TWI304415B - Epoxy resin compositions, solid state devices encapsulated therewith and method - Google Patents
Epoxy resin compositions, solid state devices encapsulated therewith and method Download PDFInfo
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- TWI304415B TWI304415B TW92127812A TW92127812A TWI304415B TW I304415 B TWI304415 B TW I304415B TW 92127812 A TW92127812 A TW 92127812A TW 92127812 A TW92127812 A TW 92127812A TW I304415 B TWI304415 B TW I304415B
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- epoxy resin
- resin
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- 239000003822 epoxy resin Substances 0.000 title claims abstract description 69
- 229920000647 polyepoxide Polymers 0.000 title claims abstract description 69
- 239000000203 mixture Substances 0.000 title claims abstract description 56
- 239000007787 solid Substances 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims description 8
- 239000004094 surface-active agent Substances 0.000 claims abstract description 39
- 239000003054 catalyst Substances 0.000 claims abstract description 29
- 239000008393 encapsulating agent Substances 0.000 claims abstract description 22
- 150000008064 anhydrides Chemical class 0.000 claims abstract description 20
- -1 polysiloxane Polymers 0.000 claims description 53
- 229920005989 resin Polymers 0.000 claims description 38
- 239000011347 resin Substances 0.000 claims description 38
- 239000004848 polyfunctional curative Substances 0.000 claims description 22
- 239000004593 Epoxy Substances 0.000 claims description 19
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 claims description 4
- 239000012963 UV stabilizer Substances 0.000 claims description 3
- 239000013543 active substance Substances 0.000 claims description 3
- 239000003017 thermal stabilizer Substances 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims description 2
- CHJMFFKHPHCQIJ-UHFFFAOYSA-L zinc;octanoate Chemical compound [Zn+2].CCCCCCCC([O-])=O.CCCCCCCC([O-])=O CHJMFFKHPHCQIJ-UHFFFAOYSA-L 0.000 claims description 2
- FKBMTBAXDISZGN-UHFFFAOYSA-N 5-methyl-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1C(C)CCC2C(=O)OC(=O)C12 FKBMTBAXDISZGN-UHFFFAOYSA-N 0.000 claims 2
- KFVPJMZRRXCXAO-UHFFFAOYSA-N [He].[O] Chemical compound [He].[O] KFVPJMZRRXCXAO-UHFFFAOYSA-N 0.000 claims 1
- 239000012760 heat stabilizer Substances 0.000 claims 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 claims 1
- 229920000137 polyphosphoric acid Polymers 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 abstract description 14
- 239000011342 resin composition Substances 0.000 abstract description 2
- 229920002050 silicone resin Polymers 0.000 abstract description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 description 29
- 239000000463 material Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 11
- 239000003607 modifier Substances 0.000 description 11
- 230000009477 glass transition Effects 0.000 description 8
- 239000003381 stabilizer Substances 0.000 description 8
- 239000007822 coupling agent Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 150000002989 phenols Chemical class 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- 241000208340 Araliaceae Species 0.000 description 5
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 5
- 235000003140 Panax quinquefolius Nutrition 0.000 description 5
- 229920002675 Polyoxyl Polymers 0.000 description 5
- 125000003118 aryl group Chemical group 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 5
