JP7153100B2 - 炭素ドープケイ素含有膜のための組成物およびそれを用いた方法 - Google Patents
炭素ドープケイ素含有膜のための組成物およびそれを用いた方法 Download PDFInfo
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- JP7153100B2 JP7153100B2 JP2021034366A JP2021034366A JP7153100B2 JP 7153100 B2 JP7153100 B2 JP 7153100B2 JP 2021034366 A JP2021034366 A JP 2021034366A JP 2021034366 A JP2021034366 A JP 2021034366A JP 7153100 B2 JP7153100 B2 JP 7153100B2
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- carbon
- doped silicon
- silicon oxide
- film
- trisilapentane
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- 238000000034 method Methods 0.000 title claims description 125
- 239000000203 mixture Substances 0.000 title claims description 53
- 229910052710 silicon Inorganic materials 0.000 title description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title description 46
- 239000010703 silicon Substances 0.000 title description 46
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 104
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 100
- 229910052760 oxygen Inorganic materials 0.000 claims description 63
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 61
- 239000001301 oxygen Substances 0.000 claims description 61
- 239000002243 precursor Substances 0.000 claims description 59
- 230000008569 process Effects 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 49
- 229910052799 carbon Inorganic materials 0.000 claims description 43
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 41
- 238000004380 ashing Methods 0.000 claims description 41
- 239000012686 silicon precursor Substances 0.000 claims description 40
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 38
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 32
- 239000001257 hydrogen Substances 0.000 claims description 28
- 229910052739 hydrogen Inorganic materials 0.000 claims description 28
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 27
- 238000010926 purge Methods 0.000 claims description 25
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 24
- 239000011261 inert gas Substances 0.000 claims description 24
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 23
- 238000011282 treatment Methods 0.000 claims description 22
- 238000009832 plasma treatment Methods 0.000 claims description 21
- 239000002904 solvent Substances 0.000 claims description 21
- RNRQKQHZWFHUHS-UHFFFAOYSA-N trichloro-[[dichloro(trichlorosilylmethyl)silyl]methyl]silane Chemical compound Cl[Si](Cl)(Cl)C[Si](Cl)(Cl)C[Si](Cl)(Cl)Cl RNRQKQHZWFHUHS-UHFFFAOYSA-N 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 16
- 239000003054 catalyst Substances 0.000 claims description 13
- -1 siloxanes Chemical class 0.000 claims description 13
- 239000006227 byproduct Substances 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- IBQXDUKVYOFNNE-UHFFFAOYSA-N Cl[Si](C[Si](C[Si](Cl)(Cl)Cl)(C)C)(Cl)Cl Chemical compound Cl[Si](C[Si](C[Si](Cl)(Cl)Cl)(C)C)(Cl)Cl IBQXDUKVYOFNNE-UHFFFAOYSA-N 0.000 claims description 10
- 229930195733 hydrocarbon Natural products 0.000 claims description 10
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 9
- PYAYAYQEBLRVBE-UHFFFAOYSA-N Cl[SiH](C[SiH2]C[SiH](Cl)Cl)Cl Chemical compound Cl[SiH](C[SiH2]C[SiH](Cl)Cl)Cl PYAYAYQEBLRVBE-UHFFFAOYSA-N 0.000 claims description 8
- KHCWYTBRWQUTQJ-UHFFFAOYSA-N Cl[Si](C[SiH2]C[Si](Cl)(Cl)Cl)(Cl)Cl Chemical compound Cl[Si](C[SiH2]C[Si](Cl)(Cl)Cl)(Cl)Cl KHCWYTBRWQUTQJ-UHFFFAOYSA-N 0.000 claims description 8
- 238000009835 boiling Methods 0.000 claims description 8
- 238000009472 formulation Methods 0.000 claims description 8
- ABDDAHLAEXNYRC-UHFFFAOYSA-N trichloro(trichlorosilylmethyl)silane Chemical compound Cl[Si](Cl)(Cl)C[Si](Cl)(Cl)Cl ABDDAHLAEXNYRC-UHFFFAOYSA-N 0.000 claims description 8
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 claims description 7
- KSNFJZGSDIMSME-UHFFFAOYSA-N trichloro(2-trichlorosilylpropan-2-yl)silane Chemical compound Cl[Si](Cl)(Cl)C(C)(C)[Si](Cl)(Cl)Cl KSNFJZGSDIMSME-UHFFFAOYSA-N 0.000 claims description 7
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 claims description 6
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 6
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 6
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 claims description 6
- BKIMMITUMNQMOS-UHFFFAOYSA-N nonane Chemical compound CCCCCCCCC BKIMMITUMNQMOS-UHFFFAOYSA-N 0.000 claims description 6
- CUHGPXPXKDHUPM-UHFFFAOYSA-N trichloro(1-trichlorosilylpropyl)silane Chemical compound CCC([Si](Cl)(Cl)Cl)[Si](Cl)(Cl)Cl CUHGPXPXKDHUPM-UHFFFAOYSA-N 0.000 claims description 6
- 150000003512 tertiary amines Chemical class 0.000 claims description 5
- GQMOTYMECCJBDG-UHFFFAOYSA-N trichloro(1-trichlorosilylethyl)silane Chemical compound Cl[Si](Cl)(Cl)C(C)[Si](Cl)(Cl)Cl GQMOTYMECCJBDG-UHFFFAOYSA-N 0.000 claims description 5
- 150000002170 ethers Chemical class 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 125000001302 tertiary amino group Chemical group 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- LMGZGXSXHCMSAA-UHFFFAOYSA-N cyclodecane Chemical compound C1CCCCCCCCC1 LMGZGXSXHCMSAA-UHFFFAOYSA-N 0.000 claims description 3
- GPTJTTCOVDDHER-UHFFFAOYSA-N cyclononane Chemical compound C1CCCCCCCC1 GPTJTTCOVDDHER-UHFFFAOYSA-N 0.000 claims description 3
- WJTCGQSWYFHTAC-UHFFFAOYSA-N cyclooctane Chemical compound C1CCCCCCC1 WJTCGQSWYFHTAC-UHFFFAOYSA-N 0.000 claims description 3
- 239000004914 cyclooctane Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 claims description 3
- 125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims description 3
- DMBOORLKGDADEQ-UHFFFAOYSA-N dichloro-bis[[dichloro(methyl)silyl]methyl]silane Chemical compound C[Si](Cl)(Cl)C[Si](Cl)(Cl)C[Si](C)(Cl)Cl DMBOORLKGDADEQ-UHFFFAOYSA-N 0.000 claims 3
- KSBGKOHSBWCTOP-UHFFFAOYSA-N bis(silylmethyl)silane Chemical compound [SiH3]C[SiH2]C[SiH3] KSBGKOHSBWCTOP-UHFFFAOYSA-N 0.000 claims 1
