200814224 九、發明說明： 【發明所屬之技術領域】 本毛明係有關-種用以將例如半導體晶 顯示器用玻璃板等之μ十板面板 及基板搬送方法。 k衣置 曰所申請之曰本專利 ’在此援用其内容。 本申請案係主張2006年9月11 申請案特願2006-245829號之優先權 【先前技術】 於製造半導體裝置之工廢，及製造液晶裝置、咖、虹 裝置等之平板面板顯示器之工薇等所設置之基板搬送裝 置’係搬送半導體晶圓及玻璃板等之基板，並使用承载哭 及機器人臂等，在薄膜形成裝置、偏彳裝置、試驗裝^ 各種處理裝置與搬送路徑之間進行基板之交接。在如上述 之搬k衣置中’基板係—般以收容在可收容複數張基板之 匣具之狀悲被搬送（參照專利文獻丨）。 近年來，伴隨液晶電視等之平板面板顯示器之大晝面 化基板亦大型化。因此，用以收容基板之匿具等亦大型 化、重量化，而使搬送速度下降，藉此招致例如未完成品 庫存之增大等，使有效率的搬送變得困難。 口此將基板一張一張地高速搬送之單片式搬送受到矚目 (參照專利文獻1)。 (專利文獻1)日本特開平9—58844號公報 【發明内容】 (發明所欲解決之課題） 318994 5 200814224 ^ 然而，比起藉由匣具搬送之情況，將基板單片式搬送 之情況下所搬送之個數會增加。因此，為了謀求與以往同 . 等或其以上之處理速度，係必須更加將基板高速搬送。 . 尤其，在主輸送帶及與該主輸送帶水平分歧之分歧輸 、 送帶之間之基板的交接速度，係在謀求基板之搬送速度上 ^ 非常地重要。因此，期望有提高在主輸送帶與分歧輸送帶 之間之基板的交接速度之技術。 又，在將玻璃板早片式搬送之基板搬送裝置中^在主 輸送帶與分歧輸送帶之間，會有須在未改變相對於行進方 向之朝向之狀態下交接基板之情況。 在將基板收容於匣具來進行搬送之習知基板搬送裝置 中，例如在未改變相對於行進方向之朝向之狀態下，將基 板自主輸送帶交接至分歧輸送帶時，係將搬送於主輸送帶 上之匣具之搬送暫時停止，而在使匣具轉動後交接至分歧 輸送帶。 厂 然而，於將基板單片式搬送之基板搬送裝置中，以同 樣的方法，進行基板之交接時，由於必須進行停止基板搬 送之步驟與將停止後之基板交接至分歧輸送帶之步驟，而 會花費時間在主輸送帶與分歧輸送帶間之基板交接上。 (用以解決課題之手段） 本發明係有鑑於上述問題點而研創者，其目的在於在 未改變基板之行進方向之狀態下，在主輸送帶與分歧輸送 帶之間交接基板時，提高在主輸送帶與分歧輸送帶間之基 板交接速度。 6 318994 200814224 為達成上述目的，本發明之基板搬送I置，係具備： ==帶嫌係對基板進行單片式搬送；分歧輸送帶，係自 變地分歧；以及基板交接部’係在維持（未改 板水平轉動“一反面=丁進方向之朝向之狀態下一面使該基 送嫌將該餘自魅輸送帶交接至該分歧輸 ‘π二或自該分歧輸送帶交接至該主輪送帶。 帶或基板搬㈣置’在自上述主輸送帶對分歧輸送 二述分歧輸送帶對主輪送帶騎基板之交接時，藉 =父接部，可在維持（不變化）相對於基板之行進方向 ^月向的狀態下將基板—面水平轉動—面進行基板之交 擇0 且、、本各月之基板搬送i置，該基板交接部係可採用 動下述構件之構成：頭部’係用以固持該基板外緣；驅 口’糸以預定之轉動轴為中心使該頭部水平轉動；以及 動=。’係將-端連接於該頭部，並且將另一端連接於該驅 又’本發明之基板搬送裝置，係可採用具備在由該美 =父接部進行該基板之交接之期間，將該基板^ 支持之支持部之構成。 丁 =本發明之基板搬送裝置中，上述支持部係可採用 塗縮空氣使該基板浮起並予以支持之構成。 接著，本發明之基板搬送方法，係藉由主輸送帶對基 =仃单片式搬送’且在維持相對於該基板之行進方向^ 。之狀態下，一面使該主輸送帶上之該基板水平轉動， 318994 7 200814224 - 一面將該基板自該主輸送帶交接至水平分歧的分歧輸送 帶。 ^ 藉由該基板搬送方法，可在未改變相對於基板之行進 方向之朝向之狀態下，一面將基板水平轉動一面將基板自 - 主輸送帶交接至分歧輸送帶。 ， 接著，本發明之基板搬送方法，係藉由從主輸送帶水 平分歧的分歧輸送帶搬送基板，且在維持相對於該基板之 行進方向之朝向之狀態下，一面使該分歧輸送帶上之該基 板水平轉動，一面將該基板交接至該主輸送帶。 藉由該基板搬送方法，在未改變相對基板之行進方向 之朝向之狀態下，可一面將基板水平轉動一面將基板自分 歧輸送帶交接至主輸送帶。 (發明之效果） 藉由本發明，在維持相對於基板之行進方向之朝向（未 改變）之狀態下，一面將基板水平轉動，一面將基板自主輸 、送帶交接至分歧輸送帶、或自分歧輸送帶交接至主輸送 帶。因此，在主輸送帶或分歧輸送帶上，不須使基板停止 而能高速進行基板之交接。 因而，藉由本發明，無須改變基板之行進方向而在主 輸送帶與分歧輸送帶之間交接基板時，能提高在主輸送帶 與分歧輸送帶間之基板之交接速度。 【實施方式】 以下，參照圖式說明本發明基板搬送裝置及基板搬送 方法之一實施形態。此外，於以下之圖式，為了使各構件 8 318994 200814224 -作為可辨識之大小，而適當變更各構件之比例尺寸。 (第1實施形態） • 第1圖係顯示本第1實施形態之基板搬送裝置丨之一 .意圖。 $ 、，基板搬运裝置1係於製造液晶裝置、PDP及el裝置等 ’之平板面板顯示器之工廠，將玻璃板P 一張一張進行單片 式搬送之裝置，係具備：主輸送帶1〇;複數個分歧輪送帶 f 20’係相對於主輪送帶10於水平面内分歧；板交接部40， 係在主輸送帶1〇與分歧輸送帶20之間進行玻璃板p的交 接；以及未圖示之控制部等，係統括地控制該等。 主輸送帶10係為將玻璃板P水平載置，並且於沿其表 面之方向以固定速度進行搬送之裝置，係由：浮起單元12 (支持σρ )，藉由空軋使玻璃板p浮起而以非接觸的方式予 以支持；以及輸送帶部15等所構成（參照第2圖及第3 圖）。如上所示，於本實施形態中，本發明之支持部的功能 ν係被組入於主輸送帶1 〇之一部分。 主輪送帶10係以大致直線狀配置在工廠之洗淨室内 ♦也板面又，在主輸送帶10之複數部位，相對於主輸送 ▼ 以大致正交且水平地連接有分歧輸送帶2〇之一端。 分歧輸送帶20係與主輸送帶1〇同樣地，為將玻璃板 ρ水士平載置，並且於沿其纟面之方向以固定速度進行搬送 之裝置，係由空氣浮起單元12(支持部）、及輪送帶部15 等構成（參照第2圖及第3圖）。如上所示，於本實施形態 中，本發明之支持部的功能係亦組入於分歧輸送帶2〇之一 318994 9 200814224 部分。 在分歧輸送帶2G之另—端側，係配置/連接有薄膜形 置5、㈣裝置6及試驗裝置7等各種處理裝置。在 ::形成農置5、钱刻裝置6及試驗裝置7等各種處理裝 置中’分別平行配置有兩個分歧輸送帶2〇。 例如，連接於薄膜形成裝置5之分歧輸送冑21、22(分 ，輸送帶⑻之中’分歧輸送帶21係用以將玻璃板p搬入 溥膜形，裝置5之輪送帶，而分歧輸送帶22係用以將玻璃 板P自薄膜形成裝置5搬出之輸送帶。 同樣地，分歧輸送帶23、25(分歧輸送帶2〇)係用以將 玻璃板P搬入㈣裝置6、試驗裝置7之輸送帶，而分歧 輸运帶24、26(分歧輸送帶）係用以將玻璃板p自#刻裝置 6、試驗裝置7搬出之輸送帶。 此外，將玻璃板P搬入各種處理裝置之分歧輪送帶[Technical Field] The present invention relates to a method for transporting a micro-plate and a substrate for, for example, a glass plate for a semiconductor crystal display. k 置 曰 申请 申请 申请 专利 专利 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ The present application claims the priority of the application No. 2006-245829 of September 11, 2006. [Prior Art] The work of manufacturing a semiconductor device, and the manufacture of a flat panel display of a liquid crystal device, a coffee maker, a rainbow device, etc. The substrate transfer device is provided such that a substrate such as a semiconductor wafer or a glass plate is transported, and a film forming device, a hemiplegic device, a test device, and various transfer devices are used between the film forming device, the hemiplegic device, and the like. The transfer of the substrate. In the above-mentioned case, the substrate is transported in a state in which the substrate is accommodated in a plurality of substrates (see Patent Document). In recent years, large-sized substrates having flat panel displays such as liquid crystal televisions have also been enlarged. Therefore, the storage for accommodating the substrate is also increased in size and weight, and the transport speed is lowered, thereby causing, for example, an increase in the inventory of unfinished products, which makes efficient transport difficult. In this case, the single-piece transfer of the substrate at a high speed is carried out one by one (see Patent Document 1). (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei 9-58844 (Summary of the Invention) (Problems to be Solved by the Invention) 318994 5 200814224 ^ However, in the case of transporting the substrate in a single piece as compared with the case of transporting the cookware The number of shipments will increase. Therefore, in order to achieve the same processing speed as the conventional one or the like, it is necessary to transport the substrate at a higher speed. In particular, the transfer speed of the substrate between the main conveyor belt and the branch conveyor and the belt which are horizontally divergent from the main conveyor belt is extremely important in order to achieve the substrate transport speed. Therefore, it is desirable to have a technique for increasing the transfer speed of the substrate between the main conveyor belt and the branch