JPS55136103A - Ozone yield controlling method - Google Patents
Ozone yield controlling methodInfo
- Publication number
- JPS55136103A JPS55136103A JP4380579A JP4380579A JPS55136103A JP S55136103 A JPS55136103 A JP S55136103A JP 4380579 A JP4380579 A JP 4380579A JP 4380579 A JP4380579 A JP 4380579A JP S55136103 A JPS55136103 A JP S55136103A
- Authority
- JP
- Japan
- Prior art keywords
- output
- ozonizer
- ozone
- flow rate
- σfi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To effectively accomplish treatment in each ozone treatment vessel independently of a load change by controlling the ozone yield of an ozonizer so that the total of the ozone flow reate set signals of ozone treatment vessels may correspond to the outlet flow rate of the ozonizer.
CONSTITUTION: Output Ci of analyzer 8i enters comparator 9 in controller 4 and is compared to preset upper and lower limit values. When output Ci is within the range between the values, the output of flow rate setter 10 does not change. In case output Ci deviates from the range, according to the deviation a signal for changing the flow rate from Fi to Fi' is sent. Output Fi' from setter 10 enters adder 11 to calculate ΣFi', and in divider 12 the ratio of ΣFi' to flow rate F of main flow meter 5, Q=ΣFi'/F is calculated. In case of Q>1 controller 4 gives output to voltage regulator 2 according to the deviation of the Q value so that the voltage of ozonizer 1 is raised, thus increasing the ozone yield of ozonizer 1. As a result, the indication of each of analyzers 81W8n is raised, Fi" is set again, and control is repeated until Q becomes 1. In case of Q<1 the reverse control is performed.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4380579A JPS55136103A (en) | 1979-04-11 | 1979-04-11 | Ozone yield controlling method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4380579A JPS55136103A (en) | 1979-04-11 | 1979-04-11 | Ozone yield controlling method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55136103A true JPS55136103A (en) | 1980-10-23 |
Family
ID=12673950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4380579A Pending JPS55136103A (en) | 1979-04-11 | 1979-04-11 | Ozone yield controlling method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55136103A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009500855A (en) * | 2005-07-07 | 2009-01-08 | エム ケー エス インストルメンツ インコーポレーテッド | Ozone system for multi-chamber tools |
-
1979
- 1979-04-11 JP JP4380579A patent/JPS55136103A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009500855A (en) * | 2005-07-07 | 2009-01-08 | エム ケー エス インストルメンツ インコーポレーテッド | Ozone system for multi-chamber tools |
JP2012146987A (en) * | 2005-07-07 | 2012-08-02 | Mks Instruments Inc | Ozone system for multi-chamber tool |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55136103A (en) | Ozone yield controlling method | |
JPS63812B2 (en) | ||
JPS5575713A (en) | Controller for filtration flow rate | |
JPS553006A (en) | Solid-liquid mixture ratio control system | |
JPS5638602A (en) | Backup controller | |
JPS5582221A (en) | Combustion controlling method of gas in air heating furnace | |
JPS57127401A (en) | Method for controlling concentrating vessel | |
JPS55147101A (en) | Controlling method of concentrating tank | |
JPS55156204A (en) | Temperature controller for cooling water drain from generating plant | |
JPS6488722A (en) | Water level controller | |
SU768808A1 (en) | Method of automatic control of starch-containing raw material boiling process in unit | |
JPS5495877A (en) | Bumpless converting system | |
JPS5610622A (en) | Mixing supply of combustion gas | |
JPS54119755A (en) | Water receiving well inflow control method | |
JPS5624611A (en) | Filtering discharge control device | |
SU1108419A1 (en) | Device for adjusting a.c. power | |
JPS55119497A (en) | Controller for volume of air fed to aeration vessel | |
JPS5695400A (en) | Slurry concentration controller | |
JPS5575712A (en) | Controller for filtration basin | |
JPS5784797A (en) | Controller for agitation in digestion vessel | |
JPS5584530A (en) | Adjusting liquid concentration | |
JPS55129197A (en) | Sewage treating apparatus | |
JPS6426902A (en) | Pid controller | |
JPS54108181A (en) | Liquid level controlling method | |
JPS5665214A (en) | Level controller |