- XDESNYGGKKUBOV-UHFFFAOYSA-N dichloro-[[chloro-[[dichloro(methyl)silyl]methyl]-methylsilyl]methyl]-methylsilane Chemical compound C[Si](Cl)(Cl)C[Si](C)(Cl)C[Si](C)(Cl)Cl XDESNYGGKKUBOV-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 267
- 238000000151 deposition Methods 0.000 description 62
- 238000000231 atomic layer deposition Methods 0.000 description 60
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 42
- 230000008021 deposition Effects 0.000 description 42
- SYSHGEHAYJKOLC-UHFFFAOYSA-N 1,1,3,3-tetrachloro-1,3-disiletane Chemical compound Cl[Si]1(Cl)C[Si](Cl)(Cl)C1 SYSHGEHAYJKOLC-UHFFFAOYSA-N 0.000 description 31
- 239000007789 gas Substances 0.000 description 27
- 229910021529 ammonia Inorganic materials 0.000 description 21
- 239000007788 liquid Substances 0.000 description 16
- 229910001868 water Inorganic materials 0.000 description 16
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 14
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 14
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 12
- 238000005137 deposition process Methods 0.000 description 12
- 125000004122 cyclic group Chemical group 0.000 description 11
- 238000000137 annealing Methods 0.000 description 10
- 238000011065 in-situ storage Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 150000001412 amines Chemical class 0.000 description 9
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 9
- DFQZXUVHEJJUTH-UHFFFAOYSA-N 1,1,3,3-tetrabromo-1,3-disiletane Chemical compound Br[Si]1(Br)C[Si](Br)(Br)C1 DFQZXUVHEJJUTH-UHFFFAOYSA-N 0.000 description 8
- HSAONXZALKRLHL-UHFFFAOYSA-N 1,1,3-trichloro-1,3-disiletane Chemical compound Cl[SiH]1C[Si](Cl)(Cl)C1 HSAONXZALKRLHL-UHFFFAOYSA-N 0.000 description 8
- JLQZGADRJJMDNW-UHFFFAOYSA-N 1,3-dichloro-1,3-dimethyl-1,3-disiletane Chemical compound C[Si]1(Cl)C[Si](C)(Cl)C1 JLQZGADRJJMDNW-UHFFFAOYSA-N 0.000 description 8
- GPWWAMQYZRLMDJ-UHFFFAOYSA-N 1-bromo-1,3-disiletane Chemical compound Br[SiH]1C[SiH2]C1 GPWWAMQYZRLMDJ-UHFFFAOYSA-N 0.000 description 8
- KFEPWALDYLJNIO-UHFFFAOYSA-N 1-chloro-1,3-disiletane Chemical compound Cl[SiH]1C[SiH2]C1 KFEPWALDYLJNIO-UHFFFAOYSA-N 0.000 description 8
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 8
- 239000000376 reactant Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- AOBHNRLXHKBAFP-UHFFFAOYSA-N 1,1,3-tribromo-1,3-disiletane Chemical compound Br[SiH]1C[Si](Br)(Br)C1 AOBHNRLXHKBAFP-UHFFFAOYSA-N 0.000 description 7
- YXEUXUWNULSFFD-UHFFFAOYSA-N 1,3-dibromo-1,3-disiletane Chemical compound Br[SiH]1C[SiH](Br)C1 YXEUXUWNULSFFD-UHFFFAOYSA-N 0.000 description 7
- 239000000460 chlorine Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 4
- 239000002879 Lewis base Substances 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 229910002091 carbon monoxide Inorganic materials 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 238000011066 ex-situ storage Methods 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 150000007527 lewis bases Chemical group 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 229910018540 Si C Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 3
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 3
- XRUXUEQTHPXADU-UHFFFAOYSA-N 1,1,3,3-tetrachlorodisiletane Chemical compound Cl[Si]1([SiH2]C(C1)(Cl)Cl)Cl XRUXUEQTHPXADU-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- JAMYXQIFJMINCP-UHFFFAOYSA-N ClC([SiH3])([SiH2]C([SiH3])(Cl)Cl)Cl Chemical compound ClC([SiH3])([SiH2]C([SiH3])(Cl)Cl)Cl JAMYXQIFJMINCP-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- JOOMLFKONHCLCJ-UHFFFAOYSA-N N-(trimethylsilyl)diethylamine Chemical compound CCN(CC)[Si](C)(C)C JOOMLFKONHCLCJ-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 238000000560 X-ray reflectometry Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- NBBQQQJUOYRZCA-UHFFFAOYSA-N diethoxymethylsilane Chemical compound CCOC([SiH3])OCC NBBQQQJUOYRZCA-UHFFFAOYSA-N 0.000 description 2
- 229940043279 diisopropylamine Drugs 0.000 description 2
- WEHWNAOGRSTTBQ-UHFFFAOYSA-N dipropylamine Chemical compound CCCNCCC WEHWNAOGRSTTBQ-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical group 0.000 description 2
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 238000006557 surface reaction Methods 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- SZSAVDMNBCBPDP-UHFFFAOYSA-N (2,6-dimethylpiperidin-1-yl)-dimethylsilane Chemical compound CC1CCCC(C)N1[SiH](C)C SZSAVDMNBCBPDP-UHFFFAOYSA-N 0.000 description 1
- NFVBAYVEVKKWEE-UHFFFAOYSA-N (2,6-dimethylpiperidin-1-yl)-trimethylsilane Chemical compound CC1CCCC(C)N1[Si](C)(C)C NFVBAYVEVKKWEE-UHFFFAOYSA-N 0.000 description 1
- LKLLNYWECKEQIB-UHFFFAOYSA-N 1,3,5-triazinane Chemical compound C1NCNCN1 LKLLNYWECKEQIB-UHFFFAOYSA-N 0.000 description 1
- VSKBQBWCVQGBDS-UHFFFAOYSA-N 1-N,1-N'-di(propan-2-yl)-3-silylprop-2-ene-1,1-diamine Chemical compound C(C)(C)NC(NC(C)C)C=C[SiH3] VSKBQBWCVQGBDS-UHFFFAOYSA-N 0.000 description 1
- FKILQBLJPXJVFV-UHFFFAOYSA-N 1-N,1-N'-diethyl-1-N,1-N'-dimethyl-3-silylprop-2-ene-1,1-diamine Chemical compound C(C)N(C)C(N(CC)C)C=C[SiH3] FKILQBLJPXJVFV-UHFFFAOYSA-N 0.000 description 1
- BFUUNISZCKASER-UHFFFAOYSA-N 1-N,1-N,1-N',1-N'-tetra(propan-2-yl)-3-silylprop-2-ene-1,1-diamine Chemical compound C(C)(C)N(C(C)C)C(N(C(C)C)C(C)C)C=C[SiH3] BFUUNISZCKASER-UHFFFAOYSA-N 0.000 description 1
- FGDGAYJQUFBEHU-UHFFFAOYSA-N 1-N,1-N,1-N',1-N'-tetraethyl-3-silylprop-2-ene-1,1-diamine Chemical compound C(C)N(CC)C(N(CC)CC)C=C[SiH3] FGDGAYJQUFBEHU-UHFFFAOYSA-N 0.000 description 1
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 description 1
- GVHIREZHTRULPT-UHFFFAOYSA-N 2-methyl-n-trimethylsilylpropan-2-amine Chemical compound CC(C)(C)N[Si](C)(C)C GVHIREZHTRULPT-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- MOFYWKAYHMTHHL-UHFFFAOYSA-N 3,3-dipyrrolidin-1-ylprop-1-enylsilane Chemical compound N1(CCCC1)C(N1CCCC1)C=C[SiH3] MOFYWKAYHMTHHL-UHFFFAOYSA-N 0.000 description 1
