JP4518180B2 - 半導体装置、および、その製造方法 - Google Patents
半導体装置、および、その製造方法 Download PDFInfo
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- JP4518180B2 JP4518180B2 JP2008107072A JP2008107072A JP4518180B2 JP 4518180 B2 JP4518180 B2 JP 4518180B2 JP 2008107072 A JP2008107072 A JP 2008107072A JP 2008107072 A JP2008107072 A JP 2008107072A JP 4518180 B2 JP4518180 B2 JP 4518180B2
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- 239000004065 semiconductor Substances 0.000 title claims description 103
- 238000004519 manufacturing process Methods 0.000 title claims description 34
- 238000000034 method Methods 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 37
- 230000015572 biosynthetic process Effects 0.000 claims description 26
- 230000005669 field effect Effects 0.000 claims description 16
- 239000012535 impurity Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 59
- 238000010586 diagram Methods 0.000 description 27
- 229920002120 photoresistant polymer Polymers 0.000 description 19
- 238000005468 ion implantation Methods 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 14
- 238000000059 patterning Methods 0.000 description 11
- 238000001020 plasma etching Methods 0.000 description 11
- 229910021332 silicide Inorganic materials 0.000 description 10
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052796 boron Inorganic materials 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000004380 ashing Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- -1 oxygen ions Chemical class 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
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- 230000003647 oxidation Effects 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
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- 238000005498 polishing Methods 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Description
(構成)
図1は、本発明の第1実施形態に係る半導体装置について、要部を模式的に示す平面図である。
本実施形態において、上記の半導体装置を製造する製造方法の要部に関して、説明する。
本発明の第2実施形態について説明する。
図18は、本発明の第2実施形態に係る半導体装置について、要部を示す平面図である。
本実施形態において、上記の半導体装置を製造する製造方法の要部に関して、説明する。
本発明の第3実施形態について説明する。
図24は、本発明の第3実施形態に係る半導体装置について、要部を示す平面図である。
本実施形態において、上記の半導体装置を製造する製造方法の要部に関して、説明する。
Claims (4)
- 少なくとも第1のフィンと複数の第2のフィンとを含むフィン型電界効果トランジスタ
を有し、
前記フィン型電界効果トランジスタは、前記第1のフィンにおける閾値電圧と前記第2のフィンにおける閾値電圧とのそれぞれが互いに異なるように、前記第1のフィンにおけるゲート長と前記第2のフィンにおけるゲート長とのそれぞれが互いに異なっていると共に、
前記第1のフィンと前記第2のフィンとのそれぞれは、同一形状であって、基板の面にて第1方向に延在しており、前記第1方向に直交する第2方向にて対称に間を隔てて並ぶように配置されている、
半導体装置。 - 前記第1のフィンと前記第2のフィンとのそれぞれは、基板の面にて第1方向に延在しており、前記第1方向に直交する第2方向にて規定される幅が、互いに異なっている、
請求項1に記載の半導体装置。 - 前記第1のフィンと前記第2のフィンとのそれぞれは、チャネル形成領域における不純物元素のドープ量が、互いに異なっている、
請求項1または2に記載の半導体装置。 - 少なくとも第1のフィンと複数の第2のフィンとを含むフィン型電界効果トランジスタを形成する工程
を有し、
当該フィン型電界効果トランジスタの形成工程においては、
前記第1のフィンにおける閾値電圧と前記第2のフィンにおける閾値電圧とのそれぞれが互いに異なるように、前記第1のフィンにおけるゲート長と前記第2のフィンにおけるゲート長とのそれぞれが互いに異なると共に、
前記第1のフィンと前記複数の第2のフィンとのそれぞれが、同一形状であって、基板の面にて第1方向に延在しており、前記第1方向に直交する第2方向にて対称に間を隔てて並んで配置されるように、当該フィン型電界効果トランジスタを形成する、
半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008107072A JP4518180B2 (ja) | 2008-04-16 | 2008-04-16 | 半導体装置、および、その製造方法 |
TW098107480A TWI414068B (zh) | 2008-04-16 | 2009-03-06 | 半導體裝置及其製造方法 |
US12/423,287 US7888751B2 (en) | 2008-04-16 | 2009-04-14 | Semiconductor device having a fin field effect transistor |
CN2009101327397A CN101562194B (zh) | 2008-04-16 | 2009-04-16 | 半导体装置及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008107072A JP4518180B2 (ja) | 2008-04-16 | 2008-04-16 | 半導体装置、および、その製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009260029A JP2009260029A (ja) | 2009-11-05 |
JP4518180B2 true JP4518180B2 (ja) | 2010-08-04 |
Family
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Country Status (4)
Country | Link |
---|---|
US (1) | US7888751B2 (ja) |
JP (1) | JP4518180B2 (ja) |
CN (1) | CN101562194B (ja) |
