the temperature correction value of the internal temperature sensor 324 at the predetermined set temperature (processing temperature) obtained in advance shown in FIG. 6 is stored in correspondence with the cooling gas flow rate.
- one condition is selected from the data stored in the temperature set value storage unit 424, and the control unit 2 controls the temperature adjustment part 320 of the heater 32 via the temperature control unit 410 under the selected condition.
- the cooling gas exhaust device 356 is controlled via the cooling gas flow rate control unit 422 and the inverter 384.
- a temperature correction value is set for the measured temperature of the internal temperature sensor 324, and the temperature correction is performed.
- the cooling gas flow rate corresponding to the value is set, and the temperature adjustment part 320 of the heater 32 is heated and controlled based on the measured temperature of the internal temperature sensor 324 after correction, and the cooling gas exhaust device corresponding to the set cooling gas flow rate The flow rate of the cooling gas exhausted by the 356 is controlled.
- the processing gas is introduced into the water tube 360 via the gas introduction nozzle 340 while rotating the boat 14 and the wafer 12 held by the boat 14 in the water tube 360, and with respect to the wafer 12.
- a film having a predetermined thickness is formed.
- the processed wafer 12 is taken out from the outer tube 360. After the wafer 12 is taken out, the film thickness of the processed wafer 12 is measured, and it is confirmed whether the film thickness in the substrate surface (in the surface of the wafer 12) is uniform.
- the temperature correction value of the internal temperature sensor 324 at the time of processing temperature is stored in correspondence with the cooling gas flow rate, for example, one condition selected previously from the data in the temperature setting value storage unit 424 Further, a value having a larger temperature correction value and a corresponding cooling gas flow rate are selected, and a film having a predetermined film thickness is again formed on the wafer 12 under the selected conditions.
- the thickness of the film formed at the edge of the substrate within the substrate surface is smaller than the thickness of the film formed at the center of the substrate, it is obtained in advance as shown in FIG.
- the temperature correction value of the internal temperature sensor 324 at the predetermined set temperature is stored in correspondence with the cooling gas flow rate, for example, from the data in the temperature set value storage unit 424 first.
- a temperature correction value smaller than the selected one condition and a corresponding cooling gas flow rate are selected, and a film having a predetermined film thickness is again formed on the wafer 12 under the selected condition. Rub.
- Fine adjustment is performed by actually repeating the film formation on the wafer 12 until the film thickness in the substrate surface becomes uniform at the desired film thickness.
- the temperature correction value is stored in each of the internal temperature sensors 324-1 to 324-4 corresponding to the temperature adjustment portions 320-1 to 320-4, and the temperature correction value is set.
- Heat control is performed using the corresponding cooling gas flow rate, and not only the uniformity of the film thickness within the substrate surface but also the film between the substrate surfaces Also fine-tune the uniformity of thickness (thickness between multiple wafers held in boat 14).
- the temperature correction value of the internal temperature sensor 324 stored at the predetermined set temperature (processing temperature) obtained in advance shown in FIG.
- a predetermined film thickness is obtained under the condition that the temperature correction value of the internal temperature sensor 324 and the cooling gas flow rate are directly changed with reference to the data. Fine adjustment may be performed until the value becomes uniform.
- the L-type temperature sensor 390 is detected by the L-type temperature sensor 390 without rotating the boat 14 and the wafer 12 held by the L-type temperature sensor 390 in a state of hermetically sealing the furnace lid 344 with a joint interposed therebetween. Fine adjustment is performed until the predetermined film thickness becomes uniform under the condition that the temperature correction value of the internal temperature sensor 324 and the cooling gas flow rate are directly changed so that the temperature to be set becomes the predetermined set temperature (processing temperature).
- processing temperature processing temperature
- the processing gas is introduced into the water tube 360 via the gas introduction nozzle 340 while rotating the boat 14 and the wafer 12 held by the boat 14 in the water tube 360, and a predetermined film is formed on the wafer 12. A thick film is formed.
- the heater 32 controls the end (periphery) temperature and the center temperature of the wafer 12 by the cooling gas while controlling the center temperature of the wafer 12 to be a constant temperature according to the set temperature.
