JP6904279B2 - 半導体装置およびその製造方法並びに電力変換装置 - Google Patents
半導体装置およびその製造方法並びに電力変換装置 Download PDFInfo
- Publication number
- JP6904279B2 JP6904279B2 JP2018033692A JP2018033692A JP6904279B2 JP 6904279 B2 JP6904279 B2 JP 6904279B2 JP 2018033692 A JP2018033692 A JP 2018033692A JP 2018033692 A JP2018033692 A JP 2018033692A JP 6904279 B2 JP6904279 B2 JP 6904279B2
- Authority
- JP
- Japan
- Prior art keywords
- peripheral
- cell
- electrode
- insulating film
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 232
- 238000006243 chemical reaction Methods 0.000 title claims description 40
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 186
- 210000004027 cell Anatomy 0.000 claims description 182
- 239000011229 interlayer Substances 0.000 claims description 42
- 230000001681 protective effect Effects 0.000 claims description 25
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 23
- 229920005591 polysilicon Polymers 0.000 claims description 23
- 239000000945 filler Substances 0.000 claims description 22
- 239000002245 particle Substances 0.000 claims description 15
- 230000037237 body shape Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 239000003566 sealing material Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 description 52
- 239000010410 layer Substances 0.000 description 41
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- 230000036413 temperature sense Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/8213—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using SiC technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
- H01L27/0823—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only including vertical bipolar transistors only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0661—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/404—Multiple field plate structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/408—Electrodes ; Multistep manufacturing processes therefor with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
- H01L29/66348—Vertical insulated gate bipolar transistors with a recessed gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
- H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
- H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
- H01L2223/5446—Located in scribe lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
- H01L23/295—Organic, e.g. plastic containing a filler
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P27/00—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage
- H02P27/04—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage
- H02P27/06—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage using dc to ac converters or inverters
- H02P27/08—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage using dc to ac converters or inverters with pulse width modulation
Description
表面および裏面を有する平面体形状を有し、前記平面体形状の平面視における中央領域に設けられたセル部と、前記平面体形状の前記平面視において前記セル部の周りに設けられた周縁部とを有する半導体チップと、
前記セル部における前記表面の上に設けられたセル表面電極部と、
前記周縁部における前記表面の上に設けられ、前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部と、
を備え、
前記セル部の前記裏面よりも前記周縁部の前記裏面が凹むように前記周縁部が前記セル部よりも薄くされており、
前記セル部の厚さを、tcとし、
前記裏面における前記セル部と前記周縁部との段差の大きさを、dtbとした場合において、
0% < dtb/tc ≦ 1.5%
である。
半導体装置を含み、入力された電力を前記半導体装置で変換することで出力する主変換回路と、
前記半導体装置を駆動する駆動信号を前記半導体装置に出力する駆動回路と、
前記駆動回路を制御する制御信号を前記駆動回路に出力する制御回路と、
を備え、
前記半導体装置は、
表面および裏面を有する平面体形状を有し、前記平面体形状の平面視における中央領域に設けられたセル部と、前記平面体形状の前記平面視において前記セル部の周りに設けられた周縁部とを有する半導体チップと、
前記セル部における前記表面の上に設けられたセル表面電極部と、
前記周縁部における前記表面の上に設けられ、前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部と、
を備え、
前記セル部の前記裏面よりも前記周縁部の前記裏面が凹むように前記周縁部が前記セル部よりも薄くされており、
前記セル部の厚さを、tcとし、
前記裏面における前記セル部と前記周縁部との段差の大きさを、dtbとした場合において、
0% < dtb/tc ≦ 1.5%
である。
表面および裏面を有する半導体ウエハを準備する準備工程と、
前記半導体ウエハにおいて予め定められた部位であるセル部に、半導体能動素子を形成する素子形成工程と、
前記半導体能動素子を形成した後に前記セル部の前記表面の上にセル表面電極部を形成し、且つ前記半導体ウエハの前記表面における前記セル部の周りの周縁部に前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部を形成するとともに、前記セル部の厚さをtcとし且つ前記セル表面電極部の上面と前記周縁表面構造部の上面との高さの差をdtfとした場合において
0% < dtf/tc ≦ 1.5%
とするように前記セル表面電極部および前記周縁表面構造部を形成する表面構造形成工程と、
前記セル表面電極部および前記周縁表面構造部を形成した後に前記半導体ウエハの前記裏面を研削するウエハ薄型化を行うことで、前記セル表面電極部と前記周縁表面構造部とで生ずる前記表面の段差が前記周縁部の前記裏面に転写される裏面研削工程と、
前記ウエハ薄型化を行った後に、前記周縁部の外周に設けられたダイシングラインに沿って前記半導体ウエハをダイシングするダイシング工程と、
を備える。
電力変換装置などを構築するために半導体装置100をケース等の内部に実装した場合には、第一エミッタ電極8の上にワイヤおよびハンダが形成される。
0% < dtb/tc ≦ 1.5% ・・・(1)
0% < dtf/tc ≦ 1.5% ・・・(2)
1.5% ≦ dtp/td ・・・(3)
図9は、実施の形態2にかかる半導体装置120の構造を示す断面図である。半導体装置120は、第一エミッタ電極8に加えて第二エミッタ電極16を備えている点が、実施の形態1にかかる半導体装置100と相違している。これ以外の構成は、実施の形態1と同様である。第二エミッタ電極16は、第一エミッタ電極8に重ねられており、第一エミッタ電極8よりも熱抵抗の低い材料で形成されている。第二エミッタ電極16の材料は、Cuなどであってもよい。
図10は、実施の形態3にかかる半導体装置130の構造を示す断面図である。半導体装置130は、セル部21における層間絶縁膜7が層間絶縁膜17に置換されている点が、実施の形態1にかかる半導体装置100と相違している。これ以外の構成は、実施の形態1と同様である。セル表面電極部30は層間絶縁膜17を含んでおり、層間絶縁膜17にはコンタクト部6が設けられている。周縁表面構造部32は実施の形態1と同様に層間絶縁膜7および上層絶縁膜37を含んでおり、上層絶縁膜37を貫通するコンタクト部36が設けられている。
図11は、実施の形態4にかかる半導体装置140の構造を示す断面図である。図12は、実施の形態4にかかる半導体装置140の実装後の構造を示す断面図である。図12に示すように、半導体装置140の実装後には、周縁表面構造部32の上に封止材50が設けられる。封止材50は、フィラー52を含む絶縁材料からなる。半導体装置140では、第二フィールドプレート電極10の厚さt4が、フィラー52の大きさとの関係で工夫されている。これ以外の構成は、実施の形態1と同様である。
図15は、実施の形態5にかかる半導体装置150の構造を示す断面図である。半導体装置150は、第二フィールドプレート電極10が第二フィールドプレート電極10bに置換されている点が、実施の形態4にかかる半導体装置140と相違している。実施の形態4では、第一エミッタ電極8と第二フィールドプレート電極10とが同じ材料で形成されているのに対し、実施の形態5ではこれらが異なる材料で形成されている。上記以外の構成は、実施の形態4と同様である。