- 235000008434 ginseng Nutrition 0.000 description 5
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 5
- 239000004615 ingredient Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052684 Cerium Inorganic materials 0.000 description 4
- 206010016654 Fibrosis Diseases 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000003963 antioxidant agent Substances 0.000 description 4
- 235000006708 antioxidants Nutrition 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 4
- 230000007882 cirrhosis Effects 0.000 description 4
- 208000019425 cirrhosis of liver Diseases 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 239000011353 cycloaliphatic epoxy resin Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 239000002105 nanoparticle Substances 0.000 description 4
- 239000005022 packaging material Substances 0.000 description 4
- HVLLSGMXQDNUAL-UHFFFAOYSA-N triphenyl phosphite Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)OC1=CC=CC=C1 HVLLSGMXQDNUAL-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 230000003078 antioxidant effect Effects 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- 239000002775 capsule Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 210000004185 liver Anatomy 0.000 description 3
- 239000008267 milk Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 230000005693 optoelectronics Effects 0.000 description 3
- 150000002923 oximes Chemical class 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- AQSJGOWTSHOLKH-UHFFFAOYSA-N phosphite(3-) Chemical class [O-]P([O-])[O-] AQSJGOWTSHOLKH-UHFFFAOYSA-N 0.000 description 3
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000003229 sclerosing agent Substances 0.000 description 3
- 239000000565 sealant Substances 0.000 description 3
- KSBAEPSJVUENNK-UHFFFAOYSA-L tin(ii) 2-ethylhexanoate Chemical compound [Sn+2].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O KSBAEPSJVUENNK-UHFFFAOYSA-L 0.000 description 3
- LNOLJFCCYQZFBQ-BUHFOSPRSA-N (ne)-n-[(4-nitrophenyl)-phenylmethylidene]hydroxylamine Chemical compound C=1C=C([N+]([O-])=O)C=CC=1C(=N/O)/C1=CC=CC=C1 LNOLJFCCYQZFBQ-BUHFOSPRSA-N 0.000 description 2
- OBETXYAYXDNJHR-UHFFFAOYSA-N 2-Ethylhexanoic acid Chemical compound CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000004844 aliphatic epoxy resin Substances 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000007859 condensation product Substances 0.000 description 2
- UZILCZKGXMQEQR-UHFFFAOYSA-N decyl-Benzene Chemical compound CCCCCCCCCCC1=CC=CC=C1 UZILCZKGXMQEQR-UHFFFAOYSA-N 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- ZJIPHXXDPROMEF-UHFFFAOYSA-N dihydroxyphosphanyl dihydrogen phosphite Chemical compound OP(O)OP(O)O ZJIPHXXDPROMEF-UHFFFAOYSA-N 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 2
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 2
- NUHSROFQTUXZQQ-UHFFFAOYSA-N isopentenyl diphosphate Chemical compound CC(=C)CCO[P@](O)(=O)OP(O)(O)=O NUHSROFQTUXZQQ-UHFFFAOYSA-N 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 235000013336 milk Nutrition 0.000 description 2
- 210000004080 milk Anatomy 0.000 description 2
- YCWSUKQGVSGXJO-NTUHNPAUSA-N nifuroxazide Chemical group C1=CC(O)=CC=C1C(=O)N\N=C\C1=CC=C([N+]([O-])=O)O1 YCWSUKQGVSGXJO-NTUHNPAUSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 150000004714 phosphonium salts Chemical class 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000005077 polysulfide Substances 0.000 description 2
- 229920001021 polysulfide Polymers 0.000 description 2
