JP6268253B2 - Semiconductor device - Google Patents

Description

The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device.

Note that in this specification, a semiconductor device refers to all devices that can function by utilizing semiconductor characteristics, and an electro-optical device, a semiconductor circuit, and an electronic device are all semiconductor devices.

A technique for forming a transistor using a semiconductor thin film formed over a substrate having an insulating surface has attracted attention. The transistor is widely applied to electronic devices such as an integrated circuit (IC) and an image display device (display device). As a semiconductor thin film applicable to a transistor, a silicon-based semiconductor material is widely known, but an oxide semiconductor material has attracted attention as another material.

For example, a transistor using an amorphous oxide containing indium (In), gallium (Ga), and zinc (Zn) as an active layer of the transistor is disclosed (see Patent Document 1).

A transistor using an oxide semiconductor has higher on-characteristics (such as on-state current) than a transistor using amorphous silicon.

As for an oxide semiconductor used for such a transistor, “the oxide semiconductor is insensitive to impurities, and there is no problem even if the film contains a considerable amount of metal impurities. It is also stated that inexpensive soda-lime glass containing a large amount can be used (see Non-Patent Document 1).

JP 2006-165528 A

Kamiya, Nomura, Hosono, “Physical Properties of Amorphous Oxide Semiconductors and Current Status of Device Development”, Solid State Physics, September 2009, Vol. 44, pp. 621-633

However, in response to the conventional technical recognition that oxide semiconductors are insensitive to impurities, when the device structure and process of a transistor using an oxide semiconductor film are designed, the resistance of the source region and the drain region is determined. Increases, and the on-current decreases from the design value.

In view of such a problem, an object of one embodiment of the disclosed invention is to improve the performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor. For example, it is an object to suppress a reduction in on-state current of a transistor including an oxide semiconductor film and to improve operating characteristics of a semiconductor device including such a transistor.

The present inventors have found that the sheet resistance of an oxide semiconductor film increases when an impurity such as silicon is added to the oxide semiconductor film.

In order to miniaturize a transistor including an oxide semiconductor film, it is preferable to reduce the thickness of the oxide semiconductor film as much as possible (this can suppress, for example, a short channel effect).
Further, in order to miniaturize a transistor, a source region and a drain region are formed in an oxide semiconductor film in a self-aligned manner, and the structure of the transistor is a top-gate structure (also referred to as a staggered structure). In general.

In the top gate structure, a gate insulating film is formed over the oxide semiconductor film. A sputtering method is used as one method for forming a gate insulating film. When a gate insulating film is formed over the oxide semiconductor film by a sputtering method, an element which is repelled from the sputtering target may be taken into the oxide semiconductor film.

Normally, the channel region is formed in an oxide semiconductor film near the interface with the gate insulating film.
When the constituent element of the gate insulating film is taken into the oxide semiconductor film in the vicinity of the interface with the gate insulating film, the region functions as an oxide semiconductor film with high resistance having an impurity such as silicon. Then, it can be a factor of reducing the electrical characteristics of the transistor, such as a reduction in on-current.

In view of such a problem, according to one embodiment of the disclosed invention, impurities such as silicon which are incorporated in the vicinity of an interface of a gate insulating film of an oxide semiconductor film are suppressed.

That is, according to one embodiment of the present invention, an oxide semiconductor film, a gate insulating film including an oxide containing silicon over the oxide semiconductor film, a gate electrode overlapping with at least the oxide semiconductor film over the gate insulating film, The oxide semiconductor film which has a source electrode and a drain electrode electrically connected to the oxide semiconductor film and overlaps at least the gate electrode has a silicon concentration of 1 from the interface with the gate insulating film toward the oxide semiconductor film. A semiconductor device having a region distributed at a concentration of 1 atomic% or less.

Note that in the above structure, the region has a thickness of 5 nm or less from the interface with the gate insulating film, and the concentration of silicon contained outside the region is smaller than the concentration of silicon contained in the region. Is preferred.

In the above structure, the concentration of silicon contained in the region is preferably 0.83.
It is desirable that the atomic% or less, more preferably 0.1 atomic% or less.

In the above structure, the gate insulating film contains carbon, and the carbon concentration is 1 in the region.
. It is preferably 0 × 10 ²⁰ atoms / cm ³ or less.

In the above, the oxide semiconductor film may have crystallinity, and the oxide semiconductor film may have an amorphous structure.

According to one embodiment of the disclosed invention, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved.

Further, according to one embodiment of the disclosed invention, a reduction in on-state current of a transistor including an oxide semiconductor film can be suppressed, so that operating characteristics of a semiconductor device including the transistor can be improved.

9A and 9B are a plan view and a cross-sectional view illustrating one embodiment of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9A and 9B are a plan view and a cross-sectional view illustrating one embodiment of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9A and 9B are a plan view and a cross-sectional view illustrating one embodiment of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9A and 9B are a plan view and a cross-sectional view illustrating one embodiment of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. 9A and 9B are a plan view and a cross-sectional view illustrating one embodiment of a semiconductor device. 9 is a cross-sectional view illustrating an example of a manufacturing process of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 10 illustrates an example of a structure of a semiconductor device. FIG. 9 illustrates an electronic device. The graph which shows the measurement result which concerns on one Example of this invention. The figure which shows the calculation result which concerns on one Example of this invention. The figure which shows the calculation result which concerns on one Example of this invention. The figure which shows the calculation result which concerns on one Example of this invention.

Hereinafter, embodiments of the invention disclosed in this specification will be described in detail with reference to the drawings.
However, the present invention is not limited to the following description, and it is easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below.

In the embodiments described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated.

Note that the position, size, range, and the like of each component illustrated in the drawings and the like may not represent the actual position, size, range, or the like for easy understanding. Therefore, the disclosed invention is not necessarily limited to the position, size, range, or the like disclosed in the drawings and the like.

In addition, ordinal numbers such as “first”, “second”, and “third” in this specification and the like are added to avoid confusion between components, and are not limited numerically. To do.

