US20040149997A1 - Methods of forming electronic devices including semiconductor mesa structures and conductivity junctions and related devices - Google Patents

Methods of forming electronic devices including semiconductor mesa structures and conductivity junctions and related devices Download PDF

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US20040149997A1
US20040149997A1 US10/742,426 US74242603A US2004149997A1 US 20040149997 A1 US20040149997 A1 US 20040149997A1 US 74242603 A US74242603 A US 74242603A US 2004149997 A1 US2004149997 A1 US 2004149997A1
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mesa
semiconductor
substrate
junction
base layer
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Michael Bergman
David Emerson
Amber Abare
Kevin Haberern
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Wolfspeed Inc
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Assigned to CREE, INC. reassignment CREE, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HABERERN, KEVIN WARD, ABARE, AMBER CHRISTINE, BERGMAN, MICHAEL JOHN, EMERSON, DAVID TODD
Publication of US20040149997A1 publication Critical patent/US20040149997A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
    • H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223—Buried stripe structure
    • H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/17—Semiconductor lasers comprising special layers
    • H01S2301/176—Specific passivation layers on surfaces other than the emission facet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/021—Silicon based substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0425—Electrodes, e.g. characterised by the structure
    • H01S5/04254—Electrodes, e.g. characterised by the structure characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
    • H01S5/2206—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on III-V materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
    • H01S5/2214—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on oxides or nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching

Definitions

  • the present invention relates to the field of electronics, and more particularly, to methods of forming electronic. semiconductor devices and related structures.
  • a laser is a device that produces a beam of coherent monochromatic light as a result of stimulated emission of photons. Stimulated emission of photons may also produce optical gain, which may cause light beams produced by lasers to have a high optical energy.
  • a number of materials are capable of producing the lasing effect and include certain high-purity crystals (ruby is a common example), semiconductors, certain types of glass, certain gases including carbon dioxide, helium, argon and neon, and certain plasmas.
  • photonic devices include light-emitting diodes (LEDs), photodetectors, photovoltaic devices, and semiconductor lasers.
  • Semiconductor lasers are similar to other lasers in that the emitted radiation has spatial and temporal coherence. As noted above, laser radiation is highly monochromatic (i.e., of narrow band width) and it produces highly directional beams of light. Semiconductor lasers may differ, however, from other lasers in several respects. For example, in semiconductor lasers, the quantum transitions are associated with the band properties of materials; semiconductor lasers may be very compact in size, may have very narrow active regions, and larger divergence of the laser beam; the characteristics of a semiconductor laser may be strongly influenced by the properties of the junction medium; and for P-N junction lasers, the lasing action is produced by passing a forward current through the diode itself.
  • semiconductor lasers can provide very efficient systems that may be controlled by modulating the current directed across the devices. Additionally, because semiconductor lasers can have very short photon lifetimes, they may be used to produce high-frequency modulation. In turn, the compact size and capability for such high-frequency modulation may make semiconductor lasers an important light source for optical fiber communications.
  • the structure of a semiconductor laser should provide optical confinement to create a resonant cavity in which light amplification may occur, and electrical confinement to produce high current densities to cause stimulated emission to occur.
  • the semiconductor may be a direct bandgap material rather than an indirect bandgap material.
  • a direct bandgap material is one in which an electron's transition from the valence band to the conduction band does not require a change in crystal momentum for the electron.
  • Gallium arsenide and gallium nitride are examples of direct bandgap semiconductors.
  • In indirect bandgap semiconductors the alternative situation exists; i.e., a change of crystal momentum is required for an electron's transition between the valence and conduction bands.
  • Silicon and silicon carbide are examples of such indirect semiconductors.
  • the frequency of electromagnetic radiation i.e., the photons
  • the photons may be a function of the material's bandgap. Smaller bandgaps produce lower energy, longer wavelength photons, while wider bandgap materials produce higher energy, shorter wavelength photons.
  • one semiconductor commonly used for lasers is aluminum indium gallium phosphide (AlInGaP).
  • the light that AlInGaP can produce may be limited to the red portion of the visible spectrum, i.e., about 600 to 700 nanometers (nm).
  • semiconductor materials having relatively large bandgaps may be used.
  • Group III-nitride materials such as gallium nitride (GaN), the ternary alloys indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN) and aluminum indium nitride (AlInN) as well as the quaternary alloy aluminum gallium indium nitride (AlInGaN) are attractive candidate materials for blue and UV lasers because of their relatively high bandgap (3.36 eV at room temperature for GaN). Accordingly, Group III-nitride based laser diodes have been demonstrated that emit light in the 370-420 nm range.
