KR100788065B1 - 잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지 - Google Patents

잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지 Download PDF

Info

Publication number
KR100788065B1
KR100788065B1 KR1020040098015A KR20040098015A KR100788065B1 KR 100788065 B1 KR100788065 B1 KR 100788065B1 KR 1020040098015 A KR1020040098015 A KR 1020040098015A KR 20040098015 A KR20040098015 A KR 20040098015A KR 100788065 B1 KR100788065 B1 KR 100788065B1
Authority
KR
South Korea
Prior art keywords
ink
layer
filter
substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020040098015A
Other languages
English (en)
Korean (ko)
Other versions
KR20050052391A (ko
Inventor
후지이겐지
고야마슈우지
오스미마사끼
나가따신고
야마무로쥰
다가와요시노리
무라야마히로유끼
우라야마요시노부
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20050052391A publication Critical patent/KR20050052391A/ko
Application granted granted Critical
Publication of KR100788065B1 publication Critical patent/KR100788065B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020040098015A 2003-11-28 2004-11-26 잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지 Expired - Fee Related KR100788065B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00399219 2003-11-28
JP2003399219 2003-11-28
JP2004319362A JP4455282B2 (ja) 2003-11-28 2004-11-02 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
JPJP-P-2004-00319362 2004-11-02

Publications (2)

Publication Number Publication Date
KR20050052391A KR20050052391A (ko) 2005-06-02
KR100788065B1 true KR100788065B1 (ko) 2007-12-21

Family

ID=34622231

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040098015A Expired - Fee Related KR100788065B1 (ko) 2003-11-28 2004-11-26 잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지

Country Status (5)

