TWD208041S - 半導體製造裝置用密封材 - Google Patents

半導體製造裝置用密封材 Download PDF

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Publication number
TWD208041S
TWD208041S TW108301177F TW108301177F TWD208041S TW D208041 S TWD208041 S TW D208041S TW 108301177 F TW108301177 F TW 108301177F TW 108301177 F TW108301177 F TW 108301177F TW D208041 S TWD208041 S TW D208041S
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Taiwan
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line
article
sectional
semiconductor manufacturing
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TW108301177F
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English (en)
Inventor
金相鎬
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日商華爾卡股份有限公司
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Publication of TWD208041S publication Critical patent/TWD208041S/zh

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Abstract

【物品用途】;本物品係一種半導體製造裝置用密封材，適合使用於例如CVD或乾蝕刻裝置等半導體裝置。如顯示本物品之使用狀態的參考圖所示，本物品之半導體製造裝置用密封材係插入設於半導體製造裝置之第1構件的溝部內使用，將第1構件與第2構件之間密封。;【設計說明】;後視圖與前視圖相同，故省略之。左側視圖與右側視圖相同，故省略之。;A-A線剖面圖係俯視圖中之A-A線處的剖面圖。;B-B線放大剖面圖係將A-A線剖面圖中之B-B線部分予以放大顯示的圖。

Description

半導體製造裝置用密封材
本物品係一種半導體製造裝置用密封材，適合使用於例如CVD或乾蝕刻裝置等半導體裝置。如顯示本物品之使用狀態的參考圖所示，本物品之半導體製造裝置用密封材係插入設於半導體製造裝置之第1構件的溝部內使用，將第1構件與第2構件之間密封。
後視圖與前視圖相同，故省略之。左側視圖與右側視圖相同，故省略之。
A-A線剖面圖係俯視圖中之A-A線處的剖面圖。
B-B線放大剖面圖係將A-A線剖面圖中之B-B線部分予以放大顯示的圖。
TW108301177F 2018-09-11 2019-03-04 半導體製造裝置用密封材 TWD208041S (zh)

Applications Claiming Priority (2)

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JP2018-019784 2018-02-07
JPD2018-19784F JP1638480S (zh) 2018-09-11 2018-09-11

Publications (1)

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TWD208041S true TWD208041S (zh) 2020-11-01

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TW108301177F TWD208041S (zh) 2018-09-11 2019-03-04 半導體製造裝置用密封材

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US (1) USD927656S1 (zh)
JP (1) JP1638480S (zh)
TW (1) TWD208041S (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD986394S1 (en) * 2021-05-12 2023-05-16 S & B Technical Products, Inc. Pipe sealing gasket
USD1004656S1 (en) 2023-03-22 2023-11-14 Hongyan Wang Vacuum sealing appliance

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TWM282946U (en) 2005-08-29 2005-12-11 Jeng-Shiun Juang Air-tight lid for container
TWM379164U (en) 2009-12-22 2010-04-21 Ying-Hsiang Chen Sealing ring for the wafer-plating jig
TWM428159U (en) 2011-12-28 2012-05-01 Won Hung Industry Co Ltd Sealed container
TWM479515U (zh) 2014-02-27 2014-06-01 Arena Instr Co Ltd 密封條結構
TWM499369U (zh) 2014-10-27 2015-04-21 Cheng-Yu Hung 船艉管密封環之結構

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USD323024S (en) * 1986-04-17 1992-01-07 Stefan Petersson Sealing ring
USD347885S (en) * 1990-04-18 1994-06-14 Forsheda Ab Sealing ring for sealing jointed pipes
USD351459S (en) * 1992-09-10 1994-10-11 Forsheda Ab Sealing ring
USD374710S (en) * 1994-01-25 1996-10-15 Forsheda Ab Sealing ring
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JP4663538B2 (ja) * 2006-01-31 2011-04-06 日本バルカー工業株式会社 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁
USD556866S1 (en) * 2006-05-22 2007-12-04 S & B Technical Products, Inc. Pipe gasket with wiper lip
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USD754308S1 (en) 2012-08-07 2016-04-19 Nippon Valqua Industries, Ltd. Composite sealing material
USD705280S1 (en) 2013-07-11 2014-05-20 Ebara Corporation Sealing ring
US9551420B2 (en) * 2014-09-12 2017-01-24 American Seal And Engineering Company, Inc. Sealing ring
TWD181453S (zh) 2015-09-16 2017-02-21 日本華爾卡工業股份有限公&#x5 密封件
TWD181454S (zh) 2015-11-09 2017-02-21 日本華爾卡工業股份有限公&#x5 密封件
TWD183422S (zh) 2015-11-09 2017-06-01 日本華爾卡工業股份有限公&#x5 密封件
JP1556326S (zh) 2015-11-27 2016-08-15
JP1556537S (zh) 2015-11-27 2016-08-15
JP1556327S (zh) 2015-11-27 2016-08-15
USD819187S1 (en) * 2016-01-26 2018-05-29 Nippon Valqua Industries, Ltd. Seal
JP1581994S (zh) * 2016-11-29 2017-07-24
JP1598171S (zh) 2017-08-07 2018-02-19
JP1599351S (zh) 2017-08-07 2018-03-12
JP1607736S (zh) 2017-11-17 2018-06-25
JP1606050S (zh) 2017-12-01 2018-06-04

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM282946U (en) 2005-08-29 2005-12-11 Jeng-Shiun Juang Air-tight lid for container
TWM379164U (en) 2009-12-22 2010-04-21 Ying-Hsiang Chen Sealing ring for the wafer-plating jig
TWM428159U (en) 2011-12-28 2012-05-01 Won Hung Industry Co Ltd Sealed container
TWM479515U (zh) 2014-02-27 2014-06-01 Arena Instr Co Ltd 密封條結構
TWM499369U (zh) 2014-10-27 2015-04-21 Cheng-Yu Hung 船艉管密封環之結構

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USD927656S1 (en) 2021-08-10

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