- 239000010963 304 stainless steel Substances 0.000 description 1
- 239000010964 304L stainless steel Substances 0.000 description 1
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- GRIWNPFFZMMYFL-UHFFFAOYSA-N CC1CCCC(C)N1C[SiH3] Chemical compound CC1CCCC(C)N1C[SiH3] GRIWNPFFZMMYFL-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- WRYCSMQKUKOKBP-UHFFFAOYSA-N Imidazolidine Chemical compound C1CNCN1 WRYCSMQKUKOKBP-UHFFFAOYSA-N 0.000 description 1
- SFLARCZJKUXPCE-UHFFFAOYSA-N N-butan-2-yl-N-silylbutan-2-amine Chemical compound CCC(C)N([SiH3])C(C)CC SFLARCZJKUXPCE-UHFFFAOYSA-N 0.000 description 1
- WEZADBNWDWZTJH-UHFFFAOYSA-N N-dimethylsilyl-2-methylpropan-2-amine Chemical compound C[SiH](C)NC(C)(C)C WEZADBNWDWZTJH-UHFFFAOYSA-N 0.000 description 1
- SQIKBMFZMZLSMO-UHFFFAOYSA-N N-dimethylsilyl-N-propan-2-ylpropan-2-amine Chemical compound CC(C)N(C(C)C)[SiH](C)C SQIKBMFZMZLSMO-UHFFFAOYSA-N 0.000 description 1
- JRLANEBCUVHNQP-UHFFFAOYSA-N N-dimethylsilylpropan-2-amine Chemical compound CC(C)N[SiH](C)C JRLANEBCUVHNQP-UHFFFAOYSA-N 0.000 description 1
- BIVNKSDKIFWKFA-UHFFFAOYSA-N N-propan-2-yl-N-silylpropan-2-amine Chemical compound CC(C)N([SiH3])C(C)C BIVNKSDKIFWKFA-UHFFFAOYSA-N 0.000 description 1
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 1
- ODUCDPQEXGNKDN-UHFFFAOYSA-N Nitrogen oxide(NO) Natural products O=N ODUCDPQEXGNKDN-UHFFFAOYSA-N 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 150000003927 aminopyridines Chemical class 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- ZTAYJSRSQODHEO-UHFFFAOYSA-N butylsilicon Chemical compound CCCC[Si] ZTAYJSRSQODHEO-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N carbon dioxide Natural products O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 239000007809 chemical reaction catalyst Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- YGHUUVGIRWMJGE-UHFFFAOYSA-N chlorodimethylsilane Chemical compound C[SiH](C)Cl YGHUUVGIRWMJGE-UHFFFAOYSA-N 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- UWGIJJRGSGDBFJ-UHFFFAOYSA-N dichloromethylsilane Chemical compound [SiH3]C(Cl)Cl UWGIJJRGSGDBFJ-UHFFFAOYSA-N 0.000 description 1
- ADTGAVILDBXARD-UHFFFAOYSA-N diethylamino(dimethyl)silicon Chemical compound CCN(CC)[Si](C)C ADTGAVILDBXARD-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- XYYQWMDBQFSCPB-UHFFFAOYSA-N dimethoxymethylsilane Chemical compound COC([SiH3])OC XYYQWMDBQFSCPB-UHFFFAOYSA-N 0.000 description 1
- OFKNHDDXWSOGKH-UHFFFAOYSA-N dimethyl(dipyrrolidin-1-yl)silane Chemical compound C1CCCN1[Si](C)(C)N1CCCC1 OFKNHDDXWSOGKH-UHFFFAOYSA-N 0.000 description 1
- GWNYFISHEJZWOL-UHFFFAOYSA-N dimethyl(pyrrolidin-1-yl)silane Chemical compound C[SiH](C)N1CCCC1 GWNYFISHEJZWOL-UHFFFAOYSA-N 0.000 description 1
- KZFNONVXCZVHRD-UHFFFAOYSA-N dimethylamino(dimethyl)silicon Chemical compound CN(C)[Si](C)C KZFNONVXCZVHRD-UHFFFAOYSA-N 0.000 description 1
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- HPYNZHMRTTWQTB-UHFFFAOYSA-N dimethylpyridine Natural products CC1=CC=CN=C1C HPYNZHMRTTWQTB-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052752 metalloid Inorganic materials 0.000 description 1
- 150000002738 metalloids Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- KVKFRMCSXWQSNT-UHFFFAOYSA-N n,n'-dimethylethane-1,2-diamine Chemical compound CNCCNC KVKFRMCSXWQSNT-UHFFFAOYSA-N 0.000 description 1
- FIRXZHKWFHIBOF-UHFFFAOYSA-N n-(dimethylamino-ethenyl-methylsilyl)-n-methylmethanamine Chemical compound CN(C)[Si](C)(C=C)N(C)C FIRXZHKWFHIBOF-UHFFFAOYSA-N 0.000 description 1
- LREMVJGWYSKMSG-UHFFFAOYSA-N n-[(tert-butylamino)-dimethylsilyl]-2-methylpropan-2-amine Chemical compound CC(C)(C)N[Si](C)(C)NC(C)(C)C LREMVJGWYSKMSG-UHFFFAOYSA-N 0.000 description 1
- IOEYTQJFJOCAAA-UHFFFAOYSA-N n-[[di(propan-2-yl)amino]-dimethylsilyl]-n-propan-2-ylpropan-2-amine Chemical compound CC(C)N(C(C)C)[Si](C)(C)N(C(C)C)C(C)C IOEYTQJFJOCAAA-UHFFFAOYSA-N 0.000 description 1
- UYGIYVFPQLCZME-UHFFFAOYSA-N n-[[ethyl(methyl)amino]-dimethylsilyl]-n-methylethanamine Chemical compound CCN(C)[Si](C)(C)N(C)CC UYGIYVFPQLCZME-UHFFFAOYSA-N 0.000 description 1
- AHKKZIUZTWZKDR-UHFFFAOYSA-N n-[bis(dimethylamino)-methylsilyl]-n-methylmethanamine Chemical compound CN(C)[Si](C)(N(C)C)N(C)C AHKKZIUZTWZKDR-UHFFFAOYSA-N 0.000 description 1
- VJDVRUZAQRISHN-UHFFFAOYSA-N n-[bis(dimethylamino)-phenylsilyl]-n-methylmethanamine Chemical compound CN(C)[Si](N(C)C)(N(C)C)C1=CC=CC=C1 VJDVRUZAQRISHN-UHFFFAOYSA-N 0.000 description 1
- JGHGZXZEGQJZPM-UHFFFAOYSA-N n-[diethylamino(diethyl)silyl]-n-ethylethanamine Chemical compound CCN(CC)[Si](CC)(CC)N(CC)CC JGHGZXZEGQJZPM-UHFFFAOYSA-N 0.000 description 1
- XIFOKLGEKUNZTI-UHFFFAOYSA-N n-[diethylamino(dimethyl)silyl]-n-ethylethanamine Chemical compound CCN(CC)[Si](C)(C)N(CC)CC XIFOKLGEKUNZTI-UHFFFAOYSA-N 0.000 description 1
- XFXQXCWQCXPVSY-UHFFFAOYSA-N n-[dimethyl(propyl)silyl]methanamine Chemical compound CCC[Si](C)(C)NC XFXQXCWQCXPVSY-UHFFFAOYSA-N 0.000 description 1
- UNOQITWAUFOMKI-UHFFFAOYSA-N n-[dimethyl-(propan-2-ylamino)silyl]propan-2-amine Chemical compound CC(C)N[Si](C)(C)NC(C)C UNOQITWAUFOMKI-UHFFFAOYSA-N 0.000 description 1
- QULMGWCCKILBTO-UHFFFAOYSA-N n-[dimethylamino(dimethyl)silyl]-n-methylmethanamine Chemical compound CN(C)[Si](C)(C)N(C)C QULMGWCCKILBTO-UHFFFAOYSA-N 0.000 description 1
- VVDUYYVVAPANCT-UHFFFAOYSA-N n-[ethyl(dimethyl)silyl]methanamine Chemical compound CC[Si](C)(C)NC VVDUYYVVAPANCT-UHFFFAOYSA-N 0.000 description 1
- KAHVZNKZQFSBFW-UHFFFAOYSA-N n-methyl-n-trimethylsilylmethanamine Chemical compound CN(C)[Si](C)(C)C KAHVZNKZQFSBFW-UHFFFAOYSA-N 0.000 description 1
- GEZQRKBBRMOCSP-UHFFFAOYSA-N n-propan-2-yl-n-trimethylsilylpropan-2-amine Chemical compound CC(C)N(C(C)C)[Si](C)(C)C GEZQRKBBRMOCSP-UHFFFAOYSA-N 0.000 description 1
- YSPHIXJPYVFLLJ-UHFFFAOYSA-N n-trimethylsilylpropan-2-amine Chemical compound CC(C)N[Si](C)(C)C YSPHIXJPYVFLLJ-UHFFFAOYSA-N 0.000 description 1
