WO2003081584A1 - Procede de fabrication d'un support d'enregistrement d'informations optiques a couches multiples - Google Patents

Procede de fabrication d'un support d'enregistrement d'informations optiques a couches multiples Download PDF

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Publication number
WO2003081584A1
WO2003081584A1 PCT/JP2003/002098 JP0302098W WO03081584A1 WO 2003081584 A1 WO2003081584 A1 WO 2003081584A1 JP 0302098 W JP0302098 W JP 0302098W WO 03081584 A1 WO03081584 A1 WO 03081584A1
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WO
WIPO (PCT)
Prior art keywords
layer
stamper
signal
optical information
recording medium
Prior art date
Application number
PCT/JP2003/002098
Other languages
English (en)
Japanese (ja)
Inventor
Kazuhiro Hayashi
Kazuya Hisada
Eiji Ohno
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to JP2003579217A priority Critical patent/JPWO2003081584A1/ja
Priority to KR10-2004-7002695A priority patent/KR20040090946A/ko
Priority to EP03744978A priority patent/EP1489609B1/fr
Priority to DE60336050T priority patent/DE60336050D1/de
Priority to AU2003211304A priority patent/AU2003211304A1/en
Priority to US10/486,764 priority patent/US7497916B2/en
Priority to MXPA04001781A priority patent/MXPA04001781A/es
Publication of WO2003081584A1 publication Critical patent/WO2003081584A1/fr

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24035—Recording layers
    • G11B7/24038—Multiple laminated recording layers

Definitions

  • the present invention relates to a method for manufacturing a multilayer optical information recording medium having n (n is 2 or more) signal recording layers and performing recording and reproduction from one side having a separation layer between each signal recording layer.
  • a multilayer optical information recording medium having a plurality of signal recording surfaces in a thickness direction like a single-sided dual-layer playback DVD has been proposed (for example, a single-sided dual-layer playback DVD has two layers).
  • a translucent reflective layer of gold, silicon, etc. was formed, and on the other information recording surface, a reflective layer of conventional aluminum was formed.
  • a blue-violet laser light source (wavelength around 400 nm) is used.
  • a high-density optical information recording medium using a NA lens and having a thin recording / reproducing-side transparent cover layer with a thickness of 0.1 mm has been proposed. Form a signal guide groove or pit on the surface and write on it. Repositionable recording multilayer film formation, the transparent cover layer on is in the formed structure further.
  • This thin transparent cover layer type high-density optical information recording medium may have two signal recording surfaces.
  • One example of the manufacturing method is as follows. (1) On a thick substrate on which signal guide grooves or pits are formed on the surface and a rewritable recording multilayer film is formed, a separation layer is further formed using an ultraviolet curable resin, and the separation layer is formed. Form a second layer signal guide groove or pit on the surface.
  • Second layer A rewritable translucent recording multilayer film is formed on the second-layer signal guide groove or pit.
  • JP-A-2002-260307 is a specific manufacturing method.
  • the entire disclosure of the document of Japanese Patent Application Laid-Open No. 2002-260307 is incorporated herein by reference in its entirety.
  • a plastic stamper is used, and an ultraviolet curable resin is applied to signal guide grooves or pits on the stamper and cured.
  • the stamper is peeled off after being bonded to the substrate on which the first recording multilayer film is formed.
  • the separation layer existing between the signal recording layers of the multilayer optical information recording medium needs to be uniform. If the separation layer is uniform, the signal recording layers before and after the separation layer have a constant effect of the reflected light received from the other during recording or reproduction. When the reflected light from the other signal recording layer fluctuates, it becomes a disturbance component of the reproduced signal, and the SZN deteriorates. Conversely, if the separation layer is uniform, disturbance from the other signal recording layer is constant, so that recording or reproduction becomes stable, and the quality of a good reproduction signal is improved.
  • the signal on the surface On a thick substrate on which a rewritable recording multilayer film is formed with a guide groove or pit formed thereon a stamper is used to separate the signal guide groove or signal guide groove from the stamper on the surface together with the separation layer between the substrate and the stamper.
  • the thickness of the separation layer becomes uneven. Disclosure of the invention
  • an object of the present invention is to provide a method for manufacturing a multilayer optical information recording medium in which a separation layer between certain two signal recording layers is uniform.
  • a first aspect of the present invention is a multilayer optical information recording medium having n signal recording layers (n is an integer of 2 or more) and having a separation layer between each signal recording layer.
  • the k-th signal recording layer from the recording surface or the reproduction surface (k is an integer of 2 to n) is the k-th signal recording layer (100), and the k-th signal recording layer (100)
  • the substrate having (k-1) th signal board is the k-th signal board (103), and the stamper having the (k-11) th signal recording layer guide groove and / or pit (105) is the (k-11) stamp. (106), and a separation layer between the k-th signal recording layer (100) and the (k-11) th signal recording layer is a (k-1) th separation layer (107). when doing, .
  • the surface of the (k-1) stamper (106) having the guide groove of the (k-1) signal recording layer and / or the pit (105) is formed on the k signal substrate (103).
  • a method for manufacturing a multilayer optical information recording medium wherein at least one of the n signal recording layers is formed by the signal recording layer forming step.
  • the distance between them is one.
  • the thickness of the (k-1) th separation layer to be produced is also uniform.
  • the signal recording layer forming step includes: 1) The stamper (106) is formed into a shape in which the stamper (106) is warped so as to wrap the surface opposite to the surface having the guide groove and / or the pit (105) of the (k-1) signal recording layer. 1 is a method for producing the multilayer optical information recording medium of the present invention.
  • the thickness of the (k-1) th separation layer is uniform.
  • the third invention is characterized in that, when the k-th signal substrate (803) is warped so as to cover the surface on the opposite side of the k-th signal recording layer (800), the signal recording layer forming step comprises: A first book in which the (k-1) stamper (806) is warped so as to cover the surface having the guide groove and the groove or pit (805) of the (k-1) signal recording layer. 4 is a method for manufacturing the multilayer optical information recording medium of the invention.
  • the k-th signal can be obtained without changing the warp of the k-th signal board. Since the distance between the recording layer and the guide groove or pit of the (k-1) -th signal recording layer, or the surface having the guide groove and the pit, is uniform and close, the second
  • the k-th signal recording layer (100) of the k-th signal substrate (103) and the (k-11) signal recording A second or third method for producing a multilayer optical information recording medium according to the present invention, wherein the guide groove of the layer and the surface having the pits or pits (105) have substantially the same radius of curvature.
  • the thickness of the (k-1) th separation layer to be manufactured becomes uniform.
  • a fifth aspect of the present invention is the multi-layer optical information recording apparatus according to the first aspect of the present invention, wherein the (k-1) th separation layer (310) is a radiation-curable resin (301,307). This is a method for producing a medium.
  • the (k-1) -th separation layer formed to have a uniform thickness can be easily cured by irradiation with radiation, and the productivity can be improved.
  • a sixth invention is the method for producing a multilayer optical information recording medium according to the fifth invention, wherein the radiation-curable resin is an ultraviolet-curable resin.
  • a seventh aspect of the present invention is the multi-layer optical information recording medium according to the first aspect of the present invention, wherein the (k-1) th separation layer (310) is composed of a plurality of layers (303, 308). It is a manufacturing method of. According to the above configuration, a material having good adhesion to the k-th signal recording layer is used as a material in contact with the k-th signal recording layer in the (k-1) -th separation layer.
  • the (k-1) -th signal recording layer on the (k-11) -stamper has a (k-1) material as a material that comes into contact with the guide groove or the pit or the surface having the guide groove and the pit. 1) Materials having different characteristics, such as using a material that is easy to peel off from the stamper, can be arranged in the thickness direction of the (k-1) th separation layer, and can be stably peeled.
  • a guide groove and / or a pit may be formed in the (k- 1) separation layer.
  • a layer to be transferred from the stamper (106) is a transfer layer (303)
  • the layer exists between the (k-1) th stamper (106) and the k-th signal recording layer (100).
  • the transfer of the (k-11) stamp is performed among a plurality of interfaces. It is possible to stably peel at the interface between the layer and the (k-1) stamper, and to improve the yield in the peeling step.
  • the ninth aspect of the present invention is the method according to the first aspect, wherein the guide groove and / or the pit among the plurality of layers (303, 308) of the (k-1) th separation layer (310) are arranged at the (k-1) th. )
  • the layer to be transferred from the stamper (106) is a transfer layer (303)
  • at least the transfer layer (303) is a radiation-curable material (301). This is a method for manufacturing a recording medium.
  • the shape of the groove or pit can be more reliably formed than the (k-11) stamp. Can be copied.
  • a tenth aspect of the present invention is the method for producing a multilayer optical information recording medium according to the ninth aspect of the present invention, wherein the radiation-curable material is an ultraviolet-curable resin.
  • production facilities used for conventional optical information recording media such as CDs and DVDs can be used.
  • the eleventh invention is the method for manufacturing a multilayer optical information recording medium according to the tenth invention, wherein the ultraviolet curable resin has a viscosity of 1 to 100 OmPa ⁇ s.
  • the ultraviolet curable resin can sufficiently enter the groove or pit of the (k-1) stamp, transfer of the groove or pit can be improved.
  • a guide groove and / or a pit is formed by the (k) 1)
  • the layer to be transferred from the stamper (902) is a transfer layer (903)
  • at least one of the (k-1) th separation layers (909) other than the transfer layer (903) is used.