- 150000008117 polysulfides Polymers 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 125000003396 thiol group Chemical group [H]S* 0.000 description 2
- 125000005409 triarylsulfonium group Chemical group 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- GVJHHUAWPYXKBD-IEOSBIPESA-N α-tocopherol Chemical compound OC1=C(C)C(C)=C2O[C@@](CCC[C@H](C)CCC[C@H](C)CCCC(C)C)(C)CCC2=C1C GVJHHUAWPYXKBD-IEOSBIPESA-N 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical compound C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- REPVLJRCJUVQFA-UHFFFAOYSA-N (-)-isopinocampheol Natural products C1C(O)C(C)C2C(C)(C)C1C2 REPVLJRCJUVQFA-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 1
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- BTEIWWXAPYLKDK-UHFFFAOYSA-N 1,1-diphenyldecylbenzene Chemical compound CCCCCCCCCC(c1ccccc1)(c1ccccc1)c1ccccc1 BTEIWWXAPYLKDK-UHFFFAOYSA-N 0.000 description 1
- XFNJYAKDBJUJAJ-UHFFFAOYSA-N 1,2-dibromopropane Chemical compound CC(Br)CBr XFNJYAKDBJUJAJ-UHFFFAOYSA-N 0.000 description 1
- LLZHXQRNOOAOFF-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione;zinc Chemical compound [Zn].C1=CC=C2NC(S)=NC2=C1 LLZHXQRNOOAOFF-UHFFFAOYSA-N 0.000 description 1
- LKDWMQZIDRHCAT-UHFFFAOYSA-N 1-(3,3-dimethylbutyl)-2,2-dimethylpiperidine Chemical compound CC(C)(CCN1CCCCC1(C)C)C LKDWMQZIDRHCAT-UHFFFAOYSA-N 0.000 description 1
- LTSWUFKUZPPYEG-UHFFFAOYSA-N 1-decoxydecane Chemical compound CCCCCCCCCCOCCCCCCCCCC LTSWUFKUZPPYEG-UHFFFAOYSA-N 0.000 description 1
- OMMGZSUKFYZRCV-UHFFFAOYSA-N 1-decylperoxydecane Chemical compound CCCCCCCCCCOOCCCCCCCCCC OMMGZSUKFYZRCV-UHFFFAOYSA-N 0.000 description 1
- LHNRHYOMDUJLLM-UHFFFAOYSA-N 1-hexylsulfanylhexane Chemical compound CCCCCCSCCCCCC LHNRHYOMDUJLLM-UHFFFAOYSA-N 0.000 description 1
- ZFSIWFDVEOUXML-UHFFFAOYSA-N 1-methyl-1,2,3,4-tetrahydroanthracene Chemical compound C1=CC=C2C=C3C(C)CCCC3=CC2=C1 ZFSIWFDVEOUXML-UHFFFAOYSA-N 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- JECYNCQXXKQDJN-UHFFFAOYSA-N 2-(2-methylhexan-2-yloxymethyl)oxirane Chemical compound CCCCC(C)(C)OCC1CO1 JECYNCQXXKQDJN-UHFFFAOYSA-N 0.000 description 1
- SSBBTCLDTXVJGT-UHFFFAOYSA-N 2-(2-propoxy-1,4-dioxan-2-yl)-7-oxabicyclo[4.1.0]heptane Chemical compound C(CC)OC1(OCCOC1)C1C2C(CCC1)O2 SSBBTCLDTXVJGT-UHFFFAOYSA-N 0.000 description 1
- SEFYJVFBMNOLBK-UHFFFAOYSA-N 2-[2-[2-(oxiran-2-ylmethoxy)ethoxy]ethoxymethyl]oxirane Chemical compound C1OC1COCCOCCOCC1CO1 SEFYJVFBMNOLBK-UHFFFAOYSA-N 0.000 description 1
- LUSCNZBJFBNVDT-UHFFFAOYSA-N 2-[[1-(oxiran-2-ylmethoxy)cyclohexyl]oxymethyl]oxirane Chemical compound C1OC1COC1(OCC2OC2)CCCCC1 LUSCNZBJFBNVDT-UHFFFAOYSA-N 0.000 description 1
- BPEQDTTUKAJORX-UHFFFAOYSA-N 2-methyl-3-(3-methyloxiran-2-yl)oxyoxirane Chemical compound CC1OC1OC1C(C)O1 BPEQDTTUKAJORX-UHFFFAOYSA-N 0.000 description 1
- HAPXCVYKFSWMNS-UHFFFAOYSA-N 2-methyl-3-(oxiran-2-yl)oxirane Chemical compound CC1OC1C1OC1 HAPXCVYKFSWMNS-UHFFFAOYSA-N 0.000 description 1
- WUKUJFNYTULCOP-UHFFFAOYSA-N 4-propyl-7-oxabicyclo[4.1.0]heptane Chemical compound C1C(CCC)CCC2OC21 WUKUJFNYTULCOP-UHFFFAOYSA-N 0.000 description 1
- RBHIUNHSNSQJNG-UHFFFAOYSA-N 6-methyl-3-(2-methyloxiran-2-yl)-7-oxabicyclo[4.1.0]heptane Chemical compound C1CC2(C)OC2CC1C1(C)CO1 RBHIUNHSNSQJNG-UHFFFAOYSA-N 0.000 description 1
- 229920003319 Araldite® Polymers 0.000 description 1
- ADAHGVUHKDNLEB-UHFFFAOYSA-N Bis(2,3-epoxycyclopentyl)ether Chemical compound C1CC2OC2C1OC1CCC2OC21 ADAHGVUHKDNLEB-UHFFFAOYSA-N 0.000 description 1
- 241000167854 Bourreria succulenta Species 0.000 description 1