- 239000002135 nanosheet Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000734 polysilsesquioxane polymer Polymers 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 238000000101 transmission high energy electron diffraction Methods 0.000 description 1
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 description 1
- NQLVIKZJXFGUET-UHFFFAOYSA-N trimethyl(pyrrolidin-1-yl)silane Chemical compound C[Si](C)(C)N1CCCC1 NQLVIKZJXFGUET-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
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Description
本願は、2017年7月19日出願の米国特許出願第15/654,426号および2016年7月27日出願の米国特許仮出願第62/367,260号の利益を主張する。米国特許出願第15/654,426号および米国特許仮出願第62/367,260号の開示は、ここに参照することによって、本明細書の内容とする。
基材を反応器中に配置する工程、
反応器を、約25℃~約550℃の範囲の1つもしくは2つ以上の温度に加熱する工程、
反応器中に、表1および2中に列挙されたケイ素前駆体およびそれらの組合せから選択された少なくとも1種の化合物を含む前駆体を導入する工程、
反応器中に、窒素源を導入して、前駆体の少なくとも一部を反応させて、炭素ドープ窒化ケイ素膜を形成させる工程、ならびに、
炭素ドープ窒化ケイ素膜を、約25℃~1000℃、または約100°~400℃の範囲の1種もしくは2種以上の温度で、炭素ドープ窒化ケイ素膜をこの膜に変換するのに十分な条件下で、酸素源で処理する工程、
を含む方法が提供される。特定の態様では、炭素ドープ酸化ケイ素膜または炭素ドープ酸窒化ケイ素膜は、XPSによって測定された約10原子質量パーセント(at.%)以上の炭素含有量および希フッ化水素酸中で測定された、熱酸化ケイ素よりも少なくとも0.5倍小さいエッチング速度を有している。
(a)1,1,1,3,3,3-ヘキサクロロ-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパン、1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1,1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択された1つのSi-C-Siまたは2つのSi-C-Si結合を有する少なくとも1種の直鎖もしくは環状のケイ素前駆体化合物、ならびに、
(b)少なくとも1種の溶媒、
を含む組成物に関する。
a)表面フィーチャを含む1つもしくは2つ以上の基材を反応器中に配置する工程、
b)反応器を周囲温度~約550℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的にこの反応器を100トール以下の圧力に保持する工程、
c)反応器中に、1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1,1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択された2つのSi-C-Si結合を有する少なくとも1種のケイ素前駆体を導入する工程、
d)不活性ガスでパージする工程、
e)窒素源を反応器中に供給して、表面と反応させて炭素ドープ窒化ケイ素膜を形成させる工程、
f)不活性ガスでパージして、反応副生成物を除去する工程、
g)工程c~fを繰り返して、炭素ドープ窒化ケイ素の所望の厚さを提供する工程、
h)結果として得られた炭素ドープ窒化ケイ素膜を、酸素源で、約室温~1000℃または約100°~400℃の範囲の1つもしくは2つ以上の温度で処理して、炭素ドープ窒化ケイ素膜を炭素ドープ酸化ケイ素膜に変換する工程、ならびに、
i)炭素ドープ酸化ケイ素膜を、水素を含むプラズマへの,堆積後曝露を与える工程、
を含んでいる。
第1に、堆積されたままの、反応性の炭素ドープ窒化ケイ素膜は、Si-C-Si結合を含むケイ素前駆体および窒素源を用いて形成される。いずれかの理論または説明によって拘束されることは望まないが、ケイ素前駆体からのSi-C-Si結合は、結果として得られた堆積されたままの膜に残り、そしてXPSによって測定された約10原子%以上の高い炭素含有量(例えば、約20~約30原子%、約10~約20原子%、そして幾つかの場合には、約10~約15原子%の炭素)を与えることが信じられる。
第2に、堆積プロセスの間に断続的に、堆積後処理として、またはそれらの組合せでのいずれかで、堆積されたままの膜を酸素源、例えば水に曝露する場合には、膜中の少なくとも1部または全ての窒素含有量は、酸素に転換されて、炭素ドープ酸化ケイ素または炭素ドープ酸窒化ケイ素膜から選択される膜を与える。堆積されたままの膜中の窒素は、1種もしくは2種以上の窒素含有副生成物、例えばアンモニアもしくはアミン基として放出される。
a.表面フィーチャを含む1つもしくは2つ以上の基材を反応器中に配置すること、
b.反応器を、周囲温度~約550℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的にこの反応器を100トール以下の圧力に保持すること、
c,この反応器中に、1つのSi-C-Si結合を有し、1,1,1,3,3,3-ヘキサクロロ-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1、3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパンからなる群から選択される少なくとも1種のケイ素前駆体を導入すること、
d.不活性ガスでパージし、それによって未反応のケイ素前駆体を除去し、そしてパージガスとケイ素前駆体を含む組成物を形成すること、
e.窒素源を反応器中に供給して、表面と反応させ、ケイ素窒化炭素膜を形成すること、
f,不活性ガスでパージして、反応副生成物を除去すること、
g.工程c~fを繰り返して、炭素ドープ窒化ケイ素の所望の厚さを与えること、
h.炭素ドープ窒化ケイ素膜を、酸素源で、約周囲温度~1000℃または約100℃~400℃の範囲の1つもしくは2つ以上の温度で、堆積後処理をして、炭素ドープ窒化ケイ素膜を炭素ドープ酸化ケイ素膜へと、インサイチュで、または他のチャンバ中でのいずれかで、転換すること、ならびに、
i.炭素ドープ酸化ケイ素膜を、水素を含むプラズマに堆積後暴露して、膜の性質を向上させ、膜特性の少なくとも1つを向上させること、
j.随意選択的に、炭素ドープ酸化ケイ素膜を、400℃~1000℃の温度でのスパイクアニールまたはUV光源での堆積後処理すること、
を含んでいる。この態様または他の態様では、UV暴露工程は、膜の堆積の間に、または堆積が一旦完了した後のいずれかに行うことができる。
a.表面フィーチャを含む1つもしくは2つ以上の基材を反応器中に(例えば、慣用のALD反応器中に)配置すること、
b.反応器を、周囲温度~約550℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的にこの反応器を100トール以下の圧力に保持すること、
c.この反応器中に、2つのSi-C-Si結合を有し、1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1,1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される少なくとも1種のケイ素前駆体を導入すること、
を含んでいる。
d.不活性ガスでパージすること、
e.窒素源を反応器中に供給して、表面と反応させ、炭素ドープ窒化ケイ素膜を形成すること、
f.不活性ガスでパージして、反応副生成物を除去すること、
g.工程c~fを繰り返して、炭素ドープ窒化ケイ素の所望の厚さを与えること、
h.炭素ドープ窒化ケイ素膜を、酸素源で、約周囲温度~1000℃または約100℃~400℃の範囲の1つもしくは2つ以上の温度で、堆積後処理をして、炭素ドープ窒化ケイ素膜を炭素ドープ酸化ケイ素膜へと、インサイチュで、または他のチャンバ中でのいずれかで、転換すること、
i.炭素ドープ酸化ケイ素膜を、水素を含むプラズマに堆積後暴露して、膜の物理的性質の少なくとも1つを向上させること、
j.随意選択的に、炭素ドープ酸化ケイ素膜を、400℃~1000℃の温度での熱アニールまたはUV光源で堆積後処理すること、
を含んでいる。この態様または他の態様では、UV暴露工程は、膜の堆積の間に、または堆積が一旦完了した後のいずれかに行うことができる。
a.表面フィーチャを含む1つもしくは2つ以上の基材を反応器中に配置すること、
b.反応器を、周囲温度~約150℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的にこの反応器を100トール以下の圧力に保持すること、
c.この反応器中に、1つもしくは2つのSi-C-Si結合を有し、1,1,1,3,3,3-ヘキサクロロ-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパン、1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1,1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン。1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される少なくとも1種のケイ素前駆体ならびに触媒を導入すること、
d.不活性ガスでパージすること、
e.水の蒸気を反応器中に供給して、前駆体ならびに触媒と反応させて、炭素ドープ酸化ケイ素を堆積された膜として形成させること、
f.不活性ガスでパージして、反応副生成物を除去すること、
g.工程c~fを繰り返して、炭素ドープ酸化ケイ素の所望の厚さを与えること、
h.処理された膜を、水素を含むプラズマに堆積後暴露して膜特性を向上させて、膜の性質の少なくとも1つを向上させること、
i.随意選択的に、炭素ドープ酸化ケイ素膜を、400℃~1000℃の温度でのスパイクアニールまたはUV光源で堆積後処理すること、を含んでいる。この態様または他の態様では、UV暴露工程は、膜の堆積の間に、または堆積が一旦完了した後のいずれかに行うことができる。
試験室規模の原子層堆積(ALD)反応器中で、ケイ素前駆体および窒素源のアンモニアとしてアンモニアを用いて、膜の堆積を実施した。ALDサイクルの工程およびプロセス条件は下記の表3に与えられている。
a.H2のみのプラズマ
プラズマ振動数=13.56MHz
H2流量=135sccm
チャンバ圧力=2トール
時間=5分間
b.H2/Arプラズマ
プラズマ振動数=13.56MHz
H2流量=65sccm
Ar流量=65sccm
チャンバ圧力=2トール
時間=5分間
例1:熱ALD堆積による炭素ドープ酸化ケイ素膜の低誘電率および高酸素アッシンク抵抗
堆積の後に、この膜は、次いでエクスサイチュで、3時間、300℃で空気中で更に処理された。
例2:1,1,3,3,-テトラクロロ-1,3-ジシラシクロブタンからの炭素ドープ酸化ケイ素膜のステップカバレージ
例3. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンを用いた熱ALD堆積によるケイ素含有膜の堆積
例4. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンから堆積された炭素ドープ酸化ケイ素膜のインサイチュアニール
例5. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンおよびアンモニアを用いた熱ALD堆積によって堆積されそしてそれに続く熱アニールおよびプラズマ処理された炭素ドープ酸化ケイ素膜の酸素アッシング抵抗
例6. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンおよびアンモニアを用いた、300℃での、次いで高温でのアニールの炭素ドープ酸化ケイ素膜
例7. プラズマ処理後のケイ素含有膜のステップカバレージ
例8. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンおよびアンモニアから堆積された炭素含有膜の化学処理
例9. オクタンおよびアンモニア中での1,1,3,3-テトラクロロジシラシクロブタンを用いた炭素含有ケイ素膜の堆積
例10. インサイチュ処理での高炭素含有量の酸化ケイ素膜
例11. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンおよび水/ピリジンから堆積された低誘電率の炭素ドープ酸化ケイ素膜
例12. インサイチュの処理からの高炭素含有量の酸化ケイ素膜
