JP4455282B2 - インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ - Google Patents

インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ Download PDF

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Publication number
JP4455282B2
JP4455282B2 JP2004319362A JP2004319362A JP4455282B2 JP 4455282 B2 JP4455282 B2 JP 4455282B2 JP 2004319362 A JP2004319362 A JP 2004319362A JP 2004319362 A JP2004319362 A JP 2004319362A JP 4455282 B2 JP4455282 B2 JP 4455282B2
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JP
Japan
Prior art keywords
ink
layer
supply port
forming
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004319362A
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English (en)
Japanese (ja)
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JP2005178364A (ja
JP2005178364A5 (enExample
Inventor
謙児 藤井
修司 小山
義則 田川
正紀 大角
裕之 村山
好信 浦山
純 山室
真吾 永田
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Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004319362A priority Critical patent/JP4455282B2/ja
Priority to US10/990,492 priority patent/US7287847B2/en
Priority to CN2004100973106A priority patent/CN1621236B/zh
Priority to KR1020040098015A priority patent/KR100788065B1/ko
Priority to TW093136598A priority patent/TWI249474B/zh
Publication of JP2005178364A publication Critical patent/JP2005178364A/ja
Priority to US11/840,383 priority patent/US7753502B2/en
Priority to US11/840,404 priority patent/US7862158B2/en
Publication of JP2005178364A5 publication Critical patent/JP2005178364A5/ja
Application granted granted Critical
Publication of JP4455282B2 publication Critical patent/JP4455282B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2004319362A 2003-11-28 2004-11-02 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ Expired - Fee Related JP4455282B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2004319362A JP4455282B2 (ja) 2003-11-28 2004-11-02 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
US10/990,492 US7287847B2 (en) 2003-11-28 2004-11-18 Method of manufacturing ink jet recording head, ink jet recording head, and ink jet cartridge
KR1020040098015A KR100788065B1 (ko) 2003-11-28 2004-11-26 잉크 제트 기록 헤드 제조 방법, 잉크 제트 기록 헤드 및잉크 제트 카트리지
TW093136598A TWI249474B (en) 2003-11-28 2004-11-26 Method of manufacturing ink jet recording head, ink jet recording head, and ink jet cartridge
CN2004100973106A CN1621236B (zh) 2003-11-28 2004-11-26 喷墨记录头的制造方法和喷墨记录头
US11/840,383 US7753502B2 (en) 2003-11-28 2007-08-17 Method of manufacturing ink jet recording head, ink jet recording head, and ink jet cartridge
US11/840,404 US7862158B2 (en) 2003-11-28 2007-08-17 Method of manufacturing ink jet recording head, ink jet cartridge

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003399219 2003-11-28
JP2004319362A JP4455282B2 (ja) 2003-11-28 2004-11-02 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009251774A Division JP5111477B2 (ja) 2003-11-28 2009-11-02 インクジェットヘッド

Publications (3)

Publication Number Publication Date
JP2005178364A JP2005178364A (ja) 2005-07-07
JP2005178364A5 JP2005178364A5 (enExample) 2007-11-01
JP4455282B2 true JP4455282B2 (ja) 2010-04-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004319362A Expired - Fee Related JP4455282B2 (ja) 2003-11-28 2004-11-02 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ

Country Status (5)

Country Link
US (3) US7287847B2 (enExample)
JP (1) JP4455282B2 (enExample)
KR (1) KR100788065B1 (enExample)
CN (1) CN1621236B (enExample)
TW (1) TWI249474B (enExample)

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TWI826747B (zh) 2020-11-24 2023-12-21 研能科技股份有限公司 晶圓結構
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US20070289942A1 (en) 2007-12-20
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TW200526421A (en) 2005-08-16
JP2005178364A (ja) 2005-07-07
US7753502B2 (en) 2010-07-13
KR100788065B1 (ko) 2007-12-21
US20050117005A1 (en) 2005-06-02
KR20050052391A (ko) 2005-06-02
CN1621236B (zh) 2010-09-29
CN1621236A (zh) 2005-06-01
US20070295687A1 (en) 2007-12-27
US7862158B2 (en) 2011-01-04

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