  • a part of the (k-1) th separation layer can be formed without performing a curing treatment such as radiation curing. Therefore, productivity can be improved.
  • the guide groove and Z or the pit are arranged in the (k-1) th separation layer.
  • the signal recording layer forming step includes the step of forming the guide groove and the Z or (k) of the (k-1) stamper (300).
  • a radiation curable material to be the transfer layer (303) is coated on the pitted surface, and then cured, and the transfer layer (303) is cured.
  • a seventh method of manufacturing a multilayer optical information recording medium according to the present invention wherein the method is affixed to the k-th signal substrate (306) on which the (k-1) -th separation layer (308) is formed, excluding the above.
  • the radiation curable material which is easy to peel off after curing is applied in advance to the (k-1) stamper as a transfer layer and cured, and then the (k-1) th separation layer on the side in contact with the transfer layer
  • the material can be easily adhered to the cured transfer layer, and when the (k-1) stamp is peeled off, the (k-1) th separation layer can be integrated and reliably peeled off .
  • a fifteenth aspect of the present invention provides the (k-11) stamper (300) on which the transfer layer is coated, and the (k-1) th separator excluding the transfer layer (303).
  • the k-th signal substrate (306) on which the layer (308) is formed is bonded to the transfer layer (303) coated on the (k-1) th stamper (300)
  • a thirteenth invention is a method for producing a multilayer optical information recording medium according to the invention, wherein the surface of the (k-1) -th separation layer is a radiation-curable material (301).
  • the transfer layer on the (k-1) th stamper and the (k-1) th separation layer on the kth signal substrate can be easily bonded by irradiating the radiation.
  • the fifteenth aspect of the present invention provides the transfer layer, wherein a layer for transferring a guide groove and / or a pit from the (k-11) stamper among a plurality of layers of the (k-1) th separation layer is referred to as a transfer layer.
  • a transfer layer a layer for transferring a guide groove and / or a pit from the (k-11) stamper among a plurality of layers of the (k-1) th separation layer.
  • the (k-1) th stamper and the (k-1) th separation board excluding the transfer layer are formed between the (k-1) th separation layer and the kth signal substrate.
  • a seventh method of manufacturing a multilayer optical information recording medium according to the present invention wherein the radiation-curable material serving as the transfer layer is disposed after the radiation-curable material is disposed.
  • the (k-1) stamp is formed on the kth signal board. If a radiation-curable material is arranged between the (k-1) -th separation layer excluding the formed transfer layer, the radiation-curable resin spreads evenly due to the capillary phenomenon, and the thickness uniformity of the separation layer can be further improved. . In addition, a transfer layer can be easily formed by irradiation with radiation while maintaining the uniformity.
  • the k-th signal substrate and the (k-11) -stamp are overlapped.
  • a fifteenth aspect of the invention is a method for manufacturing a multilayer optical information recording medium according to the present invention, wherein the radiation-curable material is cured together.
  • the radiation curable material is applied on the entire surface of the (k-1) stamp or the kth signal substrate before overlapping, the (k-1) stamp and the kth signal substrate are connected to each other. It can be bonded on the surface, and the separation layer can be integrated over the entire surface.
  • the k-th signal substrate and the (k-11) stamper may be combined with the k-th signal recording layer and the (k-11) signal.
  • the k-th signal substrate and the k-th signal substrate are so arranged that the (k-1) -th stamper has a shape along the k-th signal substrate when the surfaces having the guide grooves and the grooves or pits of the recording layer face each other.
  • the shape of the k-th signal substrate and the shape of the (k-1) -th stamper are not along each other, at least one of them is held along each other and the radiation-curable material is formed. It is not necessary to control the shape of the kth signal board or the (k-1) stamp to cure the kth signal board or the (k-1) stamp. 1) The manufacturing margin of the stamper is increased.
  • the signal recording layer forming step at least one of the k-th signal substrate and the (k ⁇ 1) st stamper is fixed on a support having a desired surface shape.
  • the shape of the k-th signal board or the (k-1) -th stamper can be easily changed so as to conform to each other.
  • the ninth aspect of the present invention is the method for producing a multilayer optical information recording medium according to the first aspect, wherein the (k-1) stamp is plastic.
  • the (k-1) stamp is light in weight and easy to handle, and has good productivity.
  • a twenty-second invention is the method for manufacturing a multilayer optical information recording medium according to the nineteenth invention, wherein the plastic is transparent.
  • the separation layer when the separation layer is a radiation-curable material, the separation layer can be cured by irradiating radiation through the (k-1) stamp.
  • the (k-1) stamper is any one of polycarbonate, an olefin resin, an acrylic resin, and a norbornene resin, and is manufactured by an injection molding method using a metal master stamper.
  • 20 is a method for manufacturing a multilayer optical information recording medium according to the 20th aspect of the present invention.
  • the k-th signal substrate and the (k-1) -th substrate may be formed according to conditions of an injection molding method for producing the (k-1) stamper.
  • a stamper is arranged such that the surface having the guide groove and the Z or pit of the (k-1) th signal recording layer faces the k-th signal recording layer.
  • the shape of the (k ⁇ 1) st stamper can be accurately controlled only by the injection molding conditions, regardless of the warpage of the kth signal substrate.
  • the (k-1) th stamper in the signal recording layer forming step, may have a guide groove and / or a pit of the (k-11) th signal recording layer.
  • the (k-1) th stamper is manufactured by an injection molding method so as to be curved so as to wrap the opposite surface, the other of the metal master stamper placed on one of a pair of molding dies is used. 22.
  • the surface of the (k-1) stamper made of plastic produced by the injection molding method has a guide groove or a pit or a guide groove or a pit immediately after being taken out of the molding die. Since the temperature on the side opposite to the side having the higher temperature is higher, more shrinkage occurs, so that the guide groove or pit or the surface opposite to the side having the guide groove and the pit is wrapped. Can be warped.
  • the mirror surface temperature of the other mold is set to be higher than the mirror surface temperature of the other one of the pair of molding dies on which the metal master stamper is installed.
  • the method is for producing a multilayer optical information recording medium according to the present invention.
  • the surface of the (k-1) stamper made of plastic produced by the injection molding method has a guide groove or a pit or a guide groove or a pit immediately after being taken out of the molding die. Since the temperature on the side opposite to the side having the higher temperature is higher, more contraction occurs, and the guide groove or The pit or the surface opposite to the surface having the guide groove and the pit can be formed into a warped shape.
  • a twenty-fifth aspect of the present invention is a method according to the twenty-third aspect, wherein a heat insulating material is provided on the back surface of the mold mirror surface opposite to the mold mirror surface on which the metal master stamper of the pair of molding dies is installed.
  • a method for manufacturing a multilayer optical information recording medium according to the present invention According to the above configuration, the mold mirror surface on the side opposite to the mold mirror surface on which the metal master stamper is installed is difficult to escape heat due to the heat insulating material on the back surface, so that the temperature can be effectively kept high. Can be.
  • the (k-11) th stamper in the signal recording layer forming step, includes a surface having a guide groove and / or a pit of the (k-11) th signal recording layer.
  • the temperature of the metal master stamper placed on the mirror surface of the pair of molding dies is adjusted to the other mold.
  • a twenty-second method for producing a multilayer optical information recording medium of the present invention wherein the temperature is higher than the mirror surface temperature of the mold.
  • the surface of the (k-1) stamper made of plastic formed by the injection molding method has the guide groove or the pit or the guide groove or the pit immediately after being removed from the molding die.
  • the surface with the groove has a higher temperature than the surface on the opposite side, so that more shrinkage occurs and the surface is bent to wrap around the guide groove or pit or the surface having the guide groove and pit. can do.
  • the mold mirror surface temperature of the pair of molding dies on which the metal master stamper is installed is set higher than the other mold mirror surface temperature. This is a method for producing the multilayer optical information recording medium of the present invention.
  • the temperature of the metal master stamper can be easily made higher than the other mold mirror surface temperature.
  • at least one of a back surface of the metal master stamper and a back surface of a mirror surface of the mold on which the metal master stamper is mounted is mounted on a pair of molding dies.
  • a twenty-sixth aspect is a method for manufacturing a multilayer optical information recording medium according to the present invention.
  • a twentieth aspect of the present invention is the method for manufacturing a multilayer optical information recording medium according to the first aspect, wherein the (k-1) th stamper is made of metal.
  • the (k-1) stamp can be prevented from being scratched or deformed when the (k-1) stamp is peeled from the kth signal substrate, and the multilayer structure can be formed.
  • the productivity of the optical information recording medium can be improved.
  • the (k-1) th stamper in the signal recording layer forming step, is manufactured by an electrode, and a pH value of an electrolytic bath, a temperature, and a current density at the time of the electric power supply are used.
  • the k-th signal substrate and the (k-1) -th stamper may be connected to the k-th signal recording layer and the (k-11) -th signal recording layer by the at least one electrification condition.
  • the (k ⁇ 1) st stamper is controlled so as to follow the kth signal substrate. This is the method of manufacturing the medium.
