JP6075185B2 - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 99
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 97
- 239000004065 semiconductor Substances 0.000 title claims description 55
- 238000000034 method Methods 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 229910052751 metal Inorganic materials 0.000 claims description 42
- 239000002184 metal Substances 0.000 claims description 42
- 229910052710 silicon Inorganic materials 0.000 claims description 40
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 39
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 34
- 239000010703 silicon Substances 0.000 claims description 34
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 27
- 229910045601 alloy Inorganic materials 0.000 claims description 19
- 239000000956 alloy Substances 0.000 claims description 19
- 238000000137 annealing Methods 0.000 claims description 5
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 228
- 239000010936 titanium Chemical group 0.000 description 43
- 229910052719 titanium Inorganic materials 0.000 description 28
- 229910052782 aluminium Inorganic materials 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 239000012535 impurity Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 15
- 239000013078 crystal Substances 0.000 description 11
- 235000012239 silicon dioxide Nutrition 0.000 description 11
- 239000000377 silicon dioxide Substances 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910008484 TiSi Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910010038 TiAl Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- CYKMNKXPYXUVPR-UHFFFAOYSA-N [C].[Ti] Chemical compound [C].[Ti] CYKMNKXPYXUVPR-UHFFFAOYSA-N 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 229910001339 C alloy Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910018125 Al-Si Inorganic materials 0.000 description 2
- 229910018520 Al—Si Inorganic materials 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
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Description
(1)実施の形態に係る炭化珪素半導体装置1の製造方法は以下の工程を有している。主面10aを有し、かつp型領域18と、p型領域18と接するn型領域14とを含む炭化珪素層10が準備される。主面10aにおいてp型領域18およびn型領域14に接する金属層16が形成される。金属層16を形成する工程の後、p型領域18と、n型領域14と、金属層16とがアニールされる。金属層16を形成する工程は、主面10aにおいてp型領域18およびn型領域14に接する第1の領域16aを形成する工程と、第1の領域16aの主面10aと接する面と16a4は反対の面16a5に接して配置された第2の領域16bを形成する工程とを含む。第1の領域16aは、アルミニウム元素およびシリコン元素を有する。第2の領域16bは、チタン元素を有する。
まず本発明の一実施の形態に係る炭化珪素半導体装置としてのMOSFET(Metal Oxide Semiconductor Field Effect Transistor)の構成について説明する。
まず、炭化珪素基板準備工程(S10:図2)が実施される。具体的には、まず炭化珪素からなる単結晶基板11の一方の主面上に、エピタキシャル成長法によってエピタキシャル層12が形成される。エピタキシャル層12の形成は、たとえば原料ガスとしてSiH4(シラン)とC3H8(プロパン)との混合ガスを採用して実施することができる。エピタキシャル層12に、たとえばN(窒素)などの不純物が導入される。これにより、単結晶基板11に含まれる不純物よりも低い濃度の不純物を含むエピタキシャル層12が単結晶基板11に接して形成される。以上のように、第1の主面10aと、第1の主面10aと反対側の第2の主面10bとを有する炭化珪素層10が準備される。
本実施の形態に係るMOSFET1の製造方法によれば、アルミニウム元素およびシリコン元素を有する第1の領域16aの上にチタン元素を含む第2の領域16bが配置された金属層16が形成された後、金属層16がアニールされる。それゆえ、アルミニウムがチタンによりカバーされた状態で金属層16がアニールされるので、アルミニウムが蒸発して金属層16から離脱することを防止することができる。結果として、炭化珪素層10のp+領域18とn+ソース領域14との双方に対して低い接触抵抗を実現可能なソースコンタクト電極16を有するMOSFET1を製造することができる。
Claims (9)
- 主面を有し、かつp型領域と、前記p型領域と接するn型領域とを含む炭化珪素層を準備する工程と、
前記主面において前記p型領域および前記n型領域に接する金属層を形成する工程と、
前記金属層を形成する工程の後、前記p型領域と、前記n型領域と、前記金属層とをアニールする工程とを備え、
前記金属層を形成する工程は、
前記主面において前記p型領域および前記n型領域に接する第1の領域を形成する工程と、
前記第1の領域の前記主面と接する面とは反対の面に接して配置された第2の領域を形成する工程とを含み、
前記第1の領域は、アルミニウム元素およびシリコン元素を有し、
前記第2の領域は、チタン元素およびシリコン元素を有する、炭化珪素半導体装置の製造方法。 - 前記第1の領域は、チタン元素をさらに含む、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記第1の領域を形成する工程は、
前記p型領域および前記n型領域と接し、かつチタン元素を含む第1の層を形成する工程と、
前記第1の層と接し、かつアルミニウム元素を含む第2の層を形成する工程と、
前記第2の層と接し、かつシリコン元素を含む第3の層を形成する工程とを含む、請求項2に記載の炭化珪素半導体装置の製造方法。 - 前記第1の層の厚みは、140オングストローム以上340オングストローム以下である、請求項3に記載の炭化珪素半導体装置の製造方法。
- 前記第2の層の厚みは、190オングストローム以上390オングストローム以下である、請求項3または4に記載の炭化珪素半導体装置の製造方法。
- 前記第3の層の厚みは、230オングストローム以上430オングストローム以下である、請求項3〜5のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記第2の領域を形成する工程は、前記第1の領域に接し、かつチタン元素を含む第4の層を形成する工程と、前記第4の層に接し、かつシリコン元素を含む第5の層を形成する工程とを含む、請求項1〜6のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記第2の領域を形成する工程は、チタンシリサイド合金を含む層を形成する工程を含む、請求項1〜6のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記第2の領域の厚みは、200オングストローム以上300オングストローム以下である、請求項1〜8のいずれか1項に記載の炭化珪素半導体装置の製造方法。
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JP2013093687A JP6075185B2 (ja) | 2013-04-26 | 2013-04-26 | 炭化珪素半導体装置の製造方法 |
US14/779,900 US20160056040A1 (en) | 2013-04-26 | 2014-03-04 | Method for manufacturing silicon carbide semiconductor device |
PCT/JP2014/055389 WO2014174903A1 (ja) | 2013-04-26 | 2014-03-04 | 炭化珪素半導体装置の製造方法 |
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US9728608B2 (en) | 2015-03-24 | 2017-08-08 | Kabushiki Kaisha Toshiba | Semiconductor device, inverter circuit, and vehicle |
JP6455335B2 (ja) * | 2015-06-23 | 2019-01-23 | 三菱電機株式会社 | 半導体装置 |
GB2553849A (en) * | 2016-09-19 | 2018-03-21 | Anvil Semiconductors Ltd | Method of reducing device contact resistance |
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JP5309600B2 (ja) * | 2008-02-22 | 2013-10-09 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法および炭化珪素半導体装置 |
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