TW200745527A - Dynamic quantity measurement device - Google Patents

Dynamic quantity measurement device

Info

Publication number
TW200745527A
TW200745527A TW096104628A TW96104628A TW200745527A TW 200745527 A TW200745527 A TW 200745527A TW 096104628 A TW096104628 A TW 096104628A TW 96104628 A TW96104628 A TW 96104628A TW 200745527 A TW200745527 A TW 200745527A
Authority
TW
Taiwan
Prior art keywords
semiconductor
parallel
measurement device
type diffusion
quantity measurement
Prior art date
Application number
TW096104628A
Other languages
English (en)
Other versions
TWI356902B (zh
Inventor
Hiromi Shimazu
Hiroyuki Ohta
Yohei Tanno
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of TW200745527A publication Critical patent/TW200745527A/zh
Application granted granted Critical
Publication of TWI356902B publication Critical patent/TWI356902B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Volume Flow (AREA)
TW096104628A 2006-03-29 2007-02-08 Dynamic quantity measurement device TW200745527A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006089834A JP4697004B2 (ja) 2006-03-29 2006-03-29 力学量測定装置

Publications (2)

Publication Number Publication Date
TW200745527A true TW200745527A (en) 2007-12-16
TWI356902B TWI356902B (zh) 2012-01-21

Family

ID=38330481

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104628A TW200745527A (en) 2006-03-29 2007-02-08 Dynamic quantity measurement device

Country Status (6)

Country Link
US (3) US7992448B2 (zh)
EP (1) EP1840500A3 (zh)
JP (1) JP4697004B2 (zh)
KR (1) KR100844092B1 (zh)
CN (1) CN101046368B (zh)
TW (1) TW200745527A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
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TWI686594B (zh) * 2016-09-14 2020-03-01 大陸商宸鴻科技（廈門）有限公司 壓力感測模組與壓力觸控感測系統
US11978680B2 (en) 2018-12-31 2024-05-07 Micron Technology, Inc. Method and apparatus for on-chip stress detection

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI686594B (zh) * 2016-09-14 2020-03-01 大陸商宸鴻科技（廈門）有限公司 壓力感測模組與壓力觸控感測系統
US11978680B2 (en) 2018-12-31 2024-05-07 Micron Technology, Inc. Method and apparatus for on-chip stress detection

Also Published As

Publication number Publication date
JP4697004B2 (ja) 2011-06-08
US8695433B2 (en) 2014-04-15
US20070228500A1 (en) 2007-10-04
US20110259112A1 (en) 2011-10-27
JP2007263781A (ja) 2007-10-11
KR20070098479A (ko) 2007-10-05
EP1840500A3 (en) 2010-10-27
US20130118268A1 (en) 2013-05-16
CN101046368A (zh) 2007-10-03
CN101046368B (zh) 2012-05-16
KR100844092B1 (ko) 2008-07-04
EP1840500A2 (en) 2007-10-03
US7992448B2 (en) 2011-08-09
TWI356902B (zh) 2012-01-21
US8365609B2 (en) 2013-02-05

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