比較例1. ジエトキシメチルシランを用いてPECVDによって堆積された炭素ドープ酸化ケイ素膜への水素プラズマ処理および酸素アッシングの効果
炭素ドープ酸化ケイ素膜が、ジエトキシメチルシラン(DEMS)を用いて、200mmの商業的なPECVD装置を用いて、300℃で堆積された。プロセスパラメータは次のとおりである:出力=500W、圧力=9トール、Si前駆体流量=500sccm、He流量=300sccm、膜厚=500Å。
例10. 1,1,3,3-テトラクロロ-1,3-ジシラシクロブタンの配合
本発明は、以下の態様を含んでいる。
(1)(a)1,1,1,3,3,3-ヘキサクロロ-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパン、1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1,1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、1つのSi-C-Siまたは2つのSi-C-Si結合を有する少なくとも1種のケイ素前駆体化合物、および、
(b)少なくとも1種の溶媒、
を含んでなる組成物。
(2)前記溶媒中に、エーテル、第3級アミン、シロキサン、アルキル炭化水素、芳香族炭化水素および第3級アミノエーテルからなる群から選択される少なくとも1種を含む、(1)記載の組成物。
(3)前記ケイ素前駆体の沸点と、前記溶媒の沸点との間の差異が、約40℃以下である、(1)記載の組成物。
(4)5ppm未満の、Al3+イオン、Fe2+、Fe3+、Ni2+、およびCr3+からなる群から選択される少なくとも1種の金属イオンを含む、(1)記載の組成物。
(5)前記溶媒中に、ヘプタン、オクタン、ノナン、デカン、ドデカン、シクロオクタン、シクロノナン、シクロデカン、トルエン、およびメシチレンからなる群から選択される少なくとも1種を含む、(1)記載の組成物。
(6)熱ALDプロセスによって15原子%~30原子%の範囲の炭素含有量を有する炭素ドープ酸化ケイ素膜を形成する方法であって、
a)表面フィーチャを含む1種もしくは2種以上の基材を反応器中に配置すること、
b)反応器を周囲温度~約550℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的に該反応器を100トール以下の圧力に保持すること、
c)1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1、1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1、3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1、1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、2つのSi-C-Si結合を有する少なくとも1種のケイ素前駆体を該反応器中に導入すること、
d)不活性ガスでパージすること、
e)該反応器中に窒素源を供給して、該表面と反応させて、炭素ドープ窒化ケイ素膜を形成すること、
f)不活性ガスでパージして、反応副生成物を除去すること、
g)工程c~fを繰り返して炭素ドープ窒化ケイ素の所望の厚さを与えること、
h)結果として得られた炭素ドープ窒化ケイ素膜を酸素源と共に、約周囲温度~1000℃または約100℃~400℃の範囲の1つもしくは2つ以上の温度で加熱して、該炭素ドープ窒化ケイ素膜を炭素ドープ酸化ケイ素膜へと転換すること、ならびに、
i)該炭素ドープ酸化ケイ素膜に、水素を含むプラズマへの堆積後曝露を与えること、
を含んでなる、方法。
(7)前記ケイ素前駆体が、(1)記載の組成物を含む、(6)記載の方法。
(8)約4未満のk、少なくとも約10原子%の炭素含有量を有する、(6)記載の方法によって形成された膜。
(9)熱酸化ケイ素よりも少なくとも0.5倍小さいエッチング速度を有する、(6)記載の方法によって形成された膜。
(10)熱酸化ケイ素よりも少なくとも0.1倍小さいエッチング速度を有する、(6)記載の方法によって形成された膜。
(11)熱酸化ケイ素よりも少なくとも0.05倍小さいエッチング速度を有する、(6)記載の方法によって形成された膜。
(12)熱酸化ケイ素よりも少なくとも0.01倍小さいエッチング速度を有する、(6)記載の方法によって形成された膜。
(13)酸素アッシングプロセスに曝露した時に、より小さい損失層(50Å以下)を有する、(6)記載の方法によって形成された膜。
(14)酸素アッシングプロセスに曝露した時に、より小さい損失層(20Å以下)を有する、(6)記載の方法によって形成された膜。
(15)酸素アッシングプロセスに曝露した時に、より小さい損失層(10Å以下)を有する、(6)記載の方法によって形成された膜。
(16)酸素アッシングプロセスに曝露した時に、より小さい損失層(5Å以下)を有する、(6)記載の方法によって形成された膜。
(17)(1)記載の組成物を収容するステンレス鋼製の容器。
(18)熱ALDプロセスによって15原子%~30原子%の範囲の炭素含有量を有する炭素ドープ酸化ケイ素膜を形成する方法であって、
a)表面フィーチャを含む1種もしくは2種以上の基材を反応器中に配置すること、
b)該反応器を周囲温度~約150℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的に該反応器を100トール以下の圧力に保持すること、
c)1-クロロ-1,3-ジシラシクロブタン、1-ブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-1,3-ジシラシクロブタン、1,3-ジブロモ-1,3-ジシラシクロブタン、1、1,3-トリクロロ-1,3-ジシラシクロブタン、1,1,3-トリブロモ-1,3-ジシラシクロブタン、1,1,3,3-テトラクロロ-1,3-ジシラシクロブタン、1,1,3,3-テトラブロモ-1,3-ジシラシクロブタン、1,3-ジクロロ-1,3-ジメチル-1,3-ジシラシクロブタン、1,3-ブロモ-1,3-ジメチル-1,3-ジシラシクロブタン、1,1,1、3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1、1,3,3,5,5,5-オクタクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、2つのSi-C-Si結合を有する少なくとも前駆体ならびに触媒を該反応器中に導入すること、
d)不活性ガスでパージすること、
e)該反応器中に水の蒸気を供給して、該前駆体ならびに触媒と反応させて、炭素ドープ酸化ケイ素の堆積されたままの膜を形成すること、
f)不活性ガスでパージして、反応副生成物を除去すること、
g)工程c~fを繰り返して炭素ドープ酸化ケイ素の所望の厚さを与えること、
を含んでなる、方法。
(19)前記炭素ドープ酸化ケイ素膜の、300~700℃の温度での熱アニールでの堆積後処理を更に含む、(18)記載の方法。
(20)前記炭素ドープ酸化ケイ素膜の、水素を含むプラズマでの水素プラズマ処理を更に含む、(18)記載の方法。
Claims (17)
- ALDプロセスに用いられる前駆体組成物であって、
(a)1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,3,3,5,5-ヘキサクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、1つのSi-C-Siまたは2つのSi-C-Si結合を有する少なくとも1種のケイ素前駆体化合物、および、
(b)少なくとも1種の溶媒、
を含んでなる前駆体組成物。 - 前記溶媒中に、エーテル、第3級アミン、シロキサン、アルキル炭化水素、芳香族炭化水素および第3級アミノエーテルからなる群から選択される少なくとも1種を含む、請求項1記載の前駆体組成物。
- 前記ケイ素前駆体の沸点と、前記溶媒の沸点との間の差異が、40℃以下である、請求項1記載の前駆体組成物。
- 5ppm未満の、Al3+イオン、Fe2+、Fe3+、Ni2+、およびCr3+からなる群から選択される少なくとも1種の金属イオンを含む、請求項1記載の前駆体組成物。
- 前記溶媒中に、ヘプタン、オクタン、ノナン、デカン、ドデカン、シクロオクタン、シクロノナン、シクロデカン、トルエン、およびメシチレンからなる群から選択される少なくとも1種を含む、請求項1記載の前駆体組成物。
- 熱ALDプロセスによって5原子%~30原子%の範囲の炭素含有量を有する炭素ドープ酸化ケイ素膜を形成する方法であって、
a)表面フィーチャを含む1種もしくは2種以上の基材を反応器中に配置すること、
b)反応器を周囲温度~550℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的に該反応器を100トール以下の圧力に保持すること、
c)1,1,1,3,3,3-ヘキサクロロ-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-メチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2,2-ジメチル-1,3-ジシラプロパン、1,1,1,3,3,3-ヘキサクロロ-2-エチル-1,3-ジシラプロパン、1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,3,3,5,5-ヘキサクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,3,5,5-ペンタクロロ-1,3,5-トリメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、1つのSi-C-Siまたは2つのSi-C-Si結合を有する少なくとも1種のケイ素前駆体を該反応器中に導入すること、
d)不活性ガスでパージすること、
e)該反応器中に窒素源を供給して、該表面と反応させて、炭素ドープ窒化ケイ素膜を形成すること、
f)不活性ガスでパージして、反応副生成物を除去すること、
g)工程c~fを繰り返して炭素ドープ窒化ケイ素の所望の厚さを与えること、
h)結果として得られた炭素ドープ窒化ケイ素膜を酸素源と共に、周囲温度~1000℃または100℃~400℃の範囲の1つもしくは2つ以上の温度で加熱して、該炭素ドープ窒化ケイ素膜を炭素ドープ酸化ケイ素膜へと転換すること、ならびに、
i)該炭素ドープ酸化ケイ素膜に、水素を含むプラズマへの堆積後曝露を与えること、
を含んでなる、方法。 - 前記ケイ素前駆体が、溶媒を含む溶媒配合物中で用いられる、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が4未満のk、少なくとも10原子%の炭素含有量を有する、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が熱酸化ケイ素よりも少なくとも0.5倍小さい、希HF(1:99の49%HFとDI水)でのエッチング速度を有する、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が熱酸化ケイ素よりも少なくとも0.1倍小さい、希HF(1:99の49%HFとDI水)でのエッチング速度を有する、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が熱酸化ケイ素よりも少なくとも0.05倍小さい、希HF(1:99の49%HFとDI水)でのエッチング速度を有する、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が熱酸化ケイ素よりも少なくとも0.01倍小さい、希HF(1:99の49%HFとDI水)でのエッチング速度を有する、請求項6記載の方法。
- 前記炭素ドープ酸化ケイ素膜が、酸素アッシングプロセスに曝露した時に、より小さい損失層(50Å以下)を有する、請求項6記載の方法。
- 請求項1記載の前駆体組成物を収容するステンレス鋼製の容器。
- 熱ALDプロセスによって15原子%~30原子%の範囲の炭素含有量を有する炭素ドープ酸化ケイ素膜を形成する方法であって、
a)表面フィーチャを含む1種もしくは2種以上の基材を反応器中に配置すること、
b)該反応器を周囲温度~150℃の範囲の1つもしくは2つ以上の温度に加熱し、そして随意選択的に該反応器を100トール以下の圧力に保持すること、
c)1,1,1,3,3,5,5,5-オクタクロロ-1,3,5-トリシラペンタン、1,1,3,3,5,5-ヘキサクロロ-1,5-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-3,3-ジメチル-1,3,5-トリシラペンタン、1,1,1,5,5,5-ヘキサクロロ-1,3,5-トリシラペンタン、1,1,5,5-テトラクロロ-1,3,5-トリシラペンタンからなる群から選択される、2つのSi-C-Si結合を有する少なくとも前駆体ならびに触媒を該反応器中に導入すること、
d)不活性ガスでパージすること、
e)該反応器中に水の蒸気を供給して、該前駆体ならびに触媒と反応させて、炭素ドープ酸化ケイ素の堆積されたままの膜を形成すること、
f)不活性ガスでパージして、反応副生成物を除去すること、