Further, in this specification and the like, the terms “upper” and “lower” do not limit that the positional relationship between the constituent elements is “directly above” or “directly below”. For example, the expression “a gate electrode over a gate insulating layer” does not exclude the case where another component is included between the gate insulating layer and the gate electrode.

Further, in this specification and the like, the terms “electrode” and “wiring” do not functionally limit these components. For example, an “electrode” may be used as part of a “wiring”
The reverse is also true. Furthermore, the terms “electrode” and “wiring” include a case where a plurality of “electrodes” and “wirings” are integrally formed.

In addition, the functions of “source” and “drain” may be switched when transistors having different polarities are employed or when the direction of current changes in circuit operation. Therefore, in this specification and the like, the terms “source” and “drain” can be used interchangeably.

In addition, in this specification and the like, “electrically connected” includes a case of being connected via “thing having some electric action”. Here, the “thing having some electric action” is not particularly limited as long as it can exchange electric signals between connection targets.
For example, “thing having some electric action” includes electrodes, wiring, switching elements such as transistors, resistance elements, inductors, capacitors, and other elements having various functions.

(Embodiment 1)
In this embodiment, one embodiment of a semiconductor device and a method for manufacturing the semiconductor device will be described with reference to FIGS.

<Configuration example of semiconductor device>
1A and 1B illustrate an example of a plan view and a cross-sectional view of a top-gate transistor as an example of a semiconductor device. FIG. 1A is a plan view, and FIG.
It is sectional drawing of the dashed-dotted line AB cross section in (A). Note that in FIG. 1A, some components of the transistor 150 (e.g., the substrate 100) are omitted to avoid complexity.

A transistor 150 illustrated in FIGS. 1A and 1B includes an insulating film 10 over a substrate 100.
2, the oxide semiconductor film 106, the gate insulating film 108, at least the gate electrode 110 overlapping with the oxide semiconductor film, and the source electrode 114 electrically connected to the oxide semiconductor film 106.
a and a drain electrode 114b.

The oxide semiconductor film 106 is in a single crystal state, a polycrystalline (also referred to as polycrystal) state, an amorphous state, or the like. Note that the thickness of the oxide semiconductor film 106 is greater than 5 nm and less than or equal to 200 nm, preferably greater than or equal to 10 nm and less than or equal to 30 nm.

Preferably, the oxide semiconductor film is a CAAC-OS (C Axis Aligned Cr).
(ystalline Oxide Semiconductor) film.

The CAAC-OS film is not completely single crystal nor completely amorphous. The CAAC-OS film is an oxide semiconductor film with a crystal-amorphous mixed phase structure where crystal parts and amorphous parts are included in an amorphous phase. Note that the crystal part is often large enough to fit in a cube whose one side is less than 100 nm. In addition, a transmission electron microscope (TEM: Transmission Electron)
n Microscope), the boundary between the amorphous part and the crystal part included in the CAAC-OS film is not clear. Further, a grain boundary (also referred to as a grain boundary) cannot be confirmed in the CAAC-OS film by TEM. Therefore, in the CAAC-OS film, reduction in electron mobility due to grain boundaries is suppressed.

In the crystal part included in the CAAC-OS film, the c-axis is aligned in a direction parallel to the normal vector of the formation surface of the CAAC-OS film or the normal vector of the surface, and triangular when viewed from the direction perpendicular to the ab plane. It has a shape or hexagonal atomic arrangement, and metal atoms are arranged in layers or metal atoms and oxygen atoms are arranged in layers as viewed from the direction perpendicular to the c-axis. Note that the directions of the a-axis and the b-axis may be different between different crystal parts. In the present specification, when simply described as vertical, 8
The range of 5 ° to 95 ° is also included. In addition, when simply described as parallel, −5
A range of not less than 5 ° and not more than 5 ° is also included.

Note that the distribution of crystal parts in the CAAC-OS film is not necessarily uniform. For example, CAA
In the formation process of the C-OS film, when crystal growth is performed from the surface side of the oxide semiconductor film, the ratio of crystal parts in the vicinity of the surface of the oxide semiconductor film may be higher in the vicinity of the surface. CA
When an impurity is added to the AC-OS film, the crystal part in a region to which the impurity is added becomes amorphous in some cases.

Since the c-axis of the crystal part included in the CAAC-OS film is aligned in a direction parallel to the normal vector of the formation surface of the CAAC-OS film or the normal vector of the surface, the shape of the CAAC-OS film (formation surface) Depending on the cross-sectional shape of the surface or the cross-sectional shape of the surface). Note that the c-axis direction of the crystal part is parallel to the normal vector of the surface where the CAAC-OS film is formed or the normal vector of the surface. The crystal part is formed by film formation or by performing crystallization treatment such as heat treatment after film formation.

In a transistor using a CAAC-OS film, change in electrical characteristics due to irradiation with visible light or ultraviolet light is small.

For example, the CAAC-OS film is formed by a sputtering method using a polycrystalline oxide semiconductor sputtering target. When ions collide with the sputtering target, the crystal region included in the sputtering target is cleaved from the ab plane, and a
It may peel off as flat or pellet-like sputtered particles having a plane parallel to the -b plane. In this case, the flat-plate-like sputtered particle reaches the substrate while maintaining a crystalline state, whereby a CAAC-OS film can be formed.

In order to form the CAAC-OS film, the following conditions are preferably applied.

By reducing the mixing of impurities during film formation, the crystal state can be prevented from being broken by impurities. For example, the concentration of impurities (such as hydrogen, water, carbon dioxide, and nitrogen) existing in the deposition chamber may be reduced. Further, the impurity concentration in the deposition gas may be reduced. Specifically, a deposition gas having a dew point of −80 ° C. or lower, preferably −100 ° C. or lower is used.

Further, by increasing the substrate heating temperature during film formation, migration of sputtered particles occurs after reaching the substrate. Specifically, the film is formed at a substrate heating temperature of 100 ° C. to 740 ° C., preferably 200 ° C. to 500 ° C. By increasing the substrate heating temperature during film formation, when flat sputtered particles reach the substrate, migration occurs on the substrate,
The flat surface of the sputtered particles adheres to the substrate.

