JP1658652S - - Google Patents

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Publication number
JP1658652S
JP1658652S JPD2019-17637F JP2019017637F JP1658652S JP 1658652 S JP1658652 S JP 1658652S JP 2019017637 F JP2019017637 F JP 2019017637F JP 1658652 S JP1658652 S JP 1658652S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2019-17637F
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Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2019-17637F priority Critical patent/JP1658652S/ja
Priority to TW108307123F priority patent/TWD208179S/zh
Priority to US29/716,458 priority patent/USD939459S1/en
Application granted granted Critical
Publication of JP1658652S publication Critical patent/JP1658652S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JPD2019-17637F 2019-08-07 2019-08-07 Active JP1658652S (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2019-17637F JP1658652S (enrdf_load_stackoverflow) 2019-08-07 2019-08-07
TW108307123F TWD208179S (zh) 2019-08-07 2019-11-21 基板處理裝置用晶舟之部分
US29/716,458 USD939459S1 (en) 2019-08-07 2019-12-10 Boat for wafer processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2019-17637F JP1658652S (enrdf_load_stackoverflow) 2019-08-07 2019-08-07

Publications (1)

Publication Number Publication Date
JP1658652S true JP1658652S (enrdf_load_stackoverflow) 2020-04-27

Family

ID=70335647

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2019-17637F Active JP1658652S (enrdf_load_stackoverflow) 2019-08-07 2019-08-07

Country Status (3)

Country Link
US (1) USD939459S1 (enrdf_load_stackoverflow)
JP (1) JP1658652S (enrdf_load_stackoverflow)
TW (1) TWD208179S (enrdf_load_stackoverflow)

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KR102552458B1 (ko) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 기판 처리 장치, 기판 지지구 및 반도체 장치의 제조 방법
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
JP1718604S (ja) 2021-10-15 2022-06-29 ハンドリング用キャリア基板
JP1724567S (ja) 2021-10-15 2022-09-12 ハンドリング用キャリア基板
JP1727916S (ja) 2021-10-15 2022-10-21 ハンドリング用キャリア基板
USD1054388S1 (en) 2021-10-15 2024-12-17 Shin-Etsu Chemical Co., Ltd. Carrier substrate for handling
JP1724481S (ja) 2021-10-15 2022-09-12 ハンドリング用キャリア基板
JP1718541S (ja) 2021-10-15 2022-06-29 ハンドリング用キャリア基板
USD1042374S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Support pipe for an interlocking process kit for a substrate processing chamber
USD1042373S1 (en) 2022-03-18 2024-09-17 Applied Materials, Inc. Sliding ring for an interlocking process kit for a substrate processing chamber
USD1055006S1 (en) * 2022-03-18 2024-12-24 Applied Materials, Inc. Support ring for an interlocking process kit for a substrate processing chamber
JP1731674S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731673S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731675S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
USD1069863S1 (en) * 2022-08-04 2025-04-08 Applied Materials, Inc. Deposition ring of a process kit for semiconductor substrate processing
USD1064005S1 (en) * 2022-08-04 2025-02-25 Applied Materials, Inc. Grounding ring of a process kit for semiconductor substrate processing
JP1768691S (ja) 2023-12-19 2024-04-19 金属ガスケット

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JP3122364B2 (ja) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 ウエハボート
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
KR19990077350A (ko) * 1996-02-29 1999-10-25 히가시 데쓰로 반도체웨이퍼의 열처리용 보트
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
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JP2002324830A (ja) * 2001-02-20 2002-11-08 Mitsubishi Electric Corp 基板熱処理用保持具、基板熱処理装置、半導体装置の製造方法、基板熱処理用保持具の製造方法及び基板熱処理用保持具の構造決定方法
JP3377996B1 (ja) * 2001-12-27 2003-02-17 東京エレクトロン株式会社 熱処理用ボート及び縦型熱処理装置
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TWD119911S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD119910S1 (zh) * 2006-05-01 2007-11-11 東京威力科創股份有限公司 晶舟
TWD130137S1 (zh) * 2006-10-25 2009-08-01 東京威力科創股份有限公司 晶舟
TWD133942S1 (zh) * 2008-03-28 2010-03-21 東京威力科創股份有限公司 晶舟
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
JP1563649S (enrdf_load_stackoverflow) * 2016-02-12 2016-11-21
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
TWD208179S (zh) 2020-11-11
USD939459S1 (en) 2021-12-28

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