DE69401134D1 - Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs - Google Patents
Verfahren zum Herstellen eines thermischen FarbstrahldruckkopfsInfo
- Publication number
- DE69401134D1 DE69401134D1 DE69401134T DE69401134T DE69401134D1 DE 69401134 D1 DE69401134 D1 DE 69401134D1 DE 69401134 T DE69401134 T DE 69401134T DE 69401134 T DE69401134 T DE 69401134T DE 69401134 D1 DE69401134 D1 DE 69401134D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- ink jet
- thermal ink
- jet printhead
- printhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/009,181 US5308442A (en) | 1993-01-25 | 1993-01-25 | Anisotropically etched ink fill slots in silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69401134D1 true DE69401134D1 (de) | 1997-01-30 |
DE69401134T2 DE69401134T2 (de) | 1997-04-03 |
Family
ID=21736058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69401134T Expired - Lifetime DE69401134T2 (de) | 1993-01-25 | 1994-01-19 | Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs |
Country Status (5)
Country | Link |
---|---|
US (1) | US5308442A (de) |
EP (1) | EP0609011B1 (de) |
JP (1) | JP3850043B2 (de) |
DE (1) | DE69401134T2 (de) |
HK (1) | HK91597A (de) |
Families Citing this family (93)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5387314A (en) * | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
US5484507A (en) * | 1993-12-01 | 1996-01-16 | Ford Motor Company | Self compensating process for aligning an aperture with crystal planes in a substrate |
US5519423A (en) * | 1994-07-08 | 1996-05-21 | Hewlett-Packard Company | Tuned entrance fang configuration for ink-jet printers |
US5431775A (en) * | 1994-07-29 | 1995-07-11 | Eastman Kodak Company | Method of forming optical light guides through silicon |
FR2727648B1 (fr) * | 1994-12-01 | 1997-01-03 | Commissariat Energie Atomique | Procede de fabrication micromecanique de buses pour jets de liquide |
JP2795213B2 (ja) * | 1995-04-04 | 1998-09-10 | 日本電気株式会社 | インクジェットプリントヘッド |
JPH08309986A (ja) * | 1995-05-24 | 1996-11-26 | Nec Corp | インクジェット式プリントヘッド |
US5992769A (en) * | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
JP3343875B2 (ja) * | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
US5711891A (en) * | 1995-09-20 | 1998-01-27 | Lucent Technologies Inc. | Wafer processing using thermal nitride etch mask |
US5658471A (en) * | 1995-09-22 | 1997-08-19 | Lexmark International, Inc. | Fabrication of thermal ink-jet feed slots in a silicon substrate |
AUPN623895A0 (en) * | 1995-10-30 | 1995-11-23 | Eastman Kodak Company | A manufacturing process for lift print heads with nozzle rim heaters |
EP0771656A3 (de) * | 1995-10-30 | 1997-11-05 | Eastman Kodak Company | Streuung der Düsen zur Verminderung der elektrostatischen Wechselwirkung zwischen gleichzeitig ausgestossenen Tröpfchen |
US5891354A (en) * | 1996-07-26 | 1999-04-06 | Fujitsu Limited | Methods of etching through wafers and substrates with a composite etch stop layer |
US5793393A (en) * | 1996-08-05 | 1998-08-11 | Hewlett-Packard Company | Dual constriction inklet nozzle feed channel |
JP3713921B2 (ja) | 1996-10-24 | 2005-11-09 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
US5971527A (en) * | 1996-10-29 | 1999-10-26 | Xerox Corporation | Ink jet channel wafer for a thermal ink jet printhead |
DE69730667T2 (de) * | 1996-11-11 | 2005-09-22 | Canon K.K. | Verfahren zur Herstellung eines Durchgangslochs, Gebrauch dieses Verfahrens zur Herstellung eines Slikonsubstrates mit einem solchen Durchgangsloch oder eine Vorrichtung mit diesem Substrat, Verfahren zur Herstellung eines Tintenstrahl-Druckkopfes und Gebrauch dieses Verfahrens zur Herstellung eines Tintenstrahldruckkopfes |
JP3984689B2 (ja) * | 1996-11-11 | 2007-10-03 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
US7195339B2 (en) | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
US6648453B2 (en) | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