TW (1) | TWI414068B (ja) |
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US8008146B2 (en) * | 2009-12-04 | 2011-08-30 | International Business Machines Corporation | Different thickness oxide silicon nanowire field effect transistors |
JP5569243B2 (ja) | 2010-08-09 | 2014-08-13 | ソニー株式会社 | 半導体装置及びその製造方法 |
US8946829B2 (en) * | 2011-10-14 | 2015-02-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Selective fin-shaping process using plasma doping and etching for 3-dimensional transistor applications |
US8963257B2 (en) | 2011-11-10 | 2015-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin field effect transistors and methods for fabricating the same |
CN103107192B (zh) * | 2011-11-10 | 2016-05-18 | 中芯国际集成电路制造(北京)有限公司 | 半导体装置及其制造方法 |
CN103107187B (zh) * | 2011-11-10 | 2016-04-13 | 中芯国际集成电路制造(北京)有限公司 | 半导体装置的制造方法 |
JP5816560B2 (ja) * | 2012-01-10 | 2015-11-18 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US8748989B2 (en) * | 2012-02-28 | 2014-06-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin field effect transistors |
US8546891B2 (en) | 2012-02-29 | 2013-10-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fin profile structure and method of making same |
US9159626B2 (en) * | 2012-03-13 | 2015-10-13 | United Microelectronics Corp. | FinFET and fabricating method thereof |
KR101823105B1 (ko) * | 2012-03-19 | 2018-01-30 | 삼성전자주식회사 | 전계 효과 트랜지스터의 형성 방법 |
US8969974B2 (en) * | 2012-06-14 | 2015-03-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and method for FinFET device |
FR2995722B1 (fr) * | 2012-09-17 | 2015-07-17 | Soitec Silicon On Insulator | Finfet en silicium sur isolant avec une dependance reduite vis-a-vis de la largeur du fin |
US8759874B1 (en) * | 2012-11-30 | 2014-06-24 | Stmicroelectronics, Inc. | FinFET device with isolated channel |
US9159832B2 (en) | 2013-03-08 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor fin structures and methods for forming the same |
CN104253046B (zh) * | 2013-06-26 | 2016-12-28 | 中芯国际集成电路制造(上海)有限公司 | 鳍式场效应晶体管及其形成方法 |
CN104465374B (zh) * | 2013-09-13 | 2017-03-29 | 中国科学院微电子研究所 | 半导体器件制造方法 |
KR102284888B1 (ko) * | 2015-01-15 | 2021-08-02 | 삼성전자주식회사 | 반도체 장치 |
WO2018119037A1 (en) * | 2016-12-20 | 2018-06-28 | Massachusetts Institute Of Technology | High-linearity transistors |
CN116190238A (zh) * | 2017-08-03 | 2023-05-30 | 联华电子股份有限公司 | 半导体元件及其制作方法 |
CN109390401B (zh) * | 2017-08-10 | 2022-07-05 | 联华电子股份有限公司 | 半导体元件及其制作方法 |
US10692769B2 (en) | 2017-08-29 | 2020-06-23 | Taiwan Semiconductor Manufacturing Co., Ltd | Fin critical dimension loading optimization |
US10446686B2 (en) * | 2018-03-09 | 2019-10-15 | International Business Machines Corporation | Asymmetric dual gate fully depleted transistor |
US11031397B2 (en) * | 2018-09-27 | 2021-06-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multi-gate device integration with separated Fin-like field effect transistor cells and gate-all-around transistor cells |
KR102433143B1 (ko) * | 2020-02-26 | 2022-08-16 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 저차원 물질 디바이스 및 방법 |
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2009
- 2009-03-06 TW TW098107480A patent/TWI414068B/zh active
- 2009-04-14 US US12/423,287 patent/US7888751B2/en active Active
- 2009-04-16 CN CN2009101327397A patent/CN101562194B/zh active Active
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Also Published As
Publication number | Publication date |
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CN101562194B (zh) | 2012-07-04 |
TWI414068B (zh) | 2013-11-01 |
US7888751B2 (en) | 2011-02-15 |
US20090261423A1 (en) | 2009-10-22 |
TW200947702A (en) | 2009-11-16 |
CN101562194A (zh) | 2009-10-21 |
JP2009260029A (ja) | 2009-11-05 |
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