  • the (k-1) stamp can be manufactured easily and at low cost. Moreover, since the power is a conventional method in which technology is established, it is possible to stably control the shape of the stamper according to the power conditions. Also, in the thirty-first aspect of the present invention, after the step of the peeling step, recording is further performed on the guide groove and / or pit of the (k-11) -th signal recording layer to which the transfer is further performed. By forming a multilayer film (hereinafter referred to as a (k-1) th recording multilayer film) or a reflective film, a first (k-1) th signal recording layer is completed. 4 is a method for manufacturing a multilayer optical information recording medium of the present invention.
  • the thirty-second aspect of the present invention provides the (k-11) th recording multilayer film on the guide groove and / or the pit of the (k-11) th signal recording layer on the (k-11) stamp.
  • a reflective film is formed, and in the peeling step, the (k-11) stamper is peeled off from an interface between the (k-11) th recording multilayer film and the (k-11) stamper.
  • This is a method for producing the multilayer optical information recording medium according to the first aspect of the present invention, wherein the (k-1) th recording multilayer film or the reflection film is transferred onto the (k-1) th separation layer.
  • the 33rd present invention is the method for producing a multilayer optical information recording medium according to the 1st present invention, wherein a transparent cover layer is formed on the first signal recording layer.
  • a thirty-fourth aspect of the present invention is directed to the production of the multilayer optical information recording medium according to the thirty-third aspect of the present invention, wherein a transparent substrate is adhered on the first signal recording layer with a transparent adhesive to form the transparent cover layer. Is the way.
  • a uniform transparent cover layer can be easily formed.
  • a thirty-fifth aspect of the present invention is the method of manufacturing a multilayer optical information recording medium according to the thirty-third aspect, wherein the transparent cover layer is formed of a transparent radiation-curable material. According to the above configuration, the cost can be reduced.
  • a thirty-sixth aspect of the present invention is the method for producing a multilayer optical information recording medium according to the thirty-third aspect, wherein at least a part of the transparent cover layer is formed of a pressure-sensitive adhesive. .
  • a uniform transparent cover layer can be easily formed.
  • a thirty-seventh aspect of the present invention is the multilayer optical information according to the thirty-third aspect, wherein the thickness of the transparent power bar layer formed on the first signal recording layer is 0.3 mm or less.
  • This is a method for manufacturing a recording medium. According to the above configuration, when performing recording or reproduction using a lens having a large numerical aperture of 0.6 or more, it is possible to suppress the aberration of the focus light due to the warpage of the multilayer optical information recording medium, thereby recording high-density information. Alternatively, playback becomes possible.
  • a thirty-eighth invention provides a multi-layer optical information recording medium manufacturing apparatus which has n signal recording layers (n is an integer of 2 or more) and has a separation layer between the signal recording layers.
  • the k-th signal recording layer from the recording surface or the reproduction surface (k is an integer of 2 or more and n or less) is the k-th signal recording layer, and the substrate having the k-th signal recording layer on the surface is the k-th signal recording layer.
  • Shape maintaining means for making the surface having the guide groove and Z or pit of the (k-11) signal recording layer of the (k-11) stamper into a shape corresponding to the surface shape of the k signal substrate
  • Signal recording layer forming means for forming the (k-1) th signal recording layer using the (k-1) th stamper
  • An apparatus for manufacturing a multilayer optical information recording medium comprising: (k-1) a separation means for separating the (k-1) stamper from an interface between the (k-1) th separation layer and the (k-1) stamper. .
  • the present invention may be the thirty-eighth invention.
  • the method of manufacturing a multilayer optical information recording medium of the present invention it is easy to hold the (k-1) th stamper and the kth signal board in a shape along the same, and furthermore, the separation layer is provided between them.
  • the (k-1) stamper and the k The substrate can be peeled off. Thereby, a multilayer optical information recording medium having a uniform thickness of the separation layer can be manufactured.
  • the thirty-ninth invention is configured such that, when the k-th signal substrate is warped, the guide groove and the Z or the pit of the (k-11) -th signal recording layer are provided in accordance with the warp of the k-th signal substrate.
  • a thirty-eighth multi-layer optical information recording medium manufacturing apparatus wherein the shape maintaining means has a mechanism for holding the (k-11) stamper so that the k-th signal recording layer extends along the k-th signal recording layer.
  • the present invention may be the thirty-ninth invention.
  • the guide groove or the pit, or the guide groove and the pit of the (k-11) -th signal recording layer and the k-th signal recording layer are along. Therefore, the thickness of the (k-1) -th separation layer formed therebetween can be made uniform.
  • the shape maintaining means is in a table shape, and the guide groove and the Z or pit of the (k-11) th signal recording layer are aligned with the kth signal recording layer. Furthermore, there is provided a thirty-ninth aspect of the present invention for manufacturing a multilayer optical information recording medium having a surface shape in contact with the (k-1) th stamper.
  • the present invention may be the 40th invention.
  • the shape of the (k-1) th stamper can be easily changed depending on the table shape.
  • the shape maintaining means may include a surface on which at least one of the (k-1) th stamper and the kth signal substrate is not formed with the (k-11) separation layer.
  • the present invention may be the forty-first invention. C According to the above configuration, the shape of the (k-1) th stamper or the k-th signal substrate can be reliably maintained.
  • FIG. 3 shows a step of removing the (k-1) stamp from the molding die.
  • FIG. 6 is a view showing a step of bonding the (k ⁇ 1) st stamper on which the transfer layer is formed and the kth signal board in one example.
  • the figure which shows an example of the thickness distribution of the separation layer formed by the manufacturing method of the multilayer optical information recording medium of the present invention.
  • (b) A diagram showing a step of inserting a hole at the interface between the transfer layer and the (k-11) stamper in one example of the (k-1) stamp release method in the first embodiment of the present invention.
  • (c) A diagram showing a step of pulling up the (k-1) stamp by the handling means, of an example of the (k-1) stamp removing method in the first embodiment of the present invention.
  • FIG. 7 shows a process in which the (k ⁇ 1) st stamper is peeled.
  • FIG. 1 A diagram showing a method of forming a transparent cover layer according to the first embodiment of the present invention, showing a method of disposing an adhesive material between a first signal substrate and a film and spinning the film by spinning.
  • FIG. 1 A diagram showing a method of forming a transparent cover layer according to Embodiment 1 of the present invention, the method including forming a cover layer by bonding a film using a pressure-sensitive adhesive.
  • Figure 9 shows (a) A diagram showing a step of putting a k-th signal substrate and a pressure-sensitive adhesive in a chamber and evacuating the chamber in the method of forming a separation layer according to the second embodiment of the present invention.
  • (c) A diagram showing a step of stacking a (k ⁇ 1) th stamper and a kth signal substrate in the method of forming a separation layer according to the second embodiment of the present invention.
  • the (k-1) th recording multilayer film is formed on the (k_l) stamper by sputtering using a target.
  • (c) A diagram showing a step of peeling off a (k ⁇ 1) st stamper by using a handling means, of an example of the recording multilayer film forming method according to the first embodiment of the present invention.
  • Figure 12 shows (a) An example in which a (k-1) th stamper is produced by the injection molding method according to the third embodiment of the present invention shows a case where a heat insulating plate is arranged between a master stamper and a mold mirror surface A.
  • FIG. 1 A diagram showing a molding die in which a heat insulating material is incorporated behind a die mirror surface A in one example of the case where a (k-1) stamper is produced by the injection molding method according to the third embodiment of the present invention.
  • (b) is a second example of the shape maintaining means and the separation layer forming means in Embodiment 5 of the present invention, and shows a step of maintaining the shape of the (k ⁇ 1) st stamper.
  • (c) is a second example of the shape maintaining means and the separation layer forming means in Embodiment 5 of the present invention, and is a view showing a step of applying an ultraviolet curing resin for an adhesive layer, which becomes a part of the separation layer.
  • (d) is a second example of the shape maintaining means and the separation layer forming means in the fifth embodiment of the present invention, and is a view showing a step of holding the (k-1) stamp by a concave shape maintaining table.
  • FIG. 1 shows an embodiment of a method for manufacturing a multilayer optical information recording medium of the present invention.
  • Fig. 1 shows the k-th signal of a disk-type multilayer optical information recording medium that has n layers (n is 2 or more) and has a separation layer between each signal recording layer and performs recording and reproduction from one side.
  • FIG. 9 is a schematic diagram of a step of forming a (k ⁇ 1) th separation layer 107 between the recording layer 100 and the (k ⁇ 1) th signal recording layer.
  • the k-th signal recording layer 100 refers to a k-th signal recording layer (k is any one of 2 or more and n or less) from the recording / reproducing surface, and a substrate having the k-th signal recording layer 100 on the surface.
  • the k signal board is 103.
  • a stamper having a guide groove of the (k-1) th signal recording layer and a pit 105 is referred to as a (k-11) stamp 106.
  • the step of forming the (k-1) th separation layer 107 in the present embodiment is an example of the signal recording layer forming step of the present invention.
  • the method for manufacturing a multilayer optical information recording medium according to the first embodiment uses a blue-violet laser light source (wavelength of about 400 nm) and a high NA lens to improve the surface recording density per layer. 0.3 mm or less. Manufacturing of high-density optical information recording media with a thin transparent cover set to target. Note that a method of manufacturing a multilayer optical information recording medium according to another embodiment other than the first embodiment also targets a high-density optical information recording medium similar to that of the first embodiment. It is needless to say that the method for manufacturing a multilayer optical information recording medium of the present embodiment can be applied without using such a high-density optical information recording medium.