conveyor belt. Further, in the substrate transfer apparatus which transports the glass sheet in the early stage, the substrate may be transferred between the main conveyance belt and the branch conveyer belt without changing the orientation with respect to the traveling direction. In a conventional substrate transport apparatus that transports a substrate in a cooker and transports it, for example, when the substrate autonomous transport belt is transferred to the branch conveyor without changing the orientation with respect to the traveling direction, it is transported to the main transport. The transfer of the cookware on the belt is temporarily stopped, and the transfer is carried out to the branch conveyor after the cookware is rotated. However, in the substrate transfer apparatus that transports the substrate in a single chip, when the substrate is transferred in the same manner, the step of stopping the substrate transfer and the step of transferring the stopped substrate to the branch conveyor are necessary. It takes time to transfer the substrate between the main conveyor belt and the divergent conveyor belt. (Means for Solving the Problem) The present invention has been made in view of the above problems, and an object thereof is to improve the transfer of a substrate between a main conveyor belt and a branch conveyor belt without changing the traveling direction of the substrate. The substrate transfer speed between the main conveyor belt and the divergent conveyor belt. 6 318994 200814224 In order to achieve the above object, the substrate transfer apparatus of the present invention has: == a suspected system for monolithic transport of substrates; a divergent conveyor belt is self-variant; and a substrate interface is maintained (Unchanging the horizontal rotation of the board) "One side of the opposite direction = the direction of the direction of the Dingjin side, the side is sent to the transfer of the remaining self-property conveyor belt to the divergent transmission 'π2 or from the divergent conveyor belt to the main wheel The belt or the substrate is moved (four) to be placed in the transfer from the main conveyor belt to the divergent conveyor belt when the divergent conveyor belt is delivered to the main wheel to the riding board, and the parenting portion can be maintained (not changed) relative to In the state in which the substrate travels in the direction of the moon, the substrate-surface is rotated horizontally, and the substrate is transferred to the substrate 0, and the substrate is transported by the current month. The substrate transfer portion can be configured as follows: The head ' is for holding the outer edge of the substrate; the drive port '糸 rotates the head horizontally about a predetermined axis of rotation; and the movement=.' connects the end to the head and connects the other end In the drive and the substrate transfer of the present invention The feeding device may be configured to have a support portion that supports the substrate during the transfer of the substrate by the US = parent portion. In the substrate transfer device of the present invention, the support portion may be employed. The substrate is transported by shrinking air to support and support the substrate. Next, the substrate transfer method of the present invention is carried out by the main conveyance belt by the substrate 仃 and is maintained in the traveling direction with respect to the substrate. In a state in which the substrate on the main conveyor belt is horizontally rotated, 318994 7 200814224 - the substrate is transferred from the main conveyor belt to the horizontally divergent conveyor belt. ^ By the substrate transport method, In the state in which the orientation of the traveling direction of the substrate is changed, the substrate is transferred from the main conveyor to the branch conveyor while the substrate is horizontally rotated. Next, the substrate transfer method of the present invention is performed by the level from the main conveyor. The divergent divergent conveyor conveys the substrate, and while maintaining the orientation with respect to the traveling direction of the substrate, the substrate on the divergent conveyor is horizontally The substrate is transferred to the main conveyor belt. The substrate transfer method allows the substrate to be transferred from the branch conveyor to the main body while the substrate is horizontally rotated without changing the orientation of the traveling direction of the counter substrate. (Effect of the Invention) According to the present invention, while the substrate is horizontally rotated while maintaining the orientation (unchanged) with respect to the traveling direction of the substrate, the substrate is automatically transported and fed to the branch conveyor. Or, the main conveyor belt is handed over from the divergent conveyor belt. Therefore, on the main conveyor belt or the divergent conveyor belt, the substrate can be transferred at a high speed without stopping the substrate. Therefore, by the present invention, it is not necessary to change the traveling direction of the substrate. When the substrate is transferred between the main conveyor belt and the branch conveyor belt, the delivery speed of the substrate between the main conveyor belt and the branch conveyor belt can be increased. [Embodiment] Hereinafter, an embodiment of a substrate transfer apparatus and a