KR101209564B1 - 반도체장치 - Google Patents

반도체장치 Download PDF

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Publication number
KR101209564B1
KR101209564B1 KR1020110070194A KR20110070194A KR101209564B1 KR 101209564 B1 KR101209564 B1 KR 101209564B1 KR 1020110070194 A KR1020110070194 A KR 1020110070194A KR 20110070194 A KR20110070194 A KR 20110070194A KR 101209564 B1 KR101209564 B1 KR 101209564B1
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South Korea
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impurity
semiconductor
type impurity
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Korean (ko)
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KR20120022056A (ko
Inventor
토모히데 테라시마
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미쓰비시덴키 가부시키가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • H10D12/411—Insulated-gate bipolar transistors [IGBT]
    • H10D12/421—Insulated-gate bipolar transistors [IGBT] on insulating layers or insulating substrates, e.g. thin-film IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/028—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs
    • H10D30/0291—Manufacture or treatment of FETs having insulated gates [IGFET] of double-diffused metal oxide semiconductor [DMOS] FETs of vertical DMOS [VDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H10D30/603—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs  having asymmetry in the channel direction, e.g. lateral high-voltage MISFETs having drain offset region or extended drain IGFETs [EDMOS]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117—Shapes of semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/141—Anode or cathode regions of thyristors; Collector or emitter regions of gated bipolar-mode devices, e.g. of IGBTs
    • H10D62/142—Anode regions of thyristors or collector regions of gated bipolar-mode devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/351—Substrate regions of field-effect devices
    • H10D62/357—Substrate regions of field-effect devices of FETs
    • H10D62/364—Substrate regions of field-effect devices of FETs of IGFETs
    • H10D62/378—Contact regions to the substrate regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H10D64/117—Recessed field plates, e.g. trench field plates or buried field plates

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020110070194A 2010-08-30 2011-07-15 반도체장치 Active KR101209564B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2010-191998 2010-08-30
JP2010191998A JP5610930B2 (ja) 2010-08-30 2010-08-30 半導体装置

Publications (2)

Publication Number Publication Date
KR20120022056A KR20120022056A (ko) 2012-03-09
KR101209564B1 true KR101209564B1 (ko) 2012-12-07

Family

ID=45566353

Family Applications (1)

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KR1020110070194A Active KR101209564B1 (ko) 2010-08-30 2011-07-15 반도체장치

Country Status (5)

Country Link
US (2) US8466515B2 (enExample)
JP (1) JP5610930B2 (enExample)
KR (1) KR101209564B1 (enExample)
CN (1) CN102386231B (enExample)
DE (1) DE102011079307B4 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011238771A (ja) * 2010-05-11 2011-11-24 Hitachi Ltd 半導体装置
JP5762353B2 (ja) * 2012-05-01 2015-08-12 三菱電機株式会社 半導体装置
CN104717555B (zh) * 2013-12-11 2018-01-02 华为技术有限公司 视频码流的获取方法及装置
US20230207568A1 (en) * 2021-12-23 2023-06-29 IceMos Technology Limited Semiconductor Device and Method for Power MOSFET on Partial SOI

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001025235A (ja) 1999-07-07 2001-01-26 Mitsubishi Electric Corp 駆動装置および電力変換装置

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JP3059442B2 (ja) * 1988-11-09 2000-07-04 株式会社日立製作所 半導体記憶装置
JPH04259259A (ja) * 1991-02-14 1992-09-14 Nippondenso Co Ltd 薄膜ｓｏｉ構造のｍｉｓトランジスタ
JP2739018B2 (ja) 1992-10-21 1998-04-08 三菱電機株式会社 誘電体分離半導体装置及びその製造方法
JP3588882B2 (ja) * 1995-12-08 2004-11-17 富士電機デバイステクノロジー株式会社 誘電体分離基板の製造方法
US7098506B2 (en) * 2000-06-28 2006-08-29 Renesas Technology Corp. Semiconductor device and method for fabricating the same
JP2001094094A (ja) * 1999-09-21 2001-04-06 Hitachi Ltd 半導体装置およびその製造方法
JP4058232B2 (ja) * 2000-11-29 2008-03-05 株式会社ルネサステクノロジ 半導体装置及びｉｃカード
JP4477886B2 (ja) * 2003-04-28 2010-06-09 株式会社ルネサステクノロジ 半導体装置の製造方法
JP4889072B2 (ja) 2003-12-19 2012-02-29 オンセミコンダクター・トレーディング・リミテッド 半導体装置
JP4618629B2 (ja) * 2004-04-21 2011-01-26 三菱電機株式会社 誘電体分離型半導体装置
JP4629490B2 (ja) 2005-05-09 2011-02-09 三菱電機株式会社 誘電体分離型半導体装置
JP4984579B2 (ja) * 2006-03-10 2012-07-25 株式会社日立製作所 高耐圧半導体集積回路装置
EP1863081A3 (en) 2006-03-10 2008-03-05 Hitachi, Ltd. Dielectric material separated-type, high breakdown voltage semiconductor circuit device, and production method thereof
JP2008311300A (ja) * 2007-06-12 2008-12-25 Toyota Motor Corp パワー半導体装置、パワー半導体装置の製造方法、およびモータ駆動装置
JP5105060B2 (ja) * 2007-11-16 2012-12-19 三菱電機株式会社 半導体装置およびその製造方法
JP2009238980A (ja) * 2008-03-27 2009-10-15 Hitachi Ltd 半導体装置及びその製造方法
JP4797203B2 (ja) 2008-12-17 2011-10-19 三菱電機株式会社 半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001025235A (ja) 1999-07-07 2001-01-26 Mitsubishi Electric Corp 駆動装置および電力変換装置

Also Published As

Publication number Publication date
US20140015004A1 (en) 2014-01-16
US8466515B2 (en) 2013-06-18
US20120049240A1 (en) 2012-03-01
CN102386231A (zh) 2012-03-21
KR20120022056A (ko) 2012-03-09
JP5610930B2 (ja) 2014-10-22
US8878239B2 (en) 2014-11-04
JP2012049428A (ja) 2012-03-08
DE102011079307B4 (de) 2015-08-13
DE102011079307A1 (de) 2012-03-01
CN102386231B (zh) 2014-06-18

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