図16は、実施の形態6にかかる半導体装置160の構造を示す断面図である。半導体装置160は、第二フィールドプレート電極10が第二フィールドプレート電極10cに置換されている点が、実施の形態5にかかる半導体装置150と相違している。さらに、実施の形態6では、半導体チップ20が内周境界部24および温度センスダイオード9cを更に備えている点で、実施の形態5にかかる半導体装置150と相違している。上記以外の構成は、実施の形態5と同様である。第二フィールドプレート電極10cは、ポリシリコン膜である。実施の形態6によれば、第二フィールドプレート電極10cの腐食を抑制することができる。
図17は、実施の形態7にかかる半導体装置の製造方法を示すフローチャートである。図17のフローチャートに従って、実施の形態1にかかる半導体装置100を製造することができる。図17のフローチャートでは、まず、半導体ウエハを準備する工程が実施される(ステップS100)。なお、実施の形態7における「半導体ウエハの表面」および「半導体ウエハの裏面」は、この半導体ウエハがダイシングされた後には、実施の形態1における「半導体チップ20の表面」および「半導体チップ20の裏面」にそれぞれ対応する。
図18は、実施の形態8にかかる半導体装置の製造方法を示すフローチャートである。図18のフローチャートでは、図17のステップS104に代えてステップS204に置換されている。この点以外は、実施の形態7と同様である。実施の形態8によれば、実施の形態6にかかる半導体装置160を製造することができる。以下、必要に応じて図16を参照する。
図19は、実施の形態9にかかる電力変換装置200を示すブロック図である。実施の形態9では、電力変換装置200が、上述した実施の形態1〜6にかかる半導体装置100〜160の少なくとも1つを備える。電力変換装置200の具体的構造は、特定の電力変換装置に限定されるものではない。以下、実施の形態9として、三相のインバータへの適用を行う場合を例示する。
2 トレンチゲート
3 ベース層
4 エミッタ層
5 拡散層
6 コンタクト部(セルコンタクト部)
7 層間絶縁膜
8 第一エミッタ電極
9、9b 第一フィールドプレート電極
9c 温度センスダイオード
9c1 第一部分
9c2 第二部分
10、10b、10c 第二フィールドプレート電極
11 保護絶縁膜
11a 端部
12 第一バッファ層
13 第二バッファ層
14 コレクタ層
15 コレクタ電極
16 第二エミッタ電極
17 層間絶縁膜(セル部層間絶縁膜)
20 半導体チップ
21 セル部
22 周縁部
22a ゲート配線部
22b 周縁凹部
23 ダイシングライン部
24 内周境界部
30 セル表面電極部
32 周縁表面構造部
34 ゲートパッド
36 コンタクト部(周縁コンタクト部)
37 上層絶縁膜
50 封止材
52 フィラー
100、110、120、130、140、150、160 半導体装置
190 電源
200 電力変換装置
201 主変換回路
201a スイッチング素子
202 駆動回路
203 制御回路
300 負荷
dtb 第一裏面段差
dtp 第二裏面段差
dtf 表面段差
dtdf 端部表面段差
Q 空乏層端
Claims (13)
- 表面および裏面を有する平面体形状を有し、前記平面体形状の平面視における中央領域に設けられたセル部と、前記平面体形状の前記平面視において前記セル部の周りに設けられた周縁部とを有する半導体チップと、
前記セル部における前記表面の上に設けられたセル表面電極部と、
前記周縁部における前記表面の上に設けられ、前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部と、
を備え、
前記セル部の前記裏面よりも前記周縁部の前記裏面が凹むように前記周縁部が前記セル部よりも薄くされており、
前記セル部の厚さを、tcとし、
前記裏面における前記セル部と前記周縁部との段差の大きさを、dtbとした場合において、
0% < dtb/tc ≦ 1.5%
である半導体装置。 - 前記周縁表面構造部は、前記半導体チップの前記周縁部における前記表面の上に重ねられた周縁電極と、前記周縁電極を覆う保護絶縁膜と、を含み、
前記保護絶縁膜が、前記セル表面電極部の縁部を覆う請求項1に記載の半導体装置。 - 前記半導体チップは、前記平面体形状の前記平面視において前記周縁部の外周に設けられたダイシングライン部をさらに備え、
前記周縁部の前記裏面よりも前記ダイシングライン部の前記裏面が出張るように、前記ダイシングライン部が前記周縁部よりも厚くされ、
前記ダイシングライン部の厚さを、tdとし、
前記裏面における前記ダイシングライン部と前記周縁部との段差の大きさを、dtpとした場合において、
1.5% ≦ dtp/td
である請求項1に記載の半導体装置。 - 前記セル表面電極部は、前記半導体チップの前記セル部における前記表面の上に設けられた層間絶縁膜と、前記層間絶縁膜を貫通するコンタクト部と、前記層間絶縁膜の上に設けられ前記コンタクト部に接続するセル電極と、を含み、
前記周縁表面構造部は、前記半導体チップの前記周縁部における前記表面の上に重ねられた周縁電極と、前記周縁電極を覆う保護絶縁膜と、を含み、
前記セル電極の上面が前記周縁電極の上面よりも高い請求項1に記載の半導体装置。 - 前記セル表面電極部は、前記セル部における前記表面の上に設けられた層間絶縁膜と、前記層間絶縁膜を貫通するコンタクト部と、前記層間絶縁膜の上に設けられ前記コンタクト部に接続する第一セル電極と、前記第一セル電極に重ねられ前記第一セル電極よりも熱抵抗の低い第二セル電極と、を含む請求項1に記載の半導体装置。
- 前記セル表面電極部は、前記セル部における前記表面の上に設けられたセル部層間絶縁膜と、前記セル部層間絶縁膜を貫通するセルコンタクト部と、前記セル部層間絶縁膜の上に設けられ前記セルコンタクト部に接続するセル電極と、を含み、