- 239000004322 Butylated hydroxytoluene Substances 0.000 description 1
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 1
- 229910004613 CdTe Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- OYHQOLUKZRVURQ-HZJYTTRNSA-N Linoleic acid Chemical compound CCCCC\C=C/C\C=C/CCCCCCCC(O)=O OYHQOLUKZRVURQ-HZJYTTRNSA-N 0.000 description 1
- AZDHKNRYXNAYPK-UHFFFAOYSA-N OCCN1C(CC(CC1(C)C)O)(C)C.NN Chemical compound OCCN1C(CC(CC1(C)C)O)(C)C.NN AZDHKNRYXNAYPK-UHFFFAOYSA-N 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- DHXVGJBLRPWPCS-UHFFFAOYSA-N Tetrahydropyran Chemical compound C1CCOCC1 DHXVGJBLRPWPCS-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- WNLRTRBMVRJNCN-UHFFFAOYSA-L adipate(2-) Chemical compound [O-]C(=O)CCCCC([O-])=O WNLRTRBMVRJNCN-UHFFFAOYSA-L 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 229940087168 alpha tocopherol Drugs 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000012296 anti-solvent Substances 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
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Classifications
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- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
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- C08G59/4284—Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof together with other curing agents
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- C08L83/04—Polysiloxanes
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- C08G77/045—Polysiloxanes containing less than 25 silicon atoms
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- C08G77/12—Polysiloxanes containing silicon bound to hydrogen
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- C—CHEMISTRY; METALLURGY
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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Description
1304415 玖、發明說明: 【發明所屬之技術領域】 、本1明係有關環氧樹脂組合物及以該環氧樹脂組合物囊 子之固怨裝置。本發明亦係關於一種囊封固態裝置之方法。、 【先前技術】 固態裝置偶爾稱作為半導體裝置或光電子裝置,固態裝. 2包含發光二極體(LEDs)、電荷耦合裝置(CCDs)、大型積· 迁私路(LSIs)、光一極體、直穴式表面發射雷射(vcsels)、 光電晶體、光耦合器、光電子耦合器等。此等裝置常具有儀嶋 特殊封裝需求。高效率高流明之固態白LEDs需要新穎封裝 材料,該LEDs比典型低強度長波長LEDs需要忍受更為苛刻 的條件。常用封裝材料經常由於熱、氧化、以及光分解等 作用的組合而逐漸喪失其光性質及機械性質。 如此持續需要有固態裝置用之新穎封裝材料,此等封裝 材料較佳具有下列性質,例如於近紫外光至可見光波長有 高透射率、長期熱安定性、氧化安定性、紫外光安定性、 熱隨形性、耐水性、透明度、耐裂性、可拋光特性、與用 於封裝固態裝置之其它材料相容且具有低度色彩以及高反_ · 射率。 ' 【發明内容】 發明人發現可硬化樹脂組合物理想適合用於囊封固態裝 置(例如發光二極體)。一具體實施例中,本發明係關於—種 用於囊封一固態裝置之可硬化環氧樹脂組合物,該組合物 包含(A)至少一種聚矽氧樹脂、(B)至少一種環氧樹脂、(c) 88371 1304415 :w、^更化劑、⑼至少—财氧燒界面活性劑以及(E) 一種輔助硬化催化劑。 本發明之另_呈麵舍、 “η例中,提供—種經封裝之固態裝 。•封裝體;(b)_晶片; 封劑包含⑷至少一種臂5"襄n讀 n, rr_ , ^夕虱树月日、(B)至少一種環氧樹 :—種肝硬化劑、⑼至少一種石夕氧境界面活性 W以及(E)至少—種輔助硬化催化劑。 、本^明疋另一具體實施例中,提供一種囊封-固態裝置 L °將邊固怨裝置置於-囊封組合物内,該組合 $ =(A)至少—種聚梦氧樹脂、⑻至少-種環氧樹脂、(C) 種奸硬化劑、⑼至少一種石夕氧燒界面活性劑以及⑻ 至少一種輔助硬化催化劑。 ^種其它本發明之特色、方 及隨附之申請專利範圍將更為 【實施方式】 面及優點經由參照後文說明 彰顯。 本發明發明人發現經由使用矽氧烷界面活性劑,該矽氧 垸:面活性劑可购氧樹脂與環氧樹脂相容來製造一種 固心裝置用《囊封劑,該囊封劑具有澄清、最佳玻璃轉換 特性、、所需熱膨脹特性、防水性、折射率數值以及於特定 波長之透射特性。該囊封劑組合物包含(A)至少-種聚矽氧 樹脂、⑻至少-種環氧樹月旨、(c)至少一種肝硬化劑、⑼ 至少-種Θ氧垸界面活性劑以及⑻至少_種辅助硬化催 U使用此等囊封劑組合物之塗層可提供耐水滲透性及 耐熱性。所得組合物也可用作為多晶片模組製造用之黏著 88371 1304415 2及介電物質。黏著劑係用來將晶片附著至基板或繞性 土 ’作為層合介電薄膜域普通(KaptQn)之黏著劑,以及 乍為’I %物貝或頂層來提供防水且耐磨之保護層。所得調 配物也可用作為多晶片模组製造時供嵌置裝置用之囊封 劑。 、 本發明用作為成分(A)之聚石夕氧樹脂包含如下結構式⑴ 表示之樹脂。
HO c6h5 Ψ— Ο—Si— 〇— C6H5 r
R I Si--h I C6H5