Country Link
US (3) US7287847B2 (enExample)
JP (1) JP4455282B2 (enExample)
KR (1) KR100788065B1 (enExample)
CN (1) CN1621236B (enExample)
TW (1) TWI249474B (enExample)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4455282B2 (ja) * 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
US7377625B2 (en) * 2004-06-25 2008-05-27 Canon Kabushiki Kaisha Method for producing ink-jet recording head having filter, ink-jet recording head, substrate for recording head, and ink-jet cartridge
US7470375B2 (en) * 2004-10-22 2008-12-30 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head, substrate for liquid ejection head, and liquid ejection head
JP4881081B2 (ja) * 2005-07-25 2012-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
US20070024705A1 (en) * 2005-08-01 2007-02-01 Richter Roger K Systems and methods for video stream selection
JP2007069435A (ja) * 2005-09-06 2007-03-22 Brother Ind Ltd 液滴吐出装置
US7712884B2 (en) 2005-10-11 2010-05-11 Silverbrook Research Pty Ltd High density thermal ink jet printhead
US7401910B2 (en) * 2005-10-11 2008-07-22 Silverbrook Research Pty Ltd Inkjet printhead with bubble trap
US7465032B2 (en) * 2005-10-11 2008-12-16 Silverbrook Research Pty Ltd. Printhead with inlet filter for ink chamber
US7712876B2 (en) * 2005-10-11 2010-05-11 Silverbrook Research Pty Ltd Inkjet printhead with opposing actuator electrode polarities
US7744195B2 (en) * 2005-10-11 2010-06-29 Silverbrook Research Pty Ltd Low loss electrode connection for inkjet printhead
US7753496B2 (en) 2005-10-11 2010-07-13 Silverbrook Research Pty Ltd Inkjet printhead with multiple chambers and multiple nozzles for each drive circuit
JP4298697B2 (ja) * 2005-11-25 2009-07-22 キヤノン株式会社 インクジェット記録ヘッド、インクジェット記録ヘッドを備えるインクジェットカートリッジ、及びインクジェット記録装置
JP4665747B2 (ja) * 2005-12-16 2011-04-06 ブラザー工業株式会社 プレート積層構造及び液体吐出ヘッド
JP2007203623A (ja) * 2006-02-02 2007-08-16 Canon Inc インクジェット記録ヘッド及びその製造方法
US8037603B2 (en) * 2006-04-27 2011-10-18 Canon Kabushiki Kaisha Ink jet head and producing method therefor
KR100773983B1 (ko) * 2006-06-26 2007-11-08 삼성전기주식회사 잉크젯 헤드 및 그 제조방법
JP5171002B2 (ja) * 2006-09-25 2013-03-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
KR100818277B1 (ko) * 2006-10-02 2008-03-31 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
US8511808B2 (en) * 2007-04-20 2013-08-20 Canon Kabushiki Kaisha Liquid-ejecting recording head and liquid-ejecting recording apparatus
JP2009119650A (ja) * 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
JP2009154376A (ja) * 2007-12-26 2009-07-16 Canon Inc インクジェット記録ヘッド、およびインクジェット記録装置
JP5511191B2 (ja) * 2008-01-28 2014-06-04 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および構造体の形成方法
JP2009208393A (ja) * 2008-03-05 2009-09-17 Canon Inc インクジェット記録ヘッド
JP2009220286A (ja) * 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
JP5355223B2 (ja) 2008-06-17 2013-11-27 キヤノン株式会社 液体吐出ヘッド
JP5224929B2 (ja) * 2008-06-24 2013-07-03 キヤノン株式会社 液体吐出記録ヘッドの製造方法
US8241540B2 (en) * 2008-10-29 2012-08-14 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
JP5335396B2 (ja) * 2008-12-16 2013-11-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP5578859B2 (ja) * 2010-01-14 2014-08-27 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
US8523327B2 (en) * 2010-02-25 2013-09-03 Eastman Kodak Company Printhead including port after filter
JP5693068B2 (ja) 2010-07-14 2015-04-01 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP5517848B2 (ja) * 2010-09-08 2014-06-11 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5500017B2 (ja) * 2010-09-11 2014-05-21 株式会社リコー 液体吐出ヘッド及び画像形成装置
JP5701014B2 (ja) * 2010-11-05 2015-04-15 キヤノン株式会社 吐出素子基板の製造方法
US8608303B2 (en) 2010-12-07 2013-12-17 Canon Kabushiki Kaisha Ink jet recording head
JP5701119B2 (ja) 2011-03-23 2015-04-15 キヤノン株式会社 液体吐出ヘッドの製造方法
US8702216B2 (en) * 2011-12-21 2014-04-22 Xerox Corporation Polymer internal contamination filter for ink jet printhead
WO2013126045A1 (en) * 2012-02-21 2013-08-29 Hewlett Packard Development Company, L.P. Fluid dispenser
US8991977B2 (en) 2012-03-12 2015-03-31 Ricoh Company, Ltd. Liquid discharge head and image forming apparatus
JP2014028471A (ja) 2012-07-31 2014-02-13 Canon Inc 液体吐出ヘッド及びその製造方法
JP6119276B2 (ja) * 2013-02-06 2017-04-26 株式会社リコー 液体吐出ヘッド、画像形成装置
JP6202869B2 (ja) 2013-04-17 2017-09-27 キヤノン株式会社 液体吐出ヘッド
JP6223006B2 (ja) 2013-06-12 2017-11-01 キヤノン株式会社 液体吐出ヘッドチップ及びその製造方法
JP6193715B2 (ja) * 2013-10-08 2017-09-06 キヤノン株式会社 液体吐出ヘッド
JP2015080918A (ja) 2013-10-23 2015-04-27 キヤノン株式会社 液体吐出ヘッドおよび該液体吐出ヘッドの製造方法
US9415349B2 (en) * 2014-02-28 2016-08-16 General Electric Company Porous membrane patterning technique
