DE69401134T2 - Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs - Google Patents
Verfahren zum Herstellen eines thermischen FarbstrahldruckkopfsInfo
- Publication number
- DE69401134T2 DE69401134T2 DE69401134T DE69401134T DE69401134T2 DE 69401134 T2 DE69401134 T2 DE 69401134T2 DE 69401134 T DE69401134 T DE 69401134T DE 69401134 T DE69401134 T DE 69401134T DE 69401134 T2 DE69401134 T2 DE 69401134T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- ink jet
- print head
- jet print
- thermal ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/009,181 US5308442A (en) | 1993-01-25 | 1993-01-25 | Anisotropically etched ink fill slots in silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69401134D1 DE69401134D1 (de) | 1997-01-30 |
DE69401134T2 true DE69401134T2 (de) | 1997-04-03 |
Family
ID=21736058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69401134T Expired - Lifetime DE69401134T2 (de) | 1993-01-25 | 1994-01-19 | Verfahren zum Herstellen eines thermischen Farbstrahldruckkopfs |
Country Status (5)
Country | Link |
---|---|
US (1) | US5308442A (de) |
EP (1) | EP0609011B1 (de) |
JP (1) | JP3850043B2 (de) |
DE (1) | DE69401134T2 (de) |
HK (1) | HK91597A (de) |
Families Citing this family (93)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5387314A (en) * | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
US5484507A (en) * | 1993-12-01 | 1996-01-16 | Ford Motor Company | Self compensating process for aligning an aperture with crystal planes in a substrate |
US5519423A (en) * | 1994-07-08 | 1996-05-21 | Hewlett-Packard Company | Tuned entrance fang configuration for ink-jet printers |
US5431775A (en) * | 1994-07-29 | 1995-07-11 | Eastman Kodak Company | Method of forming optical light guides through silicon |
FR2727648B1 (fr) * | 1994-12-01 | 1997-01-03 | Commissariat Energie Atomique | Procede de fabrication micromecanique de buses pour jets de liquide |
JP2795213B2 (ja) * | 1995-04-04 | 1998-09-10 | 日本電気株式会社 | インクジェットプリントヘッド |
JPH08309986A (ja) * | 1995-05-24 | 1996-11-26 | Nec Corp | インクジェット式プリントヘッド |
US5992769A (en) * | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
JP3343875B2 (ja) * | 1995-06-30 | 2002-11-11 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
US5711891A (en) * | 1995-09-20 | 1998-01-27 | Lucent Technologies Inc. | Wafer processing using thermal nitride etch mask |
US5658471A (en) * | 1995-09-22 | 1997-08-19 | Lexmark International, Inc. | Fabrication of thermal ink-jet feed slots in a silicon substrate |
AUPN623895A0 (en) * | 1995-10-30 | 1995-11-23 | Eastman Kodak Company | A manufacturing process for lift print heads with nozzle rim heaters |
EP0771656A3 (de) * | 1995-10-30 | 1997-11-05 | Eastman Kodak Company | Streuung der Düsen zur Verminderung der elektrostatischen Wechselwirkung zwischen gleichzeitig ausgestossenen Tröpfchen |
US5891354A (en) * | 1996-07-26 | 1999-04-06 | Fujitsu Limited | Methods of etching through wafers and substrates with a composite etch stop layer |
US5793393A (en) * | 1996-08-05 | 1998-08-11 | Hewlett-Packard Company | Dual constriction inklet nozzle feed channel |
JP3713921B2 (ja) | 1996-10-24 | 2005-11-09 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
US5971527A (en) * | 1996-10-29 | 1999-10-26 | Xerox Corporation | Ink jet channel wafer for a thermal ink jet printhead |
JP3984689B2 (ja) * | 1996-11-11 | 2007-10-03 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
DK0841167T3 (da) * | 1996-11-11 | 2005-01-24 | Canon Kk | Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling..... |
US6682174B2 (en) | 1998-03-25 | 2004-01-27 | Silverbrook Research Pty Ltd | Ink jet nozzle arrangement configuration |
US7195339B2 (en) | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
US6712453B2 (en) | 1997-07-15 | 2004-03-30 | Silverbrook Research Pty Ltd. | Ink jet nozzle rim |
US6188415B1 (en) | 1997-07-15 | 2001-02-13 | Silverbrook Research Pty Ltd | Ink jet printer having a thermal actuator comprising an external coil spring |