某些具體實施例中,聚碎氧樹脂包含結構式(I)聚梦氧樹 月曰此處Z典型為約1至約10且更典型係於約2至約5之範 圍’ R係選自羥基、C“22烷基、烷氧基、。2_22稀基、Cl" 芳土 C6-22k基-經取代之芳基及C6·22芳燒基。此外,聚矽 乳樹脂可為分支結構,其中尺為⑴设3取代基,此處rS為羥 基、CW2烷基、c1-22烷氧基、c2-22烯基、C6.14芳基、匕心 烷基-經取代之芳基&C622芳烷基。 可用於本發明之囊封劑之環氧樹脂(B)包括「環氧樹脂化 學與技術」B· Ellis(編輯)凱曼荷(Chapman Hall) 1993年紐 約以及「環氧樹脂化學與技術」c· May以及γ· Tanaka,馬 基碟克(Marcell Dekker) 1972年紐約所述之該等環氧樹 月曰了用於本發明之環氧樹脂包括可經由含經基、或含胺 化合物與表氯醇反應所製造的環氧樹脂,該反應較佳係於 88371 1304415 :::::::屬⑽物如氫氧化-在下進行。也包 仆入J y 一個且較佳兩個或兩個以上碳-碳雙键、 化合物血;晶s u 又鍵之 有用之環氧樹脂例如包括± 本發明 脂、雙哀氧樹脂、環脂族環氧樹 又酉樹脂、雙紛F環氧樹 甲酚酚醛清滚瑗备执此 々、衣虱树脂、 44’苯/ ^曰、聯苯環氧樹脂、聯苯環氧樹脂、 ,外《讀脂、多官能基環氧樹脂、二一 化物以及2_縮皮廿a t —乳 可單獨使用、,,Γ 甘油基鍵。此等環氧樹脂 、一 或組合至少兩種環氧樹脂使用。較佳本菸明 0乳樹脂4環脂族環氧樹脂以及脂肪族環氧樹脂1肪 ^氧樹脂包括含有至少―個脂肪族基以及至少-個環氧 d化合物。脂肪族環氧化物例如包括丁二缔二氧化物、 4基戊環二氧化物、二縮水甘油醚、i,心丁二醇二縮水甘 ,由二乙二醇二縮水甘油醚及二戊埽二氧化物。 %月曰狹%氧樹脂為含有至少約_個環脂族基以及至少一 個%乳乙燒基之化合物。例如環燒脂環氧化物每分子可含 有一個壤脂族基以及至少兩個環氧乙燒環。環脂族環氧樹 脂〈特例包括2_(3,4_環氧基)環己基-5、5-螺从環氧基)環 烷^酸醋、M-環氧基_6_甲基環己基f基_3,‘環氧基_6_甲 基;衣己烷羧酸酯、乙烯基環己烷二氧化物、貳(3,4_環氧基 %己基甲基)己二酸酯、貳(3,4_環氧基_6_甲基環己基甲基) 己一酸酯、外-外貳(2,3-環氧基環戊基)醚、内_外貳(2,3-環 乳基環戊基)醚、2,2-貳(4-(2,3-環氧基丙氧基)環己基)丙 己k間-一氧己%、3,4_環氧基環己基烷基_3,‘環氧基環己 88371 1304415 烷、2,6-貳(2,3-環氧基丙氧基環己基-對-二氧己環)、2,6-武(2,3 -環氧基丙氧基)原冰片締、亞油酸二元體之二縮水甘 油醚、檸檬烯二氧化物、2,2-貳(3,4-環氧基環己基)丙烷、 二J哀戊二烯二氧化物、1,2-環氧基_6_(2,3_環氧基丙氧基)六 氫-4,7-低甲基四氫茚、對(2,3_環氧基)環戊基苯基-2,3-環氧 基丙基醚、w2,3-環氧基丙氧基)苯基七6_環氧基六氮_4,7_ 低甲基四氫#、鄰(2,3_環氧基)環戍基苯基乂3_環氧基丙基 醚、1,2_幻5-(1,2_環氧基)_4,7•六氫低甲基四氫莽氧基]乙 坑二環戊埽基苯基縮水甘油鍵、環己二醇二縮水甘油醚以 及六氫苯二甲酸二縮水甘油酯。 本發明之環氧樹脂(Β)之其 (m)、(IV)及(V)之環氧樹脂。 它範例包括下示結構式(II)、 88371
〇
(V) 熱安定劑
或抗氧化劍等添如劑 可用於芳麵環氧樹脂來 -9- 1304415 減少變色。增撓劑用於組合物來降低脆性,增撓劑包括脂 肪族環氧樹脂、矽氧烷樹脂等。 可用作為成分(c)之範例奸硬化劑包括下式結構式(νι)及 (VII)之酐硬化劑 (VI)
(VII) 以及又環[2.2.1]庚七烯心-:羧酸酐^基雙環口丄^庚 -5-烯-2,3-二羧酸酐、雙環[221]庚_5_缔_2,3_二羧酸酐、苯 六氫苯二甲酸奸、六氫-4-甲基 一酸肝、二氯順丁錦r二酸肝、
一甲故肝、均苯四酸二奸、 苯二甲酸酐、十二碳烯基丁 克維連酸酐(chlorendk anhydride)、四氫苯二甲酸酐等。也 可使用包含至少兩種酐硬化劑之混合物。範例述於「環氧 树月曰化子14技術」B. Ellis(編輯)(Chapman Hall) 1993年紐 、’力以及環氧树脂化學與技術」,c. A· May編輯,馬塞碟 克編輯’第二版,紐約1988年所述之該等環氧樹脂。 發明人發現經由使用矽氧烷界面活性劑(D),可攙混各種 成分於囊封組合物,結果導致除了讓組合物具有防破碎性 <外,可讓組合物均勻、澄清、具有低散射性質、防水性 88371 -10- 1304415 ==繼界面活性劑可用來讓本發明使用之各種 ^ ^ ^虱烷界面活性劑經由減低界面張力,讓 不相备的材料彼此相容成 滿意的所需性質。㈣:(Ρ均勻相)來獲得 , 、1 σ永矽氧樹脂可使用矽氧烷界面活性 脂::容。本發明使用之彻界面活性劑可 一 醇永丙一醇、聚丙二醇醚以及經取代之矽氧 :“物加以官能化。界面活性劑可單獨使用或組合使 〃本發明(石夕氧燒界面活性劑可用於讓聚石夕氧樹脂盘環 =樹脂、硬化m選擇性使用之折射率改性劑以及熱安 疋劑彼此相容化成為—種均f組合物,該均質組合物當硬 化時可獲得包㈣組合物,該組合物為澄清透明,具有防 :::耐溶劑性、耐裂性、耐熱性以及紫外光吸收性以及 於指定波長範園之光透射性。本發明使用切氧燒界面活 性劑可具有結構通式(VIII) (VIII)
其中R1及R2於各次出現時分別係選自環氧乙燒、環氧丙燒 及2亞甲基。本發明之一具體實施例中,Rl為環氧乙烷,而 R為甲基。另—具體實施例中,R1為甲基,而R2為環氧乙 烷基。第二具體實施例中,Ri為甲基,而R2為環氧乙垸與 %氧丙烷之混合基團。結構式(VIn)ix&y值於一具體實 88371 1304415 她例係於約0至約20之範圍,但於本發明之另一具體實施例 可為約3至約1 5之範圍。本發明之第三具體實施例中,結構 式(VIII)之X值及y值係於約5至約1〇之範圍。界面活性劑所 含矽百分比,於本發明之一具體實施例係占矽氧烷界面活 性劑總重之約10%至約8〇%重量比之範圍;於本發明之第二 具組貫施例,係占矽氧烷界面活性劑總重之約2〇%至約 重量比之範圍。第三具體實施例中,矽含量係占矽氧烷界· · 面活性劑總重之約25%至約50%重量比之範圍。本發明使用 之石夕氧燒界面活性劑於-具體實施例,可具有黏度於約1〇 ’ 厘史(cst)至約2000 cst之範圍,而於第二具體實施例具有黏 度於約100 cst至約1〇〇〇 cst之範圍,以及於本發明之第三具 體實施例具有黏度於約300 cst至約600 cst之範圍。當存在 時,於矽氧烷界面活性劑之聚醚分子量於本發明之一具體 實施例典型係於約100至約2〇00之範圍;於第二具體實施例 係於200至約1500之範圍以及於本發明之第三具體實施例 係於約500至約1〇〇〇之範圍。另一具體實施例中,可用於讓_ 聚矽氧樹脂與環氧樹脂相容化之矽氧烷界面活性劑示於下 示結構式(IX)。 '
輔助硬化催化劑(E)之說明例述於「環氧樹脂化學與技 術」B· Ems(編輯XChapman Hall) 1993年紐約以及「環氧 88371 -12- 1304415 樹脂化學與技術」,C· A. May編輯,馬塞碟克編輯,第二 版,紐約1 988年。各具體實施例中,輔助硬化催化劑包含 有機金屬鹽、锍鹽或鋏鹽。特定具體實施例中,輔助硬化 催化劑包含金屬羧酸鹽、金屬乙醯基丙酮酸鹽、辛酸鋅、 辛酸亞錫、六氟磷酸三芳基锍、六氟銻酸三芳基锍(例如沙 女馬(Sartomer)公司出售<CD 1〇1〇)、六氟銻酸二芳基鋏、
或肆(五氟苯基)硼酸二芳基鋏中之至少一者。此等化合物可 單獨使用或組合至少兩種化合物使用。
聚矽氧樹脂(A)、環氧樹脂⑺)、酐硬化劑((:)、矽氧烷名 面活性劑(D)及輔助硬化催化劑(E)之用量可於寬廣範圍这 變。各個具體實施例中,組合物之聚矽氧樹脂(A)之含量 以水矽氧樹脂(A)、環氧樹脂(B)、酐硬化劑(c卜矽氧烷巧 面活性劑(D)及輔助硬化催化劑(E)組合重量為基準,係大方 40%重量比。某些具體實施例中,組合物之聚矽氧樹脂(a 之口里,以永矽氧樹脂、環氧樹脂⑺卜酐硬化劑(〇、 夕氧烷界面活性劑⑴)及輔助硬化催化劑(E)組合重量為多 係於約40%重量比至約99%重量比之範圍。其它具" J中,、且口物之聚矽氧樹脂(A)之含量,以聚矽氧樹辟 ㈧、環氧樹脂⑻、奸硬化劑⑹、石夕氧垸界 及辅助硬化催化_)組合重#為基準,係於⑽重量比至 約99%重量比之範圍。當聚矽氧樹脂、環氧樹脂、矽氧炉 界面活性劑、料化劑及辅助硬化催化劑經混合而獲㈣ ^合物’且組合物經硬化及拋光時,所得表 明,囊封缝料可防裂且不會散射光。 “ 88371 -13- 1304415 本發明之各具體貫施例中,組合物之肝硬化劑(c)之含 量,以聚矽氧樹脂(A)、環氧樹脂(B)、酐硬化劑(c)、矽氧 fe界面活性劑(D)及輔助硬化催化劑(£)組合重量為基準,係 · 小於約40%重量比。本發明之其它具體實施例中,組合物 之酐硬化劑(C)之含量,以聚矽氧樹脂(A)、環氧樹脂⑺)、. 奸硬化劑(C)、矽氧燒界面活性劑(D)及輔助硬化催化劑(E) 組合重量為基準,係小於約25%重量比。