KR100810530B1 - 천정주행차 시스템 - Google Patents

천정주행차 시스템 Download PDF

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Publication number
KR100810530B1
KR100810530B1 KR1020040086186A KR20040086186A KR100810530B1 KR 100810530 B1 KR100810530 B1 KR 100810530B1 KR 1020040086186 A KR1020040086186 A KR 1020040086186A KR 20040086186 A KR20040086186 A KR 20040086186A KR 100810530 B1 KR100810530 B1 KR 100810530B1
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KR
South Korea
Prior art keywords
ceiling
buffer
load port
vehicle
running
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020040086186A
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English (en)
Korean (ko)
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KR20050066985A (ko
Inventor
나카오타카시
타나카마코토
Original Assignee
무라타 기카이 가부시키가이샤
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Application filed by 무라타 기카이 가부시키가이샤 filed Critical 무라타 기카이 가부시키가이샤
Publication of KR20050066985A publication Critical patent/KR20050066985A/ko
Application granted granted Critical
Publication of KR100810530B1 publication Critical patent/KR100810530B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C15/00—Safety gear
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C15/00—Safety gear
    • B66C15/04—Safety gear for preventing collisions, e.g. between cranes or trolleys operating on the same track
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
KR1020040086186A 2003-12-26 2004-10-27 천정주행차 시스템 Expired - Lifetime KR100810530B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003432431 2003-12-26
JPJP-P-2003-00432431 2003-12-26
JP2004186312A JP4045451B2 (ja) 2003-12-26 2004-06-24 天井走行車システム
JPJP-P-2004-00186312 2004-06-24

Publications (2)

Publication Number Publication Date
KR20050066985A KR20050066985A (ko) 2005-06-30
KR100810530B1 true KR100810530B1 (ko) 2008-03-10

Family

ID=34554879

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040086186A Expired - Lifetime KR100810530B1 (ko) 2003-12-26 2004-10-27 천정주행차 시스템

Country Status (6)

Country Link
US (1) US7441999B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP1547943B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP4045451B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR100810530B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE602004023366D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW200521051A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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KR100882376B1 (ko) * 2002-06-19 2009-02-05 브룩스 오토메이션, 인크. 수직형 회전저장선반 및 오버헤드 호이스트의 조합에 기초한 반도체 제조용 자동식 재료 처리 시스템
WO2004034438A2 (en) 2002-10-11 2004-04-22 Brooks Automation, Inc. Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
DE102004032659B4 (de) * 2004-07-01 2008-10-30 Atotech Deutschland Gmbh Vorrichtung und Verfahren zum chemischen oder elektrolytischen Behandeln von Behandlungsgut sowie die Verwendung der Vorrichtung
JP4394027B2 (ja) 2005-04-05 2010-01-06 村田機械株式会社 天井走行車システム
JP4264834B2 (ja) * 2005-07-04 2009-05-20 村田機械株式会社 有軌道台車システム
JP4632091B2 (ja) * 2005-08-30 2011-02-16 株式会社ダイフク 物品搬送設備
US8272827B2 (en) 2005-11-07 2012-09-25 Bufano Michael L Reduced capacity carrier, transport, load port, buffer system
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JP2007191235A (ja) 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP4887804B2 (ja) * 2006-01-26 2012-02-29 村田機械株式会社 搬送システム
JP4427755B2 (ja) * 2006-02-03 2010-03-10 村田機械株式会社 搬送システム
JP2007331906A (ja) * 2006-06-16 2007-12-27 Murata Mach Ltd 天井走行車システム
JP4193186B2 (ja) 2006-11-02 2008-12-10 村田機械株式会社 天井走行車
JP4277287B2 (ja) 2006-11-27 2009-06-10 村田機械株式会社 天井走行車
JP4688824B2 (ja) 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
JP4389181B2 (ja) 2007-03-07 2009-12-24 株式会社ダイフク 物品処理設備
JP5088468B2 (ja) 2007-03-09 2012-12-05 村田機械株式会社 懸垂式搬送台車を用いた搬送システム
US20080240892A1 (en) * 2007-03-28 2008-10-02 International Business Machines Corporation Storage buffer device for automated material handling systems
JP5266680B2 (ja) 2007-07-23 2013-08-21 村田機械株式会社 搬送装置、搬送システム及び伸長機構
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JP5163866B2 (ja) * 2007-12-10 2013-03-13 村田機械株式会社 天井バッファとその移設方法
JP2009196748A (ja) 2008-02-20 2009-09-03 Murata Mach Ltd 載置台
JP5062485B2 (ja) * 2008-04-09 2012-10-31 株式会社ダイフク 物品搬送設備
JP5234328B2 (ja) * 2008-04-11 2013-07-10 株式会社ダイフク 物品収納設備
US9048274B2 (en) * 2008-12-08 2015-06-02 Taiwan Semiconductor Manufacturing Co., Ltd. Portable stocker and method of using same
JP5187200B2 (ja) * 2009-01-13 2013-04-24 村田機械株式会社 天井搬送車
JP2010184760A (ja) * 2009-02-10 2010-08-26 Muratec Automation Co Ltd 移載システム
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
US8483866B2 (en) * 2009-04-30 2013-07-09 Taiwan Semiconductor Manufacturing Co., Ltd. Automated materials handling system having multiple categories of overhead buffers
JP5463758B2 (ja) * 2009-06-26 2014-04-09 村田機械株式会社 保管庫
JP2011029550A (ja) * 2009-07-29 2011-02-10 Muratec Automation Co Ltd 搬送システム及びその設定方法
JP5024337B2 (ja) * 2009-07-29 2012-09-12 村田機械株式会社 搬送システム及び保管装置
TWI440119B (zh) * 2010-11-08 2014-06-01 Inotera Memories Inc 具有多層式軌道結構之台車系統及其控制方法
GB201314313D0 (en) 2013-08-09 2013-09-25 Ocado Ltd Apparatus for retrieving units from a storage system
US11858738B2 (en) 2013-08-09 2024-01-02 Ocado Innovation Limited Apparatus for retrieving units from a storage system
KR101576543B1 (ko) 2013-12-20 2015-12-10 주식회사 에스에프에이 이송대차 시스템 및 이송대차를 이용한 대상물 이적재방법
KR101999836B1 (ko) * 2014-08-26 2019-07-12 무라다기카이가부시끼가이샤 분류 시스템과 분류 방법
US10418263B2 (en) 2018-01-20 2019-09-17 Boris Kesil Overhead transportation system for transporting objects between multiple work stations
JP7256360B2 (ja) * 2018-12-14 2023-04-12 シンフォニアテクノロジー株式会社 搬送異常検知システム
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Also Published As

Publication number Publication date
EP1547943A1 (en) 2005-06-29
JP4045451B2 (ja) 2008-02-13
JP2005206371A (ja) 2005-08-04
KR20050066985A (ko) 2005-06-30
DE602004023366D1 (de) 2009-11-12
TWI324129B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2010-05-01
US7441999B2 (en) 2008-10-28
US20050139564A1 (en) 2005-06-30
TW200521051A (en) 2005-07-01
EP1547943B1 (en) 2009-09-30

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