In addition, it is preferable to reduce plasma damage during film formation by increasing the oxygen ratio in the film formation gas and optimizing electric power. The oxygen ratio in the deposition gas is 30% by volume or more, preferably 100% by volume.

As an example of the sputtering target, an In—Ga—Zn—O compound target is described below.

In-Ga that is polycrystalline by mixing InO _X powder, GaO _Y powder, and ZnO _Z powder in a predetermined number of moles, and after heat treatment at a temperature of 1000 ° C. or higher and 1500 ° C. or lower.
—Zn—O compound target. X, Y and Z are arbitrary positive numbers. Here, the predetermined mole number ratio is, for example, 2 for InO _X powder, GaO _Y powder, and ZnO _Z powder.
: 2: 1, 8: 4: 3, 3: 1: 1, 1: 1: 1, 4: 2: 3 or 3: 1: 2.
Note that the type of powder and the mol number ratio to be mixed may be changed as appropriate depending on the sputtering target to be manufactured.

As illustrated in FIG. 1B, the oxide semiconductor film 106 preferably has a taper angle of 20 ° to 50 ° at an end portion. The taper angle is a film having a taper shape (
For example, when the oxide semiconductor film 106) is observed from a direction perpendicular to a cross section thereof (a plane orthogonal to the surface of the substrate), an inclination angle formed between a side surface and a bottom surface of the film is shown. When the end portion of the oxide semiconductor film 106 is vertical, oxygen is easily released from the oxide semiconductor film 106, and oxygen vacancies are easily generated.
When the end portion of the oxide semiconductor film 106 has a taper angle, generation of oxygen vacancies can be suppressed and generation of leakage current of the transistor 150 can be reduced.

An oxide semiconductor used for the oxide semiconductor film 106 preferably contains at least indium (In) or zinc (Zn). In particular, In and Zn are preferably included. In addition, it is preferable that gallium (Ga) be included in addition to the stabilizer for reducing variation in electrical characteristics of the transistor including the oxide semiconductor. Moreover, it is preferable to have tin (Sn) as a stabilizer. Further, the stabilizer is selected from hafnium (Hf), zirconium (Zr), titanium (Ti), scandium (Sc), yttrium (Y), lanthanoid (eg, cerium (Ce), neodymium (Nd), gadolinium (Gd)). It is preferable that one or more of these are included.

For example, as an oxide semiconductor, indium oxide, tin oxide, zinc oxide, binary metal oxides such as In—Zn oxide, Sn—Zn oxide, Al—Zn oxide, Zn—Mg oxide Oxides, Sn—Mg oxides, In—Mg oxides, In—Ga oxides, In—Ga—Zn oxides (also referred to as IGZO) which are oxides of ternary metals, In— Al-Zn oxide, In-Sn-Zn oxide, Sn-Ga-Zn oxide, Al-Ga-Zn oxide, Sn-Al-Zn oxide, In-Hf-Zn oxide In-Zr-Zn-based oxide, In-Ti-Zn-based oxide, In-Sc-Zn-based oxide, In-Y-Zn-based oxide,
In-La-Zn-based oxide, In-Ce-Zn-based oxide, In-Pr-Zn-based oxide, I
n-Nd-Zn-based oxide, In-Sm-Zn-based oxide, In-Eu-Zn-based oxide, In
-Gd-Zn-based oxide, In-Tb-Zn-based oxide, In-Dy-Zn-based oxide, In-
Ho-Zn oxide, In-Er-Zn oxide, In-Tm-Zn oxide, In-Y
b—Zn-based oxide, In—Lu—Zn-based oxide, In—Sn— that is an oxide of a quaternary metal
Ga-Zn oxide, In-Hf-Ga-Zn oxide, In-Al-Ga-Zn oxide, In-Sn-Al-Zn oxide, In-Sn-Hf-Zn oxide , In-Hf-
An Al—Zn-based oxide can be used.

Here, the In—Ga—Zn-based oxide means an oxide containing In, Ga, and Zn as main components, and there is no limitation on the ratio of In, Ga, and Zn. Moreover, metal elements other than In, Ga, and Zn may be contained.

In addition, as an oxide semiconductor, InMO ₃ (ZnO) _m (m> 0 and m is not an integer)
A material represented by may be used. Note that M represents one metal element or a plurality of metal elements selected from Ga, Fe, Mn, and Co, or the above-described element as a stabilizer. As an oxide semiconductor, In ₂ SnO ₅ (ZnO) _n (n> 0 and n is an integer)
A material represented by may be used.

For example, In: Ga: Zn = 1: 1: 1, In: Ga: Zn = 3: 1: 2, In: Ga:
In—Ga—Zn with an atomic ratio of Zn = 1: 3: 2 or In: Ga: Zn = 2: 1: 3
A system oxide or an oxide in the vicinity of the composition may be used.

As the gate insulating film 108, an oxide insulating film having sufficient withstand voltage and insulating property is preferably used. In the case where the gate insulating film 108 has a single-layer structure, for example, an insulating film containing an oxide containing silicon such as a silicon oxide film may be used.

Alternatively, the gate insulating film 108 may have a stacked structure. In the case where the gate insulating film 108 has a stacked structure, gallium oxide, aluminum oxide, silicon nitride, silicon oxynitride, aluminum oxynitride, yttrium oxide, lanthanum oxide, silicon nitride oxide, or the like may be stacked over silicon oxide. Also, hafnium oxide, hafnium silicate (HfSi _x O
_y x> 0, y> 0)), nitrogen-added hafnium silicate (HfSiO _x N _y (x
> 0, y> 0)), high-k materials such as hafnium aluminate (HfAl _x O _y (x> 0, y> 0)) may be stacked on silicon oxide. In addition, gate leakage current can be reduced by using a high-k material.

