KR100571967B1 - 소형 광대역 변환기 - Google Patents

소형 광대역 변환기 Download PDF

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Publication number
KR100571967B1
KR100571967B1 KR1020037002017A KR20037002017A KR100571967B1 KR 100571967 B1 KR100571967 B1 KR 100571967B1 KR 1020037002017 A KR1020037002017 A KR 1020037002017A KR 20037002017 A KR20037002017 A KR 20037002017A KR 100571967 B1 KR100571967 B1 KR 100571967B1
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KR
South Korea
Prior art keywords
diaphragm
cover member
acoustic transducer
silicon
substrate
Prior art date
Application number
KR1020037002017A
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English (en)
Korean (ko)
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KR20030033026A (ko
Inventor
마이클 페더슨
피터 브이. 뢰퍼트
이성복
Original Assignee
노우레스 일렉트로닉스, 엘엘시
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Priority claimed from US09/910,110 external-priority patent/US6987859B2/en
Application filed by 노우레스 일렉트로닉스, 엘엘시 filed Critical 노우레스 일렉트로닉스, 엘엘시
Publication of KR20030033026A publication Critical patent/KR20030033026A/ko
Application granted granted Critical
Publication of KR100571967B1 publication Critical patent/KR100571967B1/ko

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
KR1020037002017A 2000-08-11 2001-08-10 소형 광대역 변환기 KR100571967B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US63740100A 2000-08-11 2000-08-11
US09/637,401 2000-08-11
US09/910,110 2001-07-20
US09/910,110 US6987859B2 (en) 2001-07-20 2001-07-20 Raised microstructure of silicon based device
PCT/US2001/025184 WO2002015636A2 (en) 2000-08-11 2001-08-10 Miniature broadband transducer

Publications (2)

Publication Number Publication Date
KR20030033026A KR20030033026A (ko) 2003-04-26
KR100571967B1 true KR100571967B1 (ko) 2006-04-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020037002017A KR100571967B1 (ko) 2000-08-11 2001-08-10 소형 광대역 변환기

Country Status (9)

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EP (2) EP1310136B1 (da)
JP (3) JP4338395B2 (da)
KR (1) KR100571967B1 (da)
CN (2) CN1498513B (da)
AT (2) ATE321429T1 (da)
AU (1) AU2001281241A1 (da)
DE (2) DE60118208T2 (da)
DK (2) DK1469701T3 (da)
WO (1) WO2002015636A2 (da)

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KR101158223B1 (ko) * 2008-07-25 2012-06-19 오므론 가부시키가이샤 정전용량형 진동 센서
KR101807069B1 (ko) * 2016-10-21 2017-12-08 현대자동차 주식회사 마이크로폰 및 그 제조방법
KR101807071B1 (ko) * 2016-10-06 2017-12-08 현대자동차 주식회사 마이크로폰 및 그 제조 방법
WO2020072904A1 (en) * 2018-10-05 2020-04-09 Knowles Electronics, Llc Acoustic transducers with a low pressure zone and diaphragms having enhanced compliance
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11671766B2 (en) 2018-10-05 2023-06-06 Knowles Electronics, Llc. Microphone device with ingress protection
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
US11787688B2 (en) 2018-10-05 2023-10-17 Knowles Electronics, Llc Methods of forming MEMS diaphragms including corrugations

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KR101807071B1 (ko) * 2016-10-06 2017-12-08 현대자동차 주식회사 마이크로폰 및 그 제조 방법
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ATE392790T1 (de) 2008-05-15
CN101867858A (zh) 2010-10-20
EP1469701A3 (en) 2005-11-16
JP2007116721A (ja) 2007-05-10
DK1310136T3 (da) 2006-07-31
JP2009153203A (ja) 2009-07-09
CN1498513A (zh) 2004-05-19
JP2004506394A (ja) 2004-02-26
WO2002015636A2 (en) 2002-02-21
CN1498513B (zh) 2010-07-14
JP4338395B2 (ja) 2009-10-07
DK1469701T3 (da) 2008-08-18
EP1469701A2 (en) 2004-10-20
DE60118208T2 (de) 2007-04-12
DE60133679D1 (de) 2008-05-29
DE60133679T2 (de) 2009-06-10
DE60118208D1 (de) 2006-05-11
WO2002015636A3 (en) 2002-10-24
KR20030033026A (ko) 2003-04-26
EP1469701B1 (en) 2008-04-16
EP1310136B1 (en) 2006-03-22
JP5049312B2 (ja) 2012-10-17
AU2001281241A1 (en) 2002-02-25
CN101867858B (zh) 2012-02-22
EP1310136A2 (en) 2003-05-14
ATE321429T1 (de) 2006-04-15

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