TWD164826S - 晶圓邊緣密封環之部分 - Google Patents
晶圓邊緣密封環之部分Info
- Publication number
- TWD164826S TWD164826S TW103300165F TW103300165F TWD164826S TW D164826 S TWD164826 S TW D164826S TW 103300165 F TW103300165 F TW 103300165F TW 103300165 F TW103300165 F TW 103300165F TW D164826 S TWD164826 S TW D164826S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- wafer
- view
- sealing ring
- edge sealing
- Prior art date
Links
- 238000007789 sealing Methods 0.000 title abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009713 electroplating Methods 0.000 abstract 1
- 230000012447 hatching Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是晶圓邊緣密封環，為一種被覆於保持在基板電鍍裝置等之基板夾具的支持面之晶圓的周端部的構件，用以防止當晶圓浸泡在液體時，除了進行電鍍之面以外的邊緣部、缺口部及背面接觸到液體。;【設計說明】;左側視圖與右側視圖相對稱，左側視圖省略。;圖中以實線所示為「主張設計」之部分，虛線所示為「不主張設計」之部分，一點鏈線為界定部分設計之邊界線。;在「部分設計範圍之放大立體圖」及「部分設計範圍之放大俯視圖」中，呈現在輪廓部分的水平、垂直及傾斜狀的細線，皆為用來指定立體表面之形狀的陰影線。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/460,477 USD705280S1 (en) | 2013-07-11 | 2013-07-11 | Sealing ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD164826S true TWD164826S (zh) | 2014-12-11 |
Family
ID=50692764
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103300165F TWD164826S (zh) | 2013-07-11 | 2014-01-10 | 晶圓邊緣密封環之部分 |
| TW103300165D01F TWD164827S (zh) | 2013-07-11 | 2014-01-10 | 晶圓邊緣密封環之部分 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103300165D01F TWD164827S (zh) | 2013-07-11 | 2014-01-10 | 晶圓邊緣密封環之部分 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD705280S1 (zh) |
| TW (2) | TWD164826S (zh) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD821552S1 (en) | 2016-11-29 | 2018-06-26 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD822181S1 (en) | 2016-11-29 | 2018-07-03 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD864361S1 (en) | 2017-07-21 | 2019-10-22 | Valqua, Ltd. | Seal |
| USD871561S1 (en) | 2017-11-17 | 2019-12-31 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD877865S1 (en) | 2016-11-29 | 2020-03-10 | Valqua, Ltd. | Seal |
| USD885444S1 (en) | 2017-12-19 | 2020-05-26 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD897504S1 (en) | 2017-11-17 | 2020-09-29 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD898171S1 (en) | 2017-12-19 | 2020-10-06 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD905761S1 (en) | 2018-07-24 | 2020-12-22 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD909323S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD927656S1 (en) | 2018-09-11 | 2021-08-10 | Valqua, Ltd. | Seal for vacuum gate valve |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD802723S1 (en) | 2015-11-27 | 2017-11-14 | Ebara Corporation | Sealing ring |
| USD834690S1 (en) * | 2017-06-16 | 2018-11-27 | Mcwane, Inc. | Gasket locking segment having single spigot tooth |
| USD933725S1 (en) * | 2019-02-08 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a substrate processing chamber |
| USD983940S1 (en) * | 2020-04-09 | 2023-04-18 | Valqua, Ltd. | Sealing ring |
| USD983941S1 (en) * | 2020-04-10 | 2023-04-18 | Valqua, Ltd. | Sealing ring |
| USD933726S1 (en) * | 2020-07-31 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a semiconductor processing chamber |
| US11581166B2 (en) | 2020-07-31 | 2023-02-14 | Applied Materials, Inc. | Low profile deposition ring for enhanced life |
-
2013
- 2013-07-11 US US29/460,477 patent/USD705280S1/en active Active
-
2014
- 2014-01-10 TW TW103300165F patent/TWD164826S/zh unknown
- 2014-01-10 TW TW103300165D01F patent/TWD164827S/zh unknown
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD821552S1 (en) | 2016-11-29 | 2018-06-26 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD822181S1 (en) | 2016-11-29 | 2018-07-03 | Nippon Valqua Industries, Ltd. | Composite seal |
| USD877865S1 (en) | 2016-11-29 | 2020-03-10 | Valqua, Ltd. | Seal |
| USD864361S1 (en) | 2017-07-21 | 2019-10-22 | Valqua, Ltd. | Seal |
| USD871561S1 (en) | 2017-11-17 | 2019-12-31 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD923158S1 (en) | 2017-11-17 | 2021-06-22 | Valqua, Ltd. | Seal members for use in semiconductor production apparatus |
| USD897504S1 (en) | 2017-11-17 | 2020-09-29 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD923159S1 (en) | 2017-11-17 | 2021-06-22 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD922545S1 (en) | 2017-11-17 | 2021-06-15 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD922547S1 (en) | 2017-12-19 | 2021-06-15 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD898171S1 (en) | 2017-12-19 | 2020-10-06 | Valqua, Ltd. | Seal members for use in semiconductor production apparatuses |
| USD885444S1 (en) | 2017-12-19 | 2020-05-26 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD919670S1 (en) | 2018-07-24 | 2021-05-18 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD919669S1 (en) | 2018-07-24 | 2021-05-18 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD905761S1 (en) | 2018-07-24 | 2020-12-22 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD927656S1 (en) | 2018-09-11 | 2021-08-10 | Valqua, Ltd. | Seal for vacuum gate valve |
| USD909323S1 (en) | 2018-10-12 | 2021-02-02 | Valqua, Ltd. | Seal member for use in semiconductor production apparatus |
| USD933033S1 (en) | 2018-10-12 | 2021-10-12 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
| USD933619S1 (en) | 2018-10-12 | 2021-10-19 | Valqua, Ltd. | Seal member for semiconductor production apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| USD705280S1 (en) | 2014-05-20 |
| TWD164827S (zh) | 2014-12-11 |
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