KR970053627A - 수지 밀봉형 반도체 장치 - Google Patents

수지 밀봉형 반도체 장치 Download PDF

Info

Publication number
KR970053627A
KR970053627A KR1019960069232A KR19960069232A KR970053627A KR 970053627 A KR970053627 A KR 970053627A KR 1019960069232 A KR1019960069232 A KR 1019960069232A KR 19960069232 A KR19960069232 A KR 19960069232A KR 970053627 A KR970053627 A KR 970053627A
Authority
KR
South Korea
Prior art keywords
chip
island region
resin
semiconductor device
sealed semiconductor
Prior art date
Application number
KR1019960069232A
Other languages
English (en)
Other versions
KR100257912B1 (ko
Inventor
도모히로 후지사키
도시카즈 세이
다께히또 이나바
Original Assignee
니시무로 타이조
가부시기가이샤 도시바
가네꼬 히사시
닛뽕덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니시무로 타이조, 가부시기가이샤 도시바, 가네꼬 히사시, 닛뽕덴끼 가부시끼가이샤 filed Critical 니시무로 타이조
Publication of KR970053627A publication Critical patent/KR970053627A/ko
Application granted granted Critical
Publication of KR100257912B1 publication Critical patent/KR100257912B1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/04042Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05556Shape in side view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/05599Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48095Kinked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • H01L2224/49173Radial fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49177Combinations of different arrangements
    • H01L2224/49179Corner adaptations, i.e. disposition of the wire connectors at the corners of the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • H01L2224/854Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85438Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/85447Copper (Cu) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01039Yttrium [Y]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01047Silver [Ag]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Abstract

아일랜드 영역(6)과 복수의 내부 리드(2B,2C,2D,2E)로 형성되는 리드 프레임(1B,1C,1D,1E)과, 상기 내부 리드2B,2C,2D,2E)의 선단은 칩(5)의 평면에 수직하게 보이는 캐비티(9B,9C,9D,9E)내에 위치하며, (b)복수의 전극을 가지며 상기 리드 프레임(1B,1C,1D,1E)의 상기 아일랜드 영역(6)상에 장착된 칩(5)과, (c)상기 칩(5)의 상기 전극을 상기 내부 리드(2B,2C,2D,2E)에 연결하는 와이어를 포함하는, 수지 밀봉형 반도체 장치에 있어서, 상기 캐비티(9B,9C,9D,9E)는 상기 칩(5)의 각 측부와 각을 형성하는 세그먼트를 갖는 둘레를 가져, 상기 칩(5)의 대각선(D1)에서 코너부에 장착된 전극에 연결될 내부 리드(L1)의 선단이 상기 칩(5)의 상기 아일랜드 영역(6)에 가장 근접하게 배치되며, 상기 대각선(D1)에 수직한 상기 칩(5)의 상기 아일랜드 영역(6)에 가장 근접하게 배치되며, 상기 대각선(D1)에 수직한 상기 칩(5)의 대각선(D2)상의 코너부에 장착된 전극중 하나에 연결될 내부 리드의 선단이 상기 칩(5)의 상기 아일랜드 영역(6)으로부터 가장 멀게 배치되는 것을 특징으로 하는 수진 밀봉형 반도체 장치를 제공하는 것이다. 본 발명은, 상부 및 하부금형에 의해 형성된 공간으로 용융수지를 주입하여 반도체 장치를 밀봉하는 단계에서, 용율수지로부터 가장 큰 힘을 받는 와이어를 짧게하는 것이 가능하다. 따라서, 상기한 단계에서, 인접 와이어 사이에서 발생하는 단락을 방지하는 것이 가능하며, 이에 의해 고수율 및 고신뢰성을 갖는 수지 밀봉형 반도체 장치를 제공하는 것이다.

Description

수지 밀봉형 반도체 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제6도는 본 발명의 제1실시예에 따라 제조된, 와이어를 통해 내부 리드에 연결된 칩이 장착된 리드 프레임을 도시한 평면도이다.