- the temperature so as to provide a temperature difference between them, the in-plane film thickness uniformity of the wafer 12 and the film thickness uniformity between the surfaces can be improved without changing the film quality.
- the refractive index of the film may vary depending on the processing temperature, or the processing temperature may be lowered from a high temperature to a low temperature.
- the etching rate is low, and the film changes from high to high depending on the processing temperature.
- the film is formed while lowering the processing temperature from high temperature to low temperature.
- the stress value is high, the film is low, and the film changes depending on the treatment temperature.
- control unit 2 controls the temperature of the water tube 360 by controlling the temperature of the temperature adjustment unit 320 and the flow rate of the cooling gas passing through the cooling gas flow path 352, By controlling the in-plane temperature of a substrate such as wafer 12 to prevent the film quality from changing, it is possible to control the uniformity of the thickness of the film formed on the substrate. Play.
- FIG. 10 is a view showing a first modification of the processing chamber 3.
- the first modification of the processing chamber 3 is that the cooling gas exhaust devices 392 and 393 such as blowers having different exhaust amounts (total flow rates) in the exhaust path 354 are connected to the shirts 394 and 395, respectively. Is provided.
- the cooling gas exhaust devices 392 and 393 are individually controlled by the control unit 2 through the inverters 396-1 and 396-2, respectively.
- the first modification of the processing chamber 3 is that the control unit 2 individually controls the inverters 396-1 and 396-2 and the shirts 394 and 395 so that the cooling gas passing through the cooling gas flow path 352 is controlled.
- the flow rate is controlled with great force.
- the conductance from the exhaust path 354 to the cooling gas exhaust devices 392 and 393 is reduced, or the flow rate of the cooling gas is controlled by providing a damper 397 or the like. It may be done.
- the first modification of the processing chamber 3 can finely control the flow rate of the cooling gas passing through the cooling gas flow path 352, the cooling of the outer side of the outer tube 360 and the wafer 12 can be performed with low strength. It is possible to control the uniformity of the thickness of the film formed on the wafer 12.
- FIG. 11 is a view showing a second modification of the processing chamber 3. Note that, in the second modification of the processing chamber 3, the same reference numerals are given to substantially the same parts as the processing chamber 3 shown in FIG.
- the second modified example of the processing chamber 3 includes a pipe 398 between the water tube 360 and the temperature adjustment unit 320.
- a cooling gas is caused to flow through the pipe 398 by, for example, a blower (exhaust device) not shown.
- the second modification of the processing chamber 3 controls the uniformity of the thickness of the film formed on the wafer 12 by flowing the cooling gas through the pipe 398 to cool the outer periphery of the wafer tube 360 and the wafer 12. To do.
- the flow rate of the cooling gas passing through the pipe 398 and the cooling gas flow path 352 may be individually controlled, or the wafer may be controlled by the flow rate of the cooling gas passing through the pipe 398.
- the uniformity of the thickness of the film formed on 12 may be controlled.
- FIG. 12 is a view showing a third modification of the processing chamber 3.
- the water tube 360 has a hollow structure, and the cooling gas flow path 399 is formed in the water tube 360.
- the cooling gas flow path 399 is supplied with cooling gas by a blower (exhaust device) (not shown), for example.
- the third modification of the processing chamber 3 controls the uniformity of the thickness of the film formed on the wafer 12 by cooling the outer peripheral side of the wafer 12 by flowing the cooling gas through the cooling gas flow path 399. .
- the semiconductor processing apparatus 1 may control the flow rate of the cooling gas with an intake device, or may be based on mass flow control.
- the heating device may be of a type that performs light heating, for example, a resistance heating method or a lamp heating method.
- the semiconductor processing apparatus 1 may be configured to cool the outer side of the water tube 360 and the wafer 12 by flowing a liquid such as water instead of the cooling gas.
- the cooling device is provided on the outer peripheral side of the processing chamber, and is provided with a cooling gas passage through which a cooling gas flows, an exhaust passage through which the cooling gas flowing through the cooling gas passage can be exhausted, and an exhaust passage. And an exhaust part for exhausting the cooling gas.
- the exhaust unit includes a plurality of exhaust devices having different displacements, and the heating control unit individually controls the plurality of exhaust devices.
- the substrate processing method includes a step of optically heating a substrate housed in a processing chamber using a heating device, and a cooling device for flowing a fluid in the vicinity of the outer periphery of the substrate.
- the process of cooling the side, the process of detecting the temperature in the processing chamber, and the detected temperature! And controlling the heating device and the cooling device.
- the substrate processing method includes a step of optically heating a substrate housed in a processing chamber from the outer peripheral side of the substrate with a heating device, and flowing a cooling gas near the outer periphery of the substrate so that the outer peripheral side of the substrate is A step of cooling, a step of exhausting the cooling gas by a plurality of exhaust devices having different displacements, a step of detecting the temperature in the processing chamber, and the caloric heat device and the plurality of exhaust devices based on the detected temperatures Individually controlling each of them.
- a temperature acquisition unit that acquires the temperature at the center and the outer periphery of the substrate, respectively, and a temperature that is set when the cooling device changes the amount of fluid that flows while the heating device heats the substrate. Based on the correlation acquired by the correlation acquisition unit that acquires the correlation between the flow rate of the fluid and the temperature deviation between the center portion and the outer peripheral side of the substrate, and the set temperature of the heating unit described above.
- the substrate processing apparatus further comprising: a set temperature correction unit that corrects
- the correlation acquisition unit when the amount of fluid that the cooling device flows while the heating device heats the substrate, changes the set temperature, the flow rate of the fluid, and the temperature detection. Further acquiring a correlation with the temperature detected by the output unit, the set temperature correction unit corrects the set temperature of the heating device based on the correlation acquired by the correlation acquisition unit (6) 2.
- the substrate processing apparatus according to 1.
- the present invention can be used for a substrate processing apparatus that controls the uniformity of the thickness of a film formed on a substrate.
Abstract
Description
Claims
Priority Applications (3)
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US12/087,479 US8501599B2 (en) | 2006-03-07 | 2007-02-21 | Substrate processing apparatus and substrate processing method |
JP2008505019A JP5153614B2 (ja) | 2006-03-07 | 2007-02-21 | 基板処理装置、半導体基板の処理方法、制御プログラム、制御プログラムが記録された記録媒体および基板処理方法 |
US12/382,343 US8507296B2 (en) | 2006-03-07 | 2009-03-13 | Substrate processing method and film forming method |
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US12/087,479 A-371-Of-International US8501599B2 (en) | 2006-03-07 | 2007-02-21 | Substrate processing apparatus and substrate processing method |
US12/382,343 Division US8507296B2 (en) | 2006-03-07 | 2009-03-13 | Substrate processing method and film forming method |
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JP (3) | JP5153614B2 (ja) |
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WO (1) | WO2007105431A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011195863A (ja) * | 2010-03-18 | 2011-10-06 | Mitsui Eng & Shipbuild Co Ltd | 原子層堆積装置及び原子層堆積方法 |
JP2012080081A (ja) * | 2010-09-09 | 2012-04-19 | Tokyo Electron Ltd | 縦型熱処理装置 |
WO2014088026A1 (ja) * | 2012-12-07 | 2014-06-12 | 株式会社日立国際電気 | 基板処理装置、基板処理方法、半導体装置の製造方法および制御プログラム |