某些具體實施例 . 中,組合物之酐硬化劑(C)之含量,以聚矽氧樹脂(A)、環 氧樹脂(B)、酐硬化劑(C)、矽氧烷界面活性劑(D)及輔助硬 化似化劑(E)組合重量為基準,係於約} %重量比至約重 i比之範圍。其它具體實施例中,組合物之肝硬化劑(C)之 吕里,以聚矽氧樹脂(A)、環氧樹脂(B)、酐硬化劑(c)、矽 氧烷界面活性劑(D)及輔助硬化催化劑(E)組合重量為基 準,係於約1%重量比至約2〇%重量比之範圍。 各個具體貫施例中,組合物之輔助硬化催化劑(E)之含 里,以聚矽氧樹脂(A)、環氧樹脂(B)、酐硬化劑(c)、矽氧馨鲁 烷界面活性劑(D)及輔助硬化催化劑(£)組合重量為基準,係· 低於約ίο%重量比。某些具體實施例中,組合物之輔助硬 -化似化劑(E)之含量,以聚矽氧樹脂(A)、環氧樹脂(B)、酐 -硬化劑(C)、矽氧烷界面活性劑(D)及輔助硬化催化劑(E)組 合重量為基準,係於約0.008Q/。重量比至約1〇%重量比之範 圍其&具體貫施例中,組合物之輔助硬化催化劑(e)之含 置,以聚矽氧樹脂(A)、環氧樹脂(B)、酐硬化劑(c)、矽氧 烷界面活性劑(D)及輔助硬化催化劑(E)組合重量為基準,係 88371 -14 - 1304415 於約0·01。/。重量比至約5%重量比之範圍。某些具體實施例 中,組合物之輔助硬化催化劑(Ε)之含量,以聚矽氧樹脂 (Α)、環氧樹脂(Β)、酐硬化劑(C)、矽氧垸界面活性劑(D) 及輔助硬化催化劑(Ε)組合重量為基準,係於約〇 〇1%重量
比至約1.0%重量比比之範圍。其它具體實施例中,組合物 之輔助硬化催化劑(Ε)之含量,以聚矽氧樹脂(Α)、環氧樹脂 (Β)肝硬化劑(C)、硬氧燒界面活性劑(D)及輔助硬化催化 ii1] (Ε)組合重I為基準’係於約〇 · 〇 1 %重量比至約〇 · $ %重量 比之範圍。 或多種熱安定劑、紫外光安定劑或其混合物可選擇性 存在於本發明組合物。此等安定劑可減少於囊封劑加工處 理過程形成色彩。安定劑例如述於LF· Rabek,「聚合物之 光安化;原理與應用」,俄思微爾(Elsevier)應用科學公司, 紐約1990年以及「塑膠添加劑手冊」第五版,H. Zweifel 編輯,漢瑟(Hanser)出版社2001年。適當安定劑範例包含有 機亞磷酸酯及亞膦酸酯例如三苯基亞磷酸酯、二苯基院基春春 亞磷酸酯、苯基二烷基亞磷酸酯、三(壬基苯基)亞磷酸酯、· 二月桂基亞磷酸酯、三十八烷基亞磷酸酯、二硬脂基異戊 四醇二亞磷酸酯、參气2,4_二-第三丁基苯基)亞磷酸酯、二 -異癸基異戊四醇二亞磷酸酯、二气2,‘二-第三丁基苯基)異 戊四醇二亞磷酸酯、三硬脂基-山梨糖醇三亞磷酸酯、及肆 -(2,4-二-第三丁基苯基聯苯二亞膦酸酯。適當安定劑 例如也包含含硫之磷化合物例如參甲基硫代亞碟酸酯、參 乙基硫代亞磷酸酯、參丙基硫代亞磷酸酯、參戊基硫代亞 88371 -15- 1304415 磷酸酯、參己基硫代亞磷酸酯、參庚基硫代亞磷酸酯、參 辛基硫代亞磷酸酯、參壬基硫代亞磷酸酯、參月桂基硫代 亞磷鉍酯、參苯基硫代亞磷酸酯、參芊基硫代亞磷酸酯、 貳丙硫代甲基亞磷酸酯、貳丙硫代壬基亞磷酸酯、貳壬基 硫代甲基亞磷酸酯、貳壬基硫代丁基亞磷酸酯、甲基乙基 硫代丁基亞磷酸酯、甲基乙基硫代丙基亞磷酸酯、甲基壬 基硫代丁基亞磷酸酯、甲基壬基硫代月桂基亞磷酸酯、以
及戊基壬基硫代丁基亞磷酸酯。此等化合物可單獨使用或 組合至少兩種化合物使用。 適^ 士足劑也包含il體封阻紛。立體封阻驗安定劑範例 包含2-第三烷基取代之酚衍生物、2_第三戊基取代之酚衍生 物、2-第三辛基取代之酚衍生物、2_第三丁基取代之酚衍生 物、2,6-一 _第二丁基取代之紛衍生物、2_第三丁基-甲基 -(或6-亞甲基-)取代之酚衍生物以及2,6•二-甲基取代之酚 衍生物。此等化合物可單獨使用或組合至少兩種化合物使 用。本發明之若干特定具體實施例中,立體封阻紛安定劑馨· 包含α生育酚及丁基化羥基甲苯。 適當安定劑也包含立體封阻胺類,例如包含貳_(2,2,6,6_ 四甲基哌啶基)癸二酸酯、貳_(2,2,6,6-五甲基哌啶基)癸二酸 - 酯、正丁基-3,5-二-第三丁基-4-羥基芊基丙二酸貳 -(1,2,2,6,6-五甲基哌啶基)酯、丨-羥基乙基-2,2,6,6•四甲基 -4-羥基哌啶與丁二酸之縮合產物、ν,ν,-(2,2,6,6-四甲基哌 啶基)-六亞甲基二胺與4-第三辛基-胺基_2,6-二氯均三畊之 縮合產物、參-(2,2,6,6-四甲基哌啶基)腈基三乙酸酯、肆 88371 -16- 1304415 -(2,2,6,6-四甲基-4-哌啶基丁烷四羧酸酯、及 1,1 -(1,2 -乙一基)_武-(3,3,5,5-四甲基旅畊酉同)。此等化合物 可單獨使用或組合至少兩種化合物使用。 適當安定劑也包含可摧毁過氧化物之化合物,例如包含 β-锍代二丙酸酯例如月桂酯、硬脂酯、肉豆蔻酯或三癸酯; 筑基苯并咪唑或2-巯基苯并咪唑鋅鹽;二丁基二硫代胺基 甲酸鋅,二十八烷基二硫化物;以及異戊四醇肆十二巯 基)-丙酸酯。此等化合物可單獨使用或組合至少兩種化合物 使用。 本發明之選擇性使用之成分也包含硬化改性劑,硬化改 f生训可修改裱氧樹脂之硬化速率。本發明之多個具體實施 例中,硬化改性劑包含至少一種硬化加速劑或硬化抑制 劑。硬化改性劑包含具有孤立電子對之雜原子之化合物。 亞磷酸酯可用作為硬化改性劑。亞磷酸酯之說明例包含三 、土亞4酸gg、二芳基亞磷酸酯、三烷基硫代亞磷酸酯、 及^芳基硫代亞磷酸酯。本發明之若干具體實施例中,亞 %馱酯包含三苯基亞磷酸酯、芊基二乙基亞磷酸酯、或三 丁基亞磷酸酿。其它適當硬化改性劑包含立體封阻胺類及 2’2:6,6_四甲基喊咬基殘基例如武(2,2,6义四甲基威淀基)癸 二酸酯。也可使用硬化改性劑混合物。 本發明之選擇性使用成分也包含偶合劑,偶合劑於多個 ^體貫施例可辅助環氧樹脂結合至基體,例如玻璃基體, 88371 勺2成I表面《強力黏合而不會產生過早故障。偶合劑 。有夕烷及親基邵分二者之化合物,偶合劑之說明例 -17- 1304415 包含巯基甲基三苯基矽烷、β-巯基乙基三苯基矽烷、β-銃 基丙基三苯基石夕燒、γ-統基丙基二苯基甲基石夕燒、γ-鏡基丙 基苯基二甲基矽燒、δ-競基丁基苯基二甲基石夕燒、δ-魏基丁 基三苯基矽烷、參(β-銃基乙基)苯基矽烷、參(γ-巯基丙基) 苯基矽烷、參(γ-銃基乙基)甲基矽烷、參(γ-毓基乙基)乙基 石夕燒、及參(γ-蔬基乙基)节基石夕燒。偶合劑也包含燒氧基石夕 垸部分及有機部分二者,例如包含式(R5〇)3Si-R6化合物, 其中R為燒基以及R係選自乙婦基、3 -縮水甘油氧基丙 基、3-¾¾基丙基、3-丙烯醒基氧基丙基、3 -甲基丙埽酸基氧 基丙基、以及CnH2n+1(其中η具有約4至約16之值)組成的組 群。本發明之若干具體實施例中,R5為甲基或乙基。本發 明之其它具體實施例中,偶合劑包含含有烷氧基矽烷部分 及%氧基邯分之化合物。偶合劑可單獨使用或組合至少兩 種化合物使用。 本發明之選擇性使用之成分也包含折射率改性劑。當 由相對高折射率晶片(典型為約2.8至3.2範園)射進較低 射率%氧樹脂囊封劑(典型於約i 2至約i 6之範圍時,部 光於臨界角被反射至晶片。具有高折射率之改性劑㈣ 每氧樹脂來提高折射率,造成兩種折射㈣之較佳匹配 =及造成發光量的增加。此種材料可提高環氧樹脂折 =而未顯著影響環氧樹脂囊封劑之透明度。此種類型 :劑包含具有高折射率之添加劑。此 聚集/I:貝例如聚彻體,以及粒子或結: 8837 ’其大小係小於發射光波長大小。此等聚集體偶: -18- 1304415 2作為奈米粒子。聚集體例如包含多種_透明金屬氧化 务或相對不會散射之n_VI族材料。—具體實施例中,奈米 =子材枓為—I化鈥。其它具體實施例中,可使用其它類 』條編物或金屬氧化物的組合。舉例言之,氧化 Γ二乳:锆乳:氧化鈽、鋁氧、氧化鉛、及複合材料例 ^ μ乳及錯氧之複合材料可用”造奈米粒子。其它 具體實施例中,奈米粒子係由ι™材料之一製造,腿 料料包含晒化鋅、硫化鋅以及由Zn、se、suMe 至。另外,氮化鎵、氮切或氮化銘也可用來製造奈米粒 子。折射率改性劑可單獨使用,或組合至少兩種化合物使 用。本發明〈―具體實施例中,囊封組合物之折射率係於 約(M至約H)敎範圍。第二具體實施例中,折射率為和 至約5·0,以及第二且蝴與、Α / τ丄 , 罘—、祖只她例中,折射率為約丨·〇至約2.5。 多個具體㈣例中,折射率係於約1.G至約2.0之範圍。 本發明組合物可你士 / 、 、,二由以任何万便順序組合多種成分包括 k擇f生成刀而1備。多個具體實施例中,全部成分可共同 混合。其它具體實施例中,兩種或兩種以 混合,隨後組合且它成八 3 μ〜、 ^ 刀。一 /、胆貫施例中,本發明組合 二 § :包含-種二部分式組合物,其中各個成分於 ',且口月昆合成至少兩種分開組合物來製備最終组合 物。 固態裝置用之囊♦十#分-& Xi 曩封技術包含澆鑄、樹脂轉移成形等。於 固態裝置已經包封於未經硬化之樹脂後,典型於模進 行《硬化1㈣使用熱' 紫外光、電子束技術等或其 88371