By using an oxide insulating film as the gate insulating film 108, oxygen can be released by heating the oxide insulating film; therefore, oxygen is supplied to the oxide semiconductor film 106 and the oxide semiconductor film 106 Can compensate for oxygen deficiency. In particular, the gate insulating film 10
8 (in the bulk) preferably has an amount of oxygen at least exceeding the stoichiometric ratio,
For example, as the gate insulating film 108, a silicon oxide film represented by SiO _{2 + α} (where α> 0) is preferably used. By using such a silicon oxide film as the gate insulating film 108, oxygen can be supplied to the oxide semiconductor film 106, and the transistor characteristics of the transistor 150 including the oxide semiconductor film 106 can be improved. it can.

Note that the above-mentioned “release oxygen by heat treatment” means TDS (Thermal Des.
The amount of released oxygen molecules is 1.0 × 10 ¹⁸ molecules / cm ³ or more, preferably 3.0 × 10 ¹⁹ molecules / cm ³ or more, more preferably 1 0.0 × 10 ²⁰ molecules / cm ³ or more.

However, when a silicon oxide film is used as the gate insulating film 108, the gate insulating film 1
There is a possibility that silicon or the like in 08 is taken into the oxide semiconductor film 106 as an impurity. When silicon or the like is taken into the oxide semiconductor film 106 as an impurity, the resistance of the oxide semiconductor film 106 is increased.

Thus, in the semiconductor device described in this embodiment, the oxide semiconductor film 1 is formed from the gate insulating film 108.
Impurities such as silicon incorporated in the vicinity of the interface of 06 are suppressed. Specifically, in the oxide semiconductor film 106, a region in which the silicon concentration is distributed at a concentration of 1.1 atomic% or less from the interface with the gate insulating film 108 toward the oxide semiconductor film 106 is formed. Note that in this specification and the like, this region is referred to as a region 106a. The concentration of silicon contained in the region 106a is more preferably 0.83 atomic% or less, and further preferably 0.1 atomic% or less. The region 106a preferably exists in a range where the thickness from the interface with the gate insulating film 108 is 5 nm or less.

Note that a region other than the region 106a in the oxide semiconductor film 106 is referred to as a region 106b. Further, the concentration of silicon contained in the region 106b is lower than the concentration of silicon contained in the region 106a.

Further, in the case where the gate insulating film 108 contains an impurity such as carbon, there is a possibility that this is also taken into the oxide semiconductor film 106 as an impurity, like the above silicon. Therefore, region 1
The concentration of carbon contained in 06a is 1.0 × 10 ²⁰ atoms / cm ³ or less, more preferably 1.0 × 10 ¹⁹ atoms / cm ³ or less.

In this manner, by reducing impurities such as silicon taken into the region 106a of the oxide semiconductor film 106, a reduction in on-state current of the transistor 150 including the oxide semiconductor film 106 can be suppressed. Thus, the operating characteristics of the semiconductor device including the transistor 150 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved.

Note that details of other components will be described with reference to FIGS. 2A to 3D in a method for manufacturing the transistor 150 described later.

Note that an insulating film or a planarization insulating film may be further provided over the transistor 150.

Hereinafter, an example of a manufacturing process of the transistor 150 illustrated in FIGS. 1A to 1C will be described with reference to FIGS.

<Manufacturing Process of Transistor 150>
First, a substrate 100 having an insulating surface is prepared, and an insulating film 102 is formed over the substrate 100 (
Refer to FIG. ).

There is no particular limitation on a substrate that can be used as the substrate 100 having an insulating surface as long as it has heat resistance enough to withstand heat treatment performed later. For example, glass substrates such as barium borosilicate glass and alumino borosilicate glass, ceramic substrates,
A substrate such as a quartz substrate or a sapphire substrate can be used. Alternatively, a single crystal semiconductor substrate such as silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, or the like can be used as long as it has an insulating surface.

Further, a flexible substrate may be used as the substrate 100. In the case where a flexible substrate is used, a transistor including the oxide semiconductor film 106 may be directly formed over the flexible substrate, or a transistor including the oxide semiconductor film 106 may be formed over another manufacturing substrate and then transferred. You may peel and transfer to a flexible substrate. Note that in order to separate the transistor from the manufacturing substrate and transfer it to the flexible substrate, a separation layer may be provided between the manufacturing substrate and the transistor including the oxide semiconductor film 106.

The insulating film 102 plays a role of preventing diffusion of impurities (eg, hydrogen, moisture, and the like) from the substrate 100, and is selected from a silicon nitride film, a silicon oxide film, a silicon nitride oxide film, or a silicon oxynitride film. Alternatively, a single-layer structure or a stacked structure using a plurality of films can be used. When an oxide insulating film is used as the insulating film 102, part of oxygen in the oxide insulating film can be eliminated by heat treatment to be described later, the oxide semiconductor film 106
Oxygen can be supplied to the oxide semiconductor film 106 to fill oxygen vacancies. In particular, it is preferable that oxygen in an amount exceeding at least the stoichiometric ratio is present in the insulating film 102 (in the bulk). For example, the insulating film 102 may be silicon oxide represented by SiO _{2 + α} (where α> 0). It is preferable to use a membrane. By using such a silicon oxide film as the insulating film 102, oxygen can be supplied to the oxide semiconductor film 106 by heat treatment as described above, and the transistor characteristics of the transistor 150 including the oxide semiconductor film are favorable. Can be.

Note that the oxide semiconductor film 1 is not formed on the insulating film 102 or before the insulating film 102 is formed over the substrate 100.
Before forming 06, reverse sputtering is performed to generate plasma by introducing argon gas,
It is preferable to remove powder substances (also referred to as particles or dust) and organic substances attached to the surface of the substrate 100 or the surface of the insulating film 102. Reverse sputtering is a method of modifying the surface on the substrate side by applying a voltage to the substrate to form plasma in the vicinity of the substrate. Note that instead of argon, a gas such as nitrogen, helium, or oxygen may be used.

