KR102058595B1 - 탄소 도핑된 규소 함유 필름을 위한 조성물 및 이의 사용 방법 - Google Patents

탄소 도핑된 규소 함유 필름을 위한 조성물 및 이의 사용 방법 Download PDF

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KR102058595B1
KR102058595B1 KR1020177025009A KR20177025009A KR102058595B1 KR 102058595 B1 KR102058595 B1 KR 102058595B1 KR 1020177025009 A KR1020177025009 A KR 1020177025009A KR 20177025009 A KR20177025009 A KR 20177025009A KR 102058595 B1 KR102058595 B1 KR 102058595B1
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plasma
film
disilacyclobutane
cyclic
silicon
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KR20170115590A (ko
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하리핀 찬드라
커크 스코트 스커트힐
아누파마 말리카주난
신지안 레이
매튜 알. 맥도날드
만차오 시아오
마두카르 바스카라 라오
지안헹 리
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버슘머트리얼즈 유에스, 엘엘씨
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/45523—Pulsed gas flow or change of composition over time
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