-19- 1304415 組合方法,以一階段或多階段硬化。例如,熱硬化於一具 體實施例可於2〇r至約20or範圍之溫度進行,於另一具體 · 實施例於約8(rCi約20(rc之範圍,於另一具體實施例於= i〇〇°c至約20(rc之範圍,以及於另一具體實施例於約12〇。〇 · 至約16(TC範圍之溫度進行。於其它具體實施例,此等材料 可初步於約室溫接受光化學硬化。雖然可能出現若干熱偏· 離光化學反應以及隨後之硬化,但典型無需外部加熱。其·· 它具體實施例中,此等材料可於二階段硬化,其中初期熱 硬化或紫外光硬化(舉例)可用來製造部分硬化環氧樹脂:· B階段裱氧樹脂。此種材料容易操控,然後可使用例如熱技 術或紫外光技術進一步硬化來製造一種材料,該種材料具 有囊封固態裝置要求的所需熱效能[例如玻璃轉換溫度(丁g) 以及熱膨脹係數(CTE)]、光學性質以及防水性。 田喿矽氧树脂(A)、環氧樹脂(B)、矽氧烷界面活性劑(d)、 酐硬化劑(C)及輔助硬化催化劑(]£)經混合且經硬化來獲得 囊封材料後,於高於玻璃轉換溫度測得之熱膨脹係數於本_ 發明艾一具體實施例係於約1〇至約1〇〇間改變,於本發明之’ 第二具體實施例係於約50至約9〇之範圍改變,以及於本發· 明〈三具體實施例係於約6〇至约85之範圍改變。於低於玻·· 璃轉換溫度測得之熱膨脹係數於本發明之-具體實施例係 於約50至約300間改變,於本發明之第二具體實施例係於約 1〇〇至約275之範圍改變,以及於第三具體實施例中,熱膨 脹係數係於約150至約250之範圍改變。 聚石夕氧樹脂⑷、環氧樹脂(B)、石夕氧燒界面活性劑(D)、 88371 -20- 1304415 纤硬化劑(C)及輔助硬化催化劑(E)當混合成囊封組合物時 可獲得所需玻璃轉換值。一具體實施例中,組合物之玻璃 轉換溫度係於約l〇°C至約250°C之範圍,第二具體實施例 中,玻璃轉換溫度係於約20°C至約200°C之範圍。第三具體 實施例中,囊封組合物之玻璃轉換溫度係於約24°C至約150 °C之範圍。
·· 本發明之環氧樹脂組合物可用於環氧樹脂組合物已知之 用途。此等用途包含塗層、陶瓷化合物以及固態裝置之囊 封劑。一具體實施例中,固態裝置為LED 1。圖1示意顯示 根據本發明之一具體實施例之LED 1。LED 1含有LED晶片 4,LED晶片4電性連結至引線框5。例如LED晶片4可直接電 性連結至引線框5之陽極或陰極,以及藉引線7連結至引線 框5之相對陰極或陽極,如圖1所示。圖1所示一特定具體實 施例中,引線框5支承LED晶片4。但引線7可被刪除,LED 晶片4可跨其引線框5的兩個電極,LED晶片4的底部含有接 觸層,接觸層接觸引線框5之陽極及陰極二者。引線框5連 結至電源功應器例如電流源、或電壓源、或另一電路(圖中 未顯示)。 LED晶片4由輻射發射面9發射輻射。LED 1發射可見光、 紫外光或紅外光輻射。LED晶片4包含任何LED晶片4其含有 可發射所需輻射之任何半導體層之P-η接面。例如LED晶片4 可含有任何所需III-V族化合物半導體層例如GaAs、 GaAlAs、GaN、InGaN、GaP等,或II-VI族化合物半導體層 如ZnSe、ZnSSe、CdTe等,或IV-IV族化合物半導體層如 88371 -21 - 1304415
SiC。LED晶片4也含有其它層例如包被廣、波導層及接觸 層。 LED 1係以本發明之囊封劑u封裝。囊封劑之另一名詞為 囊封材料。-具體實施例中,LED封裝包括囊封㈣位於 封裝體如殼體14。殼體14可為任—種塑膠或其它材料如聚 碳酸醋,該材料對LED輻射為透明。但若囊封劑u有足夠 韌度及挺度可無需使用殼體14,則也可刪除殼體“來簡化 加工。如此囊封劑之外表面於某些具體實施例係用作為殼 體Η或封裝體。殼體14含有發光面或輕射發射面服㈣ 晶片4上方、以及非發光面16毗鄰於引線框輻射發射面 15可f曲來用作為透鏡及/或著色來用作為濾色鏡。多個具 體實施財,非發光面16#LED糾為不透明,非發光面 可由不透明材料如金屬製成。殼體14若有所需可含有反射 知套住LED阳片4,或其它組成元件如電阻器等。 其它具體實施射,囊封材料選擇性I有鱗來最佳化 LED 1之色彩輸出。例如磷可呈磷粉末交互攙雜囊封齋川 或混合囊封劑U ’或呈薄膜塗覆於LED晶片4上,或呈薄膜 塗覆於殼體14之内表面上。任何磷材料皆可用於LED晶 片。例如發黃光之鈽攙雜釔鋁石榴石磷(YAG:Ce3+)可與發 藍光之InGaN主動層LED晶片用來產生可見光之黃光及藍 光輸出’對人類觀察者而言顚現為白色。其它咖晶片與 鱗的組合也可視情況需要而使用。 雖然經封裝之LED晶片4所圖1所示根據一具體實施例係 由引線框5支承’但LED i可有多種其它結構。例如LE〇晶 88371 -22- 1304415 片4可由殼體14底面16支承,或由位於殼體14底部之機座 (圖中未顯示)支承,而非由引線框5支承。
本發明之另一具體實施例中,囊封組合物可用於直穴式 表面發射雷射(VCSEL)。裝置之示意圖顯示於圖2。VCSEL 30可埋設於印刷電路板總成33之一口袋32内部。熱阱34可 置於印刷電路板33之口袋32,VCSEL 30可停靠於熱阱34 上。本發明之囊封劑組合物36可注入印刷電路板33之口袋 3 2之腔穴35,可環繞VCSEL流動,於各邊囊封VCSEL,然 後形成頂塗膜36於VCSEL 30表面上。頂塗膜36可保護 VCSEL· 30不會受損及分解,同時對水分呈惰性,且為透明 且可拋光。VCSEL發射之雷射束37可撞擊鏡38,反射出印 刷電路板33之口袋32之外。
本發明之另一具體實施例中,如圖3所示,LED陣列3可 製造於一塑膠基板上。LED晶片或晶粒4以物理方式及電性 安裝於陰極引線26上。LED晶片4頂面係以引線27電性連結 至陽極引線25。引線可藉已知導線連結技術而附接至傳導 性晶片襯墊。引線26、25包含引線框,可由金屬例如鍍銀 銅製成。引線框及LED晶片陣列3含於塑膠封裝體29,例如 聚碳酸酯封裝體、聚氯乙晞封裝體或聚醚醯亞胺封裝體。 某些具體實施例中,聚碳酸酯包含雙酚A聚碳酸酯。塑膠封 裝體29填裝本發明之囊封劑11。封裝體29含有錐形内侧壁 18,内側壁18封裝LED晶片4,且形成光展開穴20,確保LED 光之交互流通。 無需進一步解釋,相信熟諳技藝人士使用此處說明,可 88371 -23 - 1304415 將本發明利用至最完整程度。含括下列實施例對熟諳技藝 人士提供實施本案申請專利之發明提供額外指南。提供之 實施例單純為有利於本發明之教示之代表例。如此此等實 施例非絕非意圖囿限於隨附之申請專利範圍界定之本發明 之範圍。 實施例1 下列程序用於製造表1所示樣本1。小瓶内放置丨丨4克 Z6018(苯基丙基羥基聚矽氧,得自陶氏化學公司"7·5克六 氫苯一甲酸酐(ΗΗΡΑ)(汽巴嘉基(Ciba Geigy)公司)以及〇 4 克SF1488(聚二甲基矽氧烷界面活性劑,得自奇異電氣公 司)。將瓶蓋置於瓶上,内容物使用微波爐加熱至約8〇它溫 度,混合至全部力分完全溶冑。溶解完成後,樣本冷卻至 低於5(TC,加人15克以179(環脂族環氧樹脂,得自汽巴嘉 基),〇. 1克伊加諾斯(Irgan〇x)丨〇丨〇(抗氧化劑得自汽巴公司) 及〇·3克乙基-己酸錫添加至其中。材料經攙混,通過名目孔 徑5微米之過滤器過遽入乾淨瓶内。過滤後環氧樹脂攙合物 藉放置於設定為低於6〇°C之真空爐内約3〇分鐘除氣,同時 施加真空。除氣後’材料用來囊封成各組成元件。