In order to prevent hydrogen or water from being contained in the oxide semiconductor film 106 as much as possible when the oxide semiconductor film 106 is formed over the insulating film 102 in a later step, the oxide semiconductor film 10
As a pretreatment for the film forming step 6, the substrate on which the insulating film 102 is formed is preheated in the preheating chamber of the sputtering apparatus, and impurities such as hydrogen and moisture adsorbed on the substrate 100 and the insulating film 102 are desorbed and exhausted. It is preferable to do. Note that the exhaust means provided in the preheating chamber is effectively a combination of a cryopump having a high moisture exhaust capability and a sputter ion pump (also simply referred to as an ion pump) having a high hydrogen exhaust capability. At this time, if impurities are removed while introducing an inert gas, it is possible to further increase the desorption rate of moisture or the like that is difficult to desorb only by exhausting.

Note that the insulating film 102 is not necessarily provided. For example, in the case of using the substrate 100 in which impurities such as hydrogen and moisture are sufficiently reduced, a structure without the insulating film 102 may be employed.

Next, the oxide semiconductor film 106 is formed over the insulating film 102 (see FIG. 2B). The thickness of the oxide semiconductor film 106 is 1 nm to 50 nm, preferably 1 nm to 30 nm.
Hereinafter, it is more preferably 1 nm to 10 nm, and further preferably 3 nm to 7 nm. By setting the thickness of the oxide semiconductor film 106 to the above thickness, the transistor 150
The short channel effect can be suppressed.

The oxide semiconductor film 106 is in a single crystal state, a polycrystalline (also referred to as polycrystal) state, an amorphous state, or the like as described above. Preferably, the oxide semiconductor film is a CAAC-OS (CA).
xis Aligned Crystalline Oxide Semiconductor
tor) film.

In this embodiment, the oxide semiconductor film 106 is formed by a sputtering method using an In—Ga—Zn-based oxide target. The oxide semiconductor film 106 can be formed by a sputtering method in a rare gas (typically argon) atmosphere, an oxygen atmosphere, or a mixed atmosphere of a rare gas and oxygen.

As a target for forming an In—Ga—Zn—O film as the oxide semiconductor film 106 by a sputtering method, for example, an oxide target with an atomic ratio of In: Ga: Zn = 1: 1: 1, an atom An oxide target with a number ratio of In: Ga: Zn = 3: 1: 2, an oxide target with an atomic ratio of In: Ga: Zn = 1: 3: 2, and an atomic ratio of In: Ga: Zn = 2
A 1: 3 oxide target can be used. Note that the target of the oxide semiconductor film 106 is not limited to the materials and compositions of these targets.

The relative density of the oxide target is 90% to 100%, preferably 95% to 9%.
It is 9.9% or less. By using an oxide target with high relative density, the formed oxide semiconductor film 106 can be a dense film.

As a sputtering gas used for forming the oxide semiconductor film 106, a high-purity gas from which impurities such as hydrogen, water, a hydroxyl group, or hydride are removed is preferably used.

When the oxide semiconductor film 106 contains a large amount of hydrogen, the oxide semiconductor film 106 is bonded to the oxide semiconductor, so that part of the hydrogen becomes a donor and an electron serving as a carrier is generated. As a result, the threshold voltage of the transistor shifts in the negative direction. Therefore, in the oxide semiconductor film 106, the hydrogen concentration is less than 5 × 10 ¹⁸ atoms / cm ³ , preferably 1 × 1.
0 ¹⁸ atoms / cm ³ or less, more preferably 5 × 10 ¹⁷ atoms / cm ³ or less,
More preferably, it is 1 × 10 ¹⁶ atoms / cm ³ or less. Note that the hydrogen concentration in the oxide semiconductor film is determined by secondary ion mass spectrometry (SIMS).
(y Ion Mass Spectrometry).

Note that in the case where the oxide semiconductor film 106 contains an alkali metal or an alkaline earth metal, carriers are generated by bonding with the oxide semiconductor, which causes an increase in off-state current of the transistor. Therefore, the concentration of the alkali metal or the alkaline earth metal in the oxide semiconductor film 106 is 1 × 10 ¹⁸ atoms / cm ³ or less, preferably 2 × 10 ¹⁶ atoms / cm ³ or less.

The oxide semiconductor film 106 is formed with the substrate 100 held in a deposition chamber kept under reduced pressure. At this time, film formation may be performed while the substrate 100 is heated. When the substrate 100 is heated, the substrate temperature is set to 100 ° C. or higher and below the strain point of the substrate 100. When the substrate 100 is formed with heating, the concentration of impurities such as hydrogen and moisture contained in the formed oxide semiconductor film 106 can be reduced (also expressed as dehydration treatment or dehydrogenation treatment). . Also,
It is preferable because damage due to sputtering is reduced. Then, a sputtering gas from which hydrogen and moisture are removed is introduced while moisture remaining in the deposition chamber is removed, and the oxide semiconductor film 106 is formed over the substrate 100 using the target. In order to remove residual moisture in the deposition chamber,
It is preferable to use an adsorption-type vacuum pump such as a cryopump, an ion pump, or a titanium sublimation pump. The exhaust means may be a turbo pump provided with a cold trap. The film formation chamber evacuated using a cryopump is a compound containing a hydrogen atom such as a hydrogen atom or water (H ₂ O) (more preferably a compound containing a carbon atom).
Thus, the concentration of impurities such as hydrogen and moisture contained in the oxide semiconductor film 106 formed in the deposition chamber can be reduced.

Further, after the oxide semiconductor film 106 is formed, heat treatment may be performed on the oxide semiconductor film 106. The temperature of the heat treatment is 300 ° C. or higher and 700 ° C. or lower, or lower than the strain point of the substrate. By performing the heat treatment, excess hydrogen (including water and a hydroxyl group) can be removed.

The heat treatment can be performed, for example, by introducing an object to be processed into an electric furnace using a resistance heating element and the like under a nitrogen atmosphere at 450 ° C. for one hour. During this time, the oxide semiconductor film 106 is not exposed to the air so that water and hydrogen are not mixed.

