JP6455335B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6455335B2 JP6455335B2 JP2015125832A JP2015125832A JP6455335B2 JP 6455335 B2 JP6455335 B2 JP 6455335B2 JP 2015125832 A JP2015125832 A JP 2015125832A JP 2015125832 A JP2015125832 A JP 2015125832A JP 6455335 B2 JP6455335 B2 JP 6455335B2
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- 239000004065 semiconductor Substances 0.000 title claims description 197
- 239000000463 material Substances 0.000 claims description 37
- 229910000679 solder Inorganic materials 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 18
- 230000004888 barrier function Effects 0.000 claims description 14
- 229910016570 AlCu Inorganic materials 0.000 claims description 9
- 229910001362 Ta alloys Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 29
- 238000012986 modification Methods 0.000 description 28
- 230000004048 modification Effects 0.000 description 28
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 11
- 230000035882 stress Effects 0.000 description 8
- 230000035939 shock Effects 0.000 description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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Description
図1は、本発明の実施の形態1にかかるパワー半導体モジュール10を示す模式的な平面図である。図1は、モールド樹脂40を透視してパワー半導体モジュール10の内部構造を図示したものである。図2は、パワー半導体モジュール10を示す模式的な断面図である。図2は、図1のA−A線に沿うパワー半導体モジュール10の断面図である。
実施の形態2にかかるパワー半導体モジュールは、半導体装置100、150を半導体装置200、250にそれぞれ置換した点を除き、実施の形態1にかかるパワー半導体モジュール10と同じ形状および構造を備えている。したがって、以下の説明では実施の形態1と同一または相当する構成については同一の符号を付して説明を行うとともに、実施の形態1との相違点を中心に説明し、共通事項は説明を簡略化ないしは省略する。
Claims (7)
- 半導体層と、
前記半導体層の表面に積層され、AlCu又はAlSiCuで形成された第1電極層と、
前記第1電極層に積層され、Cuで形成された第2電極層と、
を備え、
前記半導体層の表面において平面視で前記第1電極層を囲うガードリングが設けられ、
前記平面視で、前記第1電極層が前記第2電極層の周縁よりも外側まで設けられた半導体装置。 - 前記第1電極層の材料は、Cuの比率が1%より高いAlCuである請求項1に記載の半導体装置。
- 前記第1電極層の材料が、Siの比率が1%より高いAlSiCuである請求項1に記載の半導体装置。
- 前記第1電極層と前記第2電極層との間に、前記第2電極層よりも機械的強度が高い材料からなるバリアメタル層をさらに備える請求項1〜3のいずれか1項に記載の半導体装置。
- 前記バリアメタル層の材料は、Ta又はTa合金である請求項4に記載の半導体装置。
- 前記第2電極層に積層された半田層と、
前記半田層により前記第2電極層に半田付けされたリードフレームと、
を備える請求項1〜5のいずれか1項に記載の半導体装置。 - 前記半導体層の材料がワイドバンドギャップ半導体である請求項1〜6のいずれか1項に記載の半導体装置。
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