TW200712817A - Ozone system for multi-chamber tools - Google Patents

Ozone system for multi-chamber tools

Info

Publication number
TW200712817A
TW200712817A TW095124937A TW95124937A TW200712817A TW 200712817 A TW200712817 A TW 200712817A TW 095124937 A TW095124937 A TW 095124937A TW 95124937 A TW95124937 A TW 95124937A TW 200712817 A TW200712817 A TW 200712817A
Authority
TW
Taiwan
Prior art keywords
concentration controller
concentration
event
ozone generator
ozone
Prior art date
Application number
TW095124937A
Other languages
English (en)
Other versions
TWI342473B (en
Inventor
Vitaly J Berkman
Thomas J Ryan
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37198817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW200712817(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of TW200712817A publication Critical patent/TW200712817A/zh
Application granted granted Critical
Publication of TWI342473B publication Critical patent/TWI342473B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C01B13/11—Preparation of ozone by electric discharge
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/40—Preparation of ozone by electrical discharge using several dischargers in series
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/60—Feed streams for electrical dischargers
    • C01B2201/64—Oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00—Preparation of ozone by electrical discharge
    • C01B2201/90—Control of the process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Chemical Vapour Deposition (AREA)
  • Flow Control (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
TW95124937A 2005-07-07 2006-07-07 Ozone system and method for multi-chamber tools TWI342473B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69780205P 2005-07-07 2005-07-07

Publications (2)

Publication Number Publication Date
TW200712817A true TW200712817A (en) 2007-04-01
TWI342473B TWI342473B (en) 2011-05-21

Family

ID=37198817

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95124937A TWI342473B (en) 2005-07-07 2006-07-07 Ozone system and method for multi-chamber tools

Country Status (7)

Country Link
US (2) US7892502B2 (zh)
EP (1) EP1899781B1 (zh)
JP (2) JP4954995B2 (zh)
KR (2) KR20130007667A (zh)
CN (1) CN101243369B (zh)
TW (1) TWI342473B (zh)
WO (1) WO2007008561A2 (zh)

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* Cited by examiner, † Cited by third party
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