DE69603639T2 - Verfahren zum Herstellen eines Tintenstrahlkopfes - Google Patents

Verfahren zum Herstellen eines Tintenstrahlkopfes

Info

Publication number
DE69603639T2
DE69603639T2 DE69603639T DE69603639T DE69603639T2 DE 69603639 T2 DE69603639 T2 DE 69603639T2 DE 69603639 T DE69603639 T DE 69603639T DE 69603639 T DE69603639 T DE 69603639T DE 69603639 T2 DE69603639 T2 DE 69603639T2
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
jet head
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69603639T
Other languages
English (en)
Other versions
DE69603639D1 (de
Inventor
Norio Ohkuma
Masashi Miyagawa
Hiroaki Toshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69603639D1 publication Critical patent/DE69603639D1/de
Application granted granted Critical
Publication of DE69603639T2 publication Critical patent/DE69603639T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE69603639T 1995-03-31 1996-04-01 Verfahren zum Herstellen eines Tintenstrahlkopfes Expired - Fee Related DE69603639T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7600695 1995-03-31

Publications (2)

Publication Number Publication Date
DE69603639D1 DE69603639D1 (de) 1999-09-16
DE69603639T2 true DE69603639T2 (de) 2000-04-13

Family

ID=13592731

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603639T Expired - Fee Related DE69603639T2 (de) 1995-03-31 1996-04-01 Verfahren zum Herstellen eines Tintenstrahlkopfes

Country Status (3)

Country Link
US (1) US6461798B1 (de)
EP (1) EP0734866B1 (de)
DE (1) DE69603639T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6162589A (en) * 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
WO1998000296A1 (de) * 1996-06-28 1998-01-08 Pelikan Produktions Ag Tintenstrahldruckkopf mit komponenten aus siliciumorganischen verbindungen
US6312085B1 (en) 1997-06-26 2001-11-06 Pelikan Produktions Ag Ink jet printing head with elements made of organosilicic compounds
JP4269136B2 (ja) * 1999-12-10 2009-05-27 富士フイルム株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法並びに印刷装置
US6520627B2 (en) 2000-06-26 2003-02-18 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
JP4532785B2 (ja) 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
US6986982B2 (en) * 2002-02-20 2006-01-17 Canon Kabushiki Kaisha Resist material and method of manufacturing inkjet recording head using the same
JP4298414B2 (ja) * 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP3862625B2 (ja) * 2002-07-10 2006-12-27 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
JP4280574B2 (ja) * 2002-07-10 2009-06-17 キヤノン株式会社 液体吐出ヘッドの製造方法
US6739519B2 (en) 2002-07-31 2004-05-25 Hewlett-Packard Development Company, Lp. Plurality of barrier layers
JP2005074747A (ja) * 2003-08-29 2005-03-24 Canon Inc インクジェットヘッドの製造方法およびインクジェットヘッド
DE10353767B4 (de) * 2003-11-17 2005-09-29 Infineon Technologies Ag Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben
CN1977219B (zh) 2004-06-28 2011-12-28 佳能株式会社 制造微细结构的方法、制造排液头的方法以及排液头
JP4447974B2 (ja) * 2004-06-28 2010-04-07 キヤノン株式会社 インクジェットヘッドの製造方法
JP4480141B2 (ja) 2004-06-28 2010-06-16 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4274556B2 (ja) * 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子の製造方法
JP5027991B2 (ja) * 2004-12-03 2012-09-19 キヤノン株式会社 インクジェットヘッドおよびその製造方法
US7637013B2 (en) * 2005-08-23 2009-12-29 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head
JP4981491B2 (ja) * 2007-03-15 2012-07-18 キヤノン株式会社 インクジェットヘッド製造方法及び貫通電極の製造方法
US7735225B2 (en) * 2007-03-30 2010-06-15 Xerox Corporation Method of manufacturing a cast-in place ink feed structure using encapsulant
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
JP5279686B2 (ja) * 2009-11-11 2013-09-04 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5501167B2 (ja) * 2010-09-08 2014-05-21 キヤノン株式会社 インクジェットヘッドの製造方法
US8434229B2 (en) * 2010-11-24 2013-05-07 Canon Kabushiki Kaisha Liquid ejection head manufacturing method
US9919526B2 (en) * 2013-11-29 2018-03-20 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4450455A (en) 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPH0729433B2 (ja) * 1986-03-05 1995-04-05 キヤノン株式会社 液体噴射記録ヘツドの作成方法
US5016024A (en) * 1990-01-09 1991-05-14 Hewlett-Packard Company Integral ink jet print head
ATE110635T1 (de) * 1990-03-22 1994-09-15 Canon Kk Flüssigkeitsstrahlaufzeichnungskopf und aufzeichnungsgerät, versehen mit diesem kopf.
DE69012096T2 (de) * 1990-03-22 1995-01-12 Canon Kk Flüssigkeitsstrahlaufzeichnungskopf und Aufzeichnungsgerät, versehen mit diesem Kopf.
EP0481788B1 (de) * 1990-10-18 1997-01-02 Canon Kabushiki Kaisha Herstellungsverfahren eines Tintenstrahldruckkopfes
DE69127801T2 (de) 1990-12-19 1998-02-05 Canon Kk Herstellungsverfahren für flüssigkeitsausströmenden Aufzeichnungskopf
US5290667A (en) * 1991-12-03 1994-03-01 Canon Kabushiki Kaisha Method for producing ink jet recording head
DE69329359T2 (de) * 1992-06-01 2001-03-08 Canon Kk Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes
JP2960608B2 (ja) 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
DE69603639D1 (de) 1999-09-16
US6461798B1 (en) 2002-10-08
EP0734866A2 (de) 1996-10-02
EP0734866A3 (de) 1997-06-25
EP0734866B1 (de) 1999-08-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee