KR100998388B1 - 프로브 재검사 데이터 분석을 사용한 웨이퍼 검사 시의생산성 제고 - Google Patents

프로브 재검사 데이터 분석을 사용한 웨이퍼 검사 시의생산성 제고 Download PDF

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KR100998388B1
KR100998388B1 KR1020067022487A KR20067022487A KR100998388B1 KR 100998388 B1 KR100998388 B1 KR 100998388B1 KR 1020067022487 A KR1020067022487 A KR 1020067022487A KR 20067022487 A KR20067022487 A KR 20067022487A KR 100998388 B1 KR100998388 B1 KR 100998388B1
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devices
group
retest
type
defects
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KR20070017167A (ko
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아키코 에프. 밸치우나스
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인터내셔널 비지네스 머신즈 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/344—Sorting according to other particular properties according to electric or electromagnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Thin Film Transistor (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020067022487A 2004-05-25 2005-05-25 프로브 재검사 데이터 분석을 사용한 웨이퍼 검사 시의생산성 제고 Expired - Fee Related KR100998388B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/709,729 2004-05-25
US10/709,729 US7253650B2 (en) 2004-05-25 2004-05-25 Increase productivity at wafer test using probe retest data analysis
PCT/US2005/019267 WO2005116671A2 (en) 2004-05-25 2005-05-25 Increase productivity at wafer test using probe retest data analysis

Publications (2)

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KR20070017167A KR20070017167A (ko) 2007-02-08
KR100998388B1 true KR100998388B1 (ko) 2010-12-03

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US (5) US7253650B2 (https=)
EP (1) EP1769257B1 (https=)
JP (1) JP4866843B2 (https=)
KR (1) KR100998388B1 (https=)
CN (1) CN100587507C (https=)
WO (1) WO2005116671A2 (https=)

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KR20170088604A (ko) * 2016-01-25 2017-08-02 에스케이하이닉스 주식회사 웨이퍼 테스트 장치 및 그 테스트 방법
CN108362704A (zh) * 2018-01-30 2018-08-03 上海霖研精密自动化机械有限公司 一种双面影像检测设备

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US7763531B2 (en) 2010-07-27
US20070292996A1 (en) 2007-12-20
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US7573284B2 (en) 2009-08-11
US7253650B2 (en) 2007-08-07
US20070284669A1 (en) 2007-12-13
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US20050267706A1 (en) 2005-12-01
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