  • Both the k-th signal board 103 and the (k-1) -th stamper 106 in FIG. 1 are disk-shaped and have a center hole at the center.
  • the k-th signal substrate 103 is formed by forming a (k-1) -th separation layer 107 after the other signal recording layer forming step, or a transparent cover layer on the first signal recording layer. It is warped in anticipation of warpage that can occur in processes such as the formation process. Also, formation of the k-th recording multilayer film of the k-th signal recording layer 100, formation of the (k + 1) -n separation layer, formation of the (k + 1) -n recording multilayer film, etc. In general, it is naturally warped by the stress caused by the process. In the first embodiment, as an example, a case where the k-th signal substrate 103 is warped so as to surround the k-th signal recording layer 100 is shown.
  • a k-th signal board 103 is prepared.
  • the (k + 1) -th signal recording layer 101 and the n-th signal recording layer 102 in this order (n —
  • the signal recording layer is a pit indicating the groove address information for guiding the recording light and the reproduction light when recording and reproducing on the multilayer optical information recording medium, and GeSbT.
  • e, AgInSbTe, etc.It consists of a recording multilayer film consisting of a phase change film such as e.g., a magnetic film, a dye film, and a dielectric film such as ZnS sandwiching them, or a reflective film. .
  • a separation layer typified by a k-th separation layer 110 is arranged between the signal recording layers.
  • the multi-layer optical information recording medium according to the present embodiment is not limited to the one including only the guide groove into which the video and audio data is written after the manufacturing. It may be composed of a pit to which video and audio data is sometimes written, or may be a pit formed inside or outside the guide groove.
  • one or a plurality of k signal boards 1 manufactured at present or in the past such as a warp measuring means 1401 shown in FIG. 14 of a fifth embodiment described later.
  • the surface of the 106th (k-11) signal recording layer having the guide groove and the pit 105 is formed in a shape corresponding to the surface shape of the k signal substrate 103. That is, the (k-1) th stamper 106 is the k signal board 10
  • the measurement of the surface shape of the k signal substrate 103 is performed, for example, by measuring the surface shape of the k signal substrate 103 manufactured the day before the first day in the morning when the factory operates, and based on the measurement result.
  • K-1 The shape of the stamper 106 may be determined.
  • C Each time the k-th signal board 103 is manufactured, one by one the k-th signal board 10
  • the shape of (3) is measured and the (k-1) stamp 10 is determined based on the measurement result.
  • the shape of 6 may be determined.
  • the shape of the (k ⁇ 1) th stamper 106 may be determined by using the results of measuring the surface shape of the k signal substrate 103 for each lot.
  • the (k-1) stamp 106 can be obtained.
  • the k-th signal board 103 have a shape along each other as shown in the figure.
  • the guide groove and the pit 105 of the (k-1) th signal recording layer and the k-th signal recording layer 100 are in a state of being along each other, and the distance is in the radial direction and in the plane. It is uniform.
  • the k-th signal recording layer 100 of the k-th signal substrate 103 and the guide groove of the (k-1) -th signal recording layer And / or the surface having the pit 105 is formed into a shape having substantially the same curvature and radius.
  • a substrate having a plurality of signal recording layers such as a k-th signal substrate 103, is warped by the stress of a film such as a recording multilayer film or a reflection film c.
  • the stamper 106 has a shape that follows the already warped k-th signal board 103, and the guide groove and pit 105 of the (k- 1) signal recording layer and the k-th signal board
  • the recording layer 100 is disposed so as to face the recording layer 100.
  • the (k-1) -th signal recording layer is formed between the guide groove and pit 105 of the (k-1) -th signal recording layer and the k-th signal recording layer 100.
  • a separation layer 107 is formed.
  • the (k-1) th stamper side of the (k-1) th separation layer 107 is formed so as to enter into the guide groove and the pit 105 of the (k-1) th signal recording layer.
  • the thickness of the (k-1) th separation layer 107 becomes uniform.
  • the configuration of the (k-1) -th separation layer 107 is not limited to one material, and may be a plurality of layers made of different materials. For example, when the layer in contact with the (k-1) th signal recording layer of the (k-1) th separation layer 107 is in contact with the groove and the pit 105, the transfer layer is cured.
  • the transfer layer is cured to complete the (k ⁇ 1) th separation layer 107.
  • the guide groove and pits 108 and () of the transferred (k-1) th signal recording layer on the (k-1) th separation layer 107 are transferred.
  • the (k ⁇ 1) separation layer 107 and the (k ⁇ l) stamper 106 have a plurality of interfaces between the (k ⁇ l) stamper 1 and the k-th signal recording layer 100. It is important that the surface be most easily peeled at the interface.
  • the material of the transfer layer, the material of the (k ⁇ l) -th stamper 106, the material of the surface thereof, and the like can be selected.
  • the guide groove and the pit 105 of the (k ⁇ l) -th signal recording layer of the (k ⁇ l) stamper 106 and the k-th signal recording layer 100 on the k-th signal substrate 103 are aligned with each other.
  • the (k ⁇ l) -th separation layer 107 By forming the (k ⁇ l) -th separation layer 107 in a different shape, a uniform separation layer can be formed. If any of the plurality of separation layers is manufactured using the above steps, the accuracy of the entire multilayer optical information recording medium can be improved, and the performance of information recording or reproduction in each signal recording layer can be greatly improved. be able to. .
  • Fig. 2 shows the fabrication process of the (k-1). Stamper.
  • plastic is used as the material of the (k-1) th stamper.
  • Plastics are lightweight and excellent in operability, and can be easily mass-produced by injection molding and are convenient. Another advantage is that a desired shape (warpage) can be easily obtained by controlling the molding conditions.
  • polycarbonate is used as the material of the (k ⁇ l) stamper.
  • an olefin resin, an acrylic resin, a norbornene-based resin, or the like can be used.
  • a master stamper 201 is set on the mirror surface A of a pair of molding dies 200, and polycarbonate 202 melted at 380 ° C is injected and filled into the molding dies 200. I do.
  • the master stamper 201 is made of, for example, a material mainly containing a metal such as nickel.
  • Cavity 2 between master stamper 201 of mold 200 and mold mirror surface B 03 is determined to have a desired thickness of the (k_l) th stamper.
  • the thickness of the cavity 203 is 1.1 mm to form a (k-1) stamper having a thickness of about 1.1 mm.
  • the mirror surface A and the mirror surface B of the molding die 200 are set to respective temperatures.
  • the temperatures of mold mirror surfaces A and B are set to 115 ° C and 125 ° C, respectively, such that (temperature of mold mirror surface A) ⁇ (temperature of mold mirror surface B).
  • the polycarbonate 202 melted at 380 ° C is cooled and solidified.
  • the mold 200 is applied with a clamping force of 20 to 30 tons. The polycarbonate melted by the mold clamping force enters between the guide grooves and the pits formed in the master stamper 201 and transfers them.
  • the (k-1) th stamper 204 is taken out of the molding die 200 as shown in FIG.
  • the (k-1) stamper 204 since (temperature of the mirror surface A of the mold) ⁇ (temperature of the mirror surface B of the mold), the (k-1) stamper 204 has a guide groove and a pit formed on the opposite side from the surface 205 where the guide groove and pit are formed.
  • the surface 206 has a higher temperature. Therefore, when the temperature decreases to room temperature, the amount of shrinkage increases on the opposite surface 206, and as a result, the (k-1) th stamper 204 has a shape that wraps around the opposite surface 206.
  • the (k ⁇ 1) st stamper 106 shown in FIG. 1 (1) is manufactured in this manner. '
  • FIG. 3 shows the step of forming the (k-1) th separation layer.
  • the (k-1) th separation layer is made of two materials, and the outer diameters of both the kth signal board and the (k-1) stamp are 120 mm in diameter.
  • FIG. 3A the (k-1) stamp 300 is placed on the table 305 with the guide groove of the (k-1) stumper and the pit facing up.
  • the (k-1) stamper 300 is shown in Figure 2. It can be manufactured by the following method.
  • the installed (k-1) stamp 300 is fixed on the table 300 by a method such as vacuum suction.
  • the surface of the table 305 has the same curvature as that of the (k ⁇ 1) st stamper as shown in the figure. This is because the shape itself of the (k-1) th stamper 300 is controlled in the step shown in FIG. (K-1)
  • the ultraviolet curable resin for the transfer layer 301 is dropped on the guide groove and the surface of the pit of the stamper, and the unnecessary resin for the transfer layer is rotated by rotating the table 350. To obtain a uniform thickness of the UV curable resin layer for the transfer layer.
  • the ultraviolet curable resin an acrylic resin which causes a radical reaction upon irradiation with ultraviolet light is preferable.
  • a talyl-based ultraviolet curable resin having a viscosity of 20 OMPas is easily peeled off from the (k-11) th stamper 300 made of polycarbonate. If the viscosity is 1 to 100 OMPa ⁇ s, it can sufficiently enter the guide grooves on the stamper and the unevenness of the pit. The spin rotation was performed at 400 rpm for 5 seconds to obtain a transfer layer having a thickness of about 8 microns.
  • ultraviolet rays are irradiated using an ultraviolet lamp 302.
  • an ultraviolet lamp 302. a metal halide lamp, a high-pressure mercury lamp, a xenon lamp, or the like is preferable.
  • the ultraviolet curable resin for transfer layer 301 is cured, and the transfer layer 303 is formed.