US6682174B2 (en) | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
US7337532B2 (en) | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
US6935724B2 (en) | 1997-07-15 | 2005-08-30 | Silverbrook Research Pty Ltd | Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point |
US6712453B2 (en) | 1997-07-15 | 2004-03-30 | Silverbrook Research Pty Ltd. | Ink jet nozzle rim |
US6855264B1 (en) | 1997-07-15 | 2005-02-15 | Kia Silverbrook | Method of manufacture of an ink jet printer having a thermal actuator comprising an external coil spring |
US7465030B2 (en) | 1997-07-15 | 2008-12-16 | Silverbrook Research Pty Ltd | Nozzle arrangement with a magnetic field generator |
US7381340B2 (en) * | 1997-07-15 | 2008-06-03 | Silverbrook Research Pty Ltd | Ink jet printhead that incorporates an etch stop layer |
US7468139B2 (en) | 1997-07-15 | 2008-12-23 | Silverbrook Research Pty Ltd | Method of depositing heater material over a photoresist scaffold |
US7556356B1 (en) | 1997-07-15 | 2009-07-07 | Silverbrook Research Pty Ltd | Inkjet printhead integrated circuit with ink spread prevention |
US6019907A (en) * | 1997-08-08 | 2000-02-01 | Hewlett-Packard Company | Forming refill for monolithic inkjet printhead |
US6042222A (en) * | 1997-08-27 | 2000-03-28 | Hewlett-Packard Company | Pinch point angle variation among multiple nozzle feed channels |
US6322201B1 (en) * | 1997-10-22 | 2001-11-27 | Hewlett-Packard Company | Printhead with a fluid channel therethrough |
US6264309B1 (en) * | 1997-12-18 | 2001-07-24 | Lexmark International, Inc. | Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same |
US6267251B1 (en) * | 1997-12-18 | 2001-07-31 | Lexmark International, Inc. | Filter assembly for a print cartridge container for removing contaminants from a fluid |
JP3408130B2 (ja) * | 1997-12-19 | 2003-05-19 | キヤノン株式会社 | インクジェット記録ヘッドおよびその製造方法 |
US6273557B1 (en) | 1998-03-02 | 2001-08-14 | Hewlett-Packard Company | Micromachined ink feed channels for an inkjet printhead |
ITTO980562A1 (it) | 1998-06-29 | 1999-12-29 | Olivetti Lexikon Spa | Testina di stampa a getto di inchiostro |
US6310641B1 (en) | 1999-06-11 | 2001-10-30 | Lexmark International, Inc. | Integrated nozzle plate for an inkjet print head formed using a photolithographic method |
IT1310099B1 (it) * | 1999-07-12 | 2002-02-11 | Olivetti Lexikon Spa | Testina di stampa monolitica e relativo processo di fabbricazione. |
JP4161493B2 (ja) * | 1999-12-10 | 2008-10-08 | ソニー株式会社 | エッチング方法およびマイクロミラーの製造方法 |
US6260957B1 (en) | 1999-12-20 | 2001-07-17 | Lexmark International, Inc. | Ink jet printhead with heater chip ink filter |
US6425804B1 (en) | 2000-03-21 | 2002-07-30 | Hewlett-Packard Company | Pressurized delivery system for abrasive particulate material |
US6971170B2 (en) * | 2000-03-28 | 2005-12-06 | Microjet Technology Co., Ltd | Method of manufacturing printhead |
US6482574B1 (en) | 2000-04-20 | 2002-11-19 | Hewlett-Packard Co. | Droplet plate architecture in ink-jet printheads |
KR100413677B1 (ko) * | 2000-07-24 | 2003-12-31 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 |
IT1320599B1 (it) * | 2000-08-23 | 2003-12-10 | Olivetti Lexikon Spa | Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione. |
US6848773B1 (en) | 2000-09-15 | 2005-02-01 | Spectra, Inc. | Piezoelectric ink jet printing module |
US6402301B1 (en) | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
US6675476B2 (en) * | 2000-12-05 | 2004-01-13 | Hewlett-Packard Development Company, L.P. | Slotted substrates and techniques for forming same |
US6648732B2 (en) | 2001-01-30 | 2003-11-18 | Hewlett-Packard Development Company, L.P. | Thin film coating of a slotted substrate and techniques for forming slotted substrates |
US7160806B2 (en) * | 2001-08-16 | 2007-01-09 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead processing with silicon etching |
TW526142B (en) * | 2001-08-28 | 2003-04-01 | Nanodynamics Inc | Ink supply structure of ink-jet print head |