g)工程c~fを繰り返して炭素ドープ酸化ケイ素の所望の厚さを与えること、
を含んでなる、方法。 - 前記炭素ドープ酸化ケイ素膜の、300~700℃の温度での熱アニールでの堆積後処理を更に含む、請求項15記載の方法。
- 前記炭素ドープ酸化ケイ素膜の、水素を含むプラズマでの水素プラズマ処理を更に含む、請求項15記載の方法。
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Families Citing this family (256)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US10832904B2 (en) | 2012-06-12 | 2020-11-10 | Lam Research Corporation | Remote plasma based deposition of oxygen doped silicon carbide films |
US10325773B2 (en) | 2012-06-12 | 2019-06-18 | Novellus Systems, Inc. | Conformal deposition of silicon carbide films |
US9234276B2 (en) | 2013-05-31 | 2016-01-12 | Novellus Systems, Inc. | Method to obtain SiC class of films of desired composition and film properties |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
US9564309B2 (en) | 2013-03-14 | 2017-02-07 | Asm Ip Holding B.V. | Si precursors for deposition of SiN at low temperatures |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
SG10202000545RA (en) * | 2014-10-24 | 2020-03-30 | Versum Materials Us Llc | Compositions and methods using same for deposition of silicon-containing films |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
US20160314964A1 (en) | 2015-04-21 | 2016-10-27 | Lam Research Corporation | Gap fill using carbon-based films |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US10410857B2 (en) | 2015-08-24 | 2019-09-10 | Asm Ip Holding B.V. | Formation of SiN thin films |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US20180033614A1 (en) * | 2016-07-27 | 2018-02-01 | Versum Materials Us, Llc | Compositions and Methods Using Same for Carbon Doped Silicon Containing Films |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
US10002787B2 (en) * | 2016-11-23 | 2018-06-19 | Lam Research Corporation | Staircase encapsulation in 3D NAND fabrication |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
WO2019028136A1 (en) | 2017-08-04 | 2019-02-07 | Lam Research Corporation | SELECTIVE DEPOSITION OF SILICON NITRIDE ON HORIZONTAL SURFACES |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
KR102597978B1 (ko) | 2017-11-27 | 2023-11-06 | 에이에스엠 아이피 홀딩 비.브이. | 배치 퍼니스와 함께 사용하기 위한 웨이퍼 카세트를 보관하기 위한 보관 장치 |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
US11482412B2 (en) | 2018-01-19 | 2022-10-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
TW202325889A (zh) | 2018-01-19 | 2023-07-01 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
JP6806721B2 (ja) * | 2018-02-20 | 2021-01-06 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理システムおよびプログラム |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US10580645B2 (en) * | 2018-04-30 | 2020-03-03 | Asm Ip Holding B.V. | Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors |
TWI811348B (zh) | 2018-05-08 | 2023-08-11 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構 |
TWI816783B (zh) | 2018-05-11 | 2023-10-01 | 荷蘭商Asm 智慧財產控股公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
CN112292477A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
JP2021529254A (ja) | 2018-06-27 | 2021-10-28 | エーエスエム・アイピー・ホールディング・ベー・フェー | 金属含有材料ならびに金属含有材料を含む膜および構造体を形成するための周期的堆積方法 |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
KR20200002519A (ko) | 2018-06-29 | 2020-01-08 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10840087B2 (en) | 2018-07-20 | 2020-11-17 | Lam Research Corporation | Remote plasma based deposition of boron nitride, boron carbide, and boron carbonitride films |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US20200071819A1 (en) * | 2018-08-29 | 2020-03-05 | Versum Materials Us, Llc | Methods For Making Silicon Containing Films That Have High Carbon Content |
US10985010B2 (en) * | 2018-08-29 | 2021-04-20 | Versum Materials Us, Llc | Methods for making silicon and nitrogen containing films |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
JP6980624B2 (ja) * | 2018-09-13 | 2021-12-15 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
KR20210047966A (ko) * | 2018-09-24 | 2021-04-30 | 버슘머트리얼즈 유에스, 엘엘씨 | 실리콘 및 질소 함유 막의 제조 방법 |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
WO2020072625A1 (en) | 2018-10-03 | 2020-04-09 | Versum Materials Us, Llc | Methods for making silicon and nitrogen containing films |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US20210380418A1 (en) * | 2018-10-05 | 2021-12-09 | Versum Materials Us, Llc | High temperature atomic layer deposition of silicon-containing film |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
JP7487189B2 (ja) | 2018-10-19 | 2024-05-20 | ラム リサーチ コーポレーション | 間隙充填のためのドープまたは非ドープシリコン炭化物および遠隔水素プラズマ曝露 |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
KR102157137B1 (ko) * | 2018-11-30 | 2020-09-17 | 주식회사 한솔케미칼 | 실리콘 전구체 및 이를 이용한 실리콘 함유 박막의 제조방법 |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
JP2020096183A (ja) | 2018-12-14 | 2020-06-18 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
KR102638425B1 (ko) | 2019-02-20 | 2024-02-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 내에 형성된 오목부를 충진하기 위한 방법 및 장치 |
JP2020136677A (ja) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための周期的堆積方法および装置 |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
JP2020133004A (ja) | 2019-02-22 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材を処理するための基材処理装置および方法 |
JP6910387B2 (ja) * | 2019-03-05 | 2021-07-28 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
JP7224217B2 (ja) * | 2019-03-15 | 2023-02-17 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
JP2020167398A (ja) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | ドアオープナーおよびドアオープナーが提供される基材処理装置 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
US11447864B2 (en) | 2019-04-19 | 2022-09-20 | Asm Ip Holding B.V. | Layer forming method and apparatus |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
JP7326912B2 (ja) * | 2019-06-20 | 2023-08-16 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット及び液体を吐出する装置 |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
