DE69822038D1 - Verfahren zum Herstellen eines Tintenstrahlkopfes - Google Patents

Verfahren zum Herstellen eines Tintenstrahlkopfes

Info

Publication number
DE69822038D1
DE69822038D1 DE69822038T DE69822038T DE69822038D1 DE 69822038 D1 DE69822038 D1 DE 69822038D1 DE 69822038 T DE69822038 T DE 69822038T DE 69822038 T DE69822038 T DE 69822038T DE 69822038 D1 DE69822038 D1 DE 69822038D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
jet head
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69822038T
Other languages
English (en)
Other versions
DE69822038T2 (de
Inventor
Yamaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69822038D1 publication Critical patent/DE69822038D1/de
Application granted granted Critical
Publication of DE69822038T2 publication Critical patent/DE69822038T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
DE69822038T 1997-06-20 1998-06-18 Verfahren zum Herstellen eines Tintenstrahlkopfes Expired - Lifetime DE69822038T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16419897A JP3416467B2 (ja) 1997-06-20 1997-06-20 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットプリント装置
JP16419897 1997-06-20

Publications (2)

Publication Number Publication Date
DE69822038D1 true DE69822038D1 (de) 2004-04-08
DE69822038T2 DE69822038T2 (de) 2004-08-19

Family

ID=15788549

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69822038T Expired - Lifetime DE69822038T2 (de) 1997-06-20 1998-06-18 Verfahren zum Herstellen eines Tintenstrahlkopfes

Country Status (5)

Country Link
US (1) US6245245B1 (de)
EP (1) EP0885725B1 (de)
JP (1) JP3416467B2 (de)
DE (1) DE69822038T2 (de)
ES (1) ES2214661T3 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001179987A (ja) * 1999-12-22 2001-07-03 Samsung Electro Mech Co Ltd ノズルプレート及びその製造方法
CN100581824C (zh) * 2003-02-13 2010-01-20 佳能株式会社 喷墨记录喷头用基板的制造方法
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US7429335B2 (en) 2004-04-29 2008-09-30 Shen Buswell Substrate passage formation
JP4560391B2 (ja) * 2004-12-08 2010-10-13 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4617150B2 (ja) * 2004-12-09 2011-01-19 キヤノン株式会社 ウエハのダイシング方法
US7824560B2 (en) 2006-03-07 2010-11-02 Canon Kabushiki Kaisha Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head
US8329046B2 (en) * 2009-02-05 2012-12-11 Asia Union Electronic Chemical Corporation Methods for damage etch and texturing of silicon single crystal substrates
JP5197724B2 (ja) * 2009-12-22 2013-05-15 キヤノン株式会社 液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head
JPS57116656A (en) * 1981-01-14 1982-07-20 Sharp Corp Manufacture of orifice for ink jet printer
US5030971B1 (en) 1989-11-29 2000-11-28 Xerox Corp Precisely aligned mono- or multi-color roofshooter type printhead
JPH042790A (ja) * 1990-04-18 1992-01-07 Seiko Epson Corp シリコン基板の加工方法
JPH05116325A (ja) * 1991-10-30 1993-05-14 Canon Inc インクジエツト記録ヘツドの製造方法
US5387314A (en) 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
JP3343875B2 (ja) 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
JP3460218B2 (ja) 1995-11-24 2003-10-27 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
JPH09207341A (ja) * 1996-02-07 1997-08-12 Seiko Epson Corp インクジェットヘッド用ノズルプレートおよびその製造方法

Also Published As

Publication number Publication date
EP0885725B1 (de) 2004-03-03
EP0885725A3 (de) 2000-03-22
JPH1110895A (ja) 1999-01-19
EP0885725A2 (de) 1998-12-23
US6245245B1 (en) 2001-06-12
JP3416467B2 (ja) 2003-06-16
ES2214661T3 (es) 2004-09-16
DE69822038T2 (de) 2004-08-19

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: SATO, TAMAKI, OHTA-KU, TOKYO, JP

8364 No opposition during term of opposition