USD893438S1 - Wafer boat - Google Patents

Wafer boat Download PDF

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Publication number
USD893438S1
USD893438S1 US29/635,787 US201829635787F USD893438S US D893438 S1 USD893438 S1 US D893438S1 US 201829635787 F US201829635787 F US 201829635787F US D893438 S USD893438 S US D893438S
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United States
Prior art keywords
wafer boat
view
taken along
along line
sectional
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Active
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US29/635,787
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English (en)
Inventor
Tomoya Hasegawa
Koichi Shimada
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMADA, KOICHI, HASEGAWA, TOMOYA
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US29/635,787 2017-08-21 2018-02-02 Wafer boat Active USD893438S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-17840F JP1597807S (enrdf_load_stackoverflow) 2017-08-21 2017-08-21
JP2017-017840 2017-08-21

Publications (1)

Publication Number Publication Date
USD893438S1 true USD893438S1 (en) 2020-08-18

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ID=61189744

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US29/635,787 Active USD893438S1 (en) 2017-08-21 2018-02-02 Wafer boat

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US (1) USD893438S1 (enrdf_load_stackoverflow)
JP (1) JP1597807S (enrdf_load_stackoverflow)
TW (1) TWD196110S (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Citations (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
US20060102081A1 (en) * 2004-11-16 2006-05-18 Sumitomo Electric Industries, Ltd. Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US20090017190A1 (en) * 2007-07-10 2009-01-15 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US20090155028A1 (en) * 2007-12-12 2009-06-18 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20100190418A1 (en) * 2009-01-27 2010-07-29 Kai Yasuoka Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
US20120240859A1 (en) * 2011-03-22 2012-09-27 Chi Mei Lighting Technology Corp. Wafer susceptor and chemical vapor deposition apparatus
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
US20130276704A1 (en) * 2012-04-18 2013-10-24 Sandeep Krishnan Wafter carrier for chemical vapor deposition systems
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
US20140261698A1 (en) * 2013-03-14 2014-09-18 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
US20150118009A1 (en) * 2012-12-03 2015-04-30 Xiamen Sanan Optoelectronics Technology Co., Ltd. Graphite Wafer Carrier for LED Epitaxial Wafer Processes
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
USD771622S1 (en) * 2015-01-16 2016-11-15 Apple Inc. Electronic device
US9633822B2 (en) * 2011-10-31 2017-04-25 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration

Patent Citations (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
US20060102081A1 (en) * 2004-11-16 2006-05-18 Sumitomo Electric Industries, Ltd. Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
US20090017190A1 (en) * 2007-07-10 2009-01-15 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US20090155028A1 (en) * 2007-12-12 2009-06-18 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20100190418A1 (en) * 2009-01-27 2010-07-29 Kai Yasuoka Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
USD704155S1 (en) * 2010-08-19 2014-05-06 Epistar Corporation Wafer carrier
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
US20120240859A1 (en) * 2011-03-22 2012-09-27 Chi Mei Lighting Technology Corp. Wafer susceptor and chemical vapor deposition apparatus
US9633822B2 (en) * 2011-10-31 2017-04-25 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
US20130276704A1 (en) * 2012-04-18 2013-10-24 Sandeep Krishnan Wafter carrier for chemical vapor deposition systems
US20150118009A1 (en) * 2012-12-03 2015-04-30 Xiamen Sanan Optoelectronics Technology Co., Ltd. Graphite Wafer Carrier for LED Epitaxial Wafer Processes
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
US20140261698A1 (en) * 2013-03-14 2014-09-18 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD771622S1 (en) * 2015-01-16 2016-11-15 Apple Inc. Electronic device
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1053830S1 (en) * 2022-03-04 2024-12-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1063875S1 (en) * 2022-09-14 2025-02-25 Kokusai Electric Corporation Substrate lifter for semiconductor manufacturing equipment
USD1078667S1 (en) * 2022-09-14 2025-06-10 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus

Also Published As

Publication number Publication date
TWD196110S (zh) 2019-02-21
JP1597807S (enrdf_load_stackoverflow) 2018-02-19

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