KR102388646B1 - 기판 처리 장치 - Google Patents
기판 처리 장치 Download PDFInfo
- Publication number
- KR102388646B1 KR102388646B1 KR1020207022192A KR20207022192A KR102388646B1 KR 102388646 B1 KR102388646 B1 KR 102388646B1 KR 1020207022192 A KR1020207022192 A KR 1020207022192A KR 20207022192 A KR20207022192 A KR 20207022192A KR 102388646 B1 KR102388646 B1 KR 102388646B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- processing
- tank
- treatment tank
- arrangement direction
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 160
- 239000007788 liquid Substances 0.000 claims abstract description 137
- 238000000034 method Methods 0.000 claims description 9
- 230000000630 rising effect Effects 0.000 abstract description 10
- 238000004088 simulation Methods 0.000 description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 238000007664 blowing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 101150106709 ARC1 gene Proteins 0.000 description 1
- 101150046212 ARC2 gene Proteins 0.000 description 1
- 101100013575 Arabidopsis thaliana FTSHI1 gene Proteins 0.000 description 1
- TWDJIKFUVRYBJF-UHFFFAOYSA-N Cyanthoate Chemical compound CCOP(=O)(OCC)SCC(=O)NC(C)(C)C#N TWDJIKFUVRYBJF-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020227011423A KR102429858B1 (ko) | 2018-03-19 | 2018-11-22 | 기판 처리 장치 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018051050A JP7002969B2 (ja) | 2018-03-19 | 2018-03-19 | 基板処理装置 |
JPJP-P-2018-051050 | 2018-03-19 | ||
PCT/JP2018/043203 WO2019181067A1 (ja) | 2018-03-19 | 2018-11-22 | 基板処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020227011423A Division KR102429858B1 (ko) | 2018-03-19 | 2018-11-22 | 기판 처리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20200099610A KR20200099610A (ko) | 2020-08-24 |
KR102388646B1 true KR102388646B1 (ko) | 2022-04-19 |
Family
ID=67987015
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020207022192A KR102388646B1 (ko) | 2018-03-19 | 2018-11-22 | 기판 처리 장치 |
KR1020227011423A KR102429858B1 (ko) | 2018-03-19 | 2018-11-22 | 기판 처리 장치 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020227011423A KR102429858B1 (ko) | 2018-03-19 | 2018-11-22 | 기판 처리 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7002969B2 (ja) |
KR (2) | KR102388646B1 (ja) |
CN (1) | CN111886675B (ja) |
TW (1) | TWI710048B (ja) |
WO (1) | WO2019181067A1 (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3343033B2 (ja) | 1996-06-28 | 2002-11-11 | 大日本スクリーン製造株式会社 | 基板処理装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125136A (ja) * | 1984-11-22 | 1986-06-12 | Hitachi Ltd | 処理槽 |
JPH0310253A (ja) * | 1989-06-07 | 1991-01-17 | Fujitsu Ltd | フォトマスクの処理方法 |
JPH0480040U (ja) * | 1990-11-26 | 1992-07-13 | ||
JP2970894B2 (ja) * | 1993-04-07 | 1999-11-02 | 東京エレクトロン株式会社 | 洗浄装置 |
JP2912538B2 (ja) * | 1993-12-08 | 1999-06-28 | 大日本スクリーン製造株式会社 | 浸漬型基板処理装置 |
JPH0817782A (ja) * | 1994-06-28 | 1996-01-19 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JPH08195431A (ja) * | 1995-01-12 | 1996-07-30 | Tokyo Electron Ltd | 基板保持具及び洗浄装置 |
JPH10303167A (ja) * | 1997-04-28 | 1998-11-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2000012497A (ja) * | 1998-06-22 | 2000-01-14 | Toho Kasei Kk | 被処理体処理装置 |
JP2000070886A (ja) * | 1998-09-03 | 2000-03-07 | Toho Kasei Kk | 基板処理装置 |
JP2002134467A (ja) | 2000-10-26 | 2002-05-10 | Daikin Ind Ltd | 基板処理装置 |
JP2007019238A (ja) * | 2005-07-07 | 2007-01-25 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP4781253B2 (ja) * | 2006-12-22 | 2011-09-28 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP4767204B2 (ja) * | 2007-03-26 | 2011-09-07 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JP2009231579A (ja) * | 2008-03-24 | 2009-10-08 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板処理方法 |
JP5394784B2 (ja) * | 2009-03-24 | 2014-01-22 | 大日本スクリーン製造株式会社 | 基板洗浄装置 |
JP6287750B2 (ja) * | 2013-12-27 | 2018-03-07 | 東京エレクトロン株式会社 | 基板液処理装置 |
JP2017117926A (ja) * | 2015-12-24 | 2017-06-29 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6617036B2 (ja) | 2016-01-18 | 2019-12-04 | 株式会社Screenホールディングス | 基板処理装置 |
-
2018
- 2018-03-19 JP JP2018051050A patent/JP7002969B2/ja active Active
- 2018-11-22 KR KR1020207022192A patent/KR102388646B1/ko active IP Right Grant
- 2018-11-22 KR KR1020227011423A patent/KR102429858B1/ko active IP Right Grant
- 2018-11-22 WO PCT/JP2018/043203 patent/WO2019181067A1/ja active Application Filing
- 2018-11-22 CN CN201880091453.6A patent/CN111886675B/zh active Active
-
2019
- 2019-03-18 TW TW108109185A patent/TWI710048B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3343033B2 (ja) | 1996-06-28 | 2002-11-11 | 大日本スクリーン製造株式会社 | 基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI710048B (zh) | 2020-11-11 |
KR20220047406A (ko) | 2022-04-15 |
TW201939647A (zh) | 2019-10-01 |
CN111886675B (zh) | 2024-03-26 |
JP2019165067A (ja) | 2019-09-26 |
WO2019181067A1 (ja) | 2019-09-26 |
KR20200099610A (ko) | 2020-08-24 |
CN111886675A (zh) | 2020-11-03 |
JP7002969B2 (ja) | 2022-01-20 |
KR102429858B1 (ko) | 2022-08-04 |
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