JP2021015791A (ja) | 2019-07-09 | 2021-02-12 | エーエスエム アイピー ホールディング ビー.ブイ. | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
CN112242296A (zh) | 2019-07-19 | 2021-01-19 | Asm Ip私人控股有限公司 | 形成拓扑受控的无定形碳聚合物膜的方法 |
TW202113936A (zh) | 2019-07-29 | 2021-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (zh) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
TW202129060A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip控股公司 | 基板處理裝置、及基板處理方法 |
TW202115273A (zh) | 2019-10-10 | 2021-04-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成光阻底層之方法及包括光阻底層之結構 |
KR20210045930A (ko) | 2019-10-16 | 2021-04-27 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물의 토폴로지-선택적 막의 형성 방법 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
JP2021097227A (ja) | 2019-12-17 | 2021-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化バナジウム層および窒化バナジウム層を含む構造体を形成する方法 |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
JP2021109175A (ja) | 2020-01-06 | 2021-08-02 | エーエスエム・アイピー・ホールディング・ベー・フェー | ガス供給アセンブリ、その構成要素、およびこれを含む反応器システム |
KR20210095050A (ko) | 2020-01-20 | 2021-07-30 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
TW202146882A (zh) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 驗證一物品之方法、用於驗證一物品之設備、及用於驗證一反應室之系統 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
TW202203344A (zh) | 2020-02-28 | 2022-01-16 | 荷蘭商Asm Ip控股公司 | 專用於零件清潔的系統 |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
TW202146831A (zh) | 2020-04-24 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 垂直批式熔爐總成、及用於冷卻垂直批式熔爐之方法 |
KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
CN113555279A (zh) | 2020-04-24 | 2021-10-26 | Asm Ip私人控股有限公司 | 形成含氮化钒的层的方法及包含其的结构 |
KR20210134226A (ko) | 2020-04-29 | 2021-11-09 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
KR20210141379A (ko) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
TW202147383A (zh) | 2020-05-19 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備 |
KR20210145078A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
KR20210145080A (ko) | 2020-05-22 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 과산화수소를 사용하여 박막을 증착하기 위한 장치 |
TW202201602A (zh) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
JP2023531513A (ja) * | 2020-06-23 | 2023-07-24 | インテグリス・インコーポレーテッド | ケイ素前駆体化合物及びケイ素含有膜を形成するための方法 |
TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
TW202217953A (zh) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
TW202204662A (zh) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
TW202212623A (zh) | 2020-08-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成金屬氧化矽層及金屬氮氧化矽層的方法、半導體結構、及系統 |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
JP2022065560A (ja) * | 2020-10-15 | 2022-04-27 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
KR20220076343A (ko) | 2020-11-30 | 2022-06-08 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치의 반응 챔버 내에 배열되도록 구성된 인젝터 |
US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
JP7444182B2 (ja) | 2022-01-28 | 2024-03-06 | トヨタ自動車株式会社 | 車両用スロープ展開装置 |
WO2023220650A1 (en) * | 2022-05-13 | 2023-11-16 | Versum Materials Us, Llc | Compositions and methods using same for carbon doped silicon containing films |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030044533A1 (en) | 2001-09-01 | 2003-03-06 | Jusung Engineering Co., Ltd. | Method for fabricating hydrogenated silicon oxycarbide thin film and PECVD apparatus therefor |
WO2005045916A1 (ja) | 2003-11-11 | 2005-05-19 | Tokyo Electron Limited | 基板処理方法 |
JP2007204626A (ja) | 2006-02-02 | 2007-08-16 | Jsr Corp | ポリマーの製造方法、ポリマー、絶縁膜形成用組成物、絶縁膜の製造方法、およびシリカ系絶縁膜 |
WO2007114144A1 (ja) | 2006-03-29 | 2007-10-11 | Daiso Co., Ltd. | 修飾シリカゲル及びその利用 |
WO2012128044A1 (ja) | 2011-03-23 | 2012-09-27 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法および基板処理装置 |
US20120270998A1 (en) | 2009-12-31 | 2012-10-25 | Sang-Ran Koh | Resin composition for transparent encapsulation material and electronic device formed using the same |
US20130071580A1 (en) | 2011-09-13 | 2013-03-21 | Applied Materials, Inc. | Activated Silicon Precursors For Low Temperature Deposition |
JP2014027285A (ja) | 2012-07-30 | 2014-02-06 | Air Products And Chemicals Inc | 酸素不含ケイ素系膜及びその形成方法 |
JP2014183218A (ja) | 2013-03-19 | 2014-09-29 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法、基板処理装置及びプログラム |
JP2015053445A (ja) | 2013-09-09 | 2015-03-19 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置及びプログラム |
WO2015045163A1 (ja) | 2013-09-30 | 2015-04-02 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、基板処理システム及び記録媒体 |
US20160002039A1 (en) | 2013-03-01 | 2016-01-07 | David Thompson | Low Temperature Atomic Layer Deposition Of Films Comprising SiCN OR SiCON |
WO2016065219A1 (en) | 2014-10-24 | 2016-04-28 | Air Products And Chemicals, Inc. | Compositions and methods using same for deposition of silicon-containing film |
Family Cites Families (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02145590A (ja) | 1988-11-26 | 1990-06-05 | Shin Etsu Chem Co Ltd | 新規ジシラシクロヘキサン化合物及びその製造方法 |
US5141817A (en) * | 1989-06-13 | 1992-08-25 | International Business Machines Corporation | Dielectric structures having embedded gap filling RIE etch stop polymeric materials of high thermal stability |
JP2614338B2 (ja) | 1990-01-11 | 1997-05-28 | 株式会社東芝 | 液体ソース容器 |
US5465766A (en) | 1993-04-28 | 1995-11-14 | Advanced Delivery & Chemical Systems, Inc. | Chemical refill system for high purity chemicals |
DE69738136T2 (de) | 1996-12-17 | 2008-06-12 | Advanced Technology Materials, Inc., Danbury | Reagenzzuführbehälter für cvd |
KR100365641B1 (ko) * | 2000-07-29 | 2002-12-26 | 삼성전자 주식회사 | 배선에 의한 기생 용량을 줄일 수 있는 반도체 장치 및 그형성방법 |
US6953047B2 (en) | 2002-01-14 | 2005-10-11 | Air Products And Chemicals, Inc. | Cabinet for chemical delivery with solvent purging |
US7875556B2 (en) * | 2005-05-16 | 2011-01-25 | Air Products And Chemicals, Inc. | Precursors for CVD silicon carbo-nitride and silicon nitride films |