Families Citing this family (317)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101003446B1 (ko) * | 2006-03-07 | 2010-12-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 기판 처리 방법 |
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US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
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US20110159199A1 (en) * | 2009-12-28 | 2011-06-30 | Guardian Industries Corp. | Large area combustion deposition line, and associated methods |
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TW201200628A (en) * | 2010-06-29 | 2012-01-01 | Hon Hai Prec Ind Co Ltd | Coating apparatus |
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US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
US20140146854A1 (en) * | 2012-04-19 | 2014-05-29 | Solexel, Inc. | Temperature calibration and control for semiconductor reactors |
US9659799B2 (en) | 2012-08-28 | 2017-05-23 | Asm Ip Holding B.V. | Systems and methods for dynamic semiconductor process scheduling |
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US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
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US9331430B2 (en) | 2013-10-18 | 2016-05-03 | JTech Solutions, Inc. | Enclosed power outlet |
US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
JP6280407B2 (ja) * | 2014-03-19 | 2018-02-14 | 東京エレクトロン株式会社 | 基板処理方法、プログラム、制御装置、基板処理装置及び基板処理システム |
JP6279396B2 (ja) * | 2014-05-12 | 2018-02-14 | 株式会社ニューフレアテクノロジー | 気相成長方法及び気相成長装置 |
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US10529542B2 (en) | 2015-03-11 | 2020-01-07 | Asm Ip Holdings B.V. | Cross-flow reactor and method |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
CN107835868B (zh) * | 2015-06-17 | 2020-04-10 | 应用材料公司 | 在处理腔室中的气体控制 |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
US9960072B2 (en) | 2015-09-29 | 2018-05-01 | Asm Ip Holding B.V. | Variable adjustment for precise matching of multiple chamber cavity housings |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US10322384B2 (en) | 2015-11-09 | 2019-06-18 | Asm Ip Holding B.V. | Counter flow mixer for process chamber |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10468251B2 (en) | 2016-02-19 | 2019-11-05 | Asm Ip Holding B.V. | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
US10501866B2 (en) | 2016-03-09 | 2019-12-10 | Asm Ip Holding B.V. | Gas distribution apparatus for improved film uniformity in an epitaxial system |
US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
US9892913B2 (en) | 2016-03-24 | 2018-02-13 | Asm Ip Holding B.V. | Radial and thickness control via biased multi-port injection settings |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
KR102592471B1 (ko) | 2016-05-17 | 2023-10-20 | 에이에스엠 아이피 홀딩 비.브이. | 금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법 |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US10388509B2 (en) | 2016-06-28 | 2019-08-20 | Asm Ip Holding B.V. | Formation of epitaxial layers via dislocation filtering |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
KR102354490B1 (ko) | 2016-07-27 | 2022-01-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US10395919B2 (en) | 2016-07-28 | 2019-08-27 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102613349B1 (ko) | 2016-08-25 | 2023-12-14 | 에이에스엠 아이피 홀딩 비.브이. | 배기 장치 및 이를 이용한 기판 가공 장치와 박막 제조 방법 |
US10410943B2 (en) | 2016-10-13 | 2019-09-10 | Asm Ip Holding B.V. | Method for passivating a surface of a semiconductor and related systems |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
KR101945264B1 (ko) * | 2016-10-27 | 2019-02-07 | 삼성전자주식회사 | 기판 처리 장치 |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10435790B2 (en) | 2016-11-01 | 2019-10-08 | Asm Ip Holding B.V. | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
US10134757B2 (en) | 2016-11-07 | 2018-11-20 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by using the method |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
