JPS56162335A - Air conditioner - Google Patents

Air conditioner

Info

Publication number
JPS56162335A
JPS56162335A JP6393980A JP6393980A JPS56162335A JP S56162335 A JPS56162335 A JP S56162335A JP 6393980 A JP6393980 A JP 6393980A JP 6393980 A JP6393980 A JP 6393980A JP S56162335 A JPS56162335 A JP S56162335A
Authority
JP
Japan
Prior art keywords
air
region
air conditioner
exhaust
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6393980A
Other languages
English (en)
Other versions
JPS6231258B2 (ja
Inventor
Hiroshi Maejima
Hiroto Nagatomo
Jun Suzuki
Akira Tatsumi
Noboru Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Plant Technologies Ltd
Hitachi Architects and Engineers Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Plant Technologies Ltd
Hitachi Architects and Engineers Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Plant Technologies Ltd, Hitachi Architects and Engineers Co Ltd filed Critical Hitachi Ltd
Priority to JP6393980A priority Critical patent/JPS56162335A/ja
Publication of JPS56162335A publication Critical patent/JPS56162335A/ja
Publication of JPS6231258B2 publication Critical patent/JPS6231258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP6393980A 1980-05-16 1980-05-16 Air conditioner Granted JPS56162335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6393980A JPS56162335A (en) 1980-05-16 1980-05-16 Air conditioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6393980A JPS56162335A (en) 1980-05-16 1980-05-16 Air conditioner

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP61059221A Division JPH0678833B2 (ja) 1986-03-19 1986-03-19 半導体製造用空気調和方法
JP61059220A Division JPS629135A (ja) 1986-03-19 1986-03-19 空気調和装置
JP61059219A Division JPH0612180B2 (ja) 1986-03-19 1986-03-19 半導体製造用空気調和装置

Publications (2)

Publication Number Publication Date
JPS56162335A true JPS56162335A (en) 1981-12-14
JPS6231258B2 JPS6231258B2 (ja) 1987-07-07

Family

ID=13243813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6393980A Granted JPS56162335A (en) 1980-05-16 1980-05-16 Air conditioner

Country Status (1)

Country Link
JP (1) JPS56162335A (ja)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127035A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
JPS58127033A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
JPS58129124A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS597836A (ja) * 1982-07-06 1984-01-17 Oshitari Kenkyusho:Kk 垂直層流式無塵室
JPS5951646U (ja) * 1982-09-30 1984-04-05 市光工業株式会社 緩衝式ドアミラ−
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法
JPS59176643U (ja) * 1983-05-09 1984-11-26 吉田　忠男 クリ−ン・ル−ム
JPS6036838A (ja) * 1984-06-15 1985-02-26 Hitachi Ltd 清浄室装置
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム
JPS6149235U (ja) * 1984-09-06 1986-04-02
JPS61107031A (ja) * 1984-10-30 1986-05-24 Taisei Corp クリ−ンル−ム装置
JPS61128045A (ja) * 1984-11-26 1986-06-16 Shimizu Constr Co Ltd 室内空気清浄設備
JPS61202026A (ja) * 1985-03-01 1986-09-06 Fujita Corp クリ−ンル−ム
JPS61217638A (ja) * 1985-02-20 1986-09-27 Matsushita Seiko Co Ltd 空気清浄装置
JPS61256135A (ja) * 1985-05-08 1986-11-13 Hitachi Ltd 空気浄化ユニツト
JPS62119336A (ja) * 1985-11-18 1987-05-30 Hirayama Setsubi Kk クリ−ンル−ムの空調コントロ−ルシステム
JPS62130330U (ja) * 1986-02-08 1987-08-18
JPS62190339A (ja) * 1987-02-20 1987-08-20 Hitachi Ltd 清浄室装置
JPS6399434A (ja) * 1986-10-15 1988-04-30 Shin Nippon Kucho Kk クリ−ンル−ムにおける天井構造
JPH0262341U (ja) * 1989-04-06 1990-05-09
US5015425A (en) * 1984-11-22 1991-05-14 Hitachi, Ltd. Manufacturing apparatus
JP2002089920A (ja) * 2000-09-19 2002-03-27 Taisei Corp クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法
JP2009186127A (ja) * 2008-02-08 2009-08-20 Takasago Thermal Eng Co Ltd 清浄空気循環システム、及び清浄空気循環方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (ja) * 1973-08-03 1975-04-08
JPS523160A (en) * 1975-06-24 1977-01-11 Nippon Telegraph & Telephone Method of connecting electronic circuits
JPS52170394U (ja) * 1976-06-17 1977-12-24
JPS559119U (ja) * 1978-06-30 1980-01-21

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (ja) * 1973-08-03 1975-04-08
JPS523160A (en) * 1975-06-24 1977-01-11 Nippon Telegraph & Telephone Method of connecting electronic circuits
JPS52170394U (ja) * 1976-06-17 1977-12-24
JPS559119U (ja) * 1978-06-30 1980-01-21

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127035A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
JPS58127033A (ja) * 1982-01-25 1983-07-28 Hitachi Ltd 清浄室装置
JPS6314257B2 (ja) * 1982-01-25 1988-03-30 Hitachi Ltd
JPS6314258B2 (ja) * 1982-01-25 1988-03-30 Hitachi Ltd
JPH0223776B2 (ja) * 1982-01-29 1990-05-25 Hitachi Ltd
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS58129124A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPH0223775B2 (ja) * 1982-01-29 1990-05-25 Hitachi Ltd
JPS597836A (ja) * 1982-07-06 1984-01-17 Oshitari Kenkyusho:Kk 垂直層流式無塵室
JPS5951646U (ja) * 1982-09-30 1984-04-05 市光工業株式会社 緩衝式ドアミラ−
JPS6328041Y2 (ja) * 1982-09-30 1988-07-28
JPS59185923A (ja) * 1983-04-07 1984-10-22 Sanki Eng Co Ltd クリーンルームの形成方法
JPH0239696B2 (ja) * 1983-04-07 1990-09-06 Sanki Eng Co Ltd
JPS59176643U (ja) * 1983-05-09 1984-11-26 吉田　忠男 クリ−ン・ル−ム
JPS6223546Y2 (ja) * 1983-05-09 1987-06-16
JPS6069441A (ja) * 1983-09-26 1985-04-20 Ryowa Chiyouon Kogyo Kk ス−パ−クリ−ンシステム
JPH0515934B2 (ja) * 1984-06-15 1993-03-03 Hitachi Ltd
JPS6036838A (ja) * 1984-06-15 1985-02-26 Hitachi Ltd 清浄室装置
JPH0247388Y2 (ja) * 1984-09-06 1990-12-13
JPS6149235U (ja) * 1984-09-06 1986-04-02
JPS61107031A (ja) * 1984-10-30 1986-05-24 Taisei Corp クリ−ンル−ム装置
US5015425A (en) * 1984-11-22 1991-05-14 Hitachi, Ltd. Manufacturing apparatus
JPS61128045A (ja) * 1984-11-26 1986-06-16 Shimizu Constr Co Ltd 室内空気清浄設備
JPH0222302B2 (ja) * 1984-11-26 1990-05-18 Shimizu Construction Co Ltd
JPS61217638A (ja) * 1985-02-20 1986-09-27 Matsushita Seiko Co Ltd 空気清浄装置
JPS61202026A (ja) * 1985-03-01 1986-09-06 Fujita Corp クリ−ンル−ム
JPS61256135A (ja) * 1985-05-08 1986-11-13 Hitachi Ltd 空気浄化ユニツト
JPS62119336A (ja) * 1985-11-18 1987-05-30 Hirayama Setsubi Kk クリ−ンル−ムの空調コントロ−ルシステム
JPS62130330U (ja) * 1986-02-08 1987-08-18
JPS6399434A (ja) * 1986-10-15 1988-04-30 Shin Nippon Kucho Kk クリ−ンル−ムにおける天井構造
JPS62190339A (ja) * 1987-02-20 1987-08-20 Hitachi Ltd 清浄室装置
JPH0262341U (ja) * 1989-04-06 1990-05-09
JP2002089920A (ja) * 2000-09-19 2002-03-27 Taisei Corp クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法
JP4535477B2 (ja) * 2000-09-19 2010-09-01 大成建設株式会社 クリーンルーム及び半導体デバイスもしくは液晶ディスプレーの製造方法
JP2009186127A (ja) * 2008-02-08 2009-08-20 Takasago Thermal Eng Co Ltd 清浄空気循環システム、及び清浄空気循環方法

Also Published As

Publication number Publication date
JPS6231258B2 (ja) 1987-07-07

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