substrate transfer method of the present invention will be described with reference to the drawings. Further, in the following drawings, in order to make each member 8 318994 200814224 - as an identifiable size, the proportional size of each member is appropriately changed. (First Embodiment) Fig. 1 is a view showing one of the substrate transfer apparatuses 本 according to the first embodiment. The substrate transporting device 1 is a device for manufacturing a flat panel display such as a liquid crystal device, a PDP or an el device, and the glass plate P is transported one by one, and is provided with a main conveyor belt. a plurality of different transfer belts f 20' are separated from each other in the horizontal plane with respect to the main transfer belt 10; the board intersection 40 is connected between the main conveyor belt 1 and the divergent conveyor belt 20 for the glass sheet p; A control unit or the like (not shown) controls these in a systematic manner. The main conveyor belt 10 is a device for horizontally placing the glass sheet P and transporting it at a fixed speed along the surface thereof, by: the floating unit 12 (supporting σρ ), which floats the glass sheet by air rolling It is supported in a non-contact manner, and is constituted by a conveyor belt portion 15 or the like (see FIGS. 2 and 3). As described above, in the present embodiment, the function ν of the support portion of the present invention is incorporated in one of the main conveyor belts 1 . The main transfer belt 10 is arranged substantially linearly in the washing chamber of the factory. ♦ The surface of the belt is further connected to the main conveyor belt 10, and the branch conveyor belt 2 is connected substantially orthogonally and horizontally with respect to the main conveyance ▼. One of the ends. Similarly to the main conveyor belt 1 , the divergent conveyor belt 20 is a device that mounts the glass plate ρ shui ping and transports it at a fixed speed in the direction of the kneading surface, and is provided by the air floating unit 12 (supported) The configuration of the portion) and the belt portion 15 (see FIGS. 2 and 3). As described above, in the present embodiment, the function of the support portion of the present invention is also incorporated in one of the branch conveyor belts 318994 9 200814224. On the other end side of the branch conveyor 2G, various processing means such as a film form 5, (4) means 6 and a test device 7 are disposed/connected. In the various processing apparatuses such as the formation of the agricultural unit 5, the money engraving device 6, and the testing device 7, two different conveyor belts 2 are disposed in parallel. For example, the branch conveyors 21, 22 connected to the film forming apparatus 5 (in the conveyor belt (8), the 'diverging belt 21' is used to carry the glass sheet p into the diaphragm shape, the wheel of the device 5, and the differential conveyor The belt 22 is a conveyor belt for carrying out the glass sheet P from the film forming apparatus 5. Similarly, the branch conveyor belts 23 and 25 (divergent conveyor belts 2) are used to carry the glass sheet P into the apparatus 4 and the test apparatus 7 The conveyor belt, and the divergent conveyor belts 24 and 26 (divergent conveyor belts) are conveyor belts for carrying out the glass sheet p from the #刻装置6 and the testing device 7. In addition, the divergence of the glass sheet P into various processing devices Round belt
21、 23、25，係相對於自各種處理裝置將玻璃板p搬出之 分歧輸，帶22、24、26而配置在主輸送帶1{)之上游側。 板交接部40係相對於將玻璃板p搬入各處理裴置之八 歧輸送帶21、23、25而分別設在主輸送帶1〇之^游側: 以及相對於自各處理裝置將玻璃板P搬出之分歧輪送帶 22、 24、26而分別設在主輸送帶1 〇之下游側。 、 該等板交接部40係在未改變相對於玻璃板p之行進方 向之朝向之狀態下，一面使玻璃板P水平轉動一面Z坡= 板P自主輸送帶1〇交接至分歧輸送帶2〇或自分〜嫌 20交接至主輸送帶1〇。 ^ ^ ^ 318994 10 200814224 第2圖係顯示主輸送帶ι〇之詳細構造的圖。 主輸送帶10係如上述所示，藉由空氣使玻璃板？浮 二：ΐ搬？於水平方向之一方向之裝置’其係具備複數 二氣序起單元12與輸送帶部15等。 空氣浮起單幻2係具備平面狀的上表面之構件，在該 縮二載置*面），係以大致均等的配置密度形成有喷出壓 ^ 魏個流體噴出孔13。空氣浮起單元12係形成 输矩形狀，且其長邊方向設成與玻璃板P之搬送方向 致。又’空氣浮起單元12之短邊方向(寬度方 為比破璃板P之寬度方向（與搬送方向正交之方向）稍=成 廉至：二由自未圖示之壓縮空氣供應裝置將壓縮空氣供 出：：：1:’形成為I縮空氣自各流體喷出孔13 氣，使η嘯由自各流體喷出孔13喷出之墨縮空 空氣洋起單元12上之玻璃板Ρ浮起，而形成 為可用非接觸的方式進行支持。 個帶部15係具備複數個滾輪16、及安裝在該複數 隔設有 輸，帶部15係沿玻璃板P之搬送方向而配置在空氣浮 俜鱼2 Φ兩側。又’一對輸送帶部15之配置間隔（距離） 係與玻璃板P之寬度方向大致相同。 則 面輸送帶部15之各滾輪16上端係配置成位在同一水平 ’猎此設在帶Π表面之突起18配置成位在比空氣浮起 318994 11 ,200814224 置於工乳汙起早兀〗2上之玻璃柘士 •方向之兩端側）。 之下表面的外緣（寬度 輸送帶部15之各滾輪16係形成為藉由 子早7G 12將玻璃板Ρ以非接觸的方式予以支持，並且 耩由輸送帶部^沿空氣浮起單元12來進行搬送。 又’輪送帶部15係葬由4闰- > 於上下方向移動。未圖不之升降裝置，構成為可 藉由升降裝置使輸送帶部15上㈣，係 1:Γ!氣浮起單元12上表面猶微上方。此時，‘ π 4 15之犬起18係抵接在玻璃板 玻璃板Ρ。 Μ之下表面’而能搬送 另一方面，使輸送帶部15下降時，係形成各突 洋起單元12上表面下方。此時，輪送帶部15(各 -起18)係與玻璃板？分開，而玻璃板ρ係成為在」各 12上完全以非接觸的方式被支持之狀態。因 要杨外力於玻璃板p’玻璃板P係會在空氣浮起單：、 12上以停止之狀態被保持。 f起早το 又，主輸送帶10係複數連接空氣浮起單元Μ盥 帶部15而構成。亦即’各空氣浮起單幻輸送;『 為互相接近，而朝水平方向並列配置。此時，久5 單元12之上表面（载置面）係調整為位在同—水VJ"。洋起 又’分歧輸送帶20亦藉由主輸送帶1〇所具備之空氣 318994 12 200814224 • 浮起單元12盥铪送册士 /、翰运f部15構成。此外，A # 本實施形態中，分歧浐 σ弟1圖所示， 19 a、 歧輸迗帶20係藉由單一的*气一” 12、與包挾該空氣浮 工虱净起單元 ^ y 起早凡12而配置之兩個輪徉册士 -所構成，但亦可進一 汩翰迗帶部π …册士 步地猎由複數個空氣浮起罡一 1 运τ部15而構成。 早70 12及輸 第3圖係顯示主輪送帶1〇與分歧輪送 分的構造的圖。 V 20之分歧部 如弟3圖所示，在φ於册 2i之上游側，係設有板交接部40。 支輪运τ 板交接部40係具備臂部41 部）。 ^及馬達43(驅動 臂部41係—端連接於頭部42而 接，且設成水平。 鳊兵馬達43相連 頭部42係構成為可固持玻璃^之 言係可固持玻璃板P之寬度方向的一邊附近。=體， 板P側面予以吸附保持來固持玻璃板？亦可^夺玻掏 玻璃板P上面與下面來固持玻璃板p亦可。3猎由挾持 馬達43係以垂直的轉動軸u中心將頭部水 轉動者，且透過臂部41將頭部42轉動 人十地 方向(以及反箭頭方向)。 、乐3圖所示箭頭 又，藉由具有如上述構成之板交接 a u ’將主;矣：¾ 1 0上之玻璃板P，在相對於玻璃板p之行進方向 、 向之狀態下一面轉動一面交接至分歧輸送帶2〇°。改文朝 此外，設在主輸送帶10之相對分歧輪送帶23、託上 318994 13 200814224 。游侧之板交接部40亦具有同樣之構造，係將主輪送* 上之玻璃板P，在相對於玻璃板P之行進方向而未^ 向之狀態下一面轉動一面交接至分歧輪送帶2〇。 . X，設在主輸送帶10之相對於分歧輪送帶22、24、 -26之下游側的板交接部40,亦具有與第3圖所示板 40同樣之構造，但係在將分歧輪送帶2〇上之玻璃板"目。 對於玻璃板P之行進方向未改變朝向之狀態下一面轉動— …面父接至主輸送帶10之點，與第3圖所示板交接部 同。 接著，說明基板搬送裝置1之動作（基板搬送方法）。 簽照第4A圖至第4D圖，說明將搬送於主輸送帶10 反3ΡΓ至/歧輸送帶2°之情況(相對於分歧輸 之動作）。 ❿叹在主輪送帶1◦上游側之板交接部40 單元送帶1〇及分歧輪送帶20之各空氣浮起 氣。又，驅而自各流體喷出孔13喷出壓縮空 ^ 又驅動輪运帶部】R々、士 度旋轉。此時，藉由未圖-各浪輪16以固定的旋轉速 上升。 ㈢ ㈤不之升降裝置先使各輸送帶部15 然後，於主輪送帶10 張地載置，㈣麵板ρ 貞彳’#由將玻魏p一張 又，如第从圖所示片式搬送。 動至板交接部40之頭邻^主輪送帶10上之玻璃板P移 之頭部42即移動到八、+可到達的位置時，板交接部40 刀4輪送帶20之一端為止，而固持主 318994 14 200814224 •:=之:璃板？的外緣。之後，主輸送帶及分 =輸运⑽之輸送帶部15係藉由未圖示降 ，降。此時，玻璃板P係藉由自：衣置而下 .愉13所喷出之屢縮空氣而浮 =…之各流雜 42二圖及第扣圖所示，固持玻璃板P之頭部 =猎由馬達43而透過臂部心水平面内轉動，從而將 玻二fpP從主輸送帶1G上搬送至分歧輸送帶20上。此時， :二板P之行進方向係從主輪送帶1〇之行進方向變化為八 =送”、23、25之行進方向，但由於破璃 動刀， 故取雨端相對於玻璃板P之行進方向係未改變。轉動 亦即，藉由本實施形態之基板搬送裝置】， 上之破璃板P係在相對於破璃板之 ^ f 變之::下本:面水平轉動-面被交接二= 送帶部15之：方7:Π=:為無法移動於與輸 P與輪送帶部15相摩擦，最好在 离板 際，趑於、、/嫌* # u行敬喁扳P之外緣之 與輪送^_止。然而，在可使 殖4 不會摩擦之情況（例如，能在頭部42固拉由 15=同:將輸送帶部15下降之情況;能先將‘ 卜之後，再以頭部42固持玻璃板Ρ之情 能移動於盥鈐3册Μ , r 丨月/凡’及頭部 :勤於兵輪⑭部15之旋轉方向相同的方 、，亚不一定須在固持玻璃板P外緣之際，將 b之驅動停止。 將輪迗帶部 又，如第4D圖所*，當玻璃板p被搬送至分歧輪送帶 318994 15 200814224 • 20^L時，主輪送帶1〇及分歧輸送帶2〇之輸送帶部u係 再次藉由未圖示之升降裝置而上升。之後，板交接部4〇、 之1邛42將破璃板p之固持解除，藉此破璃板p係藉由分 ；歧輸送帶2〇而被搬送於離開主輸送帶1〇之方向。 刀 此外，於本實施形態，解除玻璃板P由頭部42所進行 之固持時，亦與固持上述之玻璃板p外緣時同樣地，為 止玻璃板P與輪送帶部15之摩擦，最好將輸送帶部i 驅動停止。 f外，玻璃板P係藉由分歧輸送帶2〇加以搬送， 接至溥膜形成裝置5、蝕刻裝置6及試驗 理裝置。 ^ J匕：：^至各處理裝置(薄膜形成裝置5、蝕刻裝置 6及试驗裝置7等）之玻璃拓p 在 之卢μ椒山 坡离板ρ’係於各處理裝置施以預定 之處理後，搬出至各處理裝置之外部。 ±认接ΐ ’ t照第5Α圖至第5D圖，說明將玻璃板ρ自八 歧輸送帶20交接至主輪送帶刀 ?? 9C 士珣、可10之情況（相對於分歧輸送帶 22、24、26而設在主輪送；^1n ^ 作）。 勒迗，10下游側之板交接部40之動 將玻璃板P自分歧輪逆黑9 n 作，係使將玻璃板P自=二:接至主輸送帶之動 之動作大致反轉者。10交接至分歧輸送帶加 首先，對主輸送帶10及八 單元12供應壓縮空氣，自夂产雕20之各空氣洋起 又，驅動輸送帶部15，使贺出孔13喷出壓縮空氣。 〇滾輪16以固定的旋轉速度旋 318994 16 200814224 轉㈣之升降裝置先使各料帶部15上升。 接者，將玻璃板P自薄膜形成裝置5、_ ㈣ 試驗裝置7等各種處理U交接至分歧輸、 =分歧輸送帶為以搬送，而移動到 板 可到達之位置為止。又，如第5A圖所示，板交 =40之頭部42固持分歧輸送帶2〇上之玻璃板p外緣。 /主輸达帶10及分歧輸送帶2〇之輸送帶部15係藉由 未圖不之升降裝置下降。此時，玻璃板P係藉由自各空氣 12之各流體喷出孔13所喷出之壓縮空氣 支持。 二後’如第5B圖、第5C圖及第5D圖所示，固持玻璃 板P =頭部42藉由馬達43而透過臂部41於水平面内轉 動，藉此將玻璃板P自分歧輸送帶2〇上搬送至主輸送^ 1〇上。此時，玻璃板P之行進方向係自分歧輸送帶22、24、 26之行進方向變化為主輪送帶1〇之行進方向，但由於玻 ^璃板會轉動，故最前端相對於玻璃板P之行進方向係未改 變0 亦即，藉由本實施形態之基板搬送裝置1，可將分歧 輸送帶20上之玻璃板p在相對於玻璃板p之行進方向的朝 向未改變之狀態下一面水平轉動一面交接至主輸送帶1〇。 如以上說明所示，本實施形態之基板搬送裝置丨係具 備：主輪送帶1〇，係將玻璃板P進行單片式搬送；分歧輸 送帶20 ’係相對於主輸送帶ι〇而水平分歧；以及板交接 部40’係使玻璃板p在相對於玻璃板p之行進方向之朝向 318994 17 200814224 未改變之狀態下，一面轉動一面從主輸送帶1〇被交接至分 歧輸送τ 20或從分歧輸送帶2〇被交接至主輸送帶1〇。 …根據如上述之本實施形態之基板搬送裝置丨及基板搬 运方法，可使玻璃板p在相對於玻璃板p之行進方向之朝 向未改變之狀態下，一面轉動一面從主輪送帶ι〇被交接至 刀歧輸运v 20或從分歧輸送帶2〇被交接至主輸送帶。 因此，無須為了配合相對於玻璃板p之行進方向之朝向， 主輪送Y 10或分歧輸送帶2Q上使玻璃板p停止，而 能高速進行玻璃板p之交接。 因而，根據本實施形態之基板搬送裝置丨及基板 ? 土 弘 一ι_ . — 七 -------—且1久签败搬i 方法，於未改變麵板p之行進方向而在主輸送帶ι〇~ f輸送帶2G之間交接玻璃板P時，能提高在主輸送帶Π 與分歧輸送帶2〇間之玻璃板P之交接速度。 又，於本實施形態之基板搬送裝置丨中，係 电 喷出壓縮空氣之各空氣淳起輩开1? 、用用 浐详* 1ηώ v 虱子起早兀12,以自下方支持住在主 罕則达⑼與分歧輪送帶2G之間進行交接之玻璃板p。 如上述，藉由於交接之際將玻璃板p自下 抑制玻璃板p彎曲。 、 又，藉由使用壓縮空氣將玻璃板P浮起 P係在相等於盔摩柝 、玻离才1 …、tr、阻抗之狀怨下，於主輸送帶1 〇盥八, 輸送帶20之間進行交接。因此μ吏交接速产：二广:刀^ 不會因施加衝擊而損傷玻璃板?。接一化時“ (弟2實施形態） 从兒月本發明第2實施形態。其中，於本第2實 318994 18 200814224 施形態之t兒明’與上述f i實施形態同#之部分係省略其 說明或簡略化。 第6圖係顯示在本實施形態基板搬送 1〇與分歧輸送㈣之分歧部分之構造的圖。如第 不，於本實施形態，主輸送帶10及分歧輸送帶21係取代 上域第1實施形態之空氣浮起單$ 12，而具備複數排列有 球狀自+由滚輪300(支持部）之自由滾輪單元2⑽而構成。 藉由/、有如上述構成之本實施形態基板搬送裝置，在 主輸送帶10與分歧輸送帶2G之間進行玻璃板p之交接 時’玻璃板P係藉由球狀自由滾輪3〇〇自下方予以支持。 因而，藉由本實施形態基板搬送裝置，亦與上述21, 23, and 25 are disposed on the upstream side of the main conveyor belt 1{) with respect to the differential conveyance in which the glass sheets p are carried out from various processing apparatuses, and the belts 22, 24, and 26 are disposed. The board intersection 40 is provided on the side of the main conveyor belt 1 with respect to the octagonal conveyor belts 21, 23, 25 for carrying the glass sheets p into the respective processing units: and the glass sheets P from the respective processing apparatuses. The branching belts 22, 24, and 26 that are carried out are disposed on the downstream side of the main conveyor belt 1 respectively. The plate intersection 40 is horizontally rotated while the glass plate P is horizontally rotated without changing the direction of the direction of travel of the glass sheet p. The plate P is conveyed to the branch conveyor 2〇. Or self-divided ~ suspected 20 handed over to the main conveyor belt 1 〇. ^ ^ ^ 318994 10 200814224 Figure 2 is a diagram showing the detailed construction of the main conveyor belt. The main conveyor belt 10 is as shown above, and the glass plate is made by air? Float 2: Move? The device in one of the horizontal directions is provided with a plurality of two gas-sequencing units 12, a conveyor belt portion 15, and the like. The air floating single illusion 2 is a member having a flat upper surface, and the liquid discharge hole 13 is formed at a substantially uniform arrangement density at the second mounting surface. The air floating unit 12 is formed in a rectangular shape, and its longitudinal direction is set to be the direction in which the glass sheet P is conveyed. Further, the short side direction of the air floating unit 12 (the width is slightly larger than the width direction of the glass sheet P (the direction orthogonal to the conveying direction) = is as low as: two is from a compressed air supply device not shown Compressed air supply:::1: 'Formed as I-shrink air from each fluid ejection hole 13 gas, so that η is caused by the ink squirting from the respective fluid ejection holes 13 to the glass plate on the air-lifting unit 12 The belt portion 15 is provided in a non-contact manner. The belt portion 15 includes a plurality of rollers 16 and is attached to the plurality of rollers 16 , and the belt portion 15 is disposed in the air floating direction