Claims (11)

  1. 아일랜드 영역(6)과 복수의 내부 리드(2B,2C,2D,2E)로 형성되는 리드 프레임(1B,1C,1D,1E)과, 복수의전극을 가지며 상기 리드 프레임(1B,1C,1D,1E)의 상기 아일랜드 영역(6)상에 장착된 칩(5)과, 상기 칩(5)의상기 전극을 상기 내부 리드(2B,2C,2D,2E)에 연결하는 와이어를 포함하며, 상기 내부 리드(2B,2C,2D,2E)의선단은 칩(5)의 평면에 수직하게 보이는 캐비티(9B,9C,9D,9E)를 형성하며, 상기 아일랜드 영역(6)이 상기캐비티(9B,9C,9D,9E) 내에 위치하는 수지 밀봉형 반도체 장치에 있어서, 상기 캐비며,(9B,9C,9D,9E)는 상기칩(5)의 각 측부와 각을 형성하는 세그먼트를 갖는 둘레를 가져, 상기 칩(5)의 코너부에 장착된 전극에 연결될 내부 리드의 선단이 내부리드의 다른 선단보다 상기 칩(5)의 상기 아일랜드 영역(6)에 가장 가깝게 배치되는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  2. 제1항에 있어서, 상기 캐비티(9B,9D,9E)는 다각형이며, 이 다각형은 5각형 이상인 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  3. 제1항에 있어서, 상기 캐비티(9B)는 8각형이며, 이 8각형의 8개의 8개의 정점은 상기 칩(5)의 연장 대각선(D1)과 상기 칩(5)의 중앙으로부터 상기 칩(5)의 측부 중점까지 연결하는 연장선 상에 위치하는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  4. 제1항에 있어서, 상기 캐비티(9B,9D,9E)는 아치형 세그먼트를 가지지 않는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  5. 제1항에 있어서, 상기 캐비티(9C)는 원형인 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  6. 아일랜드 영역(6)과 이 아일랜드 영역(6)의 둘레에 배치되는 복수의 내부 리드(2B,2C,2D,2E)로 형성되는 리드 프레임(1B,1C,1D,1E)과, 복수의 전극을 가지며 상기 리드 프레임(1B,1C,1D,1E)의 상기 아일랜드 영역(6)상에 장착된 칩(5)과, 상기 칩(5)의 상기 전극을 상기 내부 리드(2B,2C,2D,2E)에 연결하는 와이어를 포함하는 수지 밀봉형 반도체 장치에 있어서, 상기 칩(5)의 코너부에 위치하는 전극(B)에 연결될 내부 리드(A)가 상기 아일랜드 영역(6)에 근접하게 배치되어, 상기 전극(B)에 상기 내부 리드(A)를 연결하는 와이어가 다른 와이어들 보다 더 짧은 길이를 갖는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  7. 아일랜드 영역(6)과 복수의 내부 리드(2B,2C,2D,2E)로 형성되는 리드 프레임(1B,1C,1D,1E)과, 복수의 전극을 가지며 상기 리드 프레임(1B,1C,1D,1E)의 상기 아일랜드 영역(6)상에 장착된 칩(5)과, 상기 칩(5)의 상기 전극을 상기 내부 리드(2B,2C,2D,2E)에 연결하는 와이어를 포함하며, 상기 내부 리드(2B,2C,2D,2E)의 선단은 칩(5)의 평면에 수직하게 보이는 캐비티(9B,9C,9D,9E)를 형성하며, 상기 