US10340135B2 (en) | 2016-11-28 | 2019-07-02 | Asm Ip Holding B.V. | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
US10283353B2 (en) | 2017-03-29 | 2019-05-07 | Asm Ip Holding B.V. | Method of reforming insulating film deposited on substrate with recess pattern |
US10205283B2 (en) | 2017-04-13 | 2019-02-12 | JTech Solutions, Inc. | Reduced cross-section enclosed power outlet |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10446393B2 (en) | 2017-05-08 | 2019-10-15 | Asm Ip Holding B.V. | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10504742B2 (en) | 2017-05-31 | 2019-12-10 | Asm Ip Holding B.V. | Method of atomic layer etching using hydrogen plasma |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10312055B2 (en) | 2017-07-26 | 2019-06-04 | Asm Ip Holding B.V. | Method of depositing film by PEALD using negative bias |
US10605530B2 (en) * | 2017-07-26 | 2020-03-31 | Asm Ip Holding B.V. | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11043402B2 (en) * | 2017-09-12 | 2021-06-22 | Kokusai Electric Corporation | Cooling unit, heat insulating structure, and substrate processing apparatus |
US10607895B2 (en) | 2017-09-18 | 2020-03-31 | Asm Ip Holdings B.V. | Method for forming a semiconductor device structure comprising a gate fill metal |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
TWI791689B (zh) | 2017-11-27 | 2023-02-11 | 荷蘭商Asm智慧財產控股私人有限公司 | 包括潔淨迷你環境之裝置 |
JP7214724B2 (ja) | 2017-11-27 | 2023-01-30 | エーエスエム アイピー ホールディング ビー.ブイ. | バッチ炉で利用されるウェハカセットを収納するための収納装置 |
US10290508B1 (en) | 2017-12-05 | 2019-05-14 | Asm Ip Holding B.V. | Method for forming vertical spacers for spacer-defined patterning |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
CN111630203A (zh) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | 通过等离子体辅助沉积来沉积间隙填充层的方法 |
TW202325889A (zh) | 2018-01-19 | 2023-07-01 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
US10535516B2 (en) | 2018-02-01 | 2020-01-14 | Asm Ip Holdings B.V. | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
JP7124098B2 (ja) | 2018-02-14 | 2022-08-23 | エーエスエム・アイピー・ホールディング・ベー・フェー | 周期的堆積プロセスにより基材上にルテニウム含有膜を堆積させる方法 |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
USD843321S1 (en) | 2018-03-26 | 2019-03-19 | JTech Solutions, Inc. | Extendable outlet |
USD841592S1 (en) | 2018-03-26 | 2019-02-26 | JTech Solutions, Inc. | Extendable outlet |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US10510536B2 (en) | 2018-03-29 | 2019-12-17 | Asm Ip Holding B.V. | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
KR20190128558A (ko) | 2018-05-08 | 2019-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 산화물 막을 주기적 증착 공정에 의해 증착하기 위한 방법 및 관련 소자 구조 |
TW202349473A (zh) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
WO2020003000A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
CN112292478A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
KR20200002519A (ko) | 2018-06-29 | 2020-01-08 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
US10483099B1 (en) | 2018-07-26 | 2019-11-19 | Asm Ip Holding B.V. | Method for forming thermally stable organosilicon polymer film |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US10381219B1 (en) | 2018-10-25 | 2019-08-13 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10559458B1 (en) | 2018-11-26 | 2020-02-11 | Asm Ip Holding B.V. | Method of forming oxynitride film |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
JP2020096183A (ja) | 2018-12-14 | 2020-06-18 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
TW202044325A (zh) | 2019-02-20 | 2020-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 填充一基板之一表面內所形成的一凹槽的方法、根據其所形成之半導體結構、及半導體處理設備 |
TW202104632A (zh) | 2019-02-20 | 2021-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用來填充形成於基材表面內之凹部的循環沉積方法及設備 |
KR20200102357A (ko) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | 3-d nand 응용의 플러그 충진체 증착용 장치 및 방법 |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