US7337532B2 (en) | 1997-07-15 | 2008-03-04 | Silverbrook Research Pty Ltd | Method of manufacturing micro-electromechanical device having motion-transmitting structure |
US7465030B2 (en) | 1997-07-15 | 2008-12-16 | Silverbrook Research Pty Ltd | Nozzle arrangement with a magnetic field generator |
US6935724B2 (en) | 1997-07-15 | 2005-08-30 | Silverbrook Research Pty Ltd | Ink jet nozzle having actuator with anchor positioned between nozzle chamber and actuator connection point |
US7556356B1 (en) | 1997-07-15 | 2009-07-07 | Silverbrook Research Pty Ltd | Inkjet printhead integrated circuit with ink spread prevention |
US7468139B2 (en) | 1997-07-15 | 2008-12-23 | Silverbrook Research Pty Ltd | Method of depositing heater material over a photoresist scaffold |
US7381340B2 (en) * | 1997-07-15 | 2008-06-03 | Silverbrook Research Pty Ltd | Ink jet printhead that incorporates an etch stop layer |
US6648453B2 (en) | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
US6019907A (en) * | 1997-08-08 | 2000-02-01 | Hewlett-Packard Company | Forming refill for monolithic inkjet printhead |
US6042222A (en) * | 1997-08-27 | 2000-03-28 | Hewlett-Packard Company | Pinch point angle variation among multiple nozzle feed channels |
US6322201B1 (en) | 1997-10-22 | 2001-11-27 | Hewlett-Packard Company | Printhead with a fluid channel therethrough |
US6267251B1 (en) * | 1997-12-18 | 2001-07-31 | Lexmark International, Inc. | Filter assembly for a print cartridge container for removing contaminants from a fluid |
US6264309B1 (en) | 1997-12-18 | 2001-07-24 | Lexmark International, Inc. | Filter formed as part of a heater chip for removing contaminants from a fluid and a method for forming same |
JP3408130B2 (ja) * | 1997-12-19 | 2003-05-19 | キヤノン株式会社 | インクジェット記録ヘッドおよびその製造方法 |
US6273557B1 (en) | 1998-03-02 | 2001-08-14 | Hewlett-Packard Company | Micromachined ink feed channels for an inkjet printhead |
ITTO980562A1 (it) | 1998-06-29 | 1999-12-29 | Olivetti Lexikon Spa | Testina di stampa a getto di inchiostro |
US6310641B1 (en) | 1999-06-11 | 2001-10-30 | Lexmark International, Inc. | Integrated nozzle plate for an inkjet print head formed using a photolithographic method |
IT1310099B1 (it) * | 1999-07-12 | 2002-02-11 | Olivetti Lexikon Spa | Testina di stampa monolitica e relativo processo di fabbricazione. |
JP4161493B2 (ja) * | 1999-12-10 | 2008-10-08 | ソニー株式会社 | エッチング方法およびマイクロミラーの製造方法 |
US6260957B1 (en) | 1999-12-20 | 2001-07-17 | Lexmark International, Inc. | Ink jet printhead with heater chip ink filter |
US6425804B1 (en) | 2000-03-21 | 2002-07-30 | Hewlett-Packard Company | Pressurized delivery system for abrasive particulate material |
US6971170B2 (en) * | 2000-03-28 | 2005-12-06 | Microjet Technology Co., Ltd | Method of manufacturing printhead |
US6482574B1 (en) | 2000-04-20 | 2002-11-19 | Hewlett-Packard Co. | Droplet plate architecture in ink-jet printheads |
KR100413677B1 (ko) * | 2000-07-24 | 2003-12-31 | 삼성전자주식회사 | 버블 젯 방식의 잉크 젯 프린트 헤드 |
IT1320599B1 (it) * | 2000-08-23 | 2003-12-10 | Olivetti Lexikon Spa | Testina di stampa monolitica con scanalatura autoallineata e relativoprocesso di fabbricazione. |
US6848773B1 (en) * | 2000-09-15 | 2005-02-01 | Spectra, Inc. | Piezoelectric ink jet printing module |
US6402301B1 (en) | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
US6675476B2 (en) * | 2000-12-05 | 2004-01-13 | Hewlett-Packard Development Company, L.P. | Slotted substrates and techniques for forming same |
US6648732B2 (en) * | 2001-01-30 | 2003-11-18 | Hewlett-Packard Development Company, L.P. | Thin film coating of a slotted substrate and techniques for forming slotted substrates |
US7160806B2 (en) * | 2001-08-16 | 2007-01-09 | Hewlett-Packard Development Company, L.P. | Thermal inkjet printhead processing with silicon etching |
TW526142B (en) * | 2001-08-28 | 2003-04-01 | Nanodynamics Inc | Ink supply structure of ink-jet print head |
US6818464B2 (en) * | 2001-10-17 | 2004-11-16 | Hymite A/S | Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes |
US7125731B2 (en) | 2001-10-31 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Drop generator for ultra-small droplets |
US6627467B2 (en) | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Fluid ejection device fabrication |
US6641745B2 (en) | 2001-11-16 | 2003-11-04 | Hewlett-Packard Development Company, L.P. | Method of forming a manifold in a substrate and printhead substructure having the same |
US6942320B2 (en) * | 2002-01-24 | 2005-09-13 | Industrial Technology Research Institute | Integrated micro-droplet generator |
US7011392B2 (en) * | 2002-01-24 | 2006-03-14 | Industrial Technology Research Institute | Integrated inkjet print head with rapid ink refill mechanism and off-shooter heater |
US7051426B2 (en) * | 2002-01-31 | 2006-05-30 | Hewlett-Packard Development Company, L.P. | Method making a cutting disk into of a substrate |
US6871942B2 (en) * | 2002-04-15 | 2005-03-29 | Timothy R. Emery | Bonding structure and method of making |
US6520624B1 (en) * | 2002-06-18 | 2003-02-18 | Hewlett-Packard Company | Substrate with fluid passage supports |
US6951622B2 (en) * | 2002-08-08 | 2005-10-04 | Industrial Technology Research Institute | Method for fabricating an integrated nozzle plate and multi-level micro-fluidic devices fabricated |
JP4107096B2 (ja) * | 2003-02-10 | 2008-06-25 | ヤマハ株式会社 | ウェットエッチング方法 |
US6916090B2 (en) * | 2003-03-10 | 2005-07-12 | Hewlett-Packard Development Company, L.P. | Integrated fluid ejection device and filter |
EP2937897A3 (de) | 2003-09-15 | 2016-03-23 | Nuvotronics LLC | Vorrichtungspaket und verfahren zur herstellung und prüfung davon |
EP1684861B1 (de) * | 2003-10-21 | 2014-12-03 | The Regents Of The University Of Michigan | Intrakranielles neurales schnittstellensystem |
US7040016B2 (en) * | 2003-10-22 | 2006-05-09 | Hewlett-Packard Development Company, L.P. | Method of fabricating a mandrel for electroformation of an orifice plate |
KR100537522B1 (ko) | 2004-02-27 | 2005-12-19 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드와 그 노즐 플레이트의제조 방법 |
US7681306B2 (en) * | 2004-04-28 | 2010-03-23 | Hymite A/S | Method of forming an assembly to house one or more micro components |
US7267431B2 (en) * | 2004-06-30 | 2007-09-11 | Lexmark International, Inc. | Multi-fluid ejection device |
TWI250629B (en) | 2005-01-12 | 2006-03-01 | Ind Tech Res Inst | Electronic package and fabricating method thereof |
US9014796B2 (en) | 2005-06-14 | 2015-04-21 | Regents Of The University Of Michigan | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
CN100428415C (zh) * | 2005-07-22 | 2008-10-22 | 中国科学院微电子研究所 | 基于氮化硅镂空掩模的纳米电极制备方法 |
EP1931419B1 (de) * | 2005-10-07 | 2016-08-10 | NeuroNexus Technologies, Inc. | Modulares mehrkanal-mikroelektrodenarray |
WO2007089738A2 (en) * | 2006-01-26 | 2007-08-09 | The Regents Of The University Of Michigan | Microelectrode with laterally extending platform for reduction of tissue encapsulation |
US7909434B2 (en) * | 2006-10-27 | 2011-03-22 | Hewlett-Packard Development Company, L.P. | Printhead and method of printing |
US8731673B2 (en) | 2007-02-26 | 2014-05-20 | Sapiens Steering Brain Stimulation B.V. | Neural interface system |
DE102007027434A1 (de) * | 2007-06-14 | 2008-12-18 | X-Fab Semiconductor Foundries Ag | Verfahren zur Herstellung von Justagestrukturen für eine strukturierte Schichtabscheidung auf einem Mikrosystemtechnikwafer mittels einer Beschichtungsmaske |
US8047156B2 (en) | 2007-07-02 | 2011-11-01 | Hewlett-Packard Development Company, L.P. | Dice with polymer ribs |
US8958862B2 (en) * | 2007-10-17 | 2015-02-17 | Neuronexus Technologies, Inc. | Implantable device including a resorbable carrier |
US8565894B2 (en) * | 2007-10-17 | 2013-10-22 | Neuronexus Technologies, Inc. | Three-dimensional system of electrode leads |
US8224417B2 (en) * | 2007-10-17 | 2012-07-17 | Neuronexus Technologies, Inc. | Guide tube for an implantable device system |