前記周縁表面構造部は、前記周縁部における前記表面の上に設けられた周縁部絶縁膜と、前記周縁部絶縁膜を貫通する周縁コンタクト部と、前記周縁部絶縁膜の上に重ねられ前記周縁コンタクト部と接続する周縁電極と、前記周縁電極を覆う保護絶縁膜と、を含み、
前記セル部層間絶縁膜が前記周縁部絶縁膜よりも厚くされた請求項1に記載の半導体装置。 - 前記周縁表面構造部は、前記周縁部における前記表面の上に重ねられ前記表面の面方向に互いに離間した複数の周縁電極と、前記複数の周縁電極を覆う保護絶縁膜と、を含み、
前記周縁表面構造部の上に設けられた封止材に含まれるフィラーの所定基準粒径よりも前記複数の周縁電極が薄くされ、
前記所定基準粒径は、前記フィラーの粒径単純平均値から前記フィラーの粒径の標準偏差に予め定めた所定係数を乗じた値を減算することにより予め定められた請求項1に記載の半導体装置。 - 前記周縁表面構造部は、前記周縁部における前記表面の上に重ねられた周縁電極を含み、
前記周縁電極は半絶縁性窒化膜である請求項1に記載の半導体装置。 - 前記周縁表面構造部は、前記周縁部における前記表面の上に設けられた周縁電極を含み、
前記周縁電極はポリシリコン膜である請求項1に記載の半導体装置。 - 前記半導体チップは、前記セル部と前記周縁部との間に挟まれた内周境界部を含み、
前記周縁表面構造部は、第一導電型の第一ポリシリコン膜で構成された第一周縁電極と、前記第一周縁電極に重ねられた層間絶縁膜と、前記層間絶縁膜に重ねられた第二周縁電極とを含み、
前記内周境界部の上に、前記第一ポリシリコン膜で形成され一部が第二導電型にドーピングされた温度センサダイオードが設けられた請求項1に記載の半導体装置。 - 半導体装置を含み、入力された電力を前記半導体装置で変換することで出力する主変換回路と、
前記半導体装置を駆動する駆動信号を前記半導体装置に出力する駆動回路と、
前記駆動回路を制御する制御信号を前記駆動回路に出力する制御回路と、
を備え、
前記半導体装置は、
表面および裏面を有する平面体形状を有し、前記平面体形状の平面視における中央領域に設けられたセル部と、前記平面体形状の前記平面視において前記セル部の周りに設けられた周縁部とを有する半導体チップと、
前記セル部における前記表面の上に設けられたセル表面電極部と、
前記周縁部における前記表面の上に設けられ、前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部と、
を備え、
前記セル部の前記裏面よりも前記周縁部の前記裏面が凹むように前記周縁部が前記セル部よりも薄くされており、
前記セル部の厚さを、tcとし、
前記裏面における前記セル部と前記周縁部との段差の大きさを、dtbとした場合において、
0% < dtb/tc ≦ 1.5%
である電力変換装置。 - 表面および裏面を有する半導体ウエハを準備する準備工程と、
前記半導体ウエハにおいて予め定められた部位であるセル部に、半導体能動素子を形成する素子形成工程と、
前記半導体能動素子を形成した後に前記セル部の前記表面の上にセル表面電極部を形成し、且つ前記半導体ウエハの前記表面における前記セル部の周りの周縁部に前記セル表面電極部の上面よりも高い上面を持つ周縁表面構造部を形成するとともに、前記セル部の厚さをtcとし且つ前記セル表面電極部の上面と前記周縁表面構造部の上面との高さの差をdtfとした場合において
0% < dtf/tc ≦ 1.5%
とするように前記セル表面電極部および前記周縁表面構造部を形成する表面構造形成工程と、
前記セル表面電極部および前記周縁表面構造部を形成した後に前記半導体ウエハの前記裏面を研削するウエハ薄型化を行うことで、前記セル表面電極部と前記周縁表面構造部とで生ずる前記表面の段差が前記周縁部の前記裏面に転写される裏面研削工程と、
前記ウエハ薄型化を行った後に、前記周縁部の外周に設けられたダイシングラインに沿って前記半導体ウエハをダイシングするダイシング工程と、
を備える半導体装置の製造方法。 - 前記表面構造形成工程は、
前記半導体ウエハの前記表面における前記セル部の一部に前記半導体能動素子を形成する工程と、
前記半導体ウエハの前記表面における前記セル部の他の部位に前記半導体能動素子の制御電極に接続された制御電極パッドを形成する工程と、
前記周縁部に第一フィールドプレート電極、前記第一フィールドプレート電極に重ねられた層間絶縁膜、および前記層間絶縁膜に重ねられた第二フィールドプレート電極を設けることで前記周縁表面構造部を形成する工程と、
を含み、
前記制御電極パッドおよび前記第二フィールドプレート電極は、同一の工程で積層されたポリシリコンで構成された請求項12に記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018033692A JP6904279B2 (ja) | 2018-02-27 | 2018-02-27 | 半導体装置およびその製造方法並びに電力変換装置 |
US16/115,598 US10355084B1 (en) | 2018-02-27 | 2018-08-29 | Semiconductor device, method of manufacturing the same and power conversion device |
DE102019201740.1A DE102019201740A1 (de) | 2018-02-27 | 2019-02-11 | Halbleitervorrichtung, Verfahren zum Herstellen derselben und Leistungsumwandlungsvorrichtung |
CN201910132162.3A CN110197826B (zh) | 2018-02-27 | 2019-02-22 | 半导体装置及其制造方法以及电力变换装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018033692A JP6904279B2 (ja) | 2018-02-27 | 2018-02-27 | 半導体装置およびその製造方法並びに電力変換装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2019149477A JP2019149477A (ja) | 2019-09-05 |