  • a light emitting device may include a silicon carbide substrate, and a semiconductor structure on the substrate. More particularly, the semiconductor structure may include a mesa having a mesa base adjacent the substrate, a mesa surface opposite the substrate, and mesa sidewalls between the mesa surface and the mesa base. In addition, the semiconductor structure may have a first conductivity type adjacent the silicon carbide substrate, the semiconductor structure may have a second conductivity type adjacent the mesa surface, and the semiconductor structure may have a junction between the first and second conductivity types. Moreover, the mesa may be configured to provide at least one of current confinement or optical confinement for a light emitting device in the semiconductor structure.
  • the junction may be between the mesa base and the mesa surface.
  • the semiconductor structure may include a semiconductor base layer between the mesa base and the silicon carbide substrate and the junction may be between a surface of the base layer opposite the silicon carbide substrate and the silicon carbide substrate.
  • the semiconductor structure may include a Group III-V semiconductor material.
  • an electronic device may include a substrate and a semiconductor mesa on the substrate. More particularly, the semiconductor mesa may have a mesa base adjacent the substrate, a mesa surface opposite the substrate, and mesa sidewalls between the mesa surface and the mesa base. Moreover, the semiconductor mesa may have a first conductivity type between the mesa base and a junction, the junction may be between the mesa base and the mesa surface, and the semiconductor mesa may have a second conductivity type between the junction and the mesa surface.
  • the junction may comprise a physical location where doping of the second conductivity type begins, the first conductivity type may be N-type, and the second conductivity type may be P-type.
  • the semiconductor mesa may comprise a Group III-V semiconductor material such as a Group III-nitride semiconductor material.
  • the junction may be no more that approximately 5 microns from the mesa base, and more particularly, the junction may be no more than approximately 0.75 microns from the mesa base. Moreover, the junction may be at least approximately 0.05 microns from the mesa base, and more particularly, the junction may be at least approximately 0.1 microns from the mesa base.
  • the semiconductor mesa may have a thickness in the range of approximately 0.1 microns to 5 microns.
  • a semiconductor base layer may be included between the substrate and the semiconductor mesa, and the semiconductor base layer may have the first conductivity type throughout. More particularly, the semiconductor base layer may have a thickness no greater than approximately 5 microns, and each of the semiconductor base layer and the semiconductor mesa may comprise a Group III-V semiconductor material.
  • the substrate may comprise silicon carbide.
  • an electronic device may include a substrate, a semiconductor base layer on the substrate, and a semiconductor mesa on a surface of the base layer opposite the substrate.
  • the semiconductor base layer may have a first conductivity type between the substrate and a junction, the junction may be between the substrate and a surface of the base layer opposite the substrate, and the semiconductor base layer may have a second. conductivity type between the junction and the surface of the base layer opposite the substrate.
  • the semiconductor mesa may have a mesa surface opposite the semiconductor base layer and mesa sidewalls between the mesa surface and the base layer, and the semiconductor mesa may have the second conductivity type throughout.
  • the junction may be a physical location where doping of the second conductivity type begins, the first conductivity type may be N-type, and the second conductivity type may be P-type.
  • Each of the semiconductor mesa and the semiconductor base layer may comprise a Group III-V semiconductor material such as a Group III-nitride semiconductor material.
  • the junction may be no more that approximately 0.4 microns from the surface of the base layer opposite the substrate, and more particularly, the junction may be no more than approximately 0.2 microns from the surface of the base layer opposite the substrate. In addition, the junction may be at least approximately 0.05 microns from the surface of the base layer opposite the substrate, and more particularly, the junction may be at least approximately 0.1 microns from the surface of the base layer opposite the substrate. Moreover, the semiconductor mesa may have a thickness in the range of approximately 0.1 microns to 5 microns, the semiconductor base layer may have a thickness no greater than approximately 5 microns. In addition, the substrate may comprise silicon carbide.
  • methods of forming an electronic device may include forming a semiconductor mesa on a substrate.
  • the semiconductor mesa may have a mesa base adjacent the substrate, a mesa surface opposite the substrate, and mesa sidewalls between the mesa surface and the mesa base.
  • the semiconductor mesa may have a first conductivity type between the mesa base and a junction, the junction may be between the mesa base and the mesa surface, and the semiconductor mesa may have a second conductivity type between the junction and the mesa surface.
  • the junction may comprise a physical location where doping of the second conductivity type begins, the first conductivity type may be N-type, and the second conductivity type may be P-type.
