JP6936833B2 - 埋め込み部品パッケージ構造およびその製造方法 - Google Patents
埋め込み部品パッケージ構造およびその製造方法 Download PDFInfo
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- JP6936833B2 JP6936833B2 JP2019118675A JP2019118675A JP6936833B2 JP 6936833 B2 JP6936833 B2 JP 6936833B2 JP 2019118675 A JP2019118675 A JP 2019118675A JP 2019118675 A JP2019118675 A JP 2019118675A JP 6936833 B2 JP6936833 B2 JP 6936833B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 51
- 238000000034 method Methods 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 16
- 238000005488 sandblasting Methods 0.000 description 11
- 238000005498 polishing Methods 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
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Description
Claims (22)
- 誘電体構造物と、
前記誘電体構造物内に埋め込まれ、複数の導電性柱状体を備えている部品であって、前記導電性柱状体が、前記誘電体構造物の上面から露出し、第1の厚さおよび第2の厚さそれぞれを有し、前記第1の厚さが前記第2の厚さに等しくない部品と
を備え、
前記部品は、第1の表面と、前記部品の前記第1の表面と反対側に第2の表面を有しており、前記導電性柱状体は、前記部品の前記第1の表面に備えられていて、前記部品の前記第2の表面が、前記誘電体構造物によって覆われているパッケージ構造。 - 前記部品が10μm以上、25μm以下の反りを有する、請求項1に記載のパッケージ構造。
- 前記部品は再配線層および絶縁層を備え、前記再配線層は前記絶縁層上に配置され、前記再配線層は、前記導電性柱状体が配置される複数の電気パッドを有する、請求項1に記載のパッケージ構造。
- 前記第1の厚さは前記第2の厚さと少なくとも10μm異なる、請求項1に記載のパッケージ構造。
- 前記第1の厚さおよび前記第2の厚さは少なくとも3μmよりも大きい、請求項1に記載のパッケージ構造。
- 前記導電性柱状体の上面は、前記誘電体構造物の前記上面に揃えられており、前記導電性柱状体の下面同士は、互いに異なる高さのレベルに位置付けられる、請求項1に記載のパッケージ構造。
- 前記導電性柱状体は、第1の側および第2の側を有し、前記第1の側の長さは前記第2の側の長さに等しくない、請求項1に記載のパッケージ構造。
- 前記誘電体構造物を覆い、前記導電性柱状体に電気的に接続された導電層をさらに備える、請求項1に記載のパッケージ構造。
- 前記導電性柱状体の各々は中心線を有し、前記中心線は、垂直線に対して第1の傾斜角および第2の傾斜角を有し、前記第1の傾斜角は前記第2の傾斜角に等しくない、請求項1に記載のパッケージ構造。
- 誘電体構造物と、
前記誘電体構造物内に埋め込まれ、複数の導電性柱状体を備えている部品と、を備え、
前記導電性柱状体の各々は中心線を有し、前記中心線は垂直線に対する第1の傾斜角および第2の傾斜角を有し、前記第1の傾斜角は前記第2の傾斜角に等しくなく、
前記誘電体構造物はモノリシック構造であり、少なくとも一つの前記導電性柱状物の側面を覆う、埋め込み部品パッケージ構造。 - 前記部品が10μm以上、25μm以下の反りを有する、請求項10に記載のパッケージ構造。
- 前記部品は再配線層および絶縁層を備え、前記再配線層は前記絶縁層上に配置され、前記再配線層は、電気パッド上に配置された複数の電気パッドを有する、請求項10に記載のパッケージ構造。
- 前記導電性柱状体の上面は、前記誘電体構造物の上面に揃えられており、前記導電性柱状体の下面同士は、互いに異なる高さのレベルに位置付けられる、請求項10に記載のパッケージ構造。
- 前記導電性柱状体は、前記誘電体構造物の前記上面から露出し、第1の厚さおよび第2の厚さそれぞれを有し、前記第1の厚さは前記第2の厚さに等しくない、請求項13に記載のパッケージ構造。
- 前記第1の厚さは前記第2の厚さと少なくとも10μm異なる、請求項14に記載のパッケージ構造。
- 前記第1の厚さおよび前記第2の厚さは少なくとも3μmよりも大きい、請求項14に記載のパッケージ構造。
- 前記導電性柱状体は、第1の側および第2の側を有し、前記第1の側の長さは前記第2の側の長さに等しくない、請求項10に記載のパッケージ構造。
- 前記誘電体構造物を覆い、前記導電性柱状体に電気的に接続された導電層をさらに備える、請求項10に記載のパッケージ構造。
- 複数の導電性柱状体を備えていて前記導電性柱状体同士が互いに異なる高さに位置づけられるような反りを有する半導体チップをキャリア上に設ける工程と、
前記半導体チップと前記複数の導電性柱状体とを覆う誘電体構造物を前記キャリア上に設ける工程と、
前記誘電体構造物の一部および前記導電性柱状体の一部を除去する工程と、
前記半導体チップを前記キャリアと電気的に接続する工程と、
を備える、埋め込み部品パッケージ構造の製造方法。 - 前記誘電体構造物を覆う導電層を設ける工程をさらに備え、前記導電層は前記導電性柱状体に電気的に接続される、請求項19に記載の製造方法。
- 前記導電性柱状体の前記一部を除去する前に前記導電性柱状体が前記半導体チップの前記反りよりも大きな厚さを有する、請求項19に記載の製造方法。
- 前記反りが少なくとも10μmよりも大きい、請求項21に記載の製造方法。
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