JP5218765B2 (ja) * | 2006-03-29 | 2013-06-26 | Jsr株式会社 | ポリマーの製造方法、ポリマー、ポリマー膜形成用組成物、ポリマー膜の形成方法およびポリマー膜 |
EP2095446A1 (en) * | 2006-12-20 | 2009-09-02 | Dow Corning Corporation | Composite article including a cation-sensitive layer |
WO2009123032A1 (ja) * | 2008-04-02 | 2009-10-08 | Jsr株式会社 | 含ケイ素重合体を含む組成物およびその硬化物 |
US8241624B2 (en) | 2008-04-18 | 2012-08-14 | Ecolab Usa Inc. | Method of disinfecting packages with composition containing peracid and catalase |
KR100928942B1 (ko) * | 2008-05-26 | 2009-11-30 | 제이에스아이실리콘주식회사 | 직선형이나 고리형의 트리실라알칸의 제조방법 |
CN101407466B (zh) | 2008-12-08 | 2013-11-27 | 山西玉龙化工有限公司 | 乙二胺的纯化方法 |
US8703624B2 (en) * | 2009-03-13 | 2014-04-22 | Air Products And Chemicals, Inc. | Dielectric films comprising silicon and methods for making same |
US20120030448A1 (en) * | 2009-03-30 | 2012-02-02 | Nec Corporation | Single instruction multiple date (simd) processor having a plurality of processing elements interconnected by a ring bus |
US20130022745A1 (en) | 2009-08-14 | 2013-01-24 | American Air Liquide, Inc. | Silane blend for thin film vapor deposition |
JP5188529B2 (ja) | 2010-03-30 | 2013-04-24 | 株式会社日立ハイテクノロジーズ | 電子ビーム照射方法、及び走査電子顕微鏡 |
KR101366002B1 (ko) * | 2010-04-09 | 2014-02-21 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 장치의 제조 방법, 기판 처리 방법 및 기판 처리 장치 |
TWI483995B (zh) * | 2010-08-18 | 2015-05-11 | Cheil Ind Inc | 聚有機矽氧烷與由該聚有機矽氧烷獲得之封裝材料以及包含該封裝材料之電子元件 |
US8440571B2 (en) * | 2010-11-03 | 2013-05-14 | Applied Materials, Inc. | Methods for deposition of silicon carbide and silicon carbonitride films |
US8575033B2 (en) | 2011-09-13 | 2013-11-05 | Applied Materials, Inc. | Carbosilane precursors for low temperature film deposition |
US20130224964A1 (en) * | 2012-02-28 | 2013-08-29 | Asm Ip Holding B.V. | Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond |
US9978585B2 (en) * | 2012-06-01 | 2018-05-22 | Versum Materials Us, Llc | Organoaminodisilane precursors and methods for depositing films comprising same |
US9337018B2 (en) * | 2012-06-01 | 2016-05-10 | Air Products And Chemicals, Inc. | Methods for depositing films with organoaminodisilane precursors |
KR20140083619A (ko) * | 2012-12-26 | 2014-07-04 | 제일모직주식회사 | 실록산 모노머, 봉지재 조성물, 봉지재 및 전자 소자 |
JP6112928B2 (ja) | 2013-03-19 | 2017-04-12 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置及びプログラム |
JP5864637B2 (ja) | 2013-03-19 | 2016-02-17 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、プログラム及び記録媒体 |
US9071726B2 (en) * | 2013-06-28 | 2015-06-30 | Cellco Partnership | Videocast service architecture |
US8979549B2 (en) | 2013-08-08 | 2015-03-17 | Kuei-Yang Lin | Rotating plug |
US10453675B2 (en) * | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
CN103539675B (zh) | 2013-10-21 | 2015-05-13 | 西安近代化学研究所 | 一种乙二胺和水共沸物的分离方法 |
US9401273B2 (en) * | 2013-12-11 | 2016-07-26 | Asm Ip Holding B.V. | Atomic layer deposition of silicon carbon nitride based materials |
WO2016027369A1 (ja) * | 2014-08-22 | 2016-02-25 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置および記録媒体 |
TWI585230B (zh) * | 2015-02-06 | 2017-06-01 | 氣體產品及化學品股份公司 | 用於碳摻雜的含矽膜的組合物及其方法 |
US9633838B2 (en) * | 2015-12-28 | 2017-04-25 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Vapor deposition of silicon-containing films using penta-substituted disilanes |
US20180033614A1 (en) * | 2016-07-27 | 2018-02-01 | Versum Materials Us, Llc | Compositions and Methods Using Same for Carbon Doped Silicon Containing Films |
US10249489B2 (en) * | 2016-11-02 | 2019-04-02 | Versum Materials Us, Llc | Use of silyl bridged alkyl compounds for dense OSG films |
US11851756B2 (en) * | 2017-09-14 | 2023-12-26 | Versum Materials Us, Llc | Methods for depositing silicon-containing films |
US20200071819A1 (en) * | 2018-08-29 | 2020-03-05 | Versum Materials Us, Llc | Methods For Making Silicon Containing Films That Have High Carbon Content |
US10985010B2 (en) * | 2018-08-29 | 2021-04-20 | Versum Materials Us, Llc | Methods for making silicon and nitrogen containing films |
-
2017
- 2017-07-19 US US15/654,426 patent/US20180033614A1/en not_active Abandoned
- 2017-07-26 TW TW106125167A patent/TWI637075B/zh active
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Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030044533A1 (en) | 2001-09-01 | 2003-03-06 | Jusung Engineering Co., Ltd. | Method for fabricating hydrogenated silicon oxycarbide thin film and PECVD apparatus therefor |
WO2005045916A1 (ja) | 2003-11-11 | 2005-05-19 | Tokyo Electron Limited | 基板処理方法 |
JP2007204626A (ja) | 2006-02-02 | 2007-08-16 | Jsr Corp | ポリマーの製造方法、ポリマー、絶縁膜形成用組成物、絶縁膜の製造方法、およびシリカ系絶縁膜 |
WO2007114144A1 (ja) | 2006-03-29 | 2007-10-11 | Daiso Co., Ltd. | 修飾シリカゲル及びその利用 |
US20120270998A1 (en) | 2009-12-31 | 2012-10-25 | Sang-Ran Koh | Resin composition for transparent encapsulation material and electronic device formed using the same |
WO2012128044A1 (ja) | 2011-03-23 | 2012-09-27 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法および基板処理装置 |
US20130071580A1 (en) | 2011-09-13 | 2013-03-21 | Applied Materials, Inc. | Activated Silicon Precursors For Low Temperature Deposition |
JP2014027285A (ja) | 2012-07-30 | 2014-02-06 | Air Products And Chemicals Inc | 酸素不含ケイ素系膜及びその形成方法 |
US20160002039A1 (en) | 2013-03-01 | 2016-01-07 | David Thompson | Low Temperature Atomic Layer Deposition Of Films Comprising SiCN OR SiCON |
JP2014183218A (ja) | 2013-03-19 | 2014-09-29 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法、基板処理装置及びプログラム |
JP2015053445A (ja) | 2013-09-09 | 2015-03-19 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置及びプログラム |
WO2015045163A1 (ja) | 2013-09-30 | 2015-04-02 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、基板処理システム及び記録媒体 |
WO2016065219A1 (en) | 2014-10-24 | 2016-04-28 | Air Products And Chemicals, Inc. | Compositions and methods using same for deposition of silicon-containing film |
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