The heat treatment apparatus is not limited to an electric furnace, and an apparatus for heating an object to be processed by heat conduction or heat radiation from a medium such as a heated gas may be used. For example, GRTA (Gas Rap
id Thermal Anneal) device, LRTA (Lamp Rapid The
RTA (Rapid Thermal Anneal) equipment, etc.
) Device can be used. The LRTA apparatus is an apparatus that heats an object to be processed by radiation of light (electromagnetic waves) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp.
The GRTA apparatus is an apparatus that performs heat treatment using a high-temperature gas. As the gas, an inert gas that does not react with an object to be processed by heat treatment, such as nitrogen or a rare gas such as argon, is used.

For example, as the heat treatment, a GRTA process may be performed in which an object to be processed is put in a heated inert gas atmosphere, heated for several minutes, and then the object to be processed is taken out from the inert gas atmosphere.
When GRTA treatment is used, high-temperature heat treatment can be performed in a short time. In addition, application is possible even under temperature conditions exceeding the heat resistance temperature of the object to be processed. Note that the inert gas may be switched to a gas containing oxygen during the treatment.

Note that as the inert gas atmosphere, an atmosphere containing nitrogen or a rare gas (such as helium, neon, or argon) as a main component and not including water, hydrogen, or the like is preferably used. For example, the purity of nitrogen or a rare gas such as helium, neon, or argon introduced into the heat treatment apparatus is 6N (99.9999%) or more, preferably 7N (99.99999%) or more (
That is, the impurity concentration is 1 ppm or less, preferably 0.1 ppm or less.

Note that when the above dehydration or dehydrogenation treatment is performed, oxygen which is a main component material of the oxide semiconductor film may be desorbed and reduced at the same time. In the oxide semiconductor film, oxygen vacancies exist at locations where oxygen is released, and donor levels that cause fluctuations in electrical characteristics of the transistor are generated due to the oxygen vacancies. Therefore, when dehydration or dehydrogenation is performed,
Oxygen is preferably supplied into the oxide semiconductor film 106. By supplying oxygen into the oxide semiconductor film 106, oxygen vacancies in the film can be filled.

As a method for filling oxygen vacancies in the oxide semiconductor film 106, for example, the oxide semiconductor film 1
After dehydration treatment (dehydrogenation treatment) on 06, high purity oxygen gas, nitrous oxide gas, high purity nitrous oxide gas, or ultra dry air (CRDS (cavity ring down) (Laser spectroscopic method) Water content when measured using a dew point meter is 20 ppm or less (-55 ° C. in terms of dew point), preferably 1 ppm or less, more preferably 10 ppb or less)
Should be introduced. It is preferable that water, hydrogen, or the like be not contained in the oxygen gas or nitrous oxide gas. Alternatively, the purity of oxygen gas or nitrous oxide gas introduced into the heat treatment apparatus is 6N
Or more, preferably 7N or more (that is, the impurity concentration in oxygen gas or nitrous oxide gas is 1 pp.
m or less, preferably 0.1 ppm or less).

As a method for supplying oxygen into the oxide semiconductor film 106, oxygen (at least oxygen radicals, oxygen atoms, oxygen atoms) is added to the oxide semiconductor film 106 in addition to the method of heating in an atmosphere containing oxygen as described above. The oxide semiconductor film 10 is added.
6 may be supplied with oxygen. As a method for adding oxygen, an ion implantation method, an ion doping method, a plasma immersion ion implantation method, a plasma treatment, or the like is used.

As described above, the oxide semiconductor film 106 that has been formed is subjected to dehydration treatment (dehydrogenation treatment) to remove hydrogen or moisture from the oxide semiconductor so that the oxide semiconductor film 106 is highly purified so that impurities are not contained as much as possible. By supplying oxygen (which can also be expressed as peroxygenation), which is a main component material of the oxide semiconductor, which has been reduced at the same time by dehydration (dehydrogenation), to compensate for oxygen vacancies Thus, the oxide semiconductor film 106 can be i-type (intrinsic) or nearly i-type. By doing so, the Fermi level (Ef) of the oxide semiconductor film can be made to the same level as the intrinsic Fermi level (Ei). Therefore, when the oxide semiconductor film is used for a transistor, variation in threshold voltage Vth of the transistor due to oxygen vacancies and threshold voltage shift ΔVth can be reduced.

Therefore, dehydration treatment (dehydrogenation treatment) is performed before the step of supplying oxygen to the oxide semiconductor film 106.
It is preferable to carry out.

By the way, it is known that oxygen has isotopes such as ¹⁷ O and ¹⁸ O, and their abundance ratios in the natural world are about 0.037% and 0.204% of the whole oxygen atom, respectively. In other words, since the concentration of these isotopes in the oxide semiconductor film can be estimated by a method such as SIMS, the oxygen concentration in the oxide semiconductor film can be more accurately measured by measuring these concentrations. It may be possible to estimate. Therefore, by measuring these concentrations, the oxide semiconductor film can be used as a material for determining whether oxygen is intentionally added.

Note that although the structure in which dehydrogenation treatment, peroxidation treatment, and oxygen addition are performed before the oxide semiconductor film 106 is processed into an island shape is described above, one embodiment of the disclosed invention is limited to this. Not. The treatment may be performed after the oxide semiconductor film 106 is processed into an island shape.

Next, the oxide semiconductor film 106 is formed into an island-shaped oxide semiconductor film 10 by a photolithography process.
6 (see FIG. 2C). Further, a resist mask for forming the island-shaped oxide semiconductor film 106 may be formed by an inkjet method. When the resist mask is formed by an ink-jet method, a manufacturing cost can be reduced because a photomask is not used. Note that the etching of the oxide semiconductor film 106 may be dry etching or wet etching.
Both may be used.