  • the semiconductor mesa may comprise a Group III-V semiconductor material such as a Group III-nitride semiconductor material.
  • the junction may be no more that approximately 5 microns from the mesa base, and more particularly, the junction may be no more than approximately 0.75 microns from the mesa base. In addition, the junction may be at least approximately 0.05 microns from the mesa base, and more particularly, the junction may be at least approximately 0.1 microns from the mesa base.
  • the semiconductor mesa may have a thickness in the range of approximately 0.1 microns to 5 microns.
  • a semiconductor base layer may be formed between the substrate and the semiconductor mesa, and the semiconductor base layer may have the first conductivity type throughout. More particularly, forming the semiconductor mesa and forming the semiconductor base layer may include forming a layer of a semiconductor material on the substrate, forming a mask on the layer of the semiconductor material, and etching portions of layer of the semiconductor material exposed by the mask wherein a depth of etching defines a thickness of the mesa. The layer of the semiconductor material may also include a junction at a junction depth and wherein the depth of etching of the layer of the semiconductor material is greater than the junction depth.
  • the semiconductor base layer may have a thickness no greater than approximately 5 microns, and each of the semiconductor base layer and the semiconductor mesa may comprise a Group III-V semiconductor material.
  • the substrate may comprise silicon carbide.
  • methods of forming an electronic devices may include forming a semiconductor base layer on a substrate, and forming a semiconductor mesa of a surface of the base layer opposite the substrate.
  • the semiconductor base layer may have a first conductivity type between the substrate and a junction, the junction may be between the substrate and a surface of the base layer opposite the substrate, and the semiconductor base layer may have a second conductivity type between the junction and the surface of the base layer opposite the substrate.
  • the semiconductor mesa may have a mesa surface opposite the semiconductor base layer and mesa sidewalls between the mesa surface and the base layer, wherein the semiconductor mesa has the second conductivity type throughout.
  • the junction may include a physical location where doping of the second conductivity type begins, the first conductivity type may be N-type, and the second conductivity type may be P-type.
  • Each of the semiconductor mesa and the semiconductor base layer may comprises a Group III-V semiconductor material such as a Group III-nitride semiconductor material.
  • the junction is no more that approximately 0.4 microns from the surface of the base layer opposite the substrate, and more particularly, the junction may be no more than approximately 0.2 microns from the surface of the base layer opposite the substrate.
  • the junction may be at least approximately 0.05 microns from the surface of the base layer opposite the substrate, and more particularly, the junction may be at least approximately 0.1 microns from the surface of the base layer opposite the substrate.
  • the semiconductor mesa may have a thickness in the range of approximately 0.1 microns to 5 microns.
  • the semiconductor base layer may have a thickness no greater than approximately 5 microns, and the substrate may comprise silicon carbide.
  • forming the semiconductor mesa and forming the semiconductor base layer may include forming a layer of a semiconductor material on the substrate, forming a mask on the layer of the semiconductor material, and etching portions of layer of the semiconductor material exposed by the mask wherein a depth of etching defines a thickness of the mesa.
  • the semiconductor material may include a junction at a junction depth and wherein the depth of etching of the layer of the semiconductor material may be less than the junction depth.
  • FIG. 1 is a cross-sectional view illustrating semiconductor devices according to embodiments of the present invention.
  • FIG. 2 is a cross-sectional view illustrating semiconductor devices according to additional embodiments of the present invention.
  • FIG. 3 is a cross-sectional view illustrating semiconductor devices according to still additional embodiments of the present invention.
  • a semiconductor device may include a substrate 12 and an epitaxial semiconductor structure 14 including a semiconductor base layer 19 and a semiconductor mesa 20 on a portion of the base layer 19 .
  • the semiconductor mesa 20 may include a mesa surface 20 A opposite the base layer 19 , mesa sidewalls 20 B between the mesa surface 20 A and the base layer 19 , and a mesa base 20 C adjacent the base layer.
  • the device may also include a passivation layer 24 on the semiconductor base layer 19 and on portions of the semiconductor mesa 20 with portions of the mesa surface 20 A being free of the passivation layer 24 .
  • a first ohmic contact layer 26 may be provided on portions of the mesa surface 20 A free of the passivation layer, and a metal overlayer 28 may be provided on the passivation layer 24 and the ohmic contact layer 26 .
  • a second ohmic contact layer 27 may be provided on the substrate 12 opposite the semiconductor structure 14 to define an electrical current path through the mesa 20 , the semiconductor base layer 19 , and the substrate 12 .