along the conveying direction of the glass sheet P. Both sides of the fish 2 Φ. Further, the arrangement interval (distance) between the pair of conveyor belt portions 15 is substantially the same as the width direction of the glass sheet P. Then, the upper ends of the rollers 16 of the surface conveyor belt portion 15 are arranged at the same level. The protrusions 18 provided on the surface of the belt are arranged to be positioned on the opposite sides of the glass gentleman's direction of the water 318994 11 , 200814224 placed on the front of the work. The outer edge of the lower surface (the rollers 16 of the width conveyor belt portion 15 are formed to support the glass sheet 非 in a non-contact manner by the child 7G 12, and the raft is carried by the air belt floating unit 12 The transfer belt portion 15 is hoisted by 4闰- > in the vertical direction. The lifting device (not shown) is configured such that the conveyor belt unit 15 can be lifted by the lifting device (4): Γ! The upper surface of the air floating unit 12 is slightly above. At this time, the dog of the 'π 4 15 is abutted against the glass plate glass plate Ρ. The lower surface Μ can be transported, and the conveyor belt portion 15 is lowered. At this time, the upper surface of each of the protruding parts 12 is formed. At this time, the belt portions 15 (each 18) are separated from the glass plate, and the glass plate ρ is completely non-contact on each of the 12 The way of being supported. Because Yang wants to force the glass plate p' glass plate P system will be held in the air floating single:, 12 in the state of stopping. f start early το, the main conveyor belt 10 series multiple connections The air floating unit is formed by the belt portion 15. That is, 'each air floats and floats alone; In the horizontal direction, the surface is arranged side by side. At this time, the upper surface (mounting surface) of the long unit 5 is adjusted to be in the same water VJ". The ocean and the 'divergent conveyor belt 20 are also used by the main conveyor belt. Air 318994 12 200814224 • The floating unit 12 is sent to the sergeant/Hanyun f department 15. In addition, in this embodiment, the difference 浐σ弟1 is shown in the figure, 19 a, the dislocation belt The 20 series consists of a single qi-one 12, and two rims that are arranged to cover the air-floating unit ^ 早 早 早 早 , , , , , , , , , , , , , , , , , , , , , The π ... 士 士 地 猎 由 由 由 册 册 猎 猎 猎 猎 猎 猎 猎 猎 。 。 。 70 。 。 。 。 。 70 。 。 70 70 。 70 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The divergence portion of V 20 is shown in Fig. 3, and the plate intersection portion 40 is provided on the upstream side of φ in the book 2i. The wheel carrier plate 4 is provided with the arm portion 41. ^ and the motor 43 (drive) The end portion of the arm portion 41 is connected to the head portion 42 and is horizontal. The head portion 42 of the armor motor 43 is configured to hold the glass. Near the side of the width direction of P. = body, the side of the plate P is adsorbed and held to hold the glass plate. It is also possible to hold the glass plate p above and below the glass plate P. 3 Hunting is held by the holding motor 43 The center of the vertical rotation axis u rotates the head water, and the head 42 is rotated by the arm portion 41 in the direction of the person's tenth direction (and the direction of the reverse arrow). The arrow shown in the music diagram 3, by having the above configuration The board is handed over to the main conveyor; au: the glass plate P on the 3⁄4 10 is transferred to the divergent conveyor belt 2 〇° while rotating with respect to the traveling direction of the glass plate p. In addition, the opposite branching belt 23 of the main conveyor belt 10 is provided, and 318994 13 200814224 is attached. The board-side interface 40 of the swimming side also has the same structure, and the glass sheet P on the main wheel is transferred to the branching belt while rotating in a state opposite to the traveling direction of the glass sheet P. 2〇. X, the board intersection 40 provided on the downstream side of the main conveyor belt 10 with respect to the branching belts 22, 24, -26 also has the same structure as the board 40 shown in Fig. 3, but is divided The belt has 2 glass plates on the &. The point at which the direction in which the glass sheet P travels is not changed and the surface is rotated to the main conveyor belt 10 is the same as the board intersection portion shown in Fig. 3. Next, the operation of the substrate transfer device 1 (substrate transfer method) will be described. Referring to Figs. 4A to 4D, the case where the main conveyor 10 is transported to the opposite conveyor belt 2° (relative to the operation of the divergence) will be described. It is sighed at each of the main air delivery belts on the upstream side of the board intersection 40 unit feed belt 1 and the split air belt 20 air floating air. Further, the fluid ejection holes 13 are ejected to discharge the compressed air, and the driving wheel belt portion is rotated. At this time, it is raised at a fixed rotational speed by the unillustrated-each wheel 16 . (3) (5) If the lifting device is not used, the conveyor belts 15 are first placed on the main conveyor belt 10 sheets, and (4) the panel ρ 贞彳 '# is made by the glass wei p, as shown in the figure. Transfer. Moving to the head of the board intersection 40, the head 42 of the glass