TWD197462S - 半導體製造裝置用密封材 - Google Patents

半導體製造裝置用密封材

Info

Publication number
TWD197462S
TWD197462S TW107303319F TW107303319F TWD197462S TW D197462 S TWD197462 S TW D197462S TW 107303319 F TW107303319 F TW 107303319F TW 107303319 F TW107303319 F TW 107303319F TW D197462 S TWD197462 S TW D197462S
Authority
TW
Taiwan
Prior art keywords
view
sectional
semiconductor manufacturing
manufacturing equipment
article
Prior art date
Application number
TW107303319F
Other languages
English (en)
Inventor
Kazuaki Tsuji
Original Assignee
日商華爾卡股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商華爾卡股份有限公司 filed Critical 日商華爾卡股份有限公司
Publication of TWD197462S publication Critical patent/TWD197462S/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

【物品用途】;本設計物品係一種半導體製造裝置用密封材，適合使用於例如CVD或乾蝕刻裝置等半導體製造裝置。如本設計物品之使用狀態參考圖所示，本設計物品之半導體製造裝置用密封材係插入於設置在半導體製造裝置之第1構件的溝槽內使用，以將第1構件與第2構件之間密封。;【設計說明】;後視圖與前視圖相同，故省略之。左側視圖與右側視圖相同，故省略之。仰視圖與俯視圖相同，故省略之。;A-A剖面圖係俯視圖中之A-A線處的剖面圖。;B-B放大剖面圖係將A-A剖面圖中之B-B線部分予以放大顯示之圖式。
TW107303319F 2017-12-19 2018-06-11 半導體製造裝置用密封材 TWD197462S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-28254F JP1605780S (zh) 2017-12-19 2017-12-19

Publications (1)

Publication Number Publication Date
TWD197462S true TWD197462S (zh) 2019-05-11

Family

ID=62239193

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107303319F TWD197462S (zh) 2017-12-19 2018-06-11 半導體製造裝置用密封材

Country Status (3)

Country Link
US (1) USD885444S1 (zh)
JP (1) JP1605780S (zh)
TW (1) TWD197462S (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD905761S1 (en) 2018-07-24 2020-12-22 Valqua, Ltd. Seal member for semiconductor production apparatus
USD909322S1 (en) * 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD909323S1 (en) * 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD917825S1 (en) * 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
USD1031951S1 (en) * 2020-07-30 2024-06-18 Valqua, Ltd. Composite seal
JP1721756S (ja) 2021-12-23 2022-08-05 シール材
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD442609S1 (en) * 2000-09-27 2001-05-22 Machine Design Incorporated Seal ring for a nutcracking die assembly
CA114459S (en) * 2005-08-05 2008-03-11 Faster Spa Fluid seal
JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
USD582440S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD582437S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD582438S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD582439S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD582441S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD582436S1 (en) * 2007-10-15 2008-12-09 Eagle Industry Co., Ltd. Seal for a rotary shaft
US9447881B2 (en) * 2008-03-13 2016-09-20 Nippon Valqua Industries, Ltd. Seal material
KR101269267B1 (ko) * 2008-09-18 2013-05-29 닛폰 바루카 고교 가부시키가이샤 실링 플레이트, 실링 플레이트에 사용되는 실링 부재 및 이들의 제조방법
USD631066S1 (en) * 2008-11-26 2011-01-18 Eagle Industry Co., Ltd. Seal for a rotary shaft
USD616966S1 (en) * 2009-02-11 2010-06-01 Kmt Waterjet Systems Inc. Outer follower element for a high pressure seal
TWD149670S (zh) 2010-08-16 2012-10-11 荏原製作所股份有限公司 密封環
USD690336S1 (en) * 2011-06-30 2013-09-24 Adp Distributors, Inc. Hydraulic turbocharger pedestal seal
US8608173B2 (en) * 2011-08-25 2013-12-17 Hamilton Sundstrand Corporation Method and apparatus to provide sealing contact between first and second fueldraulic components
USD722621S1 (en) * 2011-11-25 2015-02-17 Salford Group Inc. Seal
USD754308S1 (en) 2012-08-07 2016-04-19 Nippon Valqua Industries, Ltd. Composite sealing material
US9892945B2 (en) * 2012-10-09 2018-02-13 Nippon Valqua Industries, Ltd. Composite seal
USD705280S1 (en) 2013-07-11 2014-05-20 Ebara Corporation Sealing ring
JP1518502S (zh) 2014-02-04 2015-03-02
TWD183422S (zh) 2015-11-09 2017-06-01 日本華爾卡工業股份有限公司; 密封件
JP1556538S (zh) 2015-11-27 2016-08-15
USD837685S1 (en) * 2016-12-20 2019-01-08 Morito Co., Ltd. Eyelet

Also Published As

Publication number Publication date
USD885444S1 (en) 2020-05-26
JP1605780S (zh) 2018-06-04

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