  • a second ohmic contact layer may be provided on a same side of the substrate as the epitaxial semiconductor structure 14 so that current through the substrate 12 is not required.
  • the substrate 12 may included substrate material such as N-type silicon carbide having a polytype such as 2H, 4H, 6H, 8H, 15R, and/or 3C; sapphire; gallium nitride; and/or aluminum nitride.
  • the substrate 12 may be conductive to provide a “vertical” device having a “vertical” current flow through the epitaxial semiconductor structure 14 and the substrate 12 .
  • the substrate 12 may be insulating or semi-insulating where both ohmic contacts are provided on a same side of the substrate to provide a “horizontal” device.
  • a conductive substrate could also be used in a “horizontal” device.
  • the term substrate may be defined to include a non-patterned portion of the semiconductor material making up the semiconductor structure 14 , and/or there may not be a material transition between the substrate 12 and the semiconductor structure 14 .
  • Portions of the epitaxial semiconductor structure 14 may be patterned into a mesa stripe, for example, to provide optical and/or current confinement for a semiconductor laser device. As shown, only a portion of the epitaxial semiconductor structure 14 is included in the mesa 20 .
  • the epitaxial semiconductor structure 14 may include N-type and P-type layers and portions of one or both of the N-type and P-type layers may be included in the mesa 20 .
  • the epitaxial semiconductor structure 14 may include an N-type layer adjacent the substrate 12 and a P-type layer on the N-type layer opposite the substrate 12 .
  • the mesa may include portions of the P-type layer and none of the N-type layer.
  • the mesa may include all of the P-type layer and portions (but not all) of the N-type layer; or all of the P-type layer and all of the N-type layer (such that sidewalls of the mesa 20 extend to the substrate 12 ).
  • the semiconductor structure 14 may also include a junction between the N-type and P-type layers.
  • the junction for example, may be a structural junction defined as a physical location in the semiconductor structure 14 where P-type doping begins.
  • a structural junction and an actual electronic P-N junction may thus have different locations in the semiconductor structure 14 due to reactor effects, dopant incorporation rates, dopant activation rates, dopant diffusion, and/or other mechanisms.
  • the epitaxial semiconductor structure 14 may also include an active layer at the junction between the N-type layer and the P-type layer.
  • the active layer may include a number of different structures and/or layers and/or combinations thereof.
  • the active layer for example, may include single or multiple quantum wells, double heterostructures, and/or superlattices.
  • the active layer may also include light and/or current confinement layers that may encourage laser action in the device.
  • portions of the active layer may be included in the N-type layer and/or the P-type layer adjacent the junction therebetween. According to particular embodiments, the active layer may be included in the N-type layer adjacent the junction with the P-type layer.
  • a uniformly thick layer of epitaxial semiconductor material may be formed on the substrate 12 , and a layer of an ohmic contact material may be formed on the layer of the epitaxial semiconductor material.
  • the semiconductor mesa 20 and the ohmic contact layer 26 may be formed, for example, by selectively etching the layer of the contact material and the layer of the epitaxial semiconductor material using a same etch mask, using different etch masks, and/or using a lift-off technique. Methods of forming mesas, contact layers, and passivation layers are discussed, for example, in U.S. application Ser. No. ______ (Attorney Docket No. 5308-280), in U.S. application Ser. No. ______ (Attorney Docket No. 5308-281), and in U.S. application Ser. No. ______ (Attorney Docket No. 5308-282), the disclosures of which are hereby incorporated herein by reference.
  • Exposed portions of the epitaxial semiconductor material can be removed using a dry etch such as a Reactive Ion Etch (RIE), an Electron Cyclotron Resonance (ECR) plasma etch, and/or an Inductively Coupled Plasma (ICP) etch. More particularly, the epitaxial semiconductor layer can be etched using a dry etch in an Argon (Ar) environment with a chlorine (Cl 2 ) etchant.
  • RIE Reactive Ion Etch
  • ECR Electron Cyclotron Resonance
  • ICP Inductively Coupled Plasma
  • argon can flow at a rate in the range of approximately 2 to 40 sccm and chlorine can flow at a rate in the range of approximately 5 to 50 sccm in an RIE reactor at a pressure in the range of approximately 5 to 50 mTorr and at an RF power in the range of approximately 200 to 1000 W.
  • etch parameters are provided by way of example, and other etch parameters may be used.
  • thicknesses of the semiconductor base layer 19 and the semiconductor mesa 20 and a distance of a conductivity junction from the mesa base may be determined by an original thickness of the semiconductor layer from which the base layer and mesa are patterned, an original depth of the junction in the semiconductor layer, and a depth of an etch used to form the semiconductor mesa 20 .