sheet P on the main belt 10 is moved to the position of the occupant, and the position of the board is 40, and the end of the board 4 is 20 And hold the main 318994 14 200814224 •:=: glass? The outer edge. Thereafter, the main conveyor belt and the conveyor belt portion 15 of the sub-transport (10) are lowered and lowered by not shown. At this time, the glass plate P is held by the clothes. The head of the glass plate P is held by the floats of the air. = Hunting is rotated by the motor 43 through the horizontal plane of the arm, thereby transporting the glass frit fpP from the main conveyor belt 1G to the divergent conveyor belt 20. At this time, the traveling direction of the two plates P changes from the traveling direction of the main wheel conveyor belt to the traveling direction of eight=send, 23, 25, but the rain end is opposite to the glass plate due to the broken glass knife. The traveling direction of P is unchanged. The rotation, that is, the substrate conveying device of the present embodiment, the glass plate P on the glass plate is changed with respect to the glass plate: Being handed over 2 = the belt feeding portion 15: square 7: Π =: is unable to move and friction with the belt P and the belt portion 15 , preferably at the edge of the board, 趑 , , / / * The outer edge of the P is the same as the rotation of the P. However, in the case where the coagulation 4 is not rubbed (for example, the head 42 can be pulled by 15 = the same: the conveyor belt portion 15 is lowered; You can move the glass plate 头部 , , , 头部 头部 头部 头部 头部 头部 Μ Μ Μ Μ 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 头部 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固, the sub-not necessarily has to stop the driving of b while holding the outer edge of the glass plate P. The rim belt portion, as shown in Fig. 4D, is transported to the branching belt 318994 15 200814224At 20°L, the conveyor belt portion u of the main pulley belt 1〇 and the branch conveyor belt 2〇 is again raised by the lifting device (not shown). Thereafter, the panel intersection portion 4〇, 1邛42 will be broken. The holding of the plate p is released, whereby the glass plate p is conveyed in a direction away from the main conveyor 1 by the transfer belt 2〇. Further, in the present embodiment, the glass plate P is released from the head. When the holding by 42 is carried out, similarly to the case where the outer edge of the glass sheet p is held, the friction between the glass sheet P and the belt portion 15 is preferably driven to stop the belt portion i. It is conveyed by the divergent conveyor belt 2, and is connected to the enamel film forming device 5, the etching device 6, and the test device. ^ J匕::^ to each processing device (thin film forming device 5, etching device 6, and test device) 7, etc.) The glass extension p is placed on the outside of each treatment device after the predetermined treatment of each of the treatment facilities, and then moved out to the outside of each treatment device. ± ΐ ΐ ' t according to the 5th to 5D Figure, showing the transfer of the glass plate ρ from the octagonal conveyor belt 20 to the main wheel conveyor belt?? 9C 士 珣, 可 10 cases (phase For the divergent conveyor belts 22, 24, 26, it is provided in the main wheel transfer; ^1n ^). The movement of the plate intersection portion 40 on the downstream side of the 10, the glass plate P is reversed from the branch wheel by 9 n. The movement of the glass plate P from the second to the main conveyor belt is substantially reversed. 10 is transferred to the divergent conveyor belt plus first, the main conveyor belt 10 and the eight unit 12 are supplied with compressed air, and the self-producing engraving 20 Each of the air starts to drive the belt portion 15 to discharge the compressed air. The roller 16 rotates at a fixed rotational speed 318994 16 200814224 (4) The lifting device first raises the respective belt portions 15. Then, the glass sheet P is transferred from the various processes U such as the film forming apparatus 5 and the _ (four) test apparatus 7 to the branching and the branching belts for transport, and is moved to a position at which the board can reach. Further, as shown in Fig. 5A, the head 42 of the plate intersection = 40 holds the outer edge of the glass plate p on the branch conveyor 2. The conveyor belt portion 15 of the main conveyor belt 10 and the divergent conveyor belt 2 is lowered by a lifting device not shown. At this time, the glass sheet P is supported by the compressed air ejected from the respective fluid ejection holes 13 of the respective airs 12. After the second embodiment, as shown in FIG. 5B, FIG. 5C and FIG. 5D, the holding glass plate P=the head 42 is rotated by the motor 43 through the arm portion 41 in the horizontal plane, thereby driving the glass plate P from the branch conveyor belt. 2 搬 Transfer to the main transport ^ 1 。. At this time, the traveling direction of the glass sheet P changes from the traveling direction of the branch conveyor belts 22, 24, 26 to the traveling direction of the main wheel belt 1 ,, but since the glass sheet rotates, the front end is opposite to the glass sheet. In other words, the substrate transport apparatus 1 of the present embodiment can horizontally position the glass sheet p on the branch conveyor 20 in a state in which the direction of travel of the glass sheet p is not changed. The rotating side is handed over to the main