JP2019149477A5 JP2019149477A5 (ja) | 2020-08-27 |
JP6904279B2 true JP6904279B2 (ja) | 2021-07-14 |
Family
ID=67220308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018033692A Active JP6904279B2 (ja) | 2018-02-27 | 2018-02-27 | 半導体装置およびその製造方法並びに電力変換装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10355084B1 (ja) |
JP (1) | JP6904279B2 (ja) |
CN (1) | CN110197826B (ja) |
DE (1) | DE102019201740A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11430862B2 (en) * | 2019-04-12 | 2022-08-30 | Fuji Electric Co., Ltd. | Superjunction semiconductor device including parallel PN structures and method of manufacturing thereof |
JP7345354B2 (ja) * | 2019-10-25 | 2023-09-15 | 三菱電機株式会社 | 半導体装置 |
WO2021161681A1 (ja) * | 2020-02-14 | 2021-08-19 | 富士電機株式会社 | 半導体回路装置 |
JP2022144785A (ja) | 2021-03-19 | 2022-10-03 | 株式会社東芝 | 半導体装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4899290B2 (ja) * | 2003-04-10 | 2012-03-21 | 富士電機株式会社 | 逆阻止型半導体装置 |
JP2005101293A (ja) * | 2003-09-25 | 2005-04-14 | Renesas Technology Corp | 半導体装置 |
JP2009071044A (ja) | 2007-09-13 | 2009-04-02 | Toyota Motor Corp | 半導体装置とその製造方法 |
JP5266720B2 (ja) | 2007-10-30 | 2013-08-21 | 株式会社デンソー | 半導体装置 |
JP2010114248A (ja) * | 2008-11-06 | 2010-05-20 | Toyota Central R&D Labs Inc | 半導体装置 |
JP2010161240A (ja) | 2009-01-08 | 2010-07-22 | Toyota Motor Corp | 半導体装置 |
JP2012227419A (ja) * | 2011-04-21 | 2012-11-15 | Yoshitaka Sugawara | ワイドギャップ半導体装置 |
US9673163B2 (en) * | 2011-10-18 | 2017-06-06 | Rohm Co., Ltd. | Semiconductor device with flip chip structure and fabrication method of the semiconductor device |
CN103222057A (zh) * | 2011-11-17 | 2013-07-24 | 富士电机株式会社 | 半导体器件以及半导体器件的制造方法 |
JP6028325B2 (ja) * | 2011-12-01 | 2016-11-16 | 富士電機株式会社 | 半導体装置の製造方法 |
JP5637154B2 (ja) * | 2012-02-22 | 2014-12-10 | トヨタ自動車株式会社 | 半導体装置 |
WO2013140572A1 (ja) * | 2012-03-22 | 2013-09-26 | トヨタ自動車株式会社 | 半導体装置 |
WO2015004716A1 (ja) * | 2013-07-08 | 2015-01-15 | 三菱電機株式会社 | 半導体装置 |
WO2015040675A1 (ja) * | 2013-09-17 | 2015-03-26 | 株式会社日立製作所 | 半導体装置、電力変換装置、鉄道車両、および半導体装置の製造方法 |
JP6021032B2 (ja) * | 2014-05-28 | 2016-11-02 | パナソニックIpマネジメント株式会社 | 半導体素子およびその製造方法 |
JP6398405B2 (ja) * | 2014-07-15 | 2018-10-03 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
DE102014116625B4 (de) * | 2014-11-13 | 2020-06-18 | Infineon Technologies Austria Ag | Vertikale Halbleitervorrichtung und Verfahren für deren Herstellung |
JP6052481B2 (ja) * | 2014-12-25 | 2016-12-27 | 富士電機株式会社 | 半導体装置 |
