NL1005102C2 - Inrichting voor het behandelen van halfgeleiderschijven. - Google Patents

Inrichting voor het behandelen van halfgeleiderschijven. Download PDF

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Publication number
NL1005102C2
NL1005102C2 NL1005102A NL1005102A NL1005102C2 NL 1005102 C2 NL1005102 C2 NL 1005102C2 NL 1005102 A NL1005102 A NL 1005102A NL 1005102 A NL1005102 A NL 1005102A NL 1005102 C2 NL1005102 C2 NL 1005102C2
Authority
NL
Netherlands
Prior art keywords
treatment
semiconductor
reactor
turntable
semiconductor wafers
Prior art date
Application number
NL1005102A
Other languages
English (en)
Dutch (nl)
Inventor
Albert Hasper
Jan Zinger
Ernst Hendrik August Granneman
Original Assignee
Advanced Semiconductor Mat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Semiconductor Mat filed Critical Advanced Semiconductor Mat
Priority to NL1005102A priority Critical patent/NL1005102C2/nl
Priority to PCT/NL1998/000055 priority patent/WO1998036444A1/en
Priority to DE69804944T priority patent/DE69804944T2/de
Priority to JP53334298A priority patent/JP3403207B2/ja
Priority to KR10-1999-7006750A priority patent/KR100411968B1/ko
Priority to US09/355,509 priority patent/US6607602B1/en
Priority to AU56828/98A priority patent/AU5682898A/en
Priority to EP98901135A priority patent/EP0960434B1/en
Priority to TW087112194A priority patent/TW386242B/zh
Application granted granted Critical
Publication of NL1005102C2 publication Critical patent/NL1005102C2/nl

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
NL1005102A 1997-01-27 1997-01-27 Inrichting voor het behandelen van halfgeleiderschijven. NL1005102C2 (nl)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL1005102A NL1005102C2 (nl) 1997-01-27 1997-01-27 Inrichting voor het behandelen van halfgeleiderschijven.
PCT/NL1998/000055 WO1998036444A1 (en) 1997-01-27 1998-01-27 Device for processing semiconductor wafers
DE69804944T DE69804944T2 (de) 1997-01-27 1998-01-27 Gerät für die verarbeitung von halbleiterscheiben
JP53334298A JP3403207B2 (ja) 1997-01-27 1998-01-27 半導体ウェーハのプロセス装置
KR10-1999-7006750A KR100411968B1 (ko) 1997-01-27 1998-01-27 반도체 웨이퍼 처리용 장치
US09/355,509 US6607602B1 (en) 1997-01-27 1998-01-27 Device for processing semiconductor wafers
AU56828/98A AU5682898A (en) 1997-01-27 1998-01-27 Device for processing semiconductor wafers
EP98901135A EP0960434B1 (en) 1997-01-27 1998-01-27 Device for processing semiconductor wafers
TW087112194A TW386242B (en) 1997-01-27 1998-07-23 Device for processing semiconductor wafers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1005102A NL1005102C2 (nl) 1997-01-27 1997-01-27 Inrichting voor het behandelen van halfgeleiderschijven.
NL1005102 1997-01-27

Publications (1)

Publication Number Publication Date
NL1005102C2 true NL1005102C2 (nl) 1998-07-29

Family

ID=19764285

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1005102A NL1005102C2 (nl) 1997-01-27 1997-01-27 Inrichting voor het behandelen van halfgeleiderschijven.

Country Status (9)

Country Link
US (1) US6607602B1 (ja)
EP (1) EP0960434B1 (ja)
JP (1) JP3403207B2 (ja)
KR (1) KR100411968B1 (ja)
AU (1) AU5682898A (ja)
DE (1) DE69804944T2 (ja)
NL (1) NL1005102C2 (ja)
TW (1) TW386242B (ja)
WO (1) WO1998036444A1 (ja)

Families Citing this family (246)

* Cited by examiner, † Cited by third party
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US6607602B1 (en) 2003-08-19
DE69804944D1 (de) 2002-05-23
WO1998036444A1 (en) 1998-08-20
AU5682898A (en) 1998-09-08
EP0960434A1 (en) 1999-12-01
EP0960434B1 (en) 2002-04-17
TW386242B (en) 2000-04-01
DE69804944T2 (de) 2002-11-07
KR100411968B1 (ko) 2003-12-24
KR20000070506A (ko) 2000-11-25
JP2000511710A (ja) 2000-09-05
JP3403207B2 (ja) 2003-05-06

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