  • the (k ⁇ 1) th stamper 300 on which the transfer layer 303 is formed and the kth signal substrate 303 are bonded together.
  • the k-th signal substrate 306 has the (k + 1) th to n-th signal recording layers in addition to the guide groove and the pit of the k-th signal recording layer and the k-th recording multilayer film. (Not shown).
  • the k-th signal substrate 306 is fixed to the table 309 by vacuum suction, and an ultraviolet curable resin for an adhesive layer 307 serving as an adhesive is dropped on the k-th signal recording layer.
  • k-1) UV curing for the transfer layer 303 of the stamper 300 and the adhesive layer Place the tree's fat so that it touches.
  • the table 309 is rotated as shown in the figure to shake off excess UV curable resin for the adhesive layer. In the present embodiment, rotation was performed at 500 rpm for 8 seconds.
  • As the UV-curable resin for the adhesive layer 307 an acrylic UV-curable resin having a high adhesive strength to the k-th recording multilayer film and the transfer layer 303 and having a mPa-s of 600 mPas was used.
  • ultraviolet rays are irradiated from an ultraviolet lamp 302 to cure the ultraviolet curing resin 307 for the adhesive layer.
  • an ultraviolet lamp 302 a metal halide lamp, a high-pressure mercury lamp, a xenon lamp, or the like can be used as in FIG. 3B.
  • the (k-1) stamp 300 has transparency such as polycarbonate, it can transmit some ultraviolet rays and cure the ultraviolet curing resin for adhesive layer 307.
  • the average thickness of the adhesive layer 308 is 22 microns, and the transfer layer 303 and adhesive layer 308 integrated by curing become the (k-1) th separation layer 310
  • the thickness of the c- th (k-11) separation layer 310 was as shown in FIG.
  • FIG. 4 (a) shows that the thickness unevenness in the radial direction of the (k-1) th separation layer was uniform at 27 to 31 microns and 4 microns.
  • FIG. 4 (b) shows that the (k-1) th stamper is the thickness unevenness in the radial direction of the (k-1) th separation layer manufactured by the conventional method. ⁇ It tends to become thicker as the circumference radius increases, and irregularities are large, ranging from 23 to 37 microns to 14 microns.
  • the thickness unevenness in the radial direction of the (k-1) -th separation layer was uniform at 4 ⁇ m. The performance of the high-density optical information recording medium can be maintained.
  • FIG. 5 is a view showing a state of producing the (k-11) th separation layer when the (k-11) stamp is produced in a flat shape by the injection molding method as in the conventional method.
  • the process is almost the same as the process shown in FIG. 3, except that the shape of the (k-1) stamp 500 is flat.
  • Figures 5 (a) and (b) show the shape of the transfer layer 503
  • FIGS. 5 (c) and 5 (d) show the steps of forming an adhesive layer 508 and completing the (k ⁇ 1) th separation layer 510. Since the (k-1) th stamper 500 has a flat shape, it is natural to make the table 505 flat. Also, as shown in FIG.
  • FIG. 3 (B) An ultraviolet curing resin for a transfer layer is applied on the (k-1) th stamper in the step of FIG. 3 (a), and is cured by ultraviolet as shown in FIG. 3 (b).
  • an ultraviolet curing resin for an adhesive layer is applied on the k-th signal substrate in the same manner as in FIG. 3 (a). After stacking the (k-1) th tamper and the kth signal substrate in a decompressed chamber, the ultraviolet curing resin for the adhesive layer is cured with ultraviolet rays as shown in FIG. 3 (d).
  • the k-th signal substrate 303 is fixed to the table 309 by vacuum suction, and the ultraviolet curing resin for adhesive layer 307 serving as an adhesive is formed on the k-th signal recording layer. Then, the transfer layer 303 of the (k-1) stamp 300 is placed in contact with the ultraviolet curable resin 307 for the adhesive layer, and then the table 309 is rotated to remove excess
  • the ultraviolet curable resin for the adhesive layer is shaken off, it is not limited to this.
  • the layer of the ultraviolet curing resin 301 for the transfer layer on the (k- 1) stamper 300 is changed to the layer of the ultraviolet curing resin 301 for the transfer layer.
  • the (k-1) th stamper 300 may be applied on the formed (k-1) stamp 300, and then the (k-1) stamp 300 and the kth signal substrate 303 may be bonded to each other.
  • an ultraviolet-curing resin for an adhesive layer 307 on the k-th signal substrate 306 an ultraviolet-ray for a transfer layer is applied on the ultraviolet-curing resin 307 for the adhesive layer of the k-th signal substrate 306.
  • the cured resin 301 may be applied, and then the (k-1) th stamper 300 may be bonded to the k-th signal substrate 303.
  • Figure 6 shows the peeling process.
  • the (k ⁇ 1) st stamper 300 and the k-th signal substrate 303 adhered in the step illustrated in FIG. 3 are fixed on the peeling table 600.
  • the fixing means may be the vacuum suction shown in FIG. 6A, but other means may be, for example, a machine for holding the outer peripheral end surface of the k-th signal substrate 310.
  • a hole 610 is inserted at the interface between the transfer layer 303, which is a part of 310, and the (k-1) th stamper 300.
  • the tip of 6mm is sharp Therefore, it can be easily inserted as a wedge at the interface between the transfer layer 303 and the (k ⁇ 1) th stamper 300.
  • the pressurized air 615 is introduced from the center of the peeling table 600 and the air 615 is transferred to the transfer layer 3.
  • Lead between 03 and the (k-1) stamp 300 At this time, the (k-1) th stamper 300 is pulled up by the handling means 612. Pulling up with the handling means 6 12 facilitates peeling.
  • the (k-1) st stamper 300 is peeled off.
  • a (k-11) th multilayer recording film is formed on the guide groove and the pit of the (k-11) th signal recording layer transferred onto the (k-11) th separation layer.
  • the method of forming the (k-1) recording multilayer film differs depending on the material.
  • the recording film such as a phase change film such as GeSbTe or AgInSbTe, a magnetic film, and the like.
  • a dielectric film such as ZnS, a metal reflection film, and the like to be sandwiched are formed by sputtering or vapor deposition. In the case of a dye film, spin coating is used.
  • the (k-1) th signal recording layer is completed only after the (k-1) th recording multilayer film is formed. By repeating the steps shown in FIGS. 2, 3, and 6 and the formation of the recording multilayer film on the (k-1) th signal recording layer, the first signal substrate having the n-th signal recording layer is manufactured. You.
  • a method shown in FIG. 11 can also be used.
  • a (k ⁇ 1) th recording multilayer film 1101 is formed on a (k ⁇ 1) st stamper 300 by sputtering using a target 1100 in advance. I do.
  • the (k-1) th recording multilayer film 111 is actually a film of multiple materials. Therefore, multiple targets are required.
  • the transfer layer
  • the (k-1) th recording multilayer film 111 is also formed.
  • the (k-11) th recording layer can be formed simultaneously with the formation of the (k-11) th separation layer on the kth signal substrate, and a reduction in tact time can be expected.
  • FIG. 7 shows an example of a step of forming a transparent cover layer on the first signal recording layer.
  • FIG. 7 shows a cover layer formed by bonding a 90-micron-thick finolem 700 with a 10-micron-thick adhesive layer 730 on a table 720 by spin coating. Things.
  • the material of the film 700 include polycarbonate, an olefin resin, and a norbornene resin.
  • a radiation curable material such as an ultraviolet curable resin or a thermosetting resin can be used.
  • a method of disposing a bonding material between the first signal substrate 7100 and the film 700 and spinning it off, or a method in which the film 700 is turned down A method in which the first signal substrate 710 is overlaid and spinned from above, or a method in which a bonding material is applied to the entire surface of at least one of the first signal substrate 710 and at least one of the films 700 in advance and then applied in a vacuum. Etc. In any case, after the first signal substrate 7100 and the film 7100 are laminated via an adhesive material Requires curing.
  • FIG. 7 (b) shows a method for forming a cover layer by bonding a film 700 using a pressure-sensitive adhesive 7400.
  • the thickness of the pressure-sensitive adhesive 7400 is 20 to 30 microns
  • the thickness of the film 700 is 100 microns less the thickness of the pressure-sensitive adhesive 7400.
  • the bonding method is, for example, a method in which a film 700 and a pressure-sensitive adhesive 740 are overlapped in a reduced-pressure chamber 745 shown in FIG. 7 (b). After stacking, press the film surface with high-pressure compressed air to ensure adhesion. In addition to this method, a method of sticking with a roller in the air or under reduced pressure may be used.
  • FIG. 7 (c) shows the case where the cover material 750 is applied by spin coating without using finolem.
  • the first (k-1) stamper made of plastic having a thickness of 1.1 mm is used.
  • the thickness may be 0.5 mm or more. If the thickness is 0.5 mm or more, it has high rigidity, so that the shape can be easily controlled by molding conditions even in the injection molding method, and it is easy to handle, which is suitable for improving productivity.
  • the (k ⁇ 1) th separation layer is made of two materials, but it may be made of three or more materials.
  • the description has been made using the ultraviolet curable resin, other radiation curable materials such as thermosetting materials may be used.
  • FIG. 8 shows the warpage opposite to that of the first embodiment, that is, the k-th signal substrate records the k-th signal.
