WO2008139579A1 - 電子部品試験装置、電子部品試験システム及び電子部品の試験方法 - Google Patents

電子部品試験装置、電子部品試験システム及び電子部品の試験方法 Download PDF

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Publication number
WO2008139579A1
WO2008139579A1 PCT/JP2007/059597 JP2007059597W WO2008139579A1 WO 2008139579 A1 WO2008139579 A1 WO 2008139579A1 JP 2007059597 W JP2007059597 W JP 2007059597W WO 2008139579 A1 WO2008139579 A1 WO 2008139579A1
Authority
WO
WIPO (PCT)
Prior art keywords
testing
electronic part
contact plate
testing apparatus
inverting
Prior art date
Application number
PCT/JP2007/059597
Other languages
English (en)
French (fr)
Inventor
Akihiko Ito
Yoshihito Kobayashi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to PCT/JP2007/059597 priority Critical patent/WO2008139579A1/ja
Priority to JP2009514067A priority patent/JPWO2008139853A1/ja
Priority to KR1020097025220A priority patent/KR101163628B1/ko
Priority to PCT/JP2008/057764 priority patent/WO2008139853A1/ja
Priority to TW097115533A priority patent/TW200912340A/zh
Publication of WO2008139579A1 publication Critical patent/WO2008139579A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

電子部品試験装置は、ＩＣデバイスのテストを行う直前に、カスタマトレイ（５）と試験専用のコンタクトプレート（６Ａ）とを重ね合わせて反転させて、カスタマトレイ（５）からコンタクトプレート（６Ａ）にＩＣデバイスを移し替える第１の反転装置（２２０）と、ＩＣデバイスをテストする際に、コンタクトプレート（６Ａ）にＩＣデバイスを保持した状態で、ＩＣデバイスをテストヘッド（４）のソケット（４１）に押し付ける押圧装置（２５０）と、を備えている。
PCT/JP2007/059597 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法 WO2008139579A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2007/059597 WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
JP2009514067A JPWO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
KR1020097025220A KR101163628B1 (ko) 2007-05-09 2008-04-22 전자부품 시험장치 및 전자부품 시험 시스템
PCT/JP2008/057764 WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
TW097115533A TW200912340A (en) 2007-05-09 2008-04-28 Electronic component testing apparatus, electronic component testing system and electronic component testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059597 WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Publications (1)

Publication Number Publication Date
WO2008139579A1 true WO2008139579A1 (ja) 2008-11-20

Family

ID=40001811

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2007/059597 WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
PCT/JP2008/057764 WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057764 WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Country Status (4)

Country Link
JP (1) JPWO2008139853A1 (ja)
KR (1) KR101163628B1 (ja)
TW (1) TW200912340A (ja)
WO (2) WO2008139579A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146709A1 (ja) * 2009-06-19 2010-12-23 株式会社アドバンテスト 電子部品移載装置及び電子部品の移載方法
WO2010146708A1 (ja) * 2009-06-19 2010-12-23 株式会社アドバンテスト 電子部品移載装置及びそれを備えた電子部品試験装置
JP2013137286A (ja) * 2011-12-28 2013-07-11 Advantest Corp 電子部品試験装置
KR102072390B1 (ko) * 2013-06-18 2020-02-04 (주)테크윙 테스트핸들러
KR102015572B1 (ko) * 2013-10-02 2019-10-22 삼성전자주식회사 실장 장치
KR101670051B1 (ko) * 2014-07-08 2016-10-28 피에스케이 주식회사 처리 장치 및 방법
KR102145306B1 (ko) * 2014-07-21 2020-08-19 (주)테크윙 전자부품 테스트 장비
JP6104429B2 (ja) * 2016-04-26 2017-03-29 平田機工株式会社 搬送システム
JP7281250B2 (ja) 2018-05-11 2023-05-25 株式会社アドバンテスト 試験用キャリア
KR102122760B1 (ko) * 2018-11-21 2020-06-26 정성욱 트레이 교체 시스템
JP7192620B2 (ja) * 2019-03-29 2022-12-20 新東工業株式会社 検査装置
CN113552463B (zh) * 2021-07-15 2022-04-26 中国科学院长春光学精密机械与物理研究所 一种电子元器件测试装置及其测试方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194032A (ja) * 1995-01-18 1996-07-30 Advantest Corp Ｉｃテスタ用水平搬送型ハンドラ
JPH11198988A (ja) * 1998-01-12 1999-07-27 Murata Mfg Co Ltd 収納具
JPH11326448A (ja) * 1998-05-20 1999-11-26 Advantest Corp Ｉｃ試験装置
JP2000039307A (ja) * 1998-07-22 2000-02-08 Hitachi Ltd 半導体検査装置
JP2006284384A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 半導体装置の試験装置及び試験方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116461A (ja) * 1987-10-29 1989-05-09 Nec Yamagata Ltd 半導体装置の電気的特性測定方法
JP2000258493A (ja) * 1999-03-08 2000-09-22 Hitachi Ltd 半導体素子検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194032A (ja) * 1995-01-18 1996-07-30 Advantest Corp Ｉｃテスタ用水平搬送型ハンドラ
JPH11198988A (ja) * 1998-01-12 1999-07-27 Murata Mfg Co Ltd 収納具
JPH11326448A (ja) * 1998-05-20 1999-11-26 Advantest Corp Ｉｃ試験装置
JP2000039307A (ja) * 1998-07-22 2000-02-08 Hitachi Ltd 半導体検査装置
JP2006284384A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 半導体装置の試験装置及び試験方法

Also Published As

Publication number Publication date
WO2008139853A1 (ja) 2008-11-20
TW200912340A (en) 2009-03-16
JPWO2008139853A1 (ja) 2010-07-29
KR20090133141A (ko) 2009-12-31
KR101163628B1 (ko) 2012-07-09

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