JP1563649S - - Google Patents

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Publication number
JP1563649S
JP1563649S JPD2016-3052F JP2016003052F JP1563649S JP 1563649 S JP1563649 S JP 1563649S JP 2016003052 F JP2016003052 F JP 2016003052F JP 1563649 S JP1563649 S JP 1563649S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2016-3052F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2016-3052F priority Critical patent/JP1563649S/ja
Priority to TW105304454F priority patent/TWD183010S/zh
Priority to US29/573,943 priority patent/USD839219S1/en
Application granted granted Critical
Publication of JP1563649S publication Critical patent/JP1563649S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2016-3052F 2016-02-12 2016-02-12 Active JP1563649S (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2016-3052F JP1563649S (enrdf_load_stackoverflow) 2016-02-12 2016-02-12
TW105304454F TWD183010S (zh) 2016-02-12 2016-08-03 基板處理裝置用晶舟
US29/573,943 USD839219S1 (en) 2016-02-12 2016-08-10 Boat for substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-3052F JP1563649S (enrdf_load_stackoverflow) 2016-02-12 2016-02-12

Publications (1)

Publication Number Publication Date
JP1563649S true JP1563649S (enrdf_load_stackoverflow) 2016-11-21

Family

ID=57321979

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2016-3052F Active JP1563649S (enrdf_load_stackoverflow) 2016-02-12 2016-02-12

Country Status (3)

Country Link
US (1) USD839219S1 (enrdf_load_stackoverflow)
JP (1) JP1563649S (enrdf_load_stackoverflow)
TW (1) TWD183010S (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD846514S1 (en) 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

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CN206961808U (zh) * 2017-07-14 2018-02-02 君泰创新（北京）科技有限公司 硅片清洗工装
JP1597807S (enrdf_load_stackoverflow) * 2017-08-21 2018-02-19
JP1638282S (enrdf_load_stackoverflow) * 2018-09-20 2019-08-05
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
KR102552458B1 (ko) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 지지구 및 반도체 장치의 제조 방법
JP1658652S (enrdf_load_stackoverflow) * 2019-08-07 2020-04-27
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1713190S (enrdf_load_stackoverflow) * 2021-10-01 2022-04-21
JP1731670S (enrdf_load_stackoverflow) * 2022-03-04 2022-12-08
JP1731675S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731674S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731673S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1741513S (enrdf_load_stackoverflow) * 2022-09-14 2023-04-11
JP1741512S (enrdf_load_stackoverflow) * 2022-09-14 2023-04-11
EP4498411A3 (en) * 2023-06-28 2025-03-26 ASM IP Holding B.V. Wafer boat system, holder ring and use thereof

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US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
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USD551634S1 (en) * 2005-02-28 2007-09-25 Tokyo Electron Limited Wafer-boat for heat-processing of semiconductor wafers
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TWD119911S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
TWD133942S1 (zh) * 2008-03-28 2010-03-21 東京威力科創股份有限公司 晶舟
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
JP1537312S (enrdf_load_stackoverflow) * 2014-11-20 2015-11-09
JP1537629S (enrdf_load_stackoverflow) * 2014-11-20 2015-11-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD846514S1 (en) 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
TWD183010S (zh) 2017-05-11
USD839219S1 (en) 2019-01-29

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