材料之 樣本圓盤之製法係將攙合物倒 ^ 牧1入鋁盤内,加蓋讓環氧樹脂 硬化,硬化條件為於801 1小日车,以】ίπ土土 。 』時,以1小時時間斜坡式升高 至1 8 0 C,以及於該溫度維接? 、 1 + ^持2小時。其它環氧樹脂囊封劑 <製法係使用樣本1之程序劁 斤I備,經由於表丨規定之條件 下’將各種環氧樹脂及含聚石夕备 " 夕虱树脂、硬化劑及其它成分 組合及硬化。全部數量皆以方 一 88371 计。樣本1-3經除氣,且於14〇 -24. 1304415 °C硬化1小時,獲得硬而透明之樣本;樣本4、5、6及7經過 濾除氣且於1 50t烤乾70分鐘獲得透明淺橙色樣本。樣本8 於1 75-180°C除氣2小時而獲得透明淺橙色樣本。全部樣本 皆可拋光,且不因衝擊而裂開。 表1 : 環氧樹脂 硬化研究 樣本 1 樣本 2 樣本 3 樣本 4 樣本 5 樣本 6 樣本 7 樣本 8 CY 179 15.00 5.00 21.00 伊邦(Epon)862,雙 酚F環氧樹脂 10.00 殼牌(Shell)伊邦尼 斯(Eponex) 1510 24.00 10.75 奧拉萊(Araldite) AY 238 7.60 西力可非托 (Silikoftal) ED 5.10 10.80 5.50 5.00 10.80 Z6018 11.40 5.60 5.09 4.50 5.00 14.60 13.00 ΗΗΡΑ 7.50 4.50 2.09 6.60 6.00 14.40 10.00 11.00 伊匹丘隆(Epicuron) B-4400 二纤 3.00 辛酸錫 0.30 0.20 0.11 0.27 0.25 0.60 0.20 汽巴伊加諾1010 0.10 0.10 0.10 0.11 0.13 0.29 0.10 0.15 SF 1488 0.40 0.30 0.25 0.55 0.50 0.70 0.27 0.5 終樣本厚度/密耳 158 161 143 230 253 258 275 258 聚矽氧成分% 33 52 88 40 38 27 34 27 Tg/°c 140 87 24 92 64 64 55 148 88371 -25 - 1304415 本發明使用之囊封劑組合物顯示於表2。 表2 : 成分°/〇械 材料類別 一種成分 % HHPA B-4400 選擇性使 用項目 界面 活性劑 CY 179 環氧樹脂 0-50% 伊邦882,雙 酚F環氧接f脂 環氧樹脂 0-50% 殼牌伊邦尼 斯 1510 環氧樹脂 0-50% 奥拉莱AY 238 環氧樹脂 0-50% 西力可非托 EDZ6018 聚矽氧環氧樹 脂 0-70% HHPA 酐硬化劑 5-50 % 伊匹丘隆 B-4400二肝 酐硬化劑 0-10% 辛酸錫 加速催化劑 0.5 % 汽巴伊加諾 1010 抗氧化劑 0-5 SF 1488 聚矽氧界面 活性劑 0.5-10% 汽巴汀努文 (Tinuvin) 紫外光吸收劑 0-5 Z6018 聚矽氧樹脂 1-50 88371 -26 - 1304415 σ 石夕氧之環氧樹脂攙合矽氧烷界面活性劑之紫外光_ 可見井、玲 '、紅外光透射光譜對表1及2所述組合物顯示於圖 光崎指示於約500奈米至約1100奈米之範圍透射。 圖5顯示含聚矽氧環氧樹脂攙合物之紫外光-可見光吸收 “曰("且成列舉於表1及2)。未見超過500奈米的吸光。 禾夕氧環氧樹脂攙合物之折射率相對於波長資料對表1 及2列舉< 組合物顯示於圖6。折射率由於350奈米之1_58降 至於17〇〇奈米之約丨49。 隹二已、、二於典型具體實施例舉例說明本發明,但絕非咅 ’制於所示細節,原因在於可未悻離本發明之精髓做^ ^修改及取代。如此熟諳技藝人士可無需使用多於例行 實驗=對此處揭示之發明做出進一步修改及相當變化,全 部此等知改及相當變化皆落入如下申請專利範圍界定之本 發明之精髓及範圍。 【圖式簡單說明】 轉 备 可見光近 圖1鮮員示LED裝置之示意圖。 圖2顯示直穴式表面發射雷射裝置之示意圖。 圖3顯示LED陣列於塑膠之基板之示意圖。 圖4_不含聚矽氧之環氧樹脂攙合物之紫外光 紅外光透射資料。 圖5顯示含聚石夕氧之環氧樹脂攙合物之紫外光-可見光吸 收光譜。 圖6顯示含聚碎氧之環氧樹脂攙合物之折射率對波長之 88371 -27- 1304415 【圖式代表符號說明 88371 1 發光二極體’ LED 3 LED晶片陣列 4 LED晶片 5 引線框 7 引線 9 輕射發射表面 11 囊封劑 14 殼體 15 發光表面 16 非發光表面 18 内側壁 20 光展開穴 25 陽極引線 26 陰極引線 27 引線 29 塑膠封裝體 30 VCSEL,直穴式表面發射雷射 32 口袋 33 印刷電路板 34 熱阱 35 腔穴 36 塗層頂膜 37 雷射束 38 鏡 -28-
Claims (1)
13 044Αδ27812號專利申請案 中文申請專利範圍替換本(97年9月) ί 拾、申請專利範圍: 1 · 一種供囊封一固態裝詈用+ 1 之可硬化環氧樹脂組合物,包 含⑷-種聚錢樹脂包含—種㈣官能化^氧樹 脂、(Β)一種環氧樹脂包含雙齡Α環氧樹脂、(C)一種軒硬 化劑包含六氫-4-甲基苯二甲酸酐、⑼一種矽氧烷界面 活性劑包含環氧以官能切氧烧、以及⑹-種輔助硬 化催化劑辛酸鋅,其中以聚石夕氧樹脂(A)、環氧樹脂⑻、 酐硬化劑(C)、石夕氧院界面活性劑(D)及辅助硬化催化劑 ⑻之組合重量為基準,成分⑷之存在量大於佩重量 比;成分(B)之存在量為1%重量比至2〇%重量比;成分(C) 之存在量小於40%重量比;以及成分(D)及⑹之存在量 為0·008°/。重量比至1〇%重量比。 2·如申請專利範圍第丨項之組合物,進一步包含熱安定 劑、UV安定劑或其組合中之至少一者。 3· —種封裝後之固態裝置,包含:(a)一封裝體;(b)一晶 片(4),以及(c)一包含如請求項之組合物之囊封劑 (11)。 4·如申請專利範圍第3項之封裝後之固態裝置,其中該固 態裝置為半導體裝置。 5· 一種LED (1)裝置,包含(a)—封裝體;(b)一]lED晶片(4); 以及(c)一包含如請求項丨或2之組合物之囊封劑(丨1)。 6.如申請專利範圍第5項之LED 〇)裝置,其中該囊封劑 (11)進一步包含熱安定劑、uv安定劑、或其組合中之至 少一者。 88371-970909.doc 1304415 種囊封LED (1)裝置之方法,包含:將-LED 置 放置於-封裝體内,以及提供—種囊封劑⑴),其包^ · ⑷-種聚石夕氧樹脂包含,基官能化聚石夕氧樹脂、 (B)-種環氧樹脂包含雙酚F、(c)一種酐硬化劑包含六氫 -4-甲基苯二甲酸酐、⑼一種矽氧烷界面活性劑包含環 氧乙烷官能化矽氧烷、以及(E)_種辅助硬化催化劑辛2 鋅,其中以聚矽氧樹脂、環氧樹脂、酐硬化劑(c)、 矽氧烷界面活性劑(D)及辅助硬化催化劑(E)之組合重量 為基準,成分(A)之存在量大於40。/()重量比;成分⑺)之 存在篁為1%重量比至20%重量比;成分之存在量小於 40%重量比;以及成分(D)及(E)之存在量為〇〇〇8%重量 比至10%重量比。 88371-970909.doc -2-
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DE60316759T2 (de) | 2008-07-17 |
TW200415019A (en) | 2004-08-16 |
EP1408087A1 (en) | 2004-04-14 |
CN1534074A (zh) | 2004-10-06 |
CN100480352C (zh) | 2009-04-22 |
CN101307183B (zh) | 2011-06-29 |
US20040067366A1 (en) | 2004-04-08 |
CN101307183A (zh) | 2008-11-19 |
JP2004277697A (ja) | 2004-10-07 |
JP4988141B2 (ja) | 2012-08-01 |
DE60316759D1 (de) | 2007-11-22 |
ES2292912T3 (es) | 2008-03-16 |
US6800373B2 (en) | 2004-10-05 |
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