TWD196951S - 複合密封材 - Google Patents

複合密封材

Info

Publication number
TWD196951S
TWD196951S TW107304495F TW107304495F TWD196951S TW D196951 S TWD196951 S TW D196951S TW 107304495 F TW107304495 F TW 107304495F TW 107304495 F TW107304495 F TW 107304495F TW D196951 S TWD196951 S TW D196951S
Authority
TW
Taiwan
Prior art keywords
view
sectional
article
cross
sealing material
Prior art date
Application number
TW107304495F
Other languages
English (en)
Inventor
Michi Kuroda
Sangho Kim
Original Assignee
日商華爾卡股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商華爾卡股份有限公司 filed Critical 日商華爾卡股份有限公司
Publication of TWD196951S publication Critical patent/TWD196951S/zh

Links

Abstract

【物品用途】;本設計物品係一種複合密封材，適合使用於例如化學氣相沈積(CVD)或乾蝕刻裝置等半導體製造裝置。如放大參考剖面圖所示，本設計物品之複合密封材係由橡膠製的第1構件與合成樹脂製的第2構件所構成。另外，如本設計物品之使用狀態參考圖所示，本設計物品之複合密封材係插入於例如半導體製造裝置的溝槽內使用。;【設計說明】;後視圖與前視圖相同，故省略之。左側視圖與右側視圖相同，故省略之。;A-A剖面圖係俯視圖中之A-A線處的剖面圖。;B-B放大剖面圖係將A-A剖面圖中之B-B線部分予以放大顯示之圖式。
TW107304495F 2018-02-08 2018-08-02 複合密封材 TWD196951S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-2526F JP1612684S (zh) 2018-02-08 2018-02-08

Publications (1)

Publication Number Publication Date
TWD196951S true TWD196951S (zh) 2019-04-11

Family

ID=63369413

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107304495F TWD196951S (zh) 2018-02-08 2018-08-02 複合密封材

Country Status (3)

Country Link
US (1) USD895076S1 (zh)
JP (1) JP1612684S (zh)
TW (1) TWD196951S (zh)

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USD861766S1 (en) * 2017-01-13 2019-10-01 Gopro, Inc. Camera lens filter
JP1612684S (zh) 2018-02-08 2018-09-03
JP1612685S (zh) 2018-02-08 2018-09-03
USD909322S1 (en) * 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD909323S1 (en) * 2018-10-12 2021-02-02 Valqua, Ltd. Seal member for use in semiconductor production apparatus
USD936190S1 (en) * 2020-02-27 2021-11-16 Caterpillar Inc. Ripple seal
USD999885S1 (en) 2021-04-30 2023-09-26 Shape Technologies Group, Inc. High pressure seal body
USD1042373S1 (en) * 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
USD1042374S1 (en) * 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1034493S1 (en) * 2022-11-25 2024-07-09 Ap Systems Inc. Chamber wall liner for a semiconductor manufacturing apparatus

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US2622905A (en) * 1948-12-23 1952-12-23 Auto Diesel Piston Ring Compan Sealing ring
US3990711A (en) * 1975-05-09 1976-11-09 Hill Ralph W Restrained elastomeric seal ring means
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USD754308S1 (en) 2012-08-07 2016-04-19 Nippon Valqua Industries, Ltd. Composite sealing material
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JP1612684S (zh) 2018-02-08 2018-09-03

Also Published As

Publication number Publication date
JP1612684S (zh) 2018-09-03
USD895076S1 (en) 2020-09-01

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