US6818464B2 (en) * | 2001-10-17 | 2004-11-16 | Hymite A/S | Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes |
US6627467B2 (en) | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Fluid ejection device fabrication |
US7125731B2 (en) | 2001-10-31 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Drop generator for ultra-small droplets |
US6641745B2 (en) | 2001-11-16 | 2003-11-04 | Hewlett-Packard Development Company, L.P. | Method of forming a manifold in a substrate and printhead substructure having the same |
US7011392B2 (en) * | 2002-01-24 | 2006-03-14 | Industrial Technology Research Institute | Integrated inkjet print head with rapid ink refill mechanism and off-shooter heater |
US6942320B2 (en) * | 2002-01-24 | 2005-09-13 | Industrial Technology Research Institute | Integrated micro-droplet generator |
US7051426B2 (en) * | 2002-01-31 | 2006-05-30 | Hewlett-Packard Development Company, L.P. | Method making a cutting disk into of a substrate |
US6871942B2 (en) * | 2002-04-15 | 2005-03-29 | Timothy R. Emery | Bonding structure and method of making |
US6520624B1 (en) * | 2002-06-18 | 2003-02-18 | Hewlett-Packard Company | Substrate with fluid passage supports |
US6951622B2 (en) * | 2002-08-08 | 2005-10-04 | Industrial Technology Research Institute | Method for fabricating an integrated nozzle plate and multi-level micro-fluidic devices fabricated |
JP4107096B2 (ja) * | 2003-02-10 | 2008-06-25 | ヤマハ株式会社 | ウェットエッチング方法 |
US6916090B2 (en) * | 2003-03-10 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | Integrated fluid ejection device and filter |
EP1515364B1 (de) | 2003-09-15 | 2016-04-13 | Nuvotronics, LLC | Gehäuse und Verfahren zu seiner Herstellung und zu seiner Prüfung |
EP1684861B1 (de) * | 2003-10-21 | 2014-12-03 | The Regents Of The University Of Michigan | Intrakranielles neurales schnittstellensystem |
US7040016B2 (en) * | 2003-10-22 | 2006-05-09 | Hewlett-Packard Development Company, L.P. | Method of fabricating a mandrel for electroformation of an orifice plate |
KR100537522B1 (ko) | 2004-02-27 | 2005-12-19 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드와 그 노즐 플레이트의제조 방법 |
US7681306B2 (en) * | 2004-04-28 | 2010-03-23 | Hymite A/S | Method of forming an assembly to house one or more micro components |
US7267431B2 (en) * | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
TWI250629B (en) * | 2005-01-12 | 2006-03-01 | Ind Tech Res Inst | Electronic package and fabricating method thereof |
WO2006138358A2 (en) | 2005-06-14 | 2006-12-28 | The Regents Of The University Of Michigan Technology Management Office | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
CN100428415C (zh) * | 2005-07-22 | 2008-10-22 | 中国科学院微电子研究所 | 基于氮化硅镂空掩模的纳米电极制备方法 |
CN101583309B (zh) * | 2005-10-07 | 2012-07-04 | 神经连结科技公司 | 模块化多通道微电极阵列及其制造方法 |
US8195267B2 (en) | 2006-01-26 | 2012-06-05 | Seymour John P | Microelectrode with laterally extending platform for reduction of tissue encapsulation |
US7909434B2 (en) * | 2006-10-27 | 2011-03-22 | Hewlett-Packard Development Company, L.P. | Printhead and method of printing |
US8731673B2 (en) | 2007-02-26 | 2014-05-20 | Sapiens Steering Brain Stimulation B.V. | Neural interface system |
DE102007027434A1 (de) * | 2007-06-14 | 2008-12-18 | X-Fab Semiconductor Foundries Ag | Verfahren zur Herstellung von Justagestrukturen für eine strukturierte Schichtabscheidung auf einem Mikrosystemtechnikwafer mittels einer Beschichtungsmaske |
US8047156B2 (en) | 2007-07-02 | 2011-11-01 | Hewlett-Packard Development Company, L.P. | Dice with polymer ribs |
US8224417B2 (en) * | 2007-10-17 | 2012-07-17 | Neuronexus Technologies, Inc. | Guide tube for an implantable device system |
US8958862B2 (en) * | 2007-10-17 | 2015-02-17 | Neuronexus Technologies, Inc. | Implantable device including a resorbable carrier |
US8565894B2 (en) * | 2007-10-17 | 2013-10-22 | Neuronexus Technologies, Inc. | Three-dimensional system of electrode leads |