  • the mesa etch depth (and resulting mesa thickness) may be in the range of approximately 0.1 to 5 microns, and according to additional embodiments may be no greater than approximately 2.5 microns.
  • a width of the mesa surface 20 A between mesa sidewalls 20 B may be in the range of approximately 1 to 3 microns, and a distance D substrate from the mesa base 20 C to the substrate can be in the range of approximately 0 to 4.9 microns.
  • the distance D substrate is also a measure of the thickness of the semiconductor base layer 19 .
  • the mesa surface 20 A may be a P-type semiconductor material.
  • the location of the junction in the semiconductor base layer 19 or the semiconductor mesa 20 can be determined by an original depth of the conductivity junction in the semiconductor layer from which the base layer and mesa are patterned. If the etch depth of the etch used to form the semiconductor mesa 20 is greater than a depth of the junction in the semiconductor layer, the junction can be in included in the resulting semiconductor mesa 20 . In an alternative, if the etch depth of the etch used to form the semiconductor mesa 20 is less than a depth of the junction in the semiconductor layer, the junction can be included in the semiconductor base layer 19 .
  • the semiconductor mesa 20 may be formed such that the structural junction between N-type and P-type layers is included in the semiconductor base layer 19 spaced from the mesa base 20 C by a distance of no more than approximately 0.4 microns, and more particularly, by a distance of no more than approximately 0.2 microns.
  • the structural junction in the semiconductor base layer 19 outside the semiconductor mesa 20 beam quality, stability, and/or voltage characteristics for a resulting semiconductor laser may be improved.
  • the semiconductor mesa 20 may be formed such that the structural junction between N-type and P-type layers is included in the semiconductor mesa 20 spaced from the mesa base 20 C by a distance of no more than approximately 5 microns, and more particularly, by a distance of no more than approximately 0.75 microns.
  • a resulting semiconductor laser may provide stronger guiding and/or improved operating current characteristics.
  • a semiconductor device may include a substrate 112 and an epitaxial semiconductor structure 114 including a semiconductor base layer 119 and a semiconductor mesa 120 on a portion of the base layer 119 .
  • the semiconductor mesa 120 may include a mesa surface 120 A opposite the base layer 119 , mesa sidewalls 120 B between the mesa surface 120 A and the base layer 119 , and a mesa base 120 C adjacent the base layer.
  • the device may also include a passivation layer 124 on the semiconductor base layer 119 and on portions of the semiconductor mesa 120 with portions of the mesa surface 120 A being free of the passivation layer 124 .
  • a first ohmic contact layer 126 may be provided on portions of the mesa surface 120 A free of the passivation layer, and a metal overlayer 128 may be provided on the passivation layer 124 and the ohmic contact layer 126 .
  • a second ohmic contact layer 127 may be provided on the substrate 112 opposite the semiconductor structure 114 to define an electrical current path through the mesa 120 , the semiconductor base layer 119 , and the substrate 112 .
  • a second ohmic contact layer may be provided on a same side of the substrate as the epitaxial semiconductor structure 114 so that current through the substrate 112 is not required.
  • the substrate 112 may include a substrate material such as N-type silicon carbide having a polytype such as 2H, 4H, 6H, 8H, 15R, and/or 3C; sapphire; gallium nitride; and/or aluminum nitride.
  • the substrate 112 may be conductive to provide a “vertical” device having a “vertical” current flow through the epitaxial semiconductor structure 114 and the substrate 112 .
  • the substrate 112 may be insulating or semi-insulating where both ohmic contacts are provided on a same side of the substrate to provide a “horizontal” device.
  • a conductive substrate could also be used in a “horizontal” device.
  • the term substrate may be defined to include a non-patterned portion of the semiconductor material making up the semiconductor structure 114 , and/or there may not be a material transition between the substrate 112 and the semiconductor structure 114 .
  • Portions of the epitaxial semiconductor structure 114 may be patterned into a mesa stripe, for example, to provide optical and/or current confinement for a semiconductor laser device. As shown, only a portion of the epitaxial semiconductor structure 114 is included in the mesa 120 , and the remainder of the epitaxial semiconductor structure 114 is included in the semiconductor base layer 119 . More particularly, the epitaxial semiconductor structure 114 may include an N-type layer 115 , all of which is included in the semiconductor base layer 119 adjacent the substrate 112 . The epitaxial semiconductor structure 114 may also include a P-type layer (including portions 117 ′ and 117 ′′) with a junction 122 between the N-type and P-type layers.
