JP7281518B2 - 試験用キャリア - Google Patents
試験用キャリア Download PDFInfo
- Publication number
- JP7281518B2 JP7281518B2 JP2021149673A JP2021149673A JP7281518B2 JP 7281518 B2 JP7281518 B2 JP 7281518B2 JP 2021149673 A JP2021149673 A JP 2021149673A JP 2021149673 A JP2021149673 A JP 2021149673A JP 7281518 B2 JP7281518 B2 JP 7281518B2
- Authority
- JP
- Japan
- Prior art keywords
- dut
- carrier
- test carrier
- test
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
- G01R1/0441—Details
- G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0433—Sockets for IC's or transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
10…キャリア本体
11…第1の貫通孔
12…中心
13…閉塞部材
20…保持板
201…保持孔
202…段差
203,204…開口
21…ポゴピン
22…プランジャ
221…フランジ
23…固定部
231…後端部
232…軸部
24…コイルスプリング
25…開口
30…インタポーザ
31…内部端子
32…外部端子
33…配線パターン
34…開口
40…筒状体
41…内孔
42…凹部
50…二次元バーコード
60…蓋部材
61…本体部
62…プッシャ
63…第2の貫通孔
70…ラッチ
71…シャフト
72…爪部
90…DUT
91…パッド
92,92’…バンプ
100…キャリア組立装置
110…第1の吸着保持部
120…第2の吸着保持部
130…減圧部
140…駆動部
150…カメラ
160…画像処理部
170…リーダ
180…制御部
190…記憶部
Claims (7)
- DUTを収容した状態で搬送される試験用キャリアであって、
前記DUTを保持するキャリア本体と、
前記DUTを覆うと共に前記キャリア本体に固定される蓋部材と、を備え、
前記キャリア本体は、
前記DUTの特徴点に対向するように設けられ、前記DUTを前記試験用キャリアに対して位置決めするための位置決め用の複数の第1の貫通孔と、
前記DUTの第1の端子に対応するように設けられ、前記第1の端子に接触する複数の接触子と、を有し、
前記特徴点は、前記DUTが有し、前記第1の端子とは異なる第2の端子を含み、
前記第2の端子は、前記接触子と接触しない端子であり、
それぞれの前記第1の貫通孔は、前記第2の端子に対向し、
外部から前記第1の貫通孔を介して前記DUTの特徴点を見た場合に、前記接触子が前記第1の貫通孔の中に位置していない試験用キャリア。 - 請求項1に記載の試験用キャリアであって、
前記キャリア本体及び前記蓋部材が剛体から構成されている試験用キャリア。 - 請求項1又は2に記載の試験用キャリアであって、
前記第1の貫通孔は、前記キャリア本体に複数設けられている試験用キャリア。 - 請求項1~3のいずれか一項に記載の試験用キャリアであって、
前記キャリア本体は、前記第1の貫通孔に挿入され、前記第1の貫通孔を閉塞する透明の閉塞部材を有する試験用キャリア。 - 請求項1~4のいずれか一項に記載の試験用キャリアであって、
前記キャリア本体は、
前記DUTを保持する保持板と、
前記保持板上に設けられ、前記DUTの周囲を囲む筒形状を有する筒状体と、を有している試験用キャリア。 - 請求項5に記載の試験用キャリアであって、
前記蓋部材は、
板状の本体部と、
前記本体部から凸状に突出するプッシャと、を備え、
第1の平面方向において、前記保持板の大きさは、前記本体部の大きさと実質的に同一であり、
前記第1の平面方向は、前記DUTの主面に対して実質的に平行な方向である試験用キャリア。 - 請求項1~6のいずれか一項に記載の試験用キャリアであって、
前記第2の端子は前記DUTに形成されたバンプである試験用キャリア。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021149673A JP7281518B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018091984A JP7281250B2 (ja) | 2018-05-11 | 2018-05-11 | 試験用キャリア |
JP2021149673A JP7281518B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018091984A Division JP7281250B2 (ja) | 2018-05-11 | 2018-05-11 | 試験用キャリア |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021185388A JP2021185388A (ja) | 2021-12-09 |
JP7281518B2 true JP7281518B2 (ja) | 2023-05-25 |
Family
ID=68464557
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018091984A Active JP7281250B2 (ja) | 2018-05-11 | 2018-05-11 | 試験用キャリア |
JP2021149673A Active JP7281518B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
JP2021149668A Pending JP2021185386A (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア、及び、試験用キャリアの組立方法 |
JP2021149669A Active JP7162711B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
JP2021149667A Active JP7465854B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
