TWD170399S - 晶舟用填縫構件 - Google Patents

晶舟用填縫構件

Info

Publication number
TWD170399S
TWD170399S TW103307157F TW103307157F TWD170399S TW D170399 S TWD170399 S TW D170399S TW 103307157 F TW103307157 F TW 103307157F TW 103307157 F TW103307157 F TW 103307157F TW D170399 S TWD170399 S TW D170399S
Authority
TW
Taiwan
Prior art keywords
wafer
article
semiconductor substrate
caulking
holder
Prior art date
Application number
TW103307157F
Other languages
English (en)
Inventor
Kosuke Takagi
Takaaki Noda
Original Assignee
日立國際電氣股份有限公司
Hitachi Int Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司, Hitachi Int Electric Inc filed Critical 日立國際電氣股份有限公司
Publication of TWD170399S publication Critical patent/TWD170399S/zh

Links

Abstract

【物品用途】;本設計的物品是晶舟用填縫構件，如使用狀態參考圖所示，設置在用來將半導體基板(晶圓)保持水平的基板保持具(亦稱晶圓保持具或晶舟)之未載置半導體基板(晶圓)的部位，在對於半導體基板(晶圓)進行成膜之際，為了使成膜氣體和空氣的流動保持均勻所使用的填縫構件，並且是以不會在被載置的本物品之周圍產生淤積的方式，在框體的正面側和背面都設置了矩形狀的開口部。;【設計說明】
TW103307157F 2014-06-06 2014-12-05 晶舟用填縫構件 TWD170399S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-12297F JP1520825S (zh) 2014-06-06 2014-06-06

Publications (1)

Publication Number Publication Date
TWD170399S true TWD170399S (zh) 2015-09-11

Family

ID=53507611

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103307157F TWD170399S (zh) 2014-06-06 2014-12-05 晶舟用填縫構件

Country Status (3)

Country Link
US (1) USD748056S1 (zh)
JP (1) JP1520825S (zh)
TW (1) TWD170399S (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD856281S1 (en) * 2016-06-21 2019-08-13 Robert Bosch Gmbh Housing for electric and electronic components
USD919577S1 (en) * 2018-06-11 2021-05-18 Herman Miller, Inc. Electrical hub
USD946525S1 (en) * 2019-03-15 2022-03-22 Robert Bosch Gmbh Battery supporting device

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2570559A (en) * 1945-12-29 1951-10-09 Elwood M Juergenson Wheel adapter plate
US3009167A (en) * 1959-10-12 1961-11-21 Jr Harry J Leonard Plumbing adapter plate
US4454565A (en) * 1982-09-27 1984-06-12 Carlingswitch, Inc. Adapter plate assembly for circuit breaker
US4687165A (en) * 1986-05-02 1987-08-18 The United States Of America As Represented By The United States Department Of Energy Adapter plate assembly for adjustable mounting of objects
US5438483A (en) * 1994-08-31 1995-08-01 Carlingswitch, Inc. Bracket assembly for front mounted circuit breaker
US5643024A (en) * 1996-08-08 1997-07-01 Roberson, Jr.; Harold Theodore Adapter plate
US6205994B1 (en) * 1998-12-23 2001-03-27 Lucent Technologies, Inc. Scriber adapter plate
USD492253S1 (en) * 2003-04-02 2004-06-29 Dominic K. Lee Electrical receptacle adapter
USD529000S1 (en) * 2003-09-18 2006-09-26 Riso Kagaku Corporation Integrated circuit tag
USD585834S1 (en) * 2007-07-18 2009-02-03 Aslan Industries Corproation Receptacle insert
USD623595S1 (en) * 2008-07-08 2010-09-14 Walter Ruffner Travel adapter
USD616823S1 (en) * 2009-10-15 2010-06-01 Multiway Industries (Hk) Ltd. Single-outlet surge-protected adaptor
USD676387S1 (en) * 2010-10-01 2013-02-19 Viking Systems, Inc. Adapter
US8455759B2 (en) * 2010-11-10 2013-06-04 Hubbell Incorporated Inlet cover and adapter assembly for electrical components
USD671901S1 (en) * 2011-04-13 2012-12-04 Novellus Systems, Inc. Pedestal cover
USD719091S1 (en) * 2013-11-06 2014-12-09 Ronald R. Leddusire Electrical outlet assembly

Also Published As

Publication number Publication date
USD748056S1 (en) 2016-01-26
JP1520825S (zh) 2015-04-06

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