아일랜드 영역(6)이 상기 캐비티 (9B,9C,9D,9E)내에 위치하는 수지 밀봉형 반도체 장치에 있어서, 상기 캐비티(9B,9C,9D,9E)는 상기 칩(5)의 각 측부와 각을 형성하는 세그먼트를 갖는 둘레를 가져, 상기 칩(5)의 대각선(D1)에서 코너부에 장착된 전극에 연결될 내부 리드(L1)의 선단이 상기 칩(5)의 상기 아일랜드 영역(6)에 가장 근접하게 배치되며, 상기 대각선(D1)에 수직한 상기 칩(5)의 대각선(D2)상의 코너부에 장착된 전극 중 하나에 연결될 내부 리드의 선단이 상기 칩(5)의 상기 아일랜드 영역(6)으로부터 가장 멀게 배치되는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  8. 아일랜드 영역(6)과 복수의 내부 리드(2B,2C,2D,2E)로 형성되는 리드 프레임(1B,1C,1D,1E)과, 복수의 전극을 가지며 상기 리드 프레임(1B,1C,1D,1E)의 상기 아일랜드 영역(6)상에 장착된 칩(5)과, 상기 칩(5)의 상기 전극을 상기 내부 리드(2B,2C,2D,2E)에 연결하는 와이어를 포함하며, 상기 내부 리드(2B,2C,2D,2E)의 선단은 칩(5)의 평면에 수직하게 보이는 캐비티(9B,9C,9D,9E)를 형성하며, 상기 아일랜드 영역(6)이 상기 캐비티 (9B,9C,9D,9E)내에 위치하는 수지 밀봉형 반도체 장치에 있어서, 상기 캐비티(9B,9C,9D,9E)는 상기 칩(5)의 대각선(D1)상의 코너부에 장착된 전극에 내부 리드(L1)를 연결하는 와이어의 길이가 가장 짧으며, 상기 대각선(D1)에 수직한 상기 칩(5)의 대각선(D2)상의 코너부에 장착된 전극 중 하나를 연결하는 와이어의 길이가 가장 길도록 형성되는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  9. 제8항에 있어서, 상부 및 하부 금형(15,16)에 의해 형성되고 상기 칩(5)이 위치하는 공간(22A,22B)으로용융수지(18)를 도입시키는 게이트(21)에 수직하게 상기 대각선(D1)이 연장하고, 상기 대각선(D2)이 상기게이트(21)와 동일한 방향으로 연장하도록, 상기 칩(5)을 위치시키는 것을 특징으로 하는 수지 밀봉형 반도체장치.
  10. 제8항에 있어서, 상기 게이트(21)에 보다 근접하게 위치한 상기 캐비티(9E)의 절반부(H1)와 상기 게이트(21)로부터 보다 떨어져 위치한 상기 캐비티(9E)의 절반부(H1)가 서로 비대칭인 것을 특징으로 하는 수지 밀봉형 반도체 장치.
  11. 제10항에 있어서, 상기 내부 리드(L1)로부터 보다 떨어져 위치한 관련 내부 리드에 전극을 연결하는 와이어의 길이가 보다 길게 되도록, 상기 캐비티(9E)의 다른 절반부(H2)에 위치한 내부 리드(2E)가 설치되는 것을 특징으로 하는 수지 밀봉형 반도체 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960069232A 1995-12-20 1996-12-20 수지 밀봉형 반도체 장치 KR100257912B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP95-321671 1995-12-11
JP95-331667 1995-12-20
JP7331667A JP2765542B2 (ja) 1995-12-20 1995-12-20 樹脂封止型半導体装置

