TWD208041S - 半導體製造裝置用密封材 - Google Patents
半導體製造裝置用密封材 Download PDFInfo
- Publication number
- TWD208041S TWD208041S TW108301177F TW108301177F TWD208041S TW D208041 S TWD208041 S TW D208041S TW 108301177 F TW108301177 F TW 108301177F TW 108301177 F TW108301177 F TW 108301177F TW D208041 S TWD208041 S TW D208041S
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- Taiwan
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- semiconductor manufacturing
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract description 9
- 238000004519 manufacturing process Methods 0.000 title abstract description 7
- 239000003566 sealing material Substances 0.000 abstract description 4
- 238000001312 dry etching Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 1
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Abstract
【物品用途】;本物品係一種半導體製造裝置用密封材,適合使用於例如CVD或乾蝕刻裝置等半導體裝置。如顯示本物品之使用狀態的參考圖所示,本物品之半導體製造裝置用密封材係插入設於半導體製造裝置之第1構件的溝部內使用,將第1構件與第2構件之間密封。;【設計說明】;後視圖與前視圖相同,故省略之。左側視圖與右側視圖相同,故省略之。;A-A線剖面圖係俯視圖中之A-A線處的剖面圖。;B-B線放大剖面圖係將A-A線剖面圖中之B-B線部分予以放大顯示的圖。
Description
本物品係一種半導體製造裝置用密封材,適合使用於例如CVD或乾蝕刻裝置等半導體裝置。如顯示本物品之使用狀態的參考圖所示,本物品之半導體製造裝置用密封材係插入設於半導體製造裝置之第1構件的溝部內使用,將第1構件與第2構件之間密封。
後視圖與前視圖相同,故省略之。左側視圖與右側視圖相同,故省略之。
A-A線剖面圖係俯視圖中之A-A線處的剖面圖。
B-B線放大剖面圖係將A-A線剖面圖中之B-B線部分予以放大顯示的圖。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-019784 | 2018-09-11 | ||
JPD2018-19784F JP1638480S (zh) | 2018-09-11 | 2018-09-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD208041S true TWD208041S (zh) | 2020-11-01 |
Family
ID=67474935
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108301177F TWD208041S (zh) | 2018-09-11 | 2019-03-04 | 半導體製造裝置用密封材 |
Country Status (3)
Country | Link |
---|---|
US (1) | USD927656S1 (zh) |
JP (1) | JP1638480S (zh) |
TW (1) | TWD208041S (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD986394S1 (en) * | 2021-05-12 | 2023-05-16 | S & B Technical Products, Inc. | Pipe sealing gasket |
USD1004656S1 (en) | 2023-03-22 | 2023-11-14 | Hongyan Wang | Vacuum sealing appliance |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWM282946U (en) | 2005-08-29 | 2005-12-11 | Jeng-Shiun Juang | Air-tight lid for container |
TWM379164U (en) | 2009-12-22 | 2010-04-21 | Ying-Hsiang Chen | Sealing ring for the wafer-plating jig |
TWM428159U (en) | 2011-12-28 | 2012-05-01 | Won Hung Industry Co Ltd | Sealed container |
TWM479515U (zh) | 2014-02-27 | 2014-06-01 | Arena Instr Co Ltd | 密封條結構 |
TWM499369U (zh) | 2014-10-27 | 2015-04-21 | Cheng-Yu Hung | 船艉管密封環之結構 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD289078S (en) * | 1984-10-26 | 1987-03-31 | Vassallo Research And Development Corporation | Gasket |
USD323024S (en) * | 1986-04-17 | 1992-01-07 | Stefan Petersson | Sealing ring |
USD347885S (en) * | 1990-04-18 | 1994-06-14 | Forsheda Ab | Sealing ring for sealing jointed pipes |