US9815284B2 (en) * 2015-04-07 2017-11-14 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, and liquid discharge apparatus
CN108263097B (zh) * 2016-12-30 2020-10-23 上海傲睿科技有限公司 打印头芯片及其制造方法
JP6948167B2 (ja) 2017-06-15 2021-10-13 キヤノン株式会社 半導体装置、液体吐出ヘッド及び液体吐出装置
JP6400161B1 (ja) 2017-08-08 2018-10-03 キヤノン株式会社 成膜方法、ドライフィルムの製造方法、および液体吐出ヘッドの製造方法
JP7150500B2 (ja) 2018-07-04 2022-10-11 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの製造方法
JP7134831B2 (ja) * 2018-10-17 2022-09-12 キヤノン株式会社 液体吐出ヘッドの製造方法
US11027547B2 (en) 2019-02-04 2021-06-08 Canon Kabushiki Kaisha Liquid ejection head
WO2021008700A1 (en) * 2019-07-17 2021-01-21 Scrona Ag Inkjet print head with contamination robustness
JP7520581B2 (ja) 2020-06-08 2024-07-23 キヤノン株式会社 記録ヘッドおよびその製造方法
TWI826747B (zh) 2020-11-24 2023-12-21 研能科技股份有限公司 晶圓結構
JP7570910B2 (ja) * 2020-12-10 2024-10-22 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの製造方法
JP2023108679A (ja) * 2022-01-26 2023-08-07 キヤノン株式会社 記録素子基板及びその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046264A (ja) 1983-08-25 1985-03-13 Nippon Telegr & Teleph Corp <Ntt> 多孔質形サ−マルヘツド
EP0244214A1 (en) 1986-04-28 1987-11-04 Hewlett-Packard Company Thermal ink jet printhead
JPH0623979A (ja) * 1992-07-07 1994-02-01 Sharp Corp インクジェット記録ヘッド
JP2000094700A (ja) * 1998-09-22 2000-04-04 Canon Inc インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
JP2002355962A (ja) 2001-05-31 2002-12-10 Brother Ind Ltd インクジェットヘッド
JP2003145764A (ja) 2001-10-30 2003-05-21 Xerox Corp 一体化されたマイクロマシニングフィルタのシステムおよび製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US38710A (en) * 1863-05-26 Improved sugar-evaporator
US4561789A (en) * 1983-06-23 1985-12-31 Nippon Telegraph & Telephone Public Corp. Thermal ink transfer printing system
US5124717A (en) * 1990-12-06 1992-06-23 Xerox Corporation Ink jet printhead having integral filter
US5154815A (en) * 1991-10-23 1992-10-13 Xerox Corporation Method of forming integral electroplated filters on fluid handling devices such as ink jet printheads
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
SG52140A1 (en) 1994-03-04 1998-09-28 Canon Kk Ink jet recording head and method of manufacture therefor and laser processing apparatus and ink jet recording apparatus
US6371598B1 (en) * 1994-04-20 2002-04-16 Seiko Epson Corporation Ink jet recording apparatus, and an ink jet head
DE19655000B4 (de) * 1995-04-05 2008-12-24 Seiko Epson Corp. Tintenkartusche für eine Tintenstrahlaufzeichnungsvorrichtung
JP3343875B2 (ja) 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
US6543884B1 (en) 1996-02-07 2003-04-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having etched back PSG layer
US6264309B1 (en) 1997-12-18 2001-07-24 Lexmark International, Inc. Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same
ES2232047T3 (es) * 1998-06-03 2005-05-16 Canon Kabushiki Kaisha Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal.
US6084618A (en) * 1999-07-22 2000-07-04 Lexmark International, Inc. Filter for an inkjet printhead
JP3930207B2 (ja) * 1999-09-27 2007-06-13 三井化学株式会社 ノルボルナンジメチレンアミン類の製造方法
US6582064B2 (en) 2000-06-20 2003-06-24 Hewlett-Packard Development Company, L.P. Fluid ejection device having an integrated filter and method of manufacture
CN1140396C (zh) * 2000-08-04 2004-03-03 株式会社精工技研 圆盘模制模具
US6464347B2 (en) * 2000-11-30 2002-10-15 Xerox Corporation Laser ablated filter
JP2002166553A (ja) 2000-11-30 2002-06-11 Canon Inc 液体吐出ヘッドおよび液体吐出ヘッドの製造方法
JP4054583B2 (ja) 2001-02-28 2008-02-27 キヤノン株式会社 インクジェットプリントヘッドの製造方法
US6685299B2 (en) 2001-05-31 2004-02-03 Brother Kogyo Kabushiki Kaisha Ink jet head
US6561632B2 (en) * 2001-06-06 2003-05-13 Hewlett-Packard Development Company, L.P. Printhead with high nozzle packing density
EP1284188B1 (en) 2001-08-10 2007-10-17 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head, substrate for liquid discharge head and method for working substrate
JP2003311982A (ja) 2002-04-23 2003-11-06 Canon Inc 液体吐出ヘッド
JP4455282B2 (ja) * 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046264A (ja) 1983-08-25 1985-03-13 Nippon Telegr & Teleph Corp <Ntt> 多孔質形サ−マルヘツド
EP0244214A1 (en) 1986-04-28 1987-11-04 Hewlett-Packard Company Thermal ink jet printhead
JPH0623979A (ja) * 1992-07-07 1994-02-01 Sharp Corp インクジェット記録ヘッド
JP2000094700A (ja) * 1998-09-22 2000-04-04 Canon Inc インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド
JP2002355962A (ja) 2001-05-31 2002-12-10 Brother Ind Ltd インクジェットヘッド
JP2003145764A (ja) 2001-10-30 2003-05-21 Xerox Corp 一体化されたマイクロマシニングフィルタのシステムおよび製造方法

Also Published As

Publication number Publication date
US7862158B2 (en) 2011-01-04
JP2005178364A (ja) 2005-07-07
US20070295687A1 (en) 2007-12-27
US20050117005A1 (en) 2005-06-02
KR20050052391A (ko) 2005-06-02
US20070289942A1 (en) 2007-12-20
CN1621236A (zh) 2005-06-01
US7753502B2 (en) 2010-07-13
TWI249474B (en) 2006-02-21
JP4455282B2 (ja) 2010-04-21
US7287847B2 (en) 2007-10-30
TW200526421A (en) 2005-08-16
CN1621236B (zh) 2010-09-29

Similar Documents

Publication Publication Date Title
KR100788065B1 (ko) 잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지
JP5143274B2 (ja) インクジェットヘッドおよびその製造方法
US7901064B2 (en) Ink jet recording head with ink filter formed of a plurality of stacked films
JP2003145780A (ja) インクジェットプリントヘッドの製造方法
US20090095708A1 (en) Method for manufacturing liquid discharge head
EP2492096B1 (en) Liquid ejection head and process for producing the same
JP5031597B2 (ja) インクジェット記録ヘッドの製造方法
JP5111477B2 (ja) インクジェットヘッド
KR100612326B1 (ko) 잉크젯 헤드의 제조방법
JP2006130766A (ja) 液体吐出ヘッド用基板及びその製造方法
JP4974751B2 (ja) インクジェットヘッドおよびその製造方法
JP2006168141A (ja) インクジェット記録ヘッド、及びその製造方法。
JP3814608B2 (ja) インクジェット記録ヘッドの製造方法
JP4671330B2 (ja) インクジェット記録ヘッドの製造方法
JP2009255415A (ja) インクジェット記録ヘッドの製造方法
JP4810192B2 (ja) インクジェット記録ヘッドの製造方法、及びインクジェット記録ヘッド
JP2008126481A (ja) インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法
US20070091147A1 (en) Liquid discharge head and method of producing the same
JP2007296694A (ja) インクジェット記録ヘッドの製造方法
JP2006218735A (ja) インクジェット記録ヘッドおよびその製造方法
JP2009292052A (ja) インクジェット記録ヘッドおよびこれを備えたインクジェット記録装置

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

G170 Re-publication after modification of scope of protection [patent]
PG1701 Publication of correction

St.27 status event code: A-5-5-P10-P19-oth-PG1701

Patent document republication publication date: 20080414

Republication note text: Request for Correction Notice (Document Request)

Gazette number: 1007880650000

Gazette reference publication date: 20071221

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

R17-X000 Change to representative recorded

St.27 status event code: A-5-5-R10-R17-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20121121

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20131126

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20141126

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20151215

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20151215