TW202100794A (zh) | 2019-02-22 | 2021-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
KR20200116033A (ko) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | 도어 개방기 및 이를 구비한 기판 처리 장치 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141003A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 가스 감지기를 포함하는 기상 반응기 시스템 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
FI129577B (en) * | 2019-06-28 | 2022-05-13 | Beneq Oy | Atomic layer growth equipment |
JP7289355B2 (ja) * | 2019-07-01 | 2023-06-09 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法及びプログラム |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
JP2021015791A (ja) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー.ブイ. | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
CN112242296A (zh) | 2019-07-19 | 2021-01-19 | Asm Ip私人控股有限公司 | 形成拓扑受控的无定形碳聚合物膜的方法 |
TW202113936A (zh) | 2019-07-29 | 2021-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (zh) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
TW202129060A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip控股公司 | 基板處理裝置、及基板處理方法 |
KR20210043460A (ko) | 2019-10-10 | 2021-04-21 | 에이에스엠 아이피 홀딩 비.브이. | 포토레지스트 하부층을 형성하기 위한 방법 및 이를 포함한 구조체 |
KR20210045930A (ko) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물의 토폴로지-선택적 막의 형성 방법 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11885013B2 (en) | 2019-12-17 | 2024-01-30 | Asm Ip Holding B.V. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
KR20210080214A (ko) | 2019-12-19 | 2021-06-30 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
KR20210095050A (ko) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
TW202146882A (zh) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 驗證一物品之方法、用於驗證一物品之設備、及用於驗證一反應室之系統 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
TW202146715A (zh) | 2020-02-17 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於生長磷摻雜矽層之方法及其系統 |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
KR20210116249A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 록아웃 태그아웃 어셈블리 및 시스템 그리고 이의 사용 방법 |
KR20210117157A (ko) | 2020-03-12 | 2021-09-28 | 에이에스엠 아이피 홀딩 비.브이. | 타겟 토폴로지 프로파일을 갖는 층 구조를 제조하기 위한 방법 |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
KR20210132605A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
CN113555279A (zh) | 2020-04-24 | 2021-10-26 | Asm Ip私人控股有限公司 | 形成含氮化钒的层的方法及包含其的结构 |
KR20210134226A (ko) | 2020-04-29 | 2021-11-09 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
KR20210141379A (ko) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
KR20210143653A (ko) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210145078A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
TW202201602A (zh) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
TW202217953A (zh) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
TW202204662A (zh) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
CN114402425A (zh) * | 2020-08-18 | 2022-04-26 | 玛特森技术公司 | 具有冷却系统的快速热处理系统 |
TW202212623A (zh) | 2020-08-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成金屬氧化矽層及金屬氮氧化矽層的方法、半導體結構、及系統 |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
KR20220076343A (ko) | 2020-11-30 | 2022-06-08 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치의 반응 챔버 내에 배열되도록 구성된 인젝터 |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
USD999742S1 (en) | 2021-04-01 | 2023-09-26 | JTech Solutions, Inc. | Safety interlock outlet box |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
CN115565852A (zh) * | 2022-12-06 | 2023-01-03 | 西安奕斯伟材料科技有限公司 | 用于对硅片进行背封的方法和设备 |
CN116007390A (zh) * | 2022-12-15 | 2023-04-25 | 湖南优热科技有限责任公司 | 一种带有快速主动冷却系统的石墨化炉 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0992624A (ja) * | 1995-09-25 | 1997-04-04 | Semitsukusu Eng Kk | 熱処理炉 |
JP2001308085A (ja) * | 2000-02-18 | 2001-11-02 | Tokyo Electron Ltd | 熱処理方法 |
JP2003031506A (ja) * | 2001-07-17 | 2003-01-31 | Toshiba Corp | 半導体薄膜の成膜装置及び半導体薄膜の成膜方法 |