JP2023017023A Pending JP2023052972A (ja) | 2018-05-11 | 2023-02-07 | キャリア組立方法、及び、キャリア組立装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018091984A Active JP7281250B2 (ja) | 2018-05-11 | 2018-05-11 | 試験用キャリア |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021149668A Pending JP2021185386A (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア、及び、試験用キャリアの組立方法 |
JP2021149669A Active JP7162711B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
JP2021149667A Active JP7465854B2 (ja) | 2018-05-11 | 2021-09-14 | 試験用キャリア |
JP2023017023A Pending JP2023052972A (ja) | 2018-05-11 | 2023-02-07 | キャリア組立方法、及び、キャリア組立装置 |
Country Status (4)
Country | Link |
---|---|
US (5) | US11531043B2 (ja) |
JP (6) | JP7281250B2 (ja) |
KR (1) | KR102146731B1 (ja) |
TW (1) | TWI717700B (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7281250B2 (ja) | 2018-05-11 | 2023-05-25 | 株式会社アドバンテスト | 試験用キャリア |
KR102291194B1 (ko) * | 2020-03-09 | 2021-08-20 | 에이엠티 주식회사 | 미세 피치를 갖는 디바이스의 얼라인장치 및 그 방법 |
US11493551B2 (en) | 2020-06-22 | 2022-11-08 | Advantest Test Solutions, Inc. | Integrated test cell using active thermal interposer (ATI) with parallel socket actuation |
US11549981B2 (en) | 2020-10-01 | 2023-01-10 | Advantest Test Solutions, Inc. | Thermal solution for massively parallel testing |
US11808812B2 (en) | 2020-11-02 | 2023-11-07 | Advantest Test Solutions, Inc. | Passive carrier-based device delivery for slot-based high-volume semiconductor test system |
US11821913B2 (en) | 2020-11-02 | 2023-11-21 | Advantest Test Solutions, Inc. | Shielded socket and carrier for high-volume test of semiconductor devices |
US20220155364A1 (en) | 2020-11-19 | 2022-05-19 | Advantest Test Solutions, Inc. | Wafer scale active thermal interposer for device testing |
US11567119B2 (en) | 2020-12-04 | 2023-01-31 | Advantest Test Solutions, Inc. | Testing system including active thermal interposer device |
US11573262B2 (en) | 2020-12-31 | 2023-02-07 | Advantest Test Solutions, Inc. | Multi-input multi-zone thermal control for device testing |
US11587640B2 (en) | 2021-03-08 | 2023-02-21 | Advantest Test Solutions, Inc. | Carrier based high volume system level testing of devices with pop structures |
JP2023008202A (ja) * | 2021-07-05 | 2023-01-19 | 株式会社アドバンテスト | 電子部品ハンドリング装置用のキャリアのコア、及び、キャリア、並びに、コアの取外方法 |
JP7143491B1 (ja) | 2021-07-21 | 2022-09-28 | 株式会社アドバンテスト | 試験用キャリア、及び、電子部品試験装置 |
US11693026B2 (en) * | 2021-10-22 | 2023-07-04 | Advantest Corporation | Test carrier |
US11656273B1 (en) | 2021-11-05 | 2023-05-23 | Advantest Test Solutions, Inc. | High current device testing apparatus and systems |
US11835549B2 (en) | 2022-01-26 | 2023-12-05 | Advantest Test Solutions, Inc. | Thermal array with gimbal features and enhanced thermal performance |
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US20220011341A1 (en) | 2022-01-13 |
JP2021185387A (ja) | 2021-12-09 |
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JP7162711B2 (ja) | 2022-10-28 |
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