TWD180129S - sealing ring part - Google Patents

Abstract

[Use of item]; The item in this design is a sealing ring. ;[Design Description];As shown in the "Usage Reference Picture", this article is a member that covers the peripheral end portion (edge portion) of a wafer that is held by a substrate holder in a substrate plating device or the like. Surface; This article is used to prevent the edges and back surfaces other than the surface to be plated from coming into contact with the plating solution when the wafer is immersed in the plating solution. This product is produced with a diameter of about 20cm~45cm according to the size of the wafer for use. ;The rear view is symmetrical to the front view, and the rear view is omitted. ; The solid line part disclosed in the drawing is the part where the design of this case is advocated, and the dotted line part is the part of the case where the design is not advocated. ;The dotted chain line disclosed in the diagram defines the scope of the claim in this case. The dotted chain line itself is a part of the design that is not claimed in this case. ; The difference from the original design is: as shown in the "enlarged view of Part B", the cross-sectional shape of this case is slightly different from the original design. These differences are subtle and do not affect the similarity between the two cases.