USD351459S (en) * | 1992-09-10 | 1994-10-11 | Forsheda Ab | Sealing ring |
USD374710S (en) * | 1994-01-25 | 1996-10-15 | Forsheda Ab | Sealing ring |
USD372765S (en) * | 1994-08-01 | 1996-08-13 | Sisk David E | Gasket |
JP4663538B2 (ja) * | 2006-01-31 | 2011-04-06 | 日本バルカー工業株式会社 | あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁 |
USD556866S1 (en) * | 2006-05-22 | 2007-12-04 | S & B Technical Products, Inc. | Pipe gasket with wiper lip |
USD607091S1 (en) * | 2007-01-10 | 2009-12-29 | Victaulic Company | Valve seat |
TWD150427S (zh) | 2009-08-10 | 2012-11-21 | 日本華爾卡工業股份有限公司 | 複合密封材 |
USD655797S1 (en) * | 2010-03-24 | 2012-03-13 | Nippon Valqua Industries, Ltd. | Hybrid seal member |
TWD149671S (zh) | 2010-08-16 | 2012-10-11 | 荏原製作所股份有限公司 | 密封環 |
TWD149672S (zh) | 2010-08-16 | 2012-10-11 | 荏原製作所股份有限公司 | 密封環 |
TWD149670S (zh) | 2010-08-16 | 2012-10-11 | 荏原製作所股份有限公司 | 密封環 |
USD646764S1 (en) * | 2010-11-04 | 2011-10-11 | Faster S.P.A. | Sealing gasket |
USD754308S1 (en) | 2012-08-07 | 2016-04-19 | Nippon Valqua Industries, Ltd. | Composite sealing material |
USD705280S1 (en) | 2013-07-11 | 2014-05-20 | Ebara Corporation | Sealing ring |
US9551420B2 (en) * | 2014-09-12 | 2017-01-24 | American Seal And Engineering Company, Inc. | Sealing ring |
TWD181453S (zh) | 2015-09-16 | 2017-02-21 | 日本華爾卡工業股份有限公 | 密封件 |
TWD183422S (zh) | 2015-11-09 | 2017-06-01 | 日本華爾卡工業股份有限公 | 密封件 |
TWD181454S (zh) | 2015-11-09 | 2017-02-21 | 日本華爾卡工業股份有限公 | 密封件 |
JP1556326S (zh) | 2015-11-27 | 2016-08-15 | ||
JP1556327S (zh) | 2015-11-27 | 2016-08-15 | ||
JP1556537S (zh) | 2015-11-27 | 2016-08-15 | ||
USD819187S1 (en) * | 2016-01-26 | 2018-05-29 | Nippon Valqua Industries, Ltd. | Seal |
JP1581994S (zh) * | 2016-11-29 | 2017-07-24 | ||
JP1599351S (zh) | 2017-08-07 | 2018-03-12 | ||
JP1598171S (zh) | 2017-08-07 | 2018-02-19 | ||
JP1607736S (zh) | 2017-11-17 | 2018-06-25 | ||
JP1606050S (zh) | 2017-12-01 | 2018-06-04 |
-
2018
- 2018-09-11 JP JPD2018-19784F patent/JP1638480S/ja active Active
-
2019
- 2019-03-04 TW TW108301177F patent/TWD208041S/zh unknown
- 2019-03-07 US US35/355,074 patent/USD927656S1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWM282946U (en) | 2005-08-29 | 2005-12-11 | Jeng-Shiun Juang | Air-tight lid for container |
TWM379164U (en) | 2009-12-22 | 2010-04-21 | Ying-Hsiang Chen | Sealing ring for the wafer-plating jig |
TWM428159U (en) | 2011-12-28 | 2012-05-01 | Won Hung Industry Co Ltd | Sealed container |
TWM479515U (zh) | 2014-02-27 | 2014-06-01 | Arena Instr Co Ltd | 密封條結構 |
TWM499369U (zh) | 2014-10-27 | 2015-04-21 | Cheng-Yu Hung | 船艉管密封環之結構 |
Also Published As
Publication number | Publication date |
---|---|
USD927656S1 (en) | 2021-08-10 |
JP1638480S (zh) | 2019-08-05 |
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