conveyor belt 1〇. As described above, the substrate transfer apparatus of the present embodiment includes the main transfer belt 1〇, and the glass sheet P is conveyed in a single sheet; the branch conveyor belt 20' is horizontal with respect to the main conveyance belt. And the board intersection 40' is such that the glass sheet p is transferred from the main conveyor belt 1 to the divergent transport τ 20 or the state of the glass sheet p in the direction of the direction of travel of the glass sheet p 318994 17 200814224 It is handed over from the divergent conveyor belt 2至 to the main conveyor belt 1〇. According to the substrate transfer apparatus 丨 and the substrate transport method of the embodiment described above, the glass sheet p can be rotated from the main wheel while being rotated in a direction in which the direction of travel of the glass sheet p is not changed. It is handed over to the knife transport v 20 or from the divergent conveyor 2 to the main conveyor. Therefore, it is not necessary to stop the glass sheet p on the main wheel Y 10 or the branch conveyor 2Q in order to match the direction of the traveling direction with respect to the glass sheet p, and the glass sheet p can be transferred at a high speed. Therefore, according to the substrate transfer apparatus 丨 and the substrate 土 一 ι — 七 七 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且 且When the glass plate P is transferred between the belts of the ι〇~f conveyor belt 2G, the delivery speed of the glass sheet P between the main conveyor belt Π and the branch conveyor belt 2 can be increased. Further, in the substrate transfer apparatus 本 of the present embodiment, each of the air that ejects the compressed air is opened up for one time, and the 浐 * 1 1 1 虱 虱 , , , , , , , , , , , , , , , , , , , Then, the glass plate p which is handed over between the (9) and the branching belt 2G. As described above, the glass sheet p is bent from the lower suppression glass sheet p by the transfer. Moreover, by using the compressed air to float the glass plate P, the P is tied to the helmet, the glass is only 1 ..., tr, the impedance of the complaint, on the main conveyor belt 1 , 8, the conveyor belt 20 Hand over. Therefore, μ吏 handover is quick-production: Erguang: Knife ^ will not damage the glass plate due to impact. In the case of the second embodiment of the present invention, the second embodiment of the present invention is omitted from the second embodiment of the present invention. Fig. 6 is a view showing the structure of a portion where the substrate conveyance 1〇 and the branch conveyance (4) are different in the present embodiment. If not, in the present embodiment, the main conveyor belt 10 and the branch conveyor belt 21 are replaced. The air floating unit of the first embodiment is provided with a plurality of free roller units 2 (10) arranged in a spherical shape from the roller 300 (support portion). The substrate of the present embodiment having the above configuration is provided. In the conveying device, when the glass sheet p is transferred between the main conveyor 10 and the branch conveyor 2G, the glass sheet P is supported by the spherical free roller 3 from below. Therefore, the substrate conveying apparatus of the present embodiment Also with the above
實施形態基板搬送梦罟彳ρη H 、、， 衣置1㈣地，在主輸送帶10與分歧輸 n之間進行玻璃板？之交接時，能抑制玻璃板P之彎 ΐΛ η 勺 4入此外，於上述實施形態所示之各構成構件之諸形狀及 或動作順序等係為一例，且於未脫離本發明主旨之 耗圍而根據設計要求等能作各種變更。 送-2列二’於上述實施形態’說明了主輸送帶1〇與分歧輸 配置成直角之構造。'然而，本發明並未限定於此， ==用於主輸送帶10與分歧輸送帶2〇以不同角度配 图-夕4於上述實施形態，係構成為使輸送帶部15藉由未 271間交I裳置下降，從而在主輸送帶1〇與分歧輪送帶 乂破璃板Ρ時，能防止破璃板ρ與輸送帶部Μ 318994 19 200814224 然！’本發明並非限定於此，取代輪送帶部15 岭、空綺起早7012之上升來防止玻璃板P 帶？5之接觸亦可。此時，交接側之輸送帶的空氣 2=之上面，係位在與上升後之空氣浮起單元上面 成為相同面的位置。 主於上述實施形態，雖說明將破璃板？單片式予以搬送 之炀況，但並未限於此。例如，為半 構件亦可。 . ¥體曰曰04之缚板狀 於上述實施形態，雖說明在分歧輸送帶20之另一端 :則配置/連接薄膜形成裝置5、則裝置6及試驗裝置7 等各種處理褒置之情況，但並未限於此。在分歧輸送帶20 之下游側(另一端侧)’進-步連接有分歧輸送帶20之情況 亦可。 ^又，除了薄膜形成裝置5、蝕刻裝置6及試驗裝置7 f各種處理裝置之外’配置有將玻璃板？等之基板複數暫 \ ¥保存之儲存庫（st〇cker)亦可。 於上述實施形態，雖說明在薄膜形成裝置5、蝕刻裝 置6及試驗裝置7等各種處理裝置，配置將玻璃板p搬入 之分歧輪送帶21、23、25與將玻璃板p搬出之分歧輸送帶 22 24、26之情況，但並未限於此。為一個分歧輸送帶 進行將玻璃板p搬入/搬出之情況亦可。 又，於上述第1實施形態，雖說明使用壓縮空氣將玻 璃板P予以浮起支持之情況，但並未限於此。例如，藉由 將傳播於空間之振動波賦予於玻璃板P而將玻璃板p浮起 318994 20 200814224 支持亦可。 [產業上的可利用性] A二發=板搬送裝置及基板搬送方法，係在未改變 態下’在主輸送帶與分歧輪送帶之間 帶間之基板交接速度 “在主輪送帶與分歧輸送 【圖式簡單說明】 示意：1圖係顯示本發明第1實施形態之基板搬送裝置之 f2圖係顯示主輸送帶之詳細構造的圖式。 ^ 係顯示與分歧輪送帶之板交接 構造的圖式。 又I刀心 第4A圖係顯示本發明第i實施形態 動作(將玻璃板自主輸逆㈣“八+认 〜衣置之 ^ 王％迗▼引入至分歧輸送帶時）的圖式。 弟4B圖係顯示本發明第j實施形態之基板搬送裝置之 動作:將玻璃板：主輸送帶引入至分歧輸送帶時)的圖式。 第圖係’員示本發明第1實施形態之基板搬送裝置之 動作(將玻璃板自主輪送帶引入至分歧輸送帶時)的圖式。 第4D圖係顯示本發明第1實施形態之基板搬送袭置之 動作（將玻璃板自讀送帶引人至分歧輸送帶時）的圖式。 第5A圖係顯示基本發明第1實施形態之基板搬送裝置 之動作（將玻璃板自分歧輸送帶交接至主輸送帶時）的圖 式。 第5B圖係顯示基本發明第1實施形態之基板搬送裝置 318994 21 200814224 1之動作（將玻璃板自分歧輸送帶交接至主輸送帶時）的圖 式。 第5C圖係顯示基本發明第丨實施形態之基板搬送裝置 1之動作（將玻璃板自分歧輸送帶交接至主輪送帶時）的圖 式0 第5D圖係顯示基本發明第丨實施形態之基板搬送裝置 1之動作（將玻璃板自分歧輸送帶交接至主輸送帶時）的圖 式。 昂6圖係顯示在本發明第2實施形態之基板搬送裝置 分歧輪送帶之板交接部的分歧部分之構造的圖式。 