TWD196110S - Part of the crystal boat - Google Patents

Part of the crystal boat

Info

Publication number
TWD196110S
TWD196110S TW107300940F TW107300940F TWD196110S TW D196110 S TWD196110 S TW D196110S TW 107300940 F TW107300940 F TW 107300940F TW 107300940 F TW107300940 F TW 107300940F TW D196110 S TWD196110 S TW D196110S
Authority
TW
Taiwan
Prior art keywords
design
line
section
parts
film
Prior art date
Application number
TW107300940F
Other languages
Chinese (zh)
Inventor
Tomoya Hasegawa
Koichi Shimada
Original Assignee
日商東京威力科創股份有限公司
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京威力科創股份有限公司, Tokyo Electron Limited filed Critical 日商東京威力科創股份有限公司
Publication of TWD196110S publication Critical patent/TWD196110S/en

Links

Abstract

【物品用途】;本物品係在半導體製造之成膜過程中，用以將晶圓複數片層積，而設置於成膜裝置內者。部分設計所欲主張之部分係在半導體製造之成膜過程中，用以讓去除多餘之成膜用蝕刻氣體均勻地流通之通道(孔)，俯視觀察下的5個孔會貫穿至本物品下部所形成之2片的圓盤及底部之基台。;【設計說明】;以實線所表示之部分係部分設計所欲主張之部分，包含立體圖、A-A線剖面圖、B-B線乃至D-D-線放大剖面圖、E部分及F部分放大剖面圖來特定出部分設計所欲主張之部分。;由於後視圖及右側視圖並未顯示部分設計所欲主張之部分，故省略。;本案圖式所揭露之虛線部分為本案不主張設計之部分。[Use of article]; This article is used to stack multiple wafers during the film-forming process of semiconductor manufacturing and is installed in the film-forming device. Part of the design claim is that during the film formation process of semiconductor manufacturing, the channels (holes) are used to allow the etching gas used to remove excess film formation to flow evenly. When viewed from above, the five holes penetrate to the lower part of the product. The two discs and the base at the bottom are formed. ;[Design Description];The part represented by the solid line is the part that the partial design intends to advocate, including the three-dimensional view, the A-A line cross-section, the B-B line and even the D-D-line enlarged cross-section, and the enlarged cross-section of E and F. Come up with part of the design that you want to advocate. ; Since the rear view and the right side view do not show some of the intended parts of the design, they are omitted. ;The dotted line parts disclosed in the diagram of this case are the parts of this case that are not intended to be designed.

TW107300940F 2017-08-21 2018-02-13 Part of the crystal boat TWD196110S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-17840F JP1597807S (en) 2017-08-21 2017-08-21

Publications (1)

Publication Number Publication Date
TWD196110S true TWD196110S (en) 2019-02-21

Family

ID=61189744

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107300940F TWD196110S (en) 2017-08-21 2018-02-13 Part of the crystal boat

Country Status (3)

Country Link
US (1) USD893438S1 (en)
JP (1) JP1597807S (en)
TW (1) TWD196110S (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1638282S (en) * 2018-09-20 2019-08-05
JP1640260S (en) * 2018-11-19 2019-09-02
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
JP1678278S (en) * 2020-03-19 2021-02-01 Boat for substrate processing equipment
JP1706322S (en) * 2021-08-27 2022-01-31
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
JP2006173560A (en) * 2004-11-16 2006-06-29 Sumitomo Electric Ind Ltd Wafer guide, metal organic vapor phase growing device and method for depositing nitride semiconductor
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
US8092599B2 (en) * 2007-07-10 2012-01-10 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US8021487B2 (en) * 2007-12-12 2011-09-20 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
JP2010194704A (en) * 2009-01-27 2010-09-09 Shinano Denki Seiren Kk Grinding wheel for correcting surface plate, polishing device for correcting surface plate, and method for correcting polishing surface plate
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
TW201239124A (en) * 2011-03-22 2012-10-01 Chi Mei Lighting Tech Corp Wafer susceptor and chemical vapor deposition apparatus
JP5865916B2 (en) * 2011-10-31 2016-02-17 京セラ株式会社 Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
US10316412B2 (en) * 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
CN102983093B (en) * 2012-12-03 2016-04-20 安徽三安光电有限公司 A kind of graphite carrier for LED epitaxial wafer processing procedure
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
US9273413B2 (en) * 2013-03-14 2016-03-01 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
TWD168827S (en) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD165429S (en) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD167988S (en) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD789924S1 (en) * 2015-01-16 2017-06-20 Apple Inc. Electronic device
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
JP1563649S (en) * 2016-02-12 2016-11-21
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
USD893438S1 (en) 2020-08-18
JP1597807S (en) 2018-02-19

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