US8498720B2 (en) | 2008-02-29 | 2013-07-30 | Neuronexus Technologies, Inc. | Implantable electrode and method of making the same |
US9289142B2 (en) | 2008-03-24 | 2016-03-22 | Neuronexus Technologies, Inc. | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
US20090240314A1 (en) * | 2008-03-24 | 2009-09-24 | Kong K C | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
KR20110081888A (ko) * | 2008-10-31 | 2011-07-14 | 후지필름 디마틱스, 인크. | 노즐 유출구 형상화 |
US8197029B2 (en) * | 2008-12-30 | 2012-06-12 | Fujifilm Corporation | Forming nozzles |
JP5658263B2 (ja) * | 2009-10-16 | 2015-01-21 | サピエンス ステアリング ブレイン スティムレーション ベー ヴィ | 神経インターフェースシステム |
WO2011057137A1 (en) | 2009-11-05 | 2011-05-12 | Neuronexus Technologies | Waveguide neural interface device |
US9155861B2 (en) | 2010-09-20 | 2015-10-13 | Neuronexus Technologies, Inc. | Neural drug delivery system with fluidic threads |
JP5645863B2 (ja) * | 2012-03-14 | 2014-12-24 | 富士フイルム株式会社 | ノズルプレートの製造方法 |
US10319654B1 (en) | 2017-12-01 | 2019-06-11 | Cubic Corporation | Integrated chip scale packages |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US32572A (en) * | 1861-06-18 | Safety-guard for steam-boilers | ||
USRE32572E (en) * | 1985-04-03 | 1988-01-05 | Xerox Corporation | Thermal ink jet printhead and process therefor |
US4601777A (en) * | 1985-04-03 | 1986-07-22 | Xerox Corporation | Thermal ink jet printhead and process therefor |
US4612554A (en) * | 1985-07-29 | 1986-09-16 | Xerox Corporation | High density thermal ink jet printhead |
US4638337A (en) * | 1985-08-02 | 1987-01-20 | Xerox Corporation | Thermal ink jet printhead |
US4789425A (en) * | 1987-08-06 | 1988-12-06 | Xerox Corporation | Thermal ink jet printhead fabricating process |
US4882595A (en) * | 1987-10-30 | 1989-11-21 | Hewlett-Packard Company | Hydraulically tuned channel architecture |
CA1300974C (en) * | 1987-10-30 | 1992-05-19 | Kenneth E. Trueba | Hydraulically tuned channel architecture |
US4829324A (en) * | 1987-12-23 | 1989-05-09 | Xerox Corporation | Large array thermal ink jet printhead |
US4808260A (en) * | 1988-02-05 | 1989-02-28 | Ford Motor Company | Directional aperture etched in silicon |
US4863560A (en) * | 1988-08-22 | 1989-09-05 | Xerox Corp | Fabrication of silicon structures by single side, multiple step etching process |
US4851371A (en) * | 1988-12-05 | 1989-07-25 | Xerox Corporation | Fabricating process for large array semiconductive devices |
US4899181A (en) * | 1989-01-30 | 1990-02-06 | Xerox Corporation | Large monolithic thermal ink jet printhead |
US4899178A (en) * | 1989-02-02 | 1990-02-06 | Xerox Corporation | Thermal ink jet printhead with internally fed ink reservoir |
US4875968A (en) * | 1989-02-02 | 1989-10-24 | Xerox Corporation | Method of fabricating ink jet printheads |
IT1234800B (it) * | 1989-06-08 | 1992-05-27 | C Olivetti & C Spa Sede Via Je | Procedimento di fabbricazione di testine termiche di stampa a getto d'inchiostro e testine cosi' ottenute |
US5131978A (en) * | 1990-06-07 | 1992-07-21 | Xerox Corporation | Low temperature, single side, multiple step etching process for fabrication of small and large structures |
US5141596A (en) * | 1991-07-29 | 1992-08-25 | Xerox Corporation | Method of fabricating an ink jet printhead having integral silicon filter |
-
1993
- 1993-01-25 US US08/009,181 patent/US5308442A/en not_active Expired - Lifetime
-
1994
- 1994-01-19 EP EP94300394A patent/EP0609011B1/de not_active Expired - Lifetime
- 1994-01-19 DE DE69401134T patent/DE69401134T2/de not_active Expired - Lifetime
- 1994-01-25 JP JP02330894A patent/JP3850043B2/ja not_active Expired - Fee Related
-
1997
- 1997-06-26 HK HK91597A patent/HK91597A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69401134D1 (de) | 1997-01-30 |
EP0609011A3 (de) | 1994-09-14 |
HK91597A (en) | 1997-08-01 |
JP3850043B2 (ja) | 2006-11-29 |
JPH071738A (ja) | 1995-01-06 |
EP0609011A2 (de) | 1994-08-03 |
US5308442A (en) | 1994-05-03 |
EP0609011B1 (de) | 1996-12-18 |
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