US8498720B2 (en) | 2008-02-29 | 2013-07-30 | Neuronexus Technologies, Inc. | Implantable electrode and method of making the same |
US9289142B2 (en) | 2008-03-24 | 2016-03-22 | Neuronexus Technologies, Inc. | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
US20090240314A1 (en) * | 2008-03-24 | 2009-09-24 | Kong K C | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
CN102202797A (zh) * | 2008-10-31 | 2011-09-28 | 富士胶卷迪马蒂克斯股份有限公司 | 成形喷嘴出口 |
US8197029B2 (en) | 2008-12-30 | 2012-06-12 | Fujifilm Corporation | Forming nozzles |
BR112012008971A2 (pt) * | 2009-10-16 | 2018-02-27 | Neuroneux Tech Inc | "sistema de interface neural e método para fabricação" |
CN102686147B (zh) | 2009-11-05 | 2016-01-20 | 格雷特巴奇有限公司 | 波导神经接口装置 |
US9155861B2 (en) | 2010-09-20 | 2015-10-13 | Neuronexus Technologies, Inc. | Neural drug delivery system with fluidic threads |
JP5645863B2 (ja) * | 2012-03-14 | 2014-12-24 | 富士フイルム株式会社 | ノズルプレートの製造方法 |
US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US32572A (en) * | 1861-06-18 | Safety-guard for steam-boilers | ||
USRE32572E (en) * | 1985-04-03 | 1988-01-05 | Xerox Corporation | Thermal ink jet printhead and process therefor |
US4601777A (en) * | 1985-04-03 | 1986-07-22 | Xerox Corporation | Thermal ink jet printhead and process therefor |
US4612554A (en) * | 1985-07-29 | 1986-09-16 | Xerox Corporation | High density thermal ink jet printhead |
US4638337A (en) * | 1985-08-02 | 1987-01-20 | Xerox Corporation | Thermal ink jet printhead |
US4789425A (en) * | 1987-08-06 | 1988-12-06 | Xerox Corporation | Thermal ink jet printhead fabricating process |
US4882595A (en) * | 1987-10-30 | 1989-11-21 | Hewlett-Packard Company | Hydraulically tuned channel architecture |
CA1300974C (en) * | 1987-10-30 | 1992-05-19 | Kenneth E. Trueba | Hydraulically tuned channel architecture |
US4829324A (en) * | 1987-12-23 | 1989-05-09 | Xerox Corporation | Large array thermal ink jet printhead |
US4808260A (en) * | 1988-02-05 | 1989-02-28 | Ford Motor Company | Directional aperture etched in silicon |
US4863560A (en) * | 1988-08-22 | 1989-09-05 | Xerox Corp | Fabrication of silicon structures by single side, multiple step etching process |
US4851371A (en) * | 1988-12-05 | 1989-07-25 | Xerox Corporation | Fabricating process for large array semiconductive devices |
US4899181A (en) * | 1989-01-30 | 1990-02-06 | Xerox Corporation | Large monolithic thermal ink jet printhead |
US4875968A (en) * | 1989-02-02 | 1989-10-24 | Xerox Corporation | Method of fabricating ink jet printheads |
US4899178A (en) * | 1989-02-02 | 1990-02-06 | Xerox Corporation | Thermal ink jet printhead with internally fed ink reservoir |
IT1234800B (it) * | 1989-06-08 | 1992-05-27 | C Olivetti & C Spa Sede Via Je | Procedimento di fabbricazione di testine termiche di stampa a getto d'inchiostro e testine cosi' ottenute |
US5131978A (en) * | 1990-06-07 | 1992-07-21 | Xerox Corporation | Low temperature, single side, multiple step etching process for fabrication of small and large structures |
US5141596A (en) * | 1991-07-29 | 1992-08-25 | Xerox Corporation | Method of fabricating an ink jet printhead having integral silicon filter |
-
1993
- 1993-01-25 US US08/009,181 patent/US5308442A/en not_active Expired - Lifetime
-
1994
- 1994-01-19 EP EP94300394A patent/EP0609011B1/de not_active Expired - Lifetime
- 1994-01-19 DE DE69401134T patent/DE69401134T2/de not_active Expired - Lifetime
- 1994-01-25 JP JP02330894A patent/JP3850043B2/ja not_active Expired - Fee Related
-
1997
- 1997-06-26 HK HK91597A patent/HK91597A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HK91597A (en) | 1997-08-01 |
JPH071738A (ja) | 1995-01-06 |
EP0609011B1 (de) | 1996-12-18 |
DE69401134T2 (de) | 1997-04-03 |
JP3850043B2 (ja) | 2006-11-29 |
EP0609011A2 (de) | 1994-08-03 |
US5308442A (en) | 1994-05-03 |
EP0609011A3 (de) | 1994-09-14 |
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