Publications (2)

Publication Number Publication Date
KR970053627A true KR970053627A (ko) 1997-07-31
KR100257912B1 KR100257912B1 (ko) 2000-06-01

Family

ID=18246241

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960069232A KR100257912B1 (ko) 1995-12-20 1996-12-20 수지 밀봉형 반도체 장치

Country Status (3)

Country Link
US (1) US5757067A (ko)
JP (1) JP2765542B2 (ko)
KR (1) KR100257912B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100743335B1 (ko) * 1999-06-30 2007-07-26 가부시키가이샤 히타치세이사쿠쇼 반도체 장치

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5923077A (en) * 1998-02-11 1999-07-13 Bourns, Inc. Passive component integrated circuit chip
US6225685B1 (en) * 2000-04-05 2001-05-01 Advanced Micro Devices, Inc. Lead frame design for reduced wire sweep having a defined gap between tie bars and lead pins
IT1317559B1 (it) * 2000-05-23 2003-07-09 St Microelectronics Srl Telaio di supporto per chip avente interconnessioni a bassa resistenza.
US6969918B1 (en) * 2001-08-30 2005-11-29 Micron Technology, Inc. System for fabricating semiconductor components using mold cavities having runners configured to minimize venting
JP4738675B2 (ja) * 2001-09-14 2011-08-03 ルネサスエレクトロニクス株式会社 半導体装置
US20070096269A1 (en) 2005-10-31 2007-05-03 Mediatek Inc. Leadframe for semiconductor packages
US8754513B1 (en) * 2008-07-10 2014-06-17 Marvell International Ltd. Lead frame apparatus and method for improved wire bonding
JP2010153466A (ja) * 2008-12-24 2010-07-08 Elpida Memory Inc 配線基板
JP2015092635A (ja) * 2015-02-05 2015-05-14 大日本印刷株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171734A (ja) * 1984-02-17 1985-09-05 Hitachi Ltd 半導体装置
JPS61292928A (ja) * 1985-06-21 1986-12-23 Hitachi Ltd 半導体装置
JPH01298757A (ja) * 1988-05-27 1989-12-01 Hitachi Ltd リードフレーム
US5466967A (en) * 1988-10-10 1995-11-14 Lsi Logic Products Gmbh Lead frame for a multiplicity of terminals
JPH04164357A (ja) * 1990-10-29 1992-06-10 Nec Corp 半導体装置用リードフレーム
JPH05226564A (ja) * 1992-02-14 1993-09-03 Rohm Co Ltd 半導体装置
JP2834990B2 (ja) * 1993-11-02 1998-12-14 ローム株式会社 クワッド型半導体装置用リードフレームの構造
KR950015736A (ko) * 1993-11-20 1995-06-17 김광호 반도체 장치용 리드프레임

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100743335B1 (ko) * 1999-06-30 2007-07-26 가부시키가이샤 히타치세이사쿠쇼 반도체 장치
KR100864781B1 (ko) * 1999-06-30 2008-10-22 가부시키가이샤 히타치세이사쿠쇼 반도체 장치
KR100878939B1 (ko) * 1999-06-30 2009-01-19 가부시키가이샤 히타치세이사쿠쇼 반도체 장치
KR100885606B1 (ko) * 1999-06-30 2009-02-24 가부시키가이샤 히타치세이사쿠쇼 반도체 장치

Also Published As

Publication number Publication date
JP2765542B2 (ja) 1998-06-18
US5757067A (en) 1998-05-26
JPH09172130A (ja) 1997-06-30
KR100257912B1 (ko) 2000-06-01

Similar Documents

Publication Publication Date Title
KR900004721B1 (ko) 반도체장치 및 그에 사용되는 리드 프레임
US5914529A (en) Bus bar structure on lead frame of semiconductor device package
KR970053627A (ko) 수지 밀봉형 반도체 장치
KR0179925B1 (ko) 리드프레임 및 그를 이용한 버텀 리드 반도체 패키지
US5196917A (en) Carrier tape
KR900001989B1 (ko) 반도체장치
KR100298688B1 (ko) 반도체패키지제조용몰드금형의에어벤트구조
JPH0653266A (ja) 半導体装置
KR19990034731A (ko) 리드 온 칩형 리드 프레임과 그를 이용한 패키지
JPH04284656A (ja) 樹脂封止形半導体装置およびリードフレーム
KR100658894B1 (ko) 리드프레임의 몰딩 방법
JPH02202042A (ja) 樹脂封止型半導体装置
KR100244509B1 (ko) 반도체 패키지의 제조방법
KR100473338B1 (ko) 반도체패키지용 리드프레임 및 그 봉지 방법
JPH05102373A (ja) 半導体装置
JPS59207647A (ja) 半導体装置およびリ−ドフレ−ム
JPS63273324A (ja) 樹脂封止型回路装置の製造方法
JPH06140551A (ja) 半導体装置
JPH07122703A (ja) 樹脂封止型半導体装置及びその製造方法
JPH012329A (ja) 樹脂封止用金型
KR20050014131A (ko) 리이드 프레임 및, 그것을 구비한 반도체 팩키지
JPH08186137A (ja) 半導体チップの樹脂封止方法
JPS6384054A (ja) 樹脂封止型半導体装置
KR20020087766A (ko) 반도체의 에어 캐비티 패키지 및 그 패키징 방법
JPS6140036A (ja) 樹脂封止型半導体装置の製造方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
J201 Request for trial against refusal decision
AMND Amendment
B701 Decision to grant
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee