KR101286283B1 - 기판 반송 장치 및 기판 반송 방법 - Google Patents

기판 반송 장치 및 기판 반송 방법 Download PDF

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Publication number
KR101286283B1
KR101286283B1 KR1020097003167A KR20097003167A KR101286283B1 KR 101286283 B1 KR101286283 B1 KR 101286283B1 KR 1020097003167 A KR1020097003167 A KR 1020097003167A KR 20097003167 A KR20097003167 A KR 20097003167A KR 101286283 B1 KR101286283 B1 KR 101286283B1
Authority
KR
South Korea
Prior art keywords
substrate
conveyor
branch
main conveyor
glass plate
Prior art date
Application number
KR1020097003167A
Other languages
English (en)
Korean (ko)
Other versions
KR20090048461A (ko
Inventor
겐스케 히라타
도모오 미즈노
스스무 무라야마
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20090048461A publication Critical patent/KR20090048461A/ko
Application granted granted Critical
Publication of KR101286283B1 publication Critical patent/KR101286283B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Engineering (AREA)
  • Relays Between Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
KR1020097003167A 2006-09-11 2007-02-15 기판 반송 장치 및 기판 반송 방법 KR101286283B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006245829A JP4957133B2 (ja) 2006-09-11 2006-09-11 基板搬送装置及び基板搬送方法
JPJP-P-2006-245829 2006-09-11
PCT/JP2007/052669 WO2008032455A1 (fr) 2006-09-11 2007-02-15 Appareil de transfert de substrats et procédé de transfert de substrats

Publications (2)

Publication Number Publication Date
KR20090048461A KR20090048461A (ko) 2009-05-13
KR101286283B1 true KR101286283B1 (ko) 2013-07-15

Family

ID=39183524

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097003167A KR101286283B1 (ko) 2006-09-11 2007-02-15 기판 반송 장치 및 기판 반송 방법

Country Status (5)

Country Link
JP (1) JP4957133B2 (ja)
KR (1) KR101286283B1 (ja)
CN (1) CN101512748B (ja)
TW (1) TWI393205B (ja)
WO (1) WO2008032455A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5167999B2 (ja) * 2008-07-16 2013-03-21 株式会社Ｉｈｉ 基板移送システム及び基板移送方法
CN101870374B (zh) * 2010-06-24 2011-11-02 江阴纳尔捷机器人有限公司 物料分流机构
JP5842484B2 (ja) * 2011-09-07 2016-01-13 日本電気硝子株式会社 板ガラスの位置決め装置及びその位置決め方法
JP2013231962A (ja) * 2012-04-06 2013-11-14 Nsk Technology Co Ltd 露光装置及び露光方法
JP6011311B2 (ja) 2012-12-18 2016-10-19 日本電気硝子株式会社 ワーク搬送装置およびワーク搬送方法
JP6032348B2 (ja) * 2013-02-26 2016-11-24 株式会社Ihi 搬送装置
CN104860046A (zh) * 2015-05-18 2015-08-26 山东中科凤祥生物工程有限公司 产品加工设备、汇流输送设备
KR101937687B1 (ko) * 2017-02-27 2019-04-09 크린팩토메이션 주식회사 반송 경로 분산 제어형 컨베이어 장치 및 그에 사용되는 반송 경로 분산 제어 방법
EP3514825B1 (en) * 2018-01-22 2023-11-29 Meyer Burger GmbH Wafer sorting
KR101991841B1 (ko) * 2018-12-05 2019-06-21 크린팩토메이션 주식회사 반송 경로 분산 제어형 컨베이어 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05100199A (ja) * 1991-10-08 1993-04-23 Tokyo Electron Yamanashi Kk 搬送アーム
JPH10275766A (ja) * 1997-03-28 1998-10-13 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2005178919A (ja) * 2003-12-16 2005-07-07 Daifuku Co Ltd 搬送装置
JP2006176255A (ja) 2004-12-21 2006-07-06 Murata Mach Ltd 搬送システム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0829304B2 (ja) * 1988-07-29 1996-03-27 株式会社マキ製作所 青果物選別方法
JP3650495B2 (ja) * 1995-12-12 2005-05-18 東京エレクトロン株式会社 半導体処理装置、その基板交換機構及び基板交換方法
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05100199A (ja) * 1991-10-08 1993-04-23 Tokyo Electron Yamanashi Kk 搬送アーム
JPH10275766A (ja) * 1997-03-28 1998-10-13 Dainippon Screen Mfg Co Ltd 基板処理装置
JP2005178919A (ja) * 2003-12-16 2005-07-07 Daifuku Co Ltd 搬送装置
JP2006176255A (ja) 2004-12-21 2006-07-06 Murata Mach Ltd 搬送システム

Also Published As

Publication number Publication date
JP4957133B2 (ja) 2012-06-20
KR20090048461A (ko) 2009-05-13
TW200814224A (en) 2008-03-16
WO2008032455A1 (fr) 2008-03-20
CN101512748A (zh) 2009-08-19
CN101512748B (zh) 2013-02-06
TWI393205B (zh) 2013-04-11
JP2008066661A (ja) 2008-03-21

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