  • junction 122 may be a structural junction defined as a location where P-type doping begins.
  • a structural junction and an actual electronic P-N junction may thus have different locations in the semiconductor structure 114 due to reactor effects, dopant incorporation rates, dopant activation rates, dopant diffusion, and/or other mechanisms.
  • a first portion 117 ′ of the P-type layer is included in the semiconductor base layer 119
  • a second portion 117 ′′ of the P-type layer is included in the semiconductor mesa 120
  • a thickness of the first portion 117 ′ of the P-type layer is the same as the distance (labeled D′ junction ) from the mesa base 120 C to the junction 122 in the semiconductor base layer 119
  • the thickness of the second portion 117 ′′ of the P-type layer (labeled T′) is the same as the thickness of the semiconductor mesa 120
  • a distance D′ substrate between the mesa base 120 C and the substrate 112 is the same as a thickness of the semiconductor base layer 119
  • a thickness of the N-type layer 115 may be equal to a difference of D′ substrate minus D′ junction .
  • the semiconductor mesa 120 may be formed such that the junction 122 between N-type and P-type layers is included in the semiconductor base layer 119 spaced from the mesa base 120 C by a distance D′ junction of no more than approximately 0.4 microns, and more particularly, by a distance of no more than approximately 0.2 microns.
  • the junction 122 may be included in the semiconductor base layer 119 spaced from the mesa base 120 C by a distance D′ junction of at least approximately 0.05 microns, and more particularly, the junction 122 may be included in the semiconductor base layer 119 spaced from the mesa base 120 C by a distance D′ junction of at least approximately 0.1 microns.
  • the epitaxial semiconductor structure 114 may also include an active layer at the junction 122 between the N-type layer and the P-type layer.
  • the active layer may include a number of different structures and/or layers and/or combinations thereof.
  • the active layer for example, may include single or multiple quantum wells, double heterostructures, and/or superlattices.
  • the active layer may also include light and/or current confinement layers that may encourage laser action in the device.
  • portions of the active layer may he included in the N-type layer and/or the P-type layer adjacent the junction therebetween. According to particular embodiments, the active layer may be included in the N-type layer 115 adjacent the junction 122 with the P-type layer.
  • a uniformly thick layer of epitaxial semiconductor material may be formed on the substrate 112 , and a layer of an ohmic contact material may be formed on the layer of the epitaxial semiconductor material.
  • the semiconductor mesa 120 and the ohmic contact layer 126 may be formed, for example, by selectively etching the layer of the contact material and the layer of the epitaxial semiconductor material using a same etch mask, using different etch masks, and/or using a lift-off technique. Methods of forming mesas, contact layers, and passivation layers are discussed, for example, in U.S. application Ser. No. ______ (Attorney Docket No. 5308-280), in U.S. application Ser. No. ______ (Attorney Docket No. 5308-281), and in U.S. application Ser. No. ______ (Attorney Docket No. 5308-282), the disclosures of which are hereby incorporated herein by reference.
  • Exposed portions of the epitaxial semiconductor material can be removed using a dry etch such as a Reactive Ion Etch (RIE), an Electron Cyclotron Resonance (ECR) plasma etch, and/or an Inductively Coupled Plasma (ICP) etch. More particularly, the epitaxial semiconductor layer can be etched using a dry etch in an Argon (Ar) environment with a chlorine (Cl 2 ) etchant.
  • RIE Reactive Ion Etch
  • ECR Electron Cyclotron Resonance
  • ICP Inductively Coupled Plasma
  • argon can flow at a rate in the range of approximately 2 to 40 sccm and chlorine can flow at a rate in the range of approximately 5 to 50 sccm in an RIE reactor at a pressure in the range of approximately 5 to 50 mTorr and at an RF power in the range of approximately 200 to 1000 W.
  • etch parameters are provided by way of example, and other etch parameters may be used.
  • thicknesses of the semiconductor base layer 119 and the semiconductor mesa 120 and the distance D′ junction of the junction 112 from the mesa base 120 C may be determined by an original thickness of the semiconductor layer from which the base layer 119 and mesa 120 are patterned, an original depth of the conductivity junction 122 in the semiconductor layer, and a depth of an etch used to form the semiconductor mesa 120 .
  • the mesa etch depth (and resulting mesa thickness T′) may be in the range of approximately 0.1 to 5 microns, and according to additional embodiments may be no greater than approximately 2.5 microns.