JP2017045839A (ja) * | 2015-08-26 | 2017-03-02 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
CN108463885A (zh) * | 2015-12-11 | 2018-08-28 | 罗姆股份有限公司 | 半导体装置 |
CN109478561B (zh) * | 2016-07-20 | 2022-05-13 | 三菱电机株式会社 | 半导体装置以及其制造方法 |
JP6531731B2 (ja) * | 2016-07-21 | 2019-06-19 | 株式会社デンソー | 半導体装置 |
-
2018
- 2018-02-27 JP JP2018033692A patent/JP6904279B2/ja active Active
- 2018-08-29 US US16/115,598 patent/US10355084B1/en active Active
-
2019
- 2019-02-11 DE DE102019201740.1A patent/DE102019201740A1/de active Pending
- 2019-02-22 CN CN201910132162.3A patent/CN110197826B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN110197826A (zh) | 2019-09-03 |
JP2019149477A (ja) | 2019-09-05 |
US10355084B1 (en) | 2019-07-16 |
DE102019201740A1 (de) | 2019-08-29 |
CN110197826B (zh) | 2022-11-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6904279B2 (ja) | 半導体装置およびその製造方法並びに電力変換装置 | |
US20190057873A1 (en) | Semiconductor device, method of manufacturing same, and power converter | |
JPWO2018155566A1 (ja) | 炭化珪素半導体装置および電力変換装置 | |
US10872959B2 (en) | Semiconductor device and power converter | |
CN110098253B (zh) | 半导体装置、电力变换装置以及半导体装置的制造方法 | |
US11915988B2 (en) | Semiconductor device and power converter | |
US20210288140A1 (en) | Semiconductor device and power converter | |
US11257813B2 (en) | Semiconductor device | |
US10601337B2 (en) | Semiconductor device and power conversion device | |
US11183588B2 (en) | Semiconductor device and inverter | |
JP2023007491A (ja) | 半導体デバイスならびに関連するチップおよび作成方法 | |
US11239350B2 (en) | Semiconductor device, method of manufacturing semiconductor device, power conversion device | |
JP6302767B2 (ja) | 半導体装置及びそれを用いた電力変換装置 | |
CN116110959A (zh) | 半导体装置、电力变换装置及半导体装置的驱动方法 | |
TWI666867B (zh) | 半導體裝置及使用其之交流發電機 | |
JP4857814B2 (ja) | モータ駆動装置 | |
US11296191B2 (en) | Power module and power converter | |
El Khadiry et al. | Multi-switch Si-chip structures and on-substrate packaging techniques for improving the electrical performance of power modules | |
WO2014091545A1 (ja) | 半導体装置及びその製造方法 | |
JP7334678B2 (ja) | 半導体装置 | |
JP7262672B2 (ja) | 半導体装置および電力変換装置 | |
JP2005243936A (ja) | 半導体装置及びその製造方法 | |
JP2020004864A (ja) | 半導体装置 | |
JP2019145671A (ja) | 半導体装置およびその製造方法、電力変換装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200708 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200708 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210513 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210525 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210607 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6904279 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |