JP6052481B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6052481B2 JP6052481B2 JP2016557354A JP2016557354A JP6052481B2 JP 6052481 B2 JP6052481 B2 JP 6052481B2 JP 2016557354 A JP2016557354 A JP 2016557354A JP 2016557354 A JP2016557354 A JP 2016557354A JP 6052481 B2 JP6052481 B2 JP 6052481B2
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- 239000004065 semiconductor Substances 0.000 title claims description 337
- 239000010410 layer Substances 0.000 claims description 180
- 239000000758 substrate Substances 0.000 claims description 75
- 239000012535 impurity Substances 0.000 claims description 53
- 230000015556 catabolic process Effects 0.000 claims description 38
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 239000002344 surface layer Substances 0.000 claims description 14
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 50
- 229910010271 silicon carbide Inorganic materials 0.000 description 48
- 230000005684 electric field Effects 0.000 description 26
- 230000000052 comparative effect Effects 0.000 description 20
- 238000005468 ion implantation Methods 0.000 description 20
- 239000011229 interlayer Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
- 238000000206 photolithography Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000002040 relaxant effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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- 239000011574 phosphorus Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Description
実施の形態1にかかる半導体装置の構造について、炭化珪素(SiC)半導体を用いたプレーナゲート構造の縦型MOSFETを例に説明する。図1は、実施の形態1にかかる半導体装置の構造を示す断面図である。図1に示す実施の形態1にかかる半導体装置は、n+型ドレイン層となるn+型炭化珪素基板1のおもて面上にn型ドリフト層(第1半導体層)2となるn型炭化珪素エピタキシャル層およびp型ベース層(第2半導体層)4となるp型炭化珪素エピタキシャル層を順に堆積してなる炭化珪素半導体基体(半導体チップ)を用いて製造(作製)される。炭化珪素半導体基体には、中央部付近に活性領域101が設けられ、活性領域101の周囲を囲む外周部に終端構造部102が設けられている。活性領域101は、オン状態のときに主電流が流れる領域である。終端構造部102は、n型ドリフト層2の基体おもて面側の電界を緩和し耐圧を保持する領域である。
次に、実施の形態2にかかる半導体装置の構造について説明する。図8は、実施の形態2にかかる半導体装置の構造を示す断面図である。実施の形態2にかかる半導体装置が実施の形態1にかかる半導体装置と異なる点は、ダブルゾーンJTE構造を構成する2つのp型領域(p-型領域25aおよびp--型領域5b)のうちの内側のp-型領域25aを、基体おもて面に沿って平坦部104から活性領域101にまで延在させ、p型ベース層4の外周部に重なるように設けている点である。
次に、実施の形態3にかかる半導体装置の構造について説明する。図9は、実施の形態3にかかる半導体装置の構造を示す断面図である。実施の形態3にかかる半導体装置が実施の形態1にかかる半導体装置と異なる点は、最も外側のp+型コンタクト領域(第5半導体領域)27を、基体おもて面に沿って活性領域101から平坦部104にまで延在させ、ダブルゾーンJTE構造を構成する2つのp型領域のうちの内側のp-型領域5aの内周部に重なるように設けている点である。
次に、実施例にかかる半導体装置の耐圧について検証した。図10は、比較例1の半導体装置の構造を示す断面図である。図11は、ダブルゾーンJTE構造を構成する内側のp-型領域の不純物濃度と耐圧との関係を示す特性図である。まず、実施の形態2にかかる半導体装置の製造方法にしたがい、例示した上記諸条件で、ダブルゾーンJTE構造を構成する内側のp-型領域25aをp型ベース層4の一部にまで重なるように設けたMOSFET(図8参照)を作製した(以下、実施例とする)。比較として、ダブルゾーンJTE構造を構成する内側のp-型領域35aによって、最も外側のp+型ベース領域3の、平坦部104に延在する部分の下側の一部を覆うMOSFET(図10参照)を作製した(以下、比較例1とする)。
2 n型ドリフト層
3 p+型ベース領域
4 p型ベース層
5a,25a p-型領域
5b p--型領域
6 n+型ソース領域
7,27 p+型コンタクト領域
8 n型ウェル領域
9 ゲート絶縁膜
10 ゲート電極
11 層間絶縁膜
12 ソース電極
13 おもて面電極パッド
14 保護膜
15 裏面電極
16 裏面電極パッド
101 活性領域
102 終端構造部
103 段差部
104 平坦部
Claims (10)
- 電流が流れる活性領域と、前記活性領域の外側に配置され、耐圧構造が形成された終端構造部と、を有する半導体装置であって、
第1導電型の半導体基板のおもて面に設けられた、前記半導体基板よりも不純物濃度の低い第1導電型の第1半導体層と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面層に選択的に設けられた第2導電型の第1半導体領域と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面に、前記第1半導体領域を覆うように設けられた、前記第1半導体領域よりも不純物濃度の低い第2導電型の第2半導体層と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面層の、前記第1半導体領域よりも外側に選択的に設けられ前記耐圧構造を構成する、前記第1半導体領域よりも不純物濃度の低い第2導電型の第2半導体領域と、
を備え、
前記終端構造部には、
前記第2半導体層と前記第1半導体層との間の段差部と、
前記段差部よりも外側に露出された前記第1半導体層の表面からなる平坦部と、が設けられており、
最も外側の前記第1半導体領域は、前記活性領域から前記平坦部まで延在し、
前記第2半導体領域は、前記平坦部に設けられ、前記第1半導体領域の、前記平坦部に延在する部分の前記半導体基板側全体を覆うことを特徴とする半導体装置。 - 前記第2半導体領域は、前記第1半導体領域の、前記平坦部に延在する部分と前記段差部に重なるように設けられていることを特徴とする請求項1に記載の半導体装置。
- 前記第2半導体領域は、前記第2半導体層まで延在し、前記第2半導体層の外周部に重なるように設けられていることを特徴とする請求項2に記載の半導体装置。
- 前記第2半導体層の内部に選択的に設けられた第1導電型の第3半導体領域と、
前記第3半導体領域と離して、前記第2半導体層を深さ方向に貫通して前記第1半導体層に達する第1導電型の第4半導体領域と、
前記第2半導体層の、前記第3半導体領域と前記第4半導体領域とに挟まれた領域の表面上に、ゲート絶縁膜を介して設けられたゲート電極と、
前記第2半導体層および前記第3半導体領域に接する第1電極と、
前記半導体基板の裏面に設けられた第2電極と、
をさらに備えることを特徴とする請求項1に記載の半導体装置。 - 前記第2半導体層の内部に選択的に設けられた第1導電型の第3半導体領域と、
前記第3半導体領域、前記第2半導体層および前記第1半導体領域、または前記第1半導体領域の一部を貫通して前記第1半導体層に達するトレンチと、
前記トレンチの内部にゲート絶縁膜を介して設けられたゲート電極と、
前記第2半導体層および前記第3半導体領域に接する第1電極と、
前記半導体基板の裏面に設けられた第2電極と、
をさらに備えることを特徴とする請求項1に記載の半導体装置。 - 前記第2半導体層の内部に選択的に設けられた第2導電型の第5半導体領域をさらに備え、
最も外側の前記第5半導体領域は、前記第2半導体領域まで延在し、前記第2半導体領域に接することを特徴とする請求項4に記載の半導体装置。 - 最も外側の前記第5半導体領域は、前記第2半導体領域の内周部に重なるように設けられていることを特徴とする請求項6に記載の半導体装置。
- 電流が流れる活性領域と、前記活性領域の外側に配置され、耐圧構造が形成された終端構造部と、を有する半導体装置であって、
第1導電型の半導体基板のおもて面に設けられた、前記半導体基板よりも不純物濃度の低い第1導電型の第1半導体層と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面層に選択的に設けられた第2導電型の第1半導体領域と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面に、前記第1半導体領域を覆うように設けられた、前記第1半導体領域よりも不純物濃度の低い第2導電型の第2半導体層と、
前記第1半導体層の、前記半導体基板側に対して反対側の表面層の、前記第1半導体領域よりも外側に選択的に設けられ前記耐圧構造を構成する、前記第1半導体領域よりも不純物濃度の低い第2導電型の第2半導体領域と、
前記第2半導体層の内部に選択的に設けられた第1導電型の第3半導体領域と、
前記第2半導体層の内部に選択的に設けられた第2導電型の第5半導体領域と、
前記第2半導体層の、前記第3半導体領域と前記第1半導体層との間の領域に接して設けられたゲート絶縁膜と、
前記ゲート絶縁膜を挟んで前記第2半導体層の反対側に設けられたゲート電極と、
前記第2半導体層および前記第3半導体領域に接する第1電極と、
前記半導体基板の裏面に設けられた第2電極と、
を備え、
前記終端構造部には、
前記第2半導体層と前記第1半導体層との間の段差部と、
前記段差部よりも外側に露出された前記第1半導体層の表面からなる平坦部と、が設けられており、
最も外側の前記第1半導体領域は、前記活性領域から前記平坦部まで延在し、
最も外側の前記第5半導体領域は、前記平坦部まで延在し、前記第1半導体領域の、前記平坦部に延在する部分の前記半導体基板側全体を覆うことを特徴とする半導体装置。 - 前記第2半導体領域の、前記半導体基板側に対して反対側の表面は、前記第2半導体層の、前記半導体基板側に対して反対側の表面よりも前記半導体基板側に位置することを特徴とする請求項1に記載の半導体装置。
- 前記第2半導体領域と前記第1半導体層との界面は、前記第1半導体領域と前記第1半導体層との界面よりも前記半導体基板側に位置することを特徴とする請求項1〜9のいずれか一つに記載の半導体装置。
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