JPH0645242B2 - 液体噴射記録ヘツドの製造方法 - Google Patents

液体噴射記録ヘツドの製造方法

Info

Publication number
JPH0645242B2
JPH0645242B2 JP59274689A JP27468984A JPH0645242B2 JP H0645242 B2 JPH0645242 B2 JP H0645242B2 JP 59274689 A JP59274689 A JP 59274689A JP 27468984 A JP27468984 A JP 27468984A JP H0645242 B2 JPH0645242 B2 JP H0645242B2
Authority
JP
Japan
Prior art keywords
liquid
flow path
jet recording
recording head
pattern layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59274689A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61154947A (ja
Inventor
弘道 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59274689A priority Critical patent/JPH0645242B2/ja
Priority to US06/811,460 priority patent/US4657631A/en
Priority to DE3546794A priority patent/DE3546794C2/de
Priority to DE19853546063 priority patent/DE3546063A1/de
Publication of JPS61154947A publication Critical patent/JPS61154947A/ja
Priority to US07/001,174 priority patent/US4775445A/en
Publication of JPH0645242B2 publication Critical patent/JPH0645242B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP59274689A 1984-12-28 1984-12-28 液体噴射記録ヘツドの製造方法 Expired - Lifetime JPH0645242B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP59274689A JPH0645242B2 (ja) 1984-12-28 1984-12-28 液体噴射記録ヘツドの製造方法
US06/811,460 US4657631A (en) 1984-12-28 1985-12-20 Process for producing a liquid jet recording head
DE3546794A DE3546794C2 (de) 1984-12-28 1985-12-24 Verfahren zur Herstellung eines Flüssigkeitsstrahlaufzeichnungskopfes
DE19853546063 DE3546063A1 (de) 1984-12-28 1985-12-24 Verfahren zur herstellung eines fluessigkeitsstrahlaufzeichnungskopfes
US07/001,174 US4775445A (en) 1984-12-28 1987-01-07 Process for producing a liquid jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59274689A JPH0645242B2 (ja) 1984-12-28 1984-12-28 液体噴射記録ヘツドの製造方法

Publications (2)

Publication Number Publication Date
JPS61154947A JPS61154947A (ja) 1986-07-14
JPH0645242B2 true JPH0645242B2 (ja) 1994-06-15

Family

ID=17545189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59274689A Expired - Lifetime JPH0645242B2 (ja) 1984-12-28 1984-12-28 液体噴射記録ヘツドの製造方法

Country Status (3)

Country Link
US (2) US4657631A (en, 2012)
JP (1) JPH0645242B2 (en, 2012)
DE (1) DE3546063A1 (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6935723B2 (en) 2002-07-24 2005-08-30 Canon Kabushiki Kaisha Ink jet recording head
US8304177B2 (en) 2010-09-08 2012-11-06 Canon Kabushiki Kaisha Process for producing ink jet head
US8974718B2 (en) 2010-06-28 2015-03-10 Canon Kabushiki Kaisha Method for producing structure and method for producing liquid discharge head
US9862189B2 (en) 2015-07-10 2018-01-09 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head
US10005283B2 (en) 2015-07-10 2018-06-26 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head

Families Citing this family (84)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645242B2 (ja) * 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPS63102948A (ja) * 1986-10-20 1988-05-07 Canon Inc インクジエツト記録ヘツドの製造方法
JPH0698761B2 (ja) * 1987-09-07 1994-12-07 株式会社リコー インクジェットヘッド
JPH0688413B2 (ja) * 1988-03-18 1994-11-09 株式会社リコー 液体噴射記録ヘッド
US5578417A (en) * 1989-01-10 1996-11-26 Canon Kabushiki Kaisha Liquid jet recording head and recording apparatus having same
ES2087890T3 (es) * 1989-03-24 1996-08-01 Canon Kk Proceso para la fabricacion de un cabezal para la impresion por chorros de tinta.
US5150132A (en) * 1989-04-07 1992-09-22 Canon Kabushiki Kaisha Material containing a cured substance for use with a liquid ejection recording head and apparatus
JP2697937B2 (ja) * 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
US5571659A (en) * 1990-03-21 1996-11-05 Canon Kabushiki Kaisha Liquid jet recording head and recording apparatus using same
US5086307A (en) * 1990-03-21 1992-02-04 Canon Kabushiki Kaisha Liquid jet recording head
US5578418A (en) * 1990-03-21 1996-11-26 Canon Kabushiki Kaisha Liquid jet recording head and recording apparatus having same
ATE110636T1 (de) * 1990-03-22 1994-09-15 Canon Kk Flüssigkeitsstrahlaufzeichnungskopf und aufzeichnungsgerät, versehen mit diesem kopf.
CA2048366C (en) * 1990-08-03 1996-08-13 Masatsune Kobayashi Ink jet recording head molded member, apparatus comprising the same, and method of manufacturing the same
DE69123932T2 (de) * 1990-10-18 1997-05-22 Canon Kk Herstellungsverfahren eines Tintenstrahldruckkopfes
EP0488675A1 (en) * 1990-11-28 1992-06-03 Canon Kabushiki Kaisha Manufacturing method for liquid jet recording head and liquid jet recording head
EP0491560B1 (en) * 1990-12-19 1997-10-01 Canon Kabushiki Kaisha Method for producing liquid discharging recording head
ATE144197T1 (de) * 1991-02-20 1996-11-15 Canon Kk Tintenstrahlaufzeichnungskopf, tintenstrahlaufzeichnungsvorrichtung diesen verwendend und verfahren zu seiner herstellung
US5436650A (en) * 1991-07-05 1995-07-25 Canon Kabushiki Kaisha Ink jet recording head, process for producing the head and ink jet recording apparatus
JPH0577423A (ja) * 1991-09-24 1993-03-30 Canon Inc インクジエツト記録ヘツド
JPH0592570A (ja) * 1991-10-03 1993-04-16 Canon Inc 液体噴射記録ヘツド、その製造方法、及び液体噴射記録ヘツドを備えた記録装置
JP3103404B2 (ja) * 1991-10-22 2000-10-30 キヤノン株式会社 インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置
US5290667A (en) * 1991-12-03 1994-03-01 Canon Kabushiki Kaisha Method for producing ink jet recording head
EP0572948B1 (en) * 1992-06-01 2000-09-06 Canon Kabushiki Kaisha Ink jet recording head fabrication method
EP0573014B1 (en) * 1992-06-04 1998-10-28 Canon Kabushiki Kaisha Method for manufacturing ink jet head, ink jet head manufactured by such a method, and ink jet apparatus provided with such a head
JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3061944B2 (ja) * 1992-06-24 2000-07-10 キヤノン株式会社 液体噴射記録ヘッド、その製造方法及び記録装置
DE69327762T2 (de) * 1992-10-20 2000-07-06 Canon K.K., Tokio/Tokyo Farbstrahldruckkopf, dessen Herstellungsverfahren und zugehöriges Farbstrahlgerät
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3283979B2 (ja) * 1993-11-12 2002-05-20 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3397478B2 (ja) * 1993-11-26 2003-04-14 キヤノン株式会社 インクジェットヘッド及び該インクジェットヘッドの製造方法及びインクジェット装置
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
EP0715957B1 (en) 1994-12-05 1999-05-26 Canon Kabushiki Kaisha Process for the production of an ink jet head
DE69603639T2 (de) 1995-03-31 2000-04-13 Canon K.K., Tokio/Tokyo Verfahren zum Herstellen eines Tintenstrahlkopfes
JP3368094B2 (ja) 1995-04-21 2003-01-20 キヤノン株式会社 インクジェット記録ヘッドの製造方法
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JP3372739B2 (ja) * 1996-01-12 2003-02-04 キヤノン株式会社 液体噴射記録ヘッドの製造方法
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JP4497633B2 (ja) 1999-03-15 2010-07-07 キヤノン株式会社 撥液体層の形成方法及び液体吐出ヘッドの製造方法
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JP3679668B2 (ja) 1999-12-20 2005-08-03 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4669138B2 (ja) 2001-02-22 2011-04-13 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3728210B2 (ja) 2001-02-23 2005-12-21 キヤノン株式会社 インクジェットヘッドおよびその製造方法、インクジェット記録装置
JP4532785B2 (ja) 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
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JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
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US20080292993A1 (en) * 2006-12-22 2008-11-27 Canon Kabushiki Kaisha Photo-cationic polymerizable epoxy resin composition, liquid discharge head, and manufacturing method thereof
US7971964B2 (en) * 2006-12-22 2011-07-05 Canon Kabushiki Kaisha Liquid discharge head and method for manufacturing the same
JP2009119650A (ja) * 2007-11-13 2009-06-04 Canon Inc インクジェットヘッドの製造方法
US20090136875A1 (en) * 2007-11-15 2009-05-28 Canon Kabushiki Kaisha Manufacturing method of liquid ejection head
US20090162797A1 (en) * 2007-12-19 2009-06-25 Canon Kabushiki Kaisha Method of manufacturing liquid ejection head
JP2010131954A (ja) * 2007-12-19 2010-06-17 Canon Inc 液体吐出ヘッドの製造方法
JP5328334B2 (ja) * 2007-12-21 2013-10-30 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2009220286A (ja) * 2008-03-13 2009-10-01 Canon Inc 液体吐出記録ヘッド及その製造方法
JP2009233955A (ja) * 2008-03-26 2009-10-15 Canon Inc 微細構造体の製造方法及び液体吐出ヘッドの製造方法
JP5288887B2 (ja) * 2008-06-02 2013-09-11 キヤノン株式会社 インクジェット記録ヘッドの製造方法
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JP5653181B2 (ja) 2010-11-09 2015-01-14 キヤノン株式会社 親水被膜の形成方法および親水被膜、ならびにインクジェット記録ヘッドの製造方法およびインクジェット記録ヘッド
US8434229B2 (en) * 2010-11-24 2013-05-07 Canon Kabushiki Kaisha Liquid ejection head manufacturing method
JP5870766B2 (ja) * 2012-03-02 2016-03-01 セイコーエプソン株式会社 液滴吐出ヘッドおよび液滴吐出装置
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Cited By (6)

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US6935723B2 (en) 2002-07-24 2005-08-30 Canon Kabushiki Kaisha Ink jet recording head
USRE40994E1 (en) 2002-07-24 2009-11-24 Canon Kabushiki Kaisha Ink jet recording head
US8974718B2 (en) 2010-06-28 2015-03-10 Canon Kabushiki Kaisha Method for producing structure and method for producing liquid discharge head
US8304177B2 (en) 2010-09-08 2012-11-06 Canon Kabushiki Kaisha Process for producing ink jet head
US9862189B2 (en) 2015-07-10 2018-01-09 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head
US10005283B2 (en) 2015-07-10 2018-06-26 Canon Kabushiki Kaisha Method for manufacturing liquid ejection head

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US4657631A (en) 1987-04-14
JPS61154947A (ja) 1986-07-14
US4775445A (en) 1988-10-04
DE3546063C2 (en, 2012) 1991-10-10
DE3546063A1 (de) 1986-07-03

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