TWD149672S - 密封環 - Google Patents

密封環

Info

Publication number
TWD149672S
TWD149672S TW099304065F TW99304065F TWD149672S TW D149672 S TWD149672 S TW D149672S TW 099304065 F TW099304065 F TW 099304065F TW 99304065 F TW99304065 F TW 99304065F TW D149672 S TWD149672 S TW D149672S
Authority
TW
Taiwan
Prior art keywords
article
sealing ring
creation
liquid
convexity
Prior art date
Application number
TW099304065F
Other languages
English (en)
Inventor
Jumpei Fujikata
Yuji Araki
Masaaki Kimura
Original Assignee
荏原製作所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司 filed Critical 荏原製作所股份有限公司
Priority to TW099304065F priority Critical patent/TWD149672S/zh
Publication of TWD149672S publication Critical patent/TWD149672S/zh

Links

Abstract

【物品用途】;本創作的物品是密封環，本物品是如「標示各部名部之使用狀態參考圖」所示，作為下側密封環使用，本物品是固定在基板電鍍裝置等的基板夾頭之支撐體的下部，作為在將晶圓浸泡在液體中時，防止進行電鍍以外之面的邊緣部、通電用電氣接點部、以及背面接觸到液體。;【創作特點】;由各圖觀之，該密封環基本上為一環形體，詳細的斷面形狀，係如「X部B-B線放大剖面圖」所示，整體略呈ㄣ字形，外周緣向下延伸形成用圓形的凸緣，內周緣具有一斜面且向上突出形成半圓形的凸緣。
TW099304065F 2010-08-16 2010-08-16 密封環 TWD149672S (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW099304065F TWD149672S (zh) 2010-08-16 2010-08-16 密封環

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099304065F TWD149672S (zh) 2010-08-16 2010-08-16 密封環

Publications (1)

Publication Number Publication Date
TWD149672S true TWD149672S (zh) 2012-10-11

Family

ID=91478842

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099304065F TWD149672S (zh) 2010-08-16 2010-08-16 密封環

Country Status (1)

Country Link
TW (1) TWD149672S (zh)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD783922S1 (en) 2014-12-08 2017-04-11 Entegris, Inc. Wafer support ring
USD815385S1 (en) 2016-10-13 2018-04-10 Entegris, Inc. Wafer support ring
USD871561S1 (en) 2017-11-17 2019-12-31 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD897504S1 (en) 2017-11-17 2020-09-29 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD901648S1 (en) 2018-07-10 2020-11-10 Valqua, Ltd. Seal
USD909322S1 (en) 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD927656S1 (en) 2018-09-11 2021-08-10 Valqua, Ltd. Seal for vacuum gate valve

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD783922S1 (en) 2014-12-08 2017-04-11 Entegris, Inc. Wafer support ring
USD815385S1 (en) 2016-10-13 2018-04-10 Entegris, Inc. Wafer support ring
USD923159S1 (en) 2017-11-17 2021-06-22 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD897504S1 (en) 2017-11-17 2020-09-29 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD922545S1 (en) 2017-11-17 2021-06-15 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD923158S1 (en) 2017-11-17 2021-06-22 Valqua, Ltd. Seal members for use in semiconductor production apparatus
USD871561S1 (en) 2017-11-17 2019-12-31 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD901648S1 (en) 2018-07-10 2020-11-10 Valqua, Ltd. Seal
USD917028S1 (en) 2018-07-10 2021-04-20 Valqua, Ltd. Seal
USD927656S1 (en) 2018-09-11 2021-08-10 Valqua, Ltd. Seal for vacuum gate valve
USD909322S1 (en) 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD933031S1 (en) 2018-10-12 2021-10-12 Valqua, Ltd. Seal member for semiconductor production apparatus
USD933032S1 (en) 2018-10-12 2021-10-12 Valqua, Ltd. Seal member for semiconductor production apparatus

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