JPS55136103A - Ozone yield controlling method - Google Patents

Ozone yield controlling method

Info

Publication number
JPS55136103A
JPS55136103A JP4380579A JP4380579A JPS55136103A JP S55136103 A JPS55136103 A JP S55136103A JP 4380579 A JP4380579 A JP 4380579A JP 4380579 A JP4380579 A JP 4380579A JP S55136103 A JPS55136103 A JP S55136103A
Authority
JP
Japan
Prior art keywords
output
ozonizer
ozone
flow rate
σfi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4380579A
Other languages
Japanese (ja)
Inventor
Minoru Ikegami
Koji Akimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4380579A priority Critical patent/JPS55136103A/en
Publication of JPS55136103A publication Critical patent/JPS55136103A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To effectively accomplish treatment in each ozone treatment vessel independently of a load change by controlling the ozone yield of an ozonizer so that the total of the ozone flow reate set signals of ozone treatment vessels may correspond to the outlet flow rate of the ozonizer.
CONSTITUTION: Output Ci of analyzer 8i enters comparator 9 in controller 4 and is compared to preset upper and lower limit values. When output Ci is within the range between the values, the output of flow rate setter 10 does not change. In case output Ci deviates from the range, according to the deviation a signal for changing the flow rate from Fi to Fi' is sent. Output Fi' from setter 10 enters adder 11 to calculate ΣFi', and in divider 12 the ratio of ΣFi' to flow rate F of main flow meter 5, Q=ΣFi'/F is calculated. In case of Q>1 controller 4 gives output to voltage regulator 2 according to the deviation of the Q value so that the voltage of ozonizer 1 is raised, thus increasing the ozone yield of ozonizer 1. As a result, the indication of each of analyzers 81W8n is raised, Fi" is set again, and control is repeated until Q becomes 1. In case of Q<1 the reverse control is performed.
COPYRIGHT: (C)1980,JPO&Japio
JP4380579A 1979-04-11 1979-04-11 Ozone yield controlling method Pending JPS55136103A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4380579A JPS55136103A (en) 1979-04-11 1979-04-11 Ozone yield controlling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4380579A JPS55136103A (en) 1979-04-11 1979-04-11 Ozone yield controlling method

Publications (1)

Publication Number Publication Date
JPS55136103A true JPS55136103A (en) 1980-10-23

Family

ID=12673950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4380579A Pending JPS55136103A (en) 1979-04-11 1979-04-11 Ozone yield controlling method

Country Status (1)

Country Link
JP (1) JPS55136103A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009500855A (en) * 2005-07-07 2009-01-08 エム ケー エス インストルメンツ インコーポレーテッド Ozone system for multi-chamber tools

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009500855A (en) * 2005-07-07 2009-01-08 エム ケー エス インストルメンツ インコーポレーテッド Ozone system for multi-chamber tools
JP2012146987A (en) * 2005-07-07 2012-08-02 Mks Instruments Inc Ozone system for multi-chamber tool

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