  • the layer is warped so as to wrap the opposite side of the layer. Same as Fig. 1
  • the kth signal board and the (k-1) stamp in FIG. 8 are both disk-shaped and have a central hole at the center.
  • the k-th signal substrate 803 has a k-th signal recording layer 800 on the surface of the k-th separation layer 810, and the (k + 1) There are a total of (n ⁇ k ⁇ 1) signal recording layers from the signal recording layer 801 to the nth signal recording layer 802.
  • the signal recording layer includes a pit indicating guide groove address information for guiding recording light and reproduction light when recording and reproducing on the multilayer optical information recording medium, and G
  • G A recording multilayer film consisting of a phase change film such as eSbTe or AgInSbTe, a magnetic film, a recording film represented by a dye film, and a dielectric film such as ZnS sandwiching them.
  • a (k-1) th stamper 806 having a guide groove and a pit 805 of the (k-1) th signal recording layer on the surface is also prepared.
  • the (k- 1) stamper 806 includes one or a plurality of k-signals manufactured at present or in the past, such as a warp measuring unit 1401 shown in FIG. 14 of a fifth embodiment described later.
  • the surface shape of the substrate 803 is measured, and the guide groove and the Z or pit 805 of the (k-11) th signal recording layer of the (k-11) stamp 806 are determined based on the measurement result.
  • the surface has a shape corresponding to the surface shape of the k signal substrate 803. That is, the (k ⁇ 1) th stamper 806 is formed so as to follow the shape of the k-signal substrate 803.
  • the (k ⁇ 1) st stamper 806 and the kth signal board 803 are formed so as to be parallel to each other as shown in the figure, and the (k ⁇ 1) stamp 806 is the (k ⁇ 1) th signal board. It is warped so as to surround the guide groove and the bit 805 of the recording layer.
  • the guide grooves and pits 805 of the (k-1) th signal recording layer and the kth signal recording layer 800 are aligned with each other, and the distance is uniform in the radial direction and in the plane.
  • the k-th signal recording layer 8 of the k-th signal substrate 803 00 and the surface of the (k-1) th signal recording layer having the guide groove and the groove or pit 805 have substantially the same radius of curvature.
  • the guide groove of the (k ⁇ 1) th signal recording layer and the (k ⁇ 1) th separation layer between the pit 805 and the kth signal recording layer 800 are formed.
  • 807 is formed.
  • the (k-11) stumper side of the (k_l) th separation layer 807 should be inserted into the guide groove and the pit 805 of the (k-11) th signal recording layer. Need to be formed.
  • FIG. 8 (1) since the guide groove of the (k-1) th signal recording layer and the distance between the pit 805 and the kth signal recording layer 800 are uniform in the radial direction and in the plane, The thickness of the (k-1) th separation layer becomes uniform.
  • the configuration of the (k-1) th separation layer 807 is not limited to one material, and may be a plurality of layers made of different materials.
  • a layer in contact with the guide groove of the (k-1) th signal recording layer and the pit 805 of the (k-1) th separation layer 807 is a transfer layer
  • a liquid having curability as the transfer layer If a material is used, the (k ⁇ l) signal recording layer can be easily inserted into the groove and the pit 805, and the transfer can be improved. In this case, the transfer layer is cured to complete the (k ⁇ l) -th separation layer 807.
  • FIG. 8 (3) the guide groove of the (k ⁇ l) th signal recording layer transferred on the (k ⁇ l) th separation layer 807 and the pits 808 and (k) — L) Peel off from the interface of stamper 806.
  • the k-th signal board and the (k-l) -th The distance of the stamper can be made uniform in the radial direction, and the thickness of the (k-1) th separation layer can be made uniform.
  • the (k ⁇ l) -th stamper is a plastic similar to that of the first embodiment
  • the (k ⁇ l) -th stamper can be manufactured by an injection molding method as shown in FIG. By setting the temperature of the mirror surface A of the mold in Fig. 2 higher than that of the mirror surface B of the mold, 1) The stamper 204 wraps around the surface 205 on which the guide groove and the pit are formed.
  • FIG. 9 shows an example of forming a (k-1) th separation layer having a thickness of 30 microns using a pressure-sensitive adhesive and a transfer layer.
  • FIG. 9 shows a method using a pressure-sensitive adhesive as a part of the (k-1) th separation layer. Since the pressure-sensitive adhesive has a semi-solid film shape, it has excellent thickness accuracy. On the other hand, since the viscosity is very high, it is difficult to transfer the guide groove and pit of the (k-1) stamp. In this forming method, a transfer layer having a low viscosity is separately used.
  • a k-th signal substrate 900 and a pressure-sensitive adhesive 901 having a thickness of 25 micrometer are put in a chamber 905, and the chamber 905 is evacuated.
  • a range of 1 to 100 hPa is suitable as the degree of vacuum.
  • the pressure-sensitive adhesive 901 is superposed on the surface of the k-th signal recording layer of the k-th signal substrate 900.
  • the pressure-sensitive adhesive 901 has a center hole with a diameter D1.
  • the k-th signal substrate and the pressure-sensitive adhesive may be taken out to the atmosphere, and the pressure-sensitive adhesive may be pressed with high-pressure compressed air to ensure the adhesion.
  • the (k ⁇ l) stamper 902 is fixed on the table 904 as shown in FIG. 9 (b), and the groove of the (k ⁇ l) signal recording layer is provided.
  • the surface having pits is coated with an ultraviolet curing resin 903 for a transfer layer.
  • an ultraviolet curing resin 903 for a transfer layer is coated with an ultraviolet curing resin 903 for a transfer layer.
  • application by spin coating is shown as an example.
  • the UV-curable resin for transfer layer 903 as in the first embodiment, Acrylic resins that cause a cal reaction are preferred.
  • Plastic for example,
  • the rotation of the spin was set at 4000 rpm for 5 seconds, and a transfer layer having a thickness of about 8 microns was obtained.
  • the inner diameter of the coated transfer layer ultraviolet curable resin 903 is D2 smaller than the diameter D0 of the center hole of the (k-1) th stamper 902.
  • the (k-1) stamp 9002 coated with the ultraviolet curing resin for transfer layer 903 and the pressure-sensitive adhesive 901 are connected to the kth signal substrate 9 00 are superimposed in the chamber 908.
  • the degree of vacuum in the champagne 908 is 1 to; Since it is D2 and D1, the pressure-sensitive adhesive 9 and the (k-1) stamp 902 cannot come into contact with each other. This is because, in the step of peeling off the (k-1) stamper 902 after forming the (k-1) th separation layer, the pressure-sensitive adhesive 901 directly contacts the (k-1) stamper 902 This is to prevent the (k- 1) stamper 902 from being unable to be peeled off.
  • the UV-curable resin for transfer layer 903 Since the UV-curable resin for transfer layer 903 has low viscosity, it spreads when it is stacked, and the average value of the total thickness of the UV-curable resin for transfer layer 903 and the pressure-sensitive adhesive 901 is 30 Micron. After stacking, the kth signal board and the (k-1) stamp are taken out into the atmosphere, and the high-pressure compressed air is used to crush the air bubbles when the kth signal board and the (k-1) stamp are pushed together. Adhesion may be ensured.
  • the uncured transfer layer ultraviolet curing resin 903 is cured by ultraviolet rays from an ultraviolet lamp 910.
  • K consisting of pressure-sensitive adhesive 901 and UV-curable resin 903 for the transfer layer 1
  • Separation layer 909 is formed.
  • the ultraviolet lamp a metal halide lamp, a high-pressure mercury lamp, a xenon lamp, or the like can be used.
  • the pressure-sensitive adhesive must have an adhesive strength between the k-th signal recording layer and the cured transferable ultraviolet curable resin.
  • the transferable ultraviolet curable resin is easy to peel off from the (k-1) stamp after curing.
  • the ultraviolet curable resin 903 for the transfer layer is replaced with the (k-1) Although applied on the stamper 902, the transfer layer ultraviolet curing resin 903 may be applied on the pressure-sensitive adhesive 901 superimposed on the k-th signal substrate 900. . Also, in FIG. 9, the pressure-sensitive adhesive 9101 is superimposed on the k-th signal substrate 900, but this is not a limitation. After being applied onto the stamper 902, the pressure-sensitive adhesive 901 is superimposed on the (k-1) stamp 902 to which the ultraviolet curing resin for transfer layer 903 has been applied, and then the k-th adhesive is applied. The signal substrate 900 and the (k-1) th stamper 902 may be bonded together. Also, using the process shown in FIG.
  • FIG. 10 (a) shows the distribution of the thickness of the (k ⁇ 1) th separation layer 909 formed by the method of FIGS. 8 and 9.
  • FIG. 10 (b) shows a (k-11) 'isolation layer formed by the method of FIG. 9 using a flat (k-11) stamper 500 as in the prior art as shown in FIG. This is the case when you do. Since the distance between the kth signal board and the (k-1) stamp is near the inner circumference and farther away from the outer circumference, the thickness of the (k-1) th separation layer tends to increase from the inner circumference to the outer circumference. A distribution of 6 microns of 33 microns occurs. Thus, FIG. 8 and FIG. 9 are effective for the thickness uniformity of the (k-1) th separation layer.
  • the UV-curable resin for the adhesive layer shown in the first embodiment is used instead of the pressure-sensitive adhesive to form the (k-1) -th separation layer having a uniform thickness by the method of FIG. Can be made.
  • the method of using the pressure-sensitive adhesive shown in FIG. 9 can be applied.
  • the (k-1) th stamper made of plastic having a thickness of 1.1 mm is used.
  • the thickness may be 0.5 mm or more.
  • the thickness is 0.5 mm or more, it has high rigidity, so that the shape can be easily controlled by molding conditions even in the injection molding method, and it is easy to handle, which is suitable for improving productivity.
  • the (k ⁇ 1) th separation layer is made of two materials has been described, but it may be made of three or more materials.
  • the description has been made using the ultraviolet curable resin, other radiation curable materials such as thermosetting materials may be used.
  • FIG. 12 is a schematic diagram of a molding die provided with a heat insulating material.
  • the (k-11) stamper is used to warp the stamper so as to cover the surface opposite to the surface with the guide groove and pit.
  • FIG. 12A shows a case where a heat insulating plate 1200 is arranged between the master stamper 201 and the mold mirror surface A. Cooling water is passed through the cooling water passage A and the cooling water passage B in order to cool the molten polycarbonate 202 introduced into the cavity 203 of the molding die 200. By inserting the heat insulating plate 1200, the mold mirror surface B side is cooled according to the temperature of the cooling water flowing into the cooling water passage B, but the master stamper 201 side is molten polycarbonate 200. Since it becomes difficult to cool the temperature of No. 2, a warp is produced from the (k-1) stamper formed by the forming die shown in FIG.
  • Cooling water having a necessary and sufficient temperature may be supplied to the cooling water channel A so that the heat insulating plate 1200 is not destroyed by heat.
  • Fig. 12 (b) shows a molding die in which the heat insulating material 123 is incorporated behind the mirror surface A of the die. Similar effects can be obtained with this configuration.
  • a heat insulating material may be incorporated behind the mirror surface B of the mold.
  • the temperature of the mold mirror surface B tends to be higher than that of the master stamper. Therefore, the molded (k-1) stamp is warped so as to cover the surface on the opposite side to the surface with the guide groove and the pit.
  • the (k-1) th stamper made of plastic having a thickness of 1.1 mm is used.
  • the thickness may be 0.5 mm or more.
  • the thickness is 0.5 mm or more, it has high rigidity, so that the shape can be easily controlled by molding conditions even in the injection molding method, and it is easy to handle, which is suitable for improving productivity.
  • a method for manufacturing a metal (k-1) stamp will be described. Since the metal has a relatively high hardness, the (k-1) -th stamper is effective because it can prevent the (k-1) -th stamper from being damaged or deformed when the (k-1) -th stamper is peeled off from the k-th signal substrate.
  • the master stamper 201 shown in FIGS. 2 and 12 and the (k-1) th stamper also need to have the guide grooves or pits with reversed unevenness. Therefore, the (k-1) th stamper made of metal can be manufactured using the master stamper 201.
  • a master stamper is made using a glass master master having a shape in which the recesses and projections are inverted from the guide grooves and pits on the master stamper.
  • the glass master master has irregularities such as guide grooves and pits formed of photoresist on the surface of the glass.
  • a photoresist is applied uniformly on the surface of the glass plate, and the photoresist is exposed to the shape of the guide groove ⁇ pit using a focused laser in the ultraviolet to far ultraviolet wavelength range, and further, an electron beam. .
  • the exposed photoresist is removed by a developing process, and irregularities such as guide grooves and pits are formed on the glass master master.
  • a nickel thin film is formed on the surface of the guide groove ⁇ pit of the glass master master by vapor deposition and sputtering, and nickel is deposited by electrode using the nickel thin film as an electrode.
  • nickel is deposited to a thickness of 0.3 mm to form a nickel plate on the surface of the master glass master. If the nickel plate is peeled from the master glass master, the master glass master The master stamper has upper and lower irregularities (guide grooves and pits) and inverted irregularities (guide grooves and pits).
  • the method for producing the nickel (k-1) stamper from the nickel master stamper is described below.
  • Nickel (k-1) stamper is formed on the uneven surface of the master stamper by electrode
  • the direction of the warp being one means that the warp is warped on the uneven surface of the (k-1) stamp.
  • the magnitude of the warpage is indicated by the angle between the radial direction of the (k-1) stamp and the tangent of the (k-1) stamp.
  • the + warp and the one-warp change at a boundary of 20 amps / dm ⁇ 2.
  • the pH value of the bath is the minimum at pH 4.5, that is, the (k-l) stamper becomes flat, and the further away from it, the more the warp is on the + side. .
  • the electrode is controlled by controlling at least one of the current density at the time of power supply, the temperature of the electrolytic bath, and the pH value. For example, it is possible to control the warpage of the (kl) stamper. These parameters make it possible to fabricate a (k-l) stamper along the k-th signal substrate.
  • the metal (k ⁇ l) stamper manufactured in the above steps can form a separation layer between the metal (k ⁇ l) stamper and the k-th signal substrate by the method shown in FIGS.
  • the metal (k-l) stamper when forming the separation layer, is opaque and has no UV transmittance, so it can be used instead of the UV-curable resin 307 for the adhesive layer and the UV-curable resin 903 for the transfer layer. It is necessary to use radiation curing materials such as thermosetting materials and to use radiation such as far infrared rays for curing.
  • a pressure-sensitive adhesive can be used instead of the UV-curable resin 307 for the adhesive layer. After the formation of the separation layer, it can be separated from the k-th signal substrate by the method shown in FIG.
  • nickel is used as the metal, but other materials that can be electrically charged may be used as the material.
  • an apparatus for manufacturing a multilayer optical information medium will be described.
  • Manufacturing equipment The (k) th signal substrate and the (k ⁇ 1) st stamper are arranged so that the surfaces of the kth signal recording layer and the (k ⁇ 1) th signal recording layer having the guide groove and the pit face each other.
  • Shape maintaining means for maintaining the shape of the (k-1) stamp and the kth signal board so as to be along with each other; and at least one of the (k-11) stamp and the kth signal board has the shape.
  • the (k-11) -th separation layer is located between the inner groove and the pit.
  • a separating means for separating the (k-1) th stamper from the interface between the (k-1) th separating layer and the (k-11) stamp.
  • Figures 14 and 15 show examples of shape maintaining means and separation layer forming means.
  • the separation layer forming means of the present embodiment is an example of the signal recording layer forming means of the present invention.
  • FIG. 14 shows an example in which the shape maintaining means is an arm.
  • a flat (k-1) stamper 500 having a transfer layer 503 formed on the guide grooves and pits shown in FIG. 14A is used.
  • the transfer layer is formed by the method shown in FIGS. 5 (a) and 5 (b).
  • the k-th signal substrate 303 is warped so as to surround the k-th signal recording layer.
  • the warp measuring means 1401 irradiates the measuring light 1442 into the k-th signal recording layer on the k-th signal substrate 360, and detects the position of the reflected measuring light 1402. The inclination angle of the k-th signal recording layer on the k-th signal substrate is measured.
  • the shape maintaining arm 1400 is formed on a surface of the (k-1) th stamper 500 opposite to the surface on which the transfer layer 503 is formed. Hold the peripheral side and the outer peripheral side. At this time, according to the inclination angle of the k-th signal recording layer obtained from the warp measuring means 1401, the shape maintaining arm 1400 has the guide groove and the pit of the (k-1) th signal recording layer. The (k-1) th damper 500 is kept in a warped state along the k signal recording layer.
  • the measuring means 1401 measures the surface shape of the k-th signal recording layer of one or more k-signal substrates 306 manufactured now or in the past, and the shape-maintaining arm 1400 Based on the measurement result, the surface of the (k ⁇ 1) st stamper 500 with the guide groove and / or pit of the (k ⁇ 1) th signal recording layer may correspond to the surface shape of the k signal substrate 303. It is formed in an appropriate shape. That is, the shape maintaining arm 1400 forms the (k ⁇ 1) st stamper 500 along the shape of the k signal substrate 306 based on the measurement result.
  • the measurement of the shape of the k-signal board 303 is performed, for example, by measuring the shape of the k-signal board 300 manufactured the day before the first day in the morning when the factory starts operation, and based on the measurement result.
  • the shape of the stamper 500 may be determined. Also, each time the k-th signal board 303 is manufactured, the shape of the k-th signal board 303 is measured one by one, and based on the measurement result, the (k- 1) stamper 500 The shape may be determined. Alternatively, the shape of the (k ⁇ 1) st stamper 500 may be determined based on the results of measuring the shape of the k signal substrate 303 for each lot.
  • the member for holding the stamper of the shape maintaining arm 140 has driving means such as an air cylinder / stepping motor, and an actuator. Further, as a holding method, there is a vacuum suction method, and a mechanical holding method such as a claw on the outer peripheral side.
  • driving means such as an air cylinder / stepping motor, and an actuator.
  • a holding method there is a vacuum suction method, and a mechanical holding method such as a claw on the outer peripheral side.
  • the nozzle 1403 is inserted between the (k-1) stamp 500 and the k-th signal substrate 300, and the ultraviolet curable resin 3 for the adhesive layer is formed on the inner periphery of the k-th signal substrate 303. 07 is added dropwise.
  • the k-th signal board 306 is held on the table 309, and by rotating the table 309, the ultraviolet curing resin 307 for the adhesive layer is formed into a ring. It is dropped in a shape. Since the (k ⁇ l) -th stamper 500 is held by the shape maintaining arm 140, the distance from the k-th signal substrate 306 can be made uniform in the radial direction.
  • the table (309) holding the k-th signal substrate (306) is rotated while maintaining the shape of the (k-1) th stamper (500) with the shape maintaining arm (140).
  • the shape maintaining arm 140000 also rotates in synchronization with the table 309 while holding the (k ⁇ l) stamp 500.
  • the adhesive layer ultraviolet curable resin 307 spreads in the radial direction, and a uniform adhesive layer is formed between the (k ⁇ 1) th stamper 500 and the kth signal substrate 310.
  • the adhesive layer is cured by ultraviolet rays and peeling is performed as shown in FIG.
  • the hook 610 and the handling means 612 in FIG. 6 are part of the peeling means.
  • the shape maintaining arm 1400 is moved to the (k) as shown in FIG. — L)
  • the stamper 500 will be held.
  • FIG. 15 shows a case where the shape maintaining means is in the form of a table.
  • a flat (k ⁇ l) stamper 500 having a transfer layer 503 formed on the guide grooves and pits shown in FIG. 15A is used.
  • the transfer layer is formed by the method shown in FIGS. 5 (a) and 5 (b).
  • the k-th signal substrate 303 is warped so as to surround the k-th signal recording layer.
  • the warp measuring means 1401 makes the measurement light 1402 incident on the k-th signal recording layer on the k-th signal substrate 360, and detects the position of the reflected measurement light 1402, The inclination angle of the k-th signal recording layer on the k-th signal substrate is calculated.
  • the shape maintaining table 1500 holds the surface of the (k ⁇ l) st stamper 500 on which the transfer layer 503 is formed.
  • the shape maintaining table 1500 is obtained from the warp measuring means 1441.
  • the (k-1) th stamper 500 was warped so that the guide groove and the pit of the (k-1) th signal recording layer were along the kth signal recording layer according to the inclination angle of the kth signal recording layer. Hold in state. That is, according to the inclination angle of the k-th signal recording layer, the (k-1) -th stamper 500 as shown in FIG. 15 (b) is placed on the surface opposite to the surface having the guide groove and pit.
  • a convex shape table that wraps around the table and a (k-1) stamper 500 as shown in Fig. 15 (d) and wraps the surface with the guide groove and pit
  • One of the concave shape maintaining table 1501 to be formed in such a shape is selected, and the (k-1) th stamper 500 is held.
  • a holding method there is a vacuum suction method, and a mechanical holding method such as a nail on the outer peripheral side.
  • the nozzle 1403 is inserted between the (k-1) stamp 500 and the k-th signal substrate 300, and the ultraviolet curable resin 3 for the adhesive layer is provided around the periphery of the k-th signal substrate 303. 07 is added dropwise.
  • the k-th signal substrate 306 is held on the table 309, and is dropped in a ring shape by rotating the table 309. Since the (k-1) th stamper 500 can be completely held by the shape maintaining table 1500, the distance from the kth signal substrate 360 can be made uniform in the radial direction.
  • the (k-1) th stamper 500 is rotated while maintaining its shape on the shape maintaining table 150. Due to this rotation, the ultraviolet curing resin for adhesive layer 307 spreads in the radial direction, and a uniform adhesive layer is formed between the (k ⁇ 1) st stamper 500 and the kth signal substrate 310. Then, while maintaining the shape of the (k-1) th stamper on the shape maintaining table 1500, the adhesive layer is hardened by ultraviolet rays, and peeling is performed as shown in FIG. The contact 6 10 and the handling means 6 12 in FIG. 6 are part of the peeling means. In FIG.
  • the nozzle 1403 is inserted between the k-th signal board 303 and the (k-1) th stamper 500 to dispose the ultraviolet curing resin for adhesive layer 307.
  • the ultraviolet curable resin for adhesive layer 307 may be dropped directly onto the (k-1) stamp with a nozzle, and then the kth signal substrate may be dropped from above. These two types of dropping methods can also be used in the step of FIG. 3 (c).
  • Embodiment 5 can be applied even when there is a (k-1) th separation layer.
  • the present embodiment can be applied to a method in which a pressure-sensitive adhesive is provided on the k-th signal substrate, and a material to be a transfer layer is dropped on the pressure-sensitive adhesive.
  • the method of changing the shape of the (k ⁇ 1) st stamper by the shape maintaining means according to the shape (warp) of the kth signal substrate having a plurality of signal recording layers has been described.
  • the shape of the k signal board may be changed.
  • changing the shape causes distortion of a plurality of signal recording layers. Therefore, it is considered preferable to change the shape of the (k ⁇ 1) st stamper.
  • the first (k-1) stamper made of plastic having a thickness of 1.1 mm is used. However, if it is made of plastic, the thickness may be 0.5 mm or more.
  • the thickness is 0.5 mm or more, it has high rigidity, so that the shape can be easily controlled by molding conditions even in the injection molding method, and it is easy to handle, which is suitable for improving productivity.
  • the metal (k-1) stamper need not be the plastic (k-1) stamper, but may be the metal one shown in the fourth embodiment.
  • the (k-1) th separation layer is made of two materials.
  • the (k-1) th separation layer may be made of three or more materials.
  • the explanation was made using the ultraviolet curing resin, but other thermosetting materials And other radiation-curable materials. Industrial applicability
  • the method for manufacturing a multilayer optical information recording medium comprises the steps of: forming the kth signal recording layer of the kth signal substrate; the guide groove or pit of the (k-11) stamper; The k-th signal recording layer of the k-th signal substrate, the guide groove or pit of the (k-1) -stamper, The distance between the guide groove and the surface having the pit can be made constant, and the thickness of the (k-1) th separation layer formed can be made uniform.

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Abstract

Une rainure de guidage de signaux est formée à l'aide d'un extracteur sur un substrat épais présentant des couches multiples réinscriptibles. Une couche de séparation est formée entre ce substrat et cet extracteur et une rainure de guidage de signaux est transférée de cet extracteur à la surface dudit substrat. A ce moment, étant donné que l'espace entre l'extracteur et le substrat n'est pas uniforme, cette couche de séparation présente une épaisseur irrégulière. La k-ième couche d'enregistrement de signaux (100) du k-ième substrat de signaux (103) est agencée le long de la surface présentant la rainure de guidage (105) de la (k-1)ième couche d'enregistrement de signaux sur le (k-1)ième extracteur (106). La (k-1)ième couche de séparation (107) est formée entre lesdites couches et le (k-1)ième extracteur (106) est retiré. L'espace entre la surface pourvue de la rainure de guidage (105) de la (k-1)ième couche d'enregistrement de signaux et la k-ième couche d'enregistrement de signaux (100) étant uniforme, il est possible d'obtenir une épaisseur uniforme de la (k-1)ième couche de séparation (107).
PCT/JP2003/002098 2002-03-27 2003-02-26 Procede de fabrication d'un support d'enregistrement d'informations optiques a couches multiples WO2003081584A1 (fr)

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JP2003579217A JPWO2003081584A1 (ja) 2002-03-27 2003-02-26 多層光情報記録媒体の製造方法
KR10-2004-7002695A KR20040090946A (ko) 2002-03-27 2003-02-26 다층 광정보 기록매체의 제조방법
EP03744978A EP1489609B1 (fr) 2002-03-27 2003-02-26 Procede de fabrication d'un support d'enregistrement d'informations optiques a couches multiples
DE60336050T DE60336050D1 (de) 2002-03-27 2003-02-26 Herstellungsverfahren für ein mehrschichtiges optisches informationsaufzeichnungsmedium
AU2003211304A AU2003211304A1 (en) 2002-03-27 2003-02-26 Multi-layered optical information recording medium manufacturing method
US10/486,764 US7497916B2 (en) 2002-03-27 2003-02-26 Method of manufacturing multilayer optical information recording medium
MXPA04001781A MXPA04001781A (es) 2002-03-27 2003-02-26 Metodo para fabricacion de medio de grabacion optica de informacion en capas multiples.

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JP2002-087841 2002-03-27

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AU (1) AU2003211304A1 (fr)
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JP4271246B2 (ja) * 2007-04-09 2009-06-03 株式会社デンソー 成形品の収縮による変形量を予測する方法およびその装置
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US9793481B2 (en) * 2008-10-01 2017-10-17 The Regents Of The University Of Michigan Patterning by stamped metal resist
EP2660851B1 (fr) 2009-03-18 2020-10-14 EV Group GmbH Dispositif et procédé de séparation d'une tranche de silicium à partir d'un support
EP2290679B1 (fr) 2009-09-01 2016-05-04 EV Group GmbH Dispositif et procédé de séparation d'un substrat de produit (par exemple, d'une tranche semi-conductrice) d'un substrat de support par déformation d'un film flexible monté sur un cadre
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US7497916B2 (en) 2009-03-03
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TWI265515B (en) 2006-11-01
KR20040090946A (ko) 2004-10-27
EP1489609A1 (fr) 2004-12-22
DE60336050D1 (de) 2011-03-31
US20040264359A1 (en) 2004-12-30
CN1269119C (zh) 2006-08-09
EP1489609B1 (fr) 2011-02-16
TW200307940A (en) 2003-12-16
JPWO2003081584A1 (ja) 2005-07-28
CN1545703A (zh) 2004-11-10

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