L主要元件符號說明】 1In the embodiment, the substrate is transported with the nightmare ρη H , and the clothing is placed 1 (4), and the glass plate is placed between the main conveyor 10 and the divergent input n. In the case of the transfer, the shape of the glass plate P can be suppressed, and the shape and operation sequence of each of the constituent members shown in the above embodiment are taken as an example, and the cost is not deviated from the gist of the present invention. Various changes can be made according to design requirements. The transmission of -2 to 2' in the above embodiment has described a configuration in which the main conveyor belt 1〇 is disposed at right angles to the branching transmission. However, the present invention is not limited thereto, and == is used for the main conveyor belt 10 and the branch conveyor belt 2〇 at different angles. In the above embodiment, the conveyor belt portion 15 is configured by the belt 271. The intervening I is lowered, so that when the main conveyor belt 1 〇 and the divergent belt belt 乂 乂 Ρ , , , , 318 318 318 318 318 318 318 994 2008 318 The present invention is not limited thereto, and the glass plate P belt is prevented from being replaced by the rise of the ridge and the ridge of the belt portion 15 as early as 7012. 5 contact is also possible. At this time, the air 2 of the conveyor belt on the delivery side is positioned at the same position as the upper surface of the raised air floating unit. Mainly in the above embodiment, although the glass plate will be described? The condition of being transported in a single piece, but is not limited to this. For example, it may be a half member. The binding plate of the body 04 is in the above embodiment, and the description is made on the other end of the branch conveyor 20: when the film forming apparatus 5, the apparatus 6 and the testing apparatus 7 are disposed and connected, But it is not limited to this. It is also possible to connect the branch conveyor 20 to the downstream side (the other end side) of the branch conveyor 20 in a stepwise manner. Further, in addition to the film forming apparatus 5, the etching apparatus 6, and the various types of processing apparatuses of the testing apparatus 7f, a glass plate is disposed. The storage of the substrate (st〇cker) can also be used. In the above-described embodiments, various processing apparatuses such as the film forming apparatus 5, the etching apparatus 6, and the testing apparatus 7 are disposed, and the branching conveyor belts 21, 23, and 25 for carrying the glass sheet p and the differential conveying of the glass sheet p are carried out. The case of 22 24, 26, but not limited to this. It is also possible to carry in and out the glass sheet p for a different conveyor belt. Further, in the first embodiment described above, the case where the glass sheet P is floated and supported by the compressed air is described, but the invention is not limited thereto. For example, the glass plate p is floated by imparting a vibration wave propagating in the space to the glass sheet P 318994 20 200814224. [Industrial Applicability] A second hair = plate conveying device and substrate conveying method, in the unchanging state, 'substrate transfer speed between the belt between the main conveyor belt and the branching belt" in the main wheel conveyor belt [Frequent description of the drawings] Fig. 1 shows a schematic diagram showing the detailed structure of the main conveyor belt in the f2 diagram of the substrate transfer apparatus according to the first embodiment of the present invention. Fig. 4A shows the operation of the i-th embodiment of the present invention (when the glass plate is self-transferred (four) "eight + recognition ~ clothing set ^ king % 迗 ▼ introduced to the divergent conveyor belt) The pattern. Fig. 4B is a view showing the operation of the substrate transfer apparatus according to the jth embodiment of the present invention: when the glass plate: the main conveyance belt is introduced to the branch conveyor. The figure shows the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when the glass plate autonomous transfer belt is introduced to the branch conveyor). Fig. 4D is a view showing the operation of the substrate transporting operation according to the first embodiment of the present invention (when the glass plate is introduced from the read feed belt to the branch conveyor). Fig. 5A is a view showing the operation of the substrate transfer apparatus according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main conveyor). Fig. 5B is a view showing the operation of the substrate transfer device 318994 21 200814224 1 of the first embodiment of the present invention (when the glass plate is transferred from the branch conveyor to the main conveyor). Fig. 5C is a view showing the operation of the substrate transfer apparatus 1 according to the first embodiment of the present invention (when the glass sheet is transferred from the branch conveyor to the main transfer belt). Fig. 5D is a diagram showing the embodiment of the basic invention. The operation of the substrate transfer device 1 (when the glass plate is transferred from the branch conveyor to the main conveyor). The diagram of the structure of the branching portion of the board transfer portion of the branch conveyor belt of the substrate transfer device according to the second embodiment of the present invention is shown. L main component symbol description] 1
5 基板搬送裝置 蝕刻裝置 7 主輸送帶 12 流體噴出孔 15 滾輪 17 突起 、22 、 23 、 24 、 25、26 板交接部 41 頭部 43 自由滚輪單元 300 轉動車由 P5 Substrate transfer device Etching device 7 Main conveyor belt 12 Fluid discharge hole 15 Roller 17 Projection, 22, 23, 24, 25, 26 Plate intersection 41 Head 43 Free roller unit 300 Rotating car by P
10 13 16 18 20、 40 42 200 L 薄膜形成裝置 試驗裝置 空氣浮起單元 輸送帶部 皮帶 分歧輸送帶 臂部 馬達 球狀自由滾輪 玻璃板 318994 2210 13 16 18 20, 40 42 200 L Film forming device Test device Air floating unit Conveyor belt belt Conveyor belt Convergence belt Arm Motor Ball free roller Glass plate 318994 22