JP2003031510A (ja) * | 2001-07-19 | 2003-01-31 | Sharp Corp | 熱処理装置および熱処理方法 |
WO2005008755A1 (ja) * | 2003-07-18 | 2005-01-27 | Hitachi Kokusai Electric Inc. | 温度制御方法、基板処理装置及び半導体製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3244809B2 (ja) * | 1992-09-30 | 2002-01-07 | 株式会社東芝 | 薄膜形成方法及び薄膜形成装置 |
US5607009A (en) * | 1993-01-28 | 1997-03-04 | Applied Materials, Inc. | Method of heating and cooling large area substrates and apparatus therefor |
JP3184000B2 (ja) * | 1993-05-10 | 2001-07-09 | 株式会社東芝 | 薄膜の形成方法およびその装置 |
US20030049372A1 (en) * | 1997-08-11 | 2003-03-13 | Cook Robert C. | High rate deposition at low pressures in a small batch reactor |
KR20010110291A (ko) | 2000-02-18 | 2001-12-12 | 히가시 데쓰로 | 기판처리방법 |
EP1320124B1 (en) * | 2000-07-25 | 2008-03-12 | Tokyo Electron Limited | Method of determining heat treatment conditions |
JP4806127B2 (ja) * | 2001-02-01 | 2011-11-02 | 東京エレクトロン株式会社 | 薄膜形成方法 |
US7190400B2 (en) * | 2001-06-04 | 2007-03-13 | Texas Instruments Incorporated | Charge multiplier with logarithmic dynamic range compression implemented in charge domain |
US8796589B2 (en) * | 2001-07-15 | 2014-08-05 | Applied Materials, Inc. | Processing system with the dual end-effector handling |
US6783630B2 (en) * | 2002-08-27 | 2004-08-31 | Axcelis Technologies, Inc. | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling |
JP2005032883A (ja) * | 2003-07-09 | 2005-02-03 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP4610908B2 (ja) * | 2004-02-24 | 2011-01-12 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
JP2005243667A (ja) * | 2004-02-24 | 2005-09-08 | National Institute Of Advanced Industrial & Technology | 熱処理装置 |
US20070084406A1 (en) * | 2005-10-13 | 2007-04-19 | Joseph Yudovsky | Reaction chamber with opposing pockets for gas injection and exhaust |
KR101003446B1 (ko) * | 2006-03-07 | 2010-12-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 기판 처리 방법 |
US7972444B2 (en) * | 2007-11-07 | 2011-07-05 | Mattson Technology, Inc. | Workpiece support with fluid zones for temperature control |
-
2007
- 2007-02-21 KR KR1020087015396A patent/KR101003446B1/ko active IP Right Grant
- 2007-02-21 JP JP2008505019A patent/JP5153614B2/ja active Active
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0992624A (ja) * | 1995-09-25 | 1997-04-04 | Semitsukusu Eng Kk | 熱処理炉 |
JP2001308085A (ja) * | 2000-02-18 | 2001-11-02 | Tokyo Electron Ltd | 熱処理方法 |
JP2003031506A (ja) * | 2001-07-17 | 2003-01-31 | Toshiba Corp | 半導体薄膜の成膜装置及び半導体薄膜の成膜方法 |
JP2003031510A (ja) * | 2001-07-19 | 2003-01-31 | Sharp Corp | 熱処理装置および熱処理方法 |
WO2005008755A1 (ja) * | 2003-07-18 | 2005-01-27 | Hitachi Kokusai Electric Inc. | 温度制御方法、基板処理装置及び半導体製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011195863A (ja) * | 2010-03-18 | 2011-10-06 | Mitsui Eng & Shipbuild Co Ltd | 原子層堆積装置及び原子層堆積方法 |
JP2012080081A (ja) * | 2010-09-09 | 2012-04-19 | Tokyo Electron Ltd | 縦型熱処理装置 |
US9255736B2 (en) | 2010-09-09 | 2016-02-09 | Tokyo Electron Limited | Vertical-type heat treatment apparatus |
WO2014088026A1 (ja) * | 2012-12-07 | 2014-06-12 | 株式会社日立国際電気 | 基板処理装置、基板処理方法、半導体装置の製造方法および制御プログラム |
JPWO2014088026A1 (ja) * | 2012-12-07 | 2017-01-05 | 株式会社日立国際電気 | 基板処理装置、基板処理方法、半導体装置の製造方法および制御プログラム |
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JP5547775B2 (ja) | 2014-07-16 |
KR101003446B1 (ko) | 2010-12-28 |
TW201140699A (en) | 2011-11-16 |
KR20100087401A (ko) | 2010-08-04 |
TWI349968B (en) | 2011-10-01 |
JP2012216851A (ja) | 2012-11-08 |
KR101005518B1 (ko) | 2011-01-04 |
TW200741878A (en) | 2007-11-01 |
JPWO2007105431A1 (ja) | 2009-07-30 |
JP2009158968A (ja) | 2009-07-16 |
JP5153614B2 (ja) | 2013-02-27 |
US20090197352A1 (en) | 2009-08-06 |
JP5153699B2 (ja) | 2013-02-27 |
US20090029486A1 (en) | 2009-01-29 |
TWI505366B (zh) | 2015-10-21 |
US8501599B2 (en) | 2013-08-06 |
KR20080080142A (ko) | 2008-09-02 |
US8507296B2 (en) | 2013-08-13 |
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