Here, as illustrated in FIG. 2C, the oxide semiconductor film 106 preferably has a taper angle of 20 ° to 50 ° at an end portion. When the end portion of the oxide semiconductor film 106 is vertical, oxygen can easily escape from the oxide semiconductor film 106, but oxygen vacancies can easily occur.
With the taper angle at the end of the transistor, generation of oxygen vacancies can be suppressed and generation of leakage current of the transistor 150 can be reduced.

Next, the insulating film 107 for forming the gate insulating film 108 is formed over the oxide semiconductor film 106 (see FIG. 2D). Here, the film thickness of the insulating film 107 is, for example, 1 nm or more and 50
nm or less. As a method for forming the insulating film 107, for example, a sputtering method, an MBE method, a CVD method, a pulse laser deposition method, an ALD method, or the like can be used as appropriate.

As the insulating film 107, an oxide insulating film having sufficient withstand voltage and insulating property is preferably used. In the case where the insulating film 107 has a single-layer structure, for example, an insulating film containing an oxide containing silicon such as a silicon oxide film may be used.

The insulating film 107 may have a stacked structure. In the case where the insulating film 107 has a stacked structure, gallium oxide, aluminum oxide, silicon nitride, silicon oxynitride, aluminum oxynitride, yttrium oxide, lanthanum oxide, silicon nitride oxide, or the like may be stacked over silicon oxide. Also, hafnium oxide, hafnium silicate (HfSi _x O _y x> 0, y
> 0)), and hafnium silicate doped with nitrogen (HfSiO _x N _y (x> 0, y> 0
)), Hafnium aluminate (HfAl _x O _y (x> 0, y> 0))
The k material may be stacked on the silicon oxide. In addition, gate leakage current can be reduced by using a high-k material.

Note that by using an oxide insulating film as the insulating film 107, part of oxygen in the oxide insulating film is released by heat treatment to supply oxygen to the oxide semiconductor film 106, as in the insulating film 102. Oxygen vacancies in the oxide semiconductor film 106 can be filled. The description of the insulating film 102 may be referred to for details of the treatment, and there is no particular limitation on the timing of performing heat treatment on the insulating film 107 as long as the insulating film 107 is formed.

In particular, it is preferable that oxygen in an amount exceeding at least the stoichiometric ratio is present in the insulating film 107 (in the bulk). For example, the insulating film 107 includes silicon oxide represented by SiO _{2 + α} (where α> 0). It is preferable to use a membrane. Such a silicon oxide film is used as the insulating film 107.
As a result, oxygen can be supplied to the oxide semiconductor film 106, and the transistor characteristics of the transistor 150 including the oxide semiconductor film 106 can be improved.

As described above, in order to make the insulating film 107 an insulating film containing oxygen in an amount exceeding at least the stoichiometric ratio, it is preferable to form the insulating film 107 by a sputtering method.
In addition, when the sputtering method is used, a high-purity gas is used as described above, the film formation apparatus is baked and impurities are exhausted by an exhaust apparatus, and the substrate is preheated. By removing impurities such as hydrogen and moisture as much as possible, the concentration of hydrogen and moisture in the insulating film 107 can be kept low. From this point of view, the insulating film 107 is formed by sputtering. It can be said that it is preferable to use the method.

Note that before the oxide semiconductor film 106 is formed, reverse sputtering that generates plasma by introducing argon gas is performed, and a powdery substance (also referred to as particles or dust) attached to the surface of the gate insulating film 108 is used. Is preferably removed. Reverse sputtering means applying a voltage to the substrate,
In this method, plasma is formed in the vicinity of the substrate to modify the surface on the substrate side. Note that instead of argon, a gas such as nitrogen, helium, or oxygen may be used.

As described above, in the case where the insulating film 107 is formed using a sputtering apparatus, the insulating film 107
When such a constituent element such as silicon collides with the oxide semiconductor film 106, the element may be mixed into the oxide semiconductor film 106. The contamination phenomenon is caused by the insulating film 1
In the oxide semiconductor film 106 in the vicinity of the interface with 07, specifically, the above-described region 106a is particularly noticeable. In the transistor described in this embodiment and the like, the gate insulating film 108
Since a channel region is formed in the oxide semiconductor film 106 in the vicinity, an element included in the gate insulating film 108 is mixed as an impurity into the region, so that the on-state characteristics of the transistor (
For example, it can be a factor that reduces the on-current. In Example 1, a change in characteristics of the oxide semiconductor film 106 caused by the entry of impurities such as silicon into the oxide semiconductor film 106 will be described in detail.

Note that the phenomenon in which the constituent elements of the insulating film 107 are mixed into the oxide semiconductor film 106 as described above can occur in the oxide semiconductor film 106 in the vicinity of the interface with the insulating film 107. Therefore, if the insulating film is formed by weakening the moment of collision of the elements included in the insulating film with the oxide semiconductor film, the momentum of collision may be increased thereafter. For example, the film forming power of an apparatus for forming an insulating film is reduced to form an insulating film near the interface with the oxide semiconductor film 106, and then the insulating power is further increased to increase the film forming power. Thus, the insulating film 107 may be formed. In addition, an insulating film in the vicinity of the interface with the oxide semiconductor film 106 is formed by increasing the film forming pressure of the apparatus for forming the insulating film, and then further forming the insulating film by reducing the film forming pressure. Thus, the insulating film 107 may be formed. Further, an insulating film in the vicinity of the interface with the oxide semiconductor film 106 is formed by increasing the T-S distance of the apparatus for forming the insulating film, and then further insulating by reducing the T-S distance. The insulating film 107 may be formed by forming a film.

For example, when the insulating film 107 is formed using a sputtering apparatus, the specific value of the film formation power is 10 kW or less, preferably 1 kW or less, more preferably 500 W or less, and still more preferably 200 W or less. desirable. Note that the insulating film 1 decreases as the deposition power decreases.
The film forming rate of 07 is lowered. In addition, when the deposition power is very low, it is difficult to generate plasma in the sputtering apparatus, and the possibility that the deposition process cannot be performed normally increases. For this reason, it is desirable that the deposition power be 5% or more of the maximum power that can be applied by the sputtering apparatus to be used. As to how much the deposition power is reduced, in consideration of the performance of the sputtering apparatus, the thickness of the insulating film 107, and the like, the deposition can be performed normally, and the deposition time can be reduced. The practitioner only needs to select an optimal power value as long as it does not have a significant influence on the time.