  • a width of the mesa surface 120 A between mesa sidewalls 120 B may be in the range of approximately 1 to 3 microns, and a distance D substrate from the mesa base 120 C to the substrate can be in the range of approximately 0 to 4.9 microns.
  • the distance D substrate is also a measure of the thickness of the semiconductor base layer 119 .
  • the mesa surface 120 A may be a P-type semiconductor material.
  • the location of the junction 122 in the semiconductor base layer 119 can be determined by an original depth (T′+D′ junction ) of the junction in the semiconductor layer from which the base layer and mesa are patterned and an etch depth T′ used to form the mesa 120 .
  • the etch depth T′ of the etch used to form the semiconductor mesa 120 can be less than the depth of the junction in the semiconductor layer so that the junction 122 is included in the semiconductor base layer 119 .
  • a semiconductor device may include a substrate 212 and an epitaxial semiconductor structure 214 including a semiconductor base layer 219 and a semiconductor mesa 220 on a portion of the base layer 219 .
  • the semiconductor mesa 220 may include a mesa surface 220 A opposite the base layer 219 , mesa sidewalls 220 B between the mesa surface 220 A and the base layer 219 , and a mesa base 220 C adjacent the base layer.
  • the device may also include a passivation layer 224 on the semiconductor base layer 219 and on portions of the semiconductor mesa 220 with portions of the mesa surface 220 A being free of the passivation layer 224 .
  • a first ohmic contact layer 226 may be provided on portions of the mesa surface 220 A free of the passivation layer, and a metal overlayer 228 may be provided on the passivation layer 224 and the ohmic contact layer 226 .
  • a second ohmic contact layer 227 may be provided on the substrate 212 opposite the semiconductor structure 214 to define an electrical current path through the mesa 220 , the semiconductor base layer 219 , and the substrate 212 .
  • a second ohmic contact layer may be provide on a same side of the substrate as the epitaxial semiconductor structure 214 so that current through the substrate 212 is not required.
  • the substrate 212 may include a substrate material such as N-type silicon carbide having a polytype such as 2H, 4H, 6H, 8H, 15R, and/or 3C; sapphire; gallium nitride; and/or aluminum nitride.
  • the substrate 212 may be conductive to provide a “vertical” device having a “vertical” current flow through the epitaxial semiconductor structure 214 and the substrate 212 .
  • the substrate 212 may be insulating or semi-insulating where both ohmic contacts are provided on a same side of the substrate to provide a “horizontal” device.
  • a conductive substrate could also be used in a “horizontal” device.
  • the term substrate may be defined to include a non-patterned portion of the semiconductor material making up the semiconductor structure 214 , and/or there may not be a material transition between the substrate 212 and the semiconductor structure 214 .
  • Portions of the epitaxial semiconductor structure 214 may be patterned into a mesa stripe, for example, to provide optical and/or current confinement for a semiconductor laser device. As shown, only a portion of the epitaxial semiconductor structure 214 is included in the mesa 220 , and the remainder of the epitaxial semiconductor structure 214 is included in the semiconductor base layer 219 . More particularly, the epitaxial semiconductor structure 214 may include a P-type layer 217 , all of which is included in the semiconductor mesa 220 adjacent the mesa surface 220 A. The epitaxial semiconductor structure 214 may also include an N-type layer (including portions 215 ′ and 215 ′′) with a junction 222 between the P-type layer and the N-type layer.
  • the junction 222 may be a structural junction defined as a location where P-type doping begins.
  • a structural junction and an actual electronic P-N junction may thus have different locations in the semiconductor structure 114 due to reactor effects, dopant incorporation rates, dopant activation rates, dopant diffusion, and/or other mechanisms.
  • a first portion 215 ′ of the N-type layer is included in the semiconductor base layer 219
  • a second portion 215 ′′ of the N-type layer is included in the semiconductor mesa 220
  • a thickness of the first portion 215 ′ of the N-type layer is the same as the distance (labeled D′′ substrate ) from the mesa base 220 C to the substrate 212
  • the thickness of the second portion 215 ′′ of the N-type layer (labeled D′′ junction ) is the same as the distance from the mesa base 220 C to the junction between the N-type and P-type layers.
  • the thickness of the semiconductor mesa is labeled T′′.
  • a thickness of the P-type layer 217 may be equal to a difference of the mesa thickness T′′ minus D′′ junction .
  • the semiconductor mesa 220 may be formed such that the junction 222 between N-type and P-type layers is included in the mesa 220 spaced apart from the mesa base 220 C by a distance D′′junction of no more than approximately 5 microns, and more particularly, by a distance of no more than approximately 0.75 microns.
  • the junction 222 may be included in the semiconductor mesa 220 spaced from the mesa base 220 C by a distance D′′ junction of at least approximately 0.05 microns, and more particularly, the junction 222 may be included in the semiconductor mesa 220 spaced from the mesa base 220 C by a distance D′′ junction of at least approximately 0.1 microns.
  • the epitaxial semiconductor structure 214 may also include an active layer at the junction between the N-type layer and the P-type layer.
  • the active layer may include a number of different structures and/or layers and/or combinations thereof.
  • the active layer for example, may include single or multiple quantum wells, double heterostructures, and/or superlattices.
  • the active layer may also include light and/or current confinement layers that may encourage laser action in the device.
  • portions of the active layer may be included in the N-type layer and/or the P-type layer adjacent the junction therebetween. According to particular embodiments, the active layer may be included in the second portion 215 ′′ of the N-type layer adjacent the junction 222 with the P-type layer 217 .
  • a uniformly thick layer of epitaxial semiconductor material may be formed on the substrate 212 , and a layer of an ohmic contact material may be formed on the layer of the epitaxial semiconductor material.
  • the semiconductor mesa 220 and the ohmic contact layer 226 may be formed, for example, by selectively etching the layer of the contact material and the layer of the epitaxial semiconductor material using a same etch mask, using different etch masks, and/or using a lift-off technique. Methods of forming mesas, contact layers, and passivation layers are discussed, for example, in U.S. application Ser. No. ______ (Attorney Docket No. 5308-280), in U.S. application Ser. No. ______ (Attorney Docket No. 5308-281), and in U.S. application Ser. No. ______ (Attorney Docket No. 5308-282), the disclosures of which are hereby incorporated herein by reference.
  • Exposed portions of the epitaxial semiconductor material can be removed using a dry etch such as a Reactive Ion Etch (RIE), an Electron Cyclotron Resonance (ECR) plasma etch, and/or an Inductively Coupled Plasma (ICP) etch. More particularly, the epitaxial semiconductor layer can be etched using a dry etch in an Argon (Ar) environment with a chlorine (Cl 2 ) etchant.
  • RIE Reactive Ion Etch
  • ECR Electron Cyclotron Resonance
  • ICP Inductively Coupled Plasma
  • argon can flow at a rate in the range of approximately 2 to 40 sccm and chlorine can flow at a rate in the range of approximately 5 to 50 sccm in an RIE reactor at a pressure in the range of approximately 5 to 50 mTorr and at an RF power in the range of approximately 200 to 1000 W.
  • etch parameters are provided by way of example, and other etch parameters may be used.
  • thicknesses of the semiconductor base layer 219 and the semiconductor mesa 220 and a distance D′′ junction of a junction from the mesa base 220 C may be determined by an original thickness of the semiconductor layer from which the base layer 219 and mesa 220 are patterned, an original depth of the junction in the semiconductor layer, and a depth of an etch used to form the semiconductor mesa 220 .
  • the mesa etch depth (and resulting mesa thickness T′′) may be in the range of approximately 0.1 to 5 microns, and according to additional embodiments may be no greater than approximately 2.5 microns.
  • a width of the mesa surface 220 A between mesa sidewalls 220 B may be in the range of approximately 1 to 3 microns, and a distance D substrate from the mesa base 220 C to the substrate can be in the range of approximately 0 to 4.9 microns.
  • the distance D substrate is also a measure of the thickness of the semiconductor base layer 219 .
  • the mesa surface 220 A may be a P-type semiconductor material.
  • the location of the junction 222 in the semiconductor mesa 220 can be determined by an original depth (T′′ ⁇ D′′ junction ) of the junction in the semiconductor layer from which the base layer 219 and mesa 220 are patterned and an etch depth used to form the mesa 220 .
  • the etch depth T′′ of the etch used to form the semiconductor mesa 220 can be greater than a depth of the junction in the semiconductor layer so that the junction can be included in the semiconductor base layer 219 .
  • the resulting semiconductor devices may provide edge emitting semiconductor lasers with light being emitted parallel to the substrate along a lengthwise direction of a semiconductor mesa stripe. Stated in other words, the light may be emitted along a direction perpendicular to the cross section of the Figures discussed above. While methods and devices have been discussed with reference to methods of forming light emitting devices such as laser diodes, methods according to embodiments of the present invention may be used to form other semiconductor devices such as conventional diodes, conventional light emitting diodes, or any other semiconductor device including a semiconductor mesa.

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