JP4866843B2 - 集積回路デバイスを試験する方法、システム及びプログラム - Google Patents

集積回路デバイスを試験する方法、システム及びプログラム Download PDF

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JP4866843B2
JP4866843B2 JP2007515536A JP2007515536A JP4866843B2 JP 4866843 B2 JP4866843 B2 JP 4866843B2 JP 2007515536 A JP2007515536 A JP 2007515536A JP 2007515536 A JP2007515536 A JP 2007515536A JP 4866843 B2 JP4866843 B2 JP 4866843B2
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retest
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retesting
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JP2008500737A5 (https=
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アキコ・エフ・バルキウナス
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International Business Machines Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B07C5/344—Sorting according to other particular properties according to electric or electromagnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Thin Film Transistor (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2007515536A 2004-05-25 2005-05-25 集積回路デバイスを試験する方法、システム及びプログラム Expired - Fee Related JP4866843B2 (ja)

Applications Claiming Priority (3)

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US10/709,729 2004-05-25
US10/709,729 US7253650B2 (en) 2004-05-25 2004-05-25 Increase productivity at wafer test using probe retest data analysis
PCT/US2005/019267 WO2005116671A2 (en) 2004-05-25 2005-05-25 Increase productivity at wafer test using probe retest data analysis

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JP2008500737A JP2008500737A (ja) 2008-01-10
JP2008500737A5 JP2008500737A5 (https=) 2008-06-26
JP4866843B2 true JP4866843B2 (ja) 2012-02-01

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US (5) US7253650B2 (https=)
EP (1) EP1769257B1 (https=)
JP (1) JP4866843B2 (https=)
KR (1) KR100998388B1 (https=)
CN (1) CN100587507C (https=)
WO (1) WO2005116671A2 (https=)

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