TWD196110S - 晶舟之部分 - Google Patents

晶舟之部分

Info

Publication number
TWD196110S
TWD196110S TW107300940F TW107300940F TWD196110S TW D196110 S TWD196110 S TW D196110S TW 107300940 F TW107300940 F TW 107300940F TW 107300940 F TW107300940 F TW 107300940F TW D196110 S TWD196110 S TW D196110S
Authority
TW
Taiwan
Prior art keywords
design
line
section
parts
film
Prior art date
Application number
TW107300940F
Other languages
English (en)
Chinese (zh)
Inventor
Tomoya Hasegawa
Koichi Shimada
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TWD196110S publication Critical patent/TWD196110S/zh

Links

TW107300940F 2017-08-21 2018-02-13 晶舟之部分 TWD196110S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-17840F JP1597807S (enrdf_load_stackoverflow) 2017-08-21 2017-08-21

Publications (1)

Publication Number Publication Date
TWD196110S true TWD196110S (zh) 2019-02-21

Family

ID=61189744

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107300940F TWD196110S (zh) 2017-08-21 2018-02-13 晶舟之部分

Country Status (3)

Country Link
US (1) USD893438S1 (enrdf_load_stackoverflow)
JP (1) JP1597807S (enrdf_load_stackoverflow)
TW (1) TWD196110S (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1638282S (enrdf_load_stackoverflow) * 2018-09-20 2019-08-05
JP1640260S (enrdf_load_stackoverflow) * 2018-11-19 2019-09-02
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1706322S (enrdf_load_stackoverflow) * 2021-08-27 2022-01-31
JP1731670S (enrdf_load_stackoverflow) * 2022-03-04 2022-12-08
JP1741513S (enrdf_load_stackoverflow) * 2022-09-14 2023-04-11
JP1741512S (enrdf_load_stackoverflow) * 2022-09-14 2023-04-11
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
JP2006173560A (ja) * 2004-11-16 2006-06-29 Sumitomo Electric Ind Ltd ウエハガイド、有機金属気相成長装置および窒化物系半導体を堆積する方法
TWD119910S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
US8092599B2 (en) * 2007-07-10 2012-01-10 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US8021487B2 (en) * 2007-12-12 2011-09-20 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
JP2010194704A (ja) * 2009-01-27 2010-09-09 Shinano Denki Seiren Kk 定盤修正用砥石、定盤修正用研磨装置及び研磨定盤の修正方法
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
TW201239124A (en) * 2011-03-22 2012-10-01 Chi Mei Lighting Tech Corp Wafer susceptor and chemical vapor deposition apparatus
US9633822B2 (en) * 2011-10-31 2017-04-25 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
US10316412B2 (en) * 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
CN102983093B (zh) * 2012-12-03 2016-04-20 安徽三安光电有限公司 一种用于led外延晶圆制程的石墨承载盘
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
US9273413B2 (en) * 2013-03-14 2016-03-01 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD789924S1 (en) * 2015-01-16 2017-06-20 Apple Inc. Electronic device
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
JP1563649S (enrdf_load_stackoverflow) * 2016-02-12 2016-11-21
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
JP1597807S (enrdf_load_stackoverflow) 2018-02-19
USD893438S1 (en) 2020-08-18

Similar Documents

Publication Publication Date Title
TWD196110S (zh) 晶舟之部分
TWD166332S (zh) 基板處理裝置用晶舟之部分
TWD167988S (zh) 半導體製造裝置用晶舟
TWD161688S (zh) 半導體製造裝置用晶舟
TWD168827S (zh) 半導體製造裝置用晶舟
TWD165429S (zh) 半導體製造裝置用晶舟
TWD146655S (zh) 半導體製造裝置用晶舟
TWD146654S (zh) 半導體製造裝置用晶舟
TWD197462S (zh) 半導體製造裝置用密封材
TWD179095S (zh) 基板保持環
TWD180129S (zh) 密封環之部分
TWD167109S (zh) 基板保持環
TWD170400S (zh) 晶舟用填縫構件
TWD202463S (zh) 基板處理裝置用晶舟之部分
USD766850S1 (en) Wafer holder for manufacturing semiconductor
TWD187175S (zh) 圖案化石英晶圓
TWD175115S (zh) 晶圓舟之晶圓支撐爪（二）
TWD171962S (zh) 仿真晶圓之部分（三）
TWD183002S (zh) 圖案化石英晶圓
TWD175116S (zh) 晶圓舟之晶圓支撐爪（四）
TWD171961S (zh) 仿真晶圓之部分（二）
TWD180126S (zh) 密封環
TWD171960S (zh) 仿真晶圓之部分（一）
TWD167115S (zh) 基板處理裝置用晶舟之部分
TWD208352S (zh) 容器