In the case where the insulating film 107 is formed using a sputtering apparatus, the specific value of the film formation pressure is 0.4 Pa or more, preferably 1.0 Pa or more, more preferably 2.0 Pa or more, and further preferably It is desirable to set it as 5.0 Pa or more. Note that as the film forming pressure is increased, the film quality of the formed film tends to deteriorate (for example, the film quality becomes sparse). For this reason, it is desirable that the film forming pressure be 100 Pa or less. To what extent the film formation pressure is increased, the practitioner may select an optimal pressure value as appropriate in consideration of characteristics required for the insulating film 107 (for example, field effect mobility).

In addition, when the insulating film 107 is formed using a sputtering apparatus, the specific value of the T-S distance is 30 mm or more, preferably 50 mm or more, more preferably 100 mm or more, and further preferably 300 mm or more. It is desirable. Note that the deposition rate of the insulating film 107 decreases as the distance between T and S increases. For this reason, the distance between TS is 500 m.
m or less is desirable. The extent to which the T-S distance is increased is determined by the practitioner as appropriate as long as the film formation time does not have a significant effect on the manufacturing process (tact time) of the transistor 150. Should be selected.

Note that in order to weaken the momentum at which the elements included in the insulating film 107 collide with the oxide semiconductor film 106, any one of the deposition power, the deposition pressure, and the T-S distance is set as the above range. The insulating film 107 may be formed, or the insulating film 107 may be formed with a plurality of conditions within the above range.

Note that in the case where a magnetron sputtering apparatus in which a target and a deposition target substrate are installed in parallel is used as the sputtering apparatus (also simply referred to as a magnetron sputtering apparatus), the oxide semiconductor film 106 includes an insulating film 107. It can be said that the element constituting the insulating film 107 is very likely to be mixed into the oxide semiconductor film 106 because plasma, secondary electrons, and the like collide in addition to the element constituting the oxide. Therefore, as a sputtering apparatus for forming the insulating film 107, an opposed target sputtering apparatus (also referred to as a mirrortron sputtering apparatus or a Naturatron sputtering apparatus) may be used. The apparatus is installed in a state where two targets are opposed to each other, and the deposition target substrate is located in a place other than the space between the two targets.
It is installed in a state almost perpendicular to the target. Then, high-density plasma is generated between two opposing targets, and the surface of the target (a target used for forming the insulating film 107) is sputtered by the plasma, whereby the insulating film 107 is formed on the deposition target substrate. Is deposited. For this reason, the deposition target substrate is not directly exposed to plasma or secondary electrons (or very little).

In the case where the insulating film 107 is formed by a sputtering method in a rare gas atmosphere, helium may be used instead of argon. Since argon has a larger number of atoms than helium, when argon ions collide with the oxide semiconductor film 106 in the vicinity of the interface of the insulating film 107, the bonds of the oxide semiconductor film 106 are broken to form constituent elements of the insulating film 107. May be mixed into the oxide semiconductor film 106 from a bond splitting position. By using helium as the rare gas ion, the above-described bond splitting can be suppressed, so that the constituent elements of the insulating film 107 can be prevented from being mixed into the oxide semiconductor film 106. Further, the oxide semiconductor film 10
The insulating film 107 may be formed in the vicinity of the interface with 6 by forming the insulating film in a helium atmosphere and then forming the insulating film by switching the film formation chamber to an argon atmosphere.
Thereby, the deposition speed of the insulating film 107 can be improved.

Alternatively, the insulating film 107 may be formed by a method having a low impact on the oxide semiconductor film 106 such as an ALD (Atomic Layer Deposition) method, an evaporation method, or a coating method.

As described above, by forming the insulating film 107 while reducing the momentum at which the elements included in the insulating film 107 collide with the oxide semiconductor film 106, as described above, in the oxide semiconductor film 106,
The silicon concentration is 1.1 atomic% from the interface with the insulating film 107 toward the oxide semiconductor film 106.
A region 106a distributed at the following concentration and a region 106b in which the concentration of contained silicon is smaller than the region 106a are formed. Here, the region 106b refers to a region other than the region 106a in the oxide semiconductor film 106. The concentration of silicon contained in the region 106b is 0.
. More preferably, it is 1 atomic% or less.

In addition, by forming the oxide semiconductor film 106 in this manner, the entry of impurities such as carbon contained in the insulating film 107 into the oxide semiconductor film 106 is reduced, so that the region 106a is formed as described above. The carbon concentration contained in is 1.0 × 10 ²⁰ atoms / cm ³ or less, more preferably 1.0 × 10 ¹⁹ atoms / cm ³ or less.

In this manner, by reducing impurities such as silicon taken into the region 106a of the oxide semiconductor film 106, a reduction in on-state current of the transistor 150 including the oxide semiconductor film 106 can be suppressed. Thus, the operating characteristics of the semiconductor device including the transistor 150 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved.

Further, when the insulating film 107 is formed by reducing the momentum with which the elements included in the insulating film 107 collide with the oxide semiconductor film 106, the elements included in the oxide semiconductor film 106 are mixed into the insulating film 107. This can also be suppressed. Thus, the insulating film 107 can be prevented from being mixed with a highly conductive element such as a metal element included in the oxide semiconductor film 106.
7 can be prevented from decreasing in resistivity.

Next, a conductive film 109 for forming the gate electrode 110 (including a wiring formed using the same layer) is formed over the insulating film 107 (see FIG. 3A). As the conductive film 109,
For example, molybdenum, titanium, tantalum, tungsten, aluminum, copper, neodymium,
A metal material such as scandium or an alloy material containing these as a main component can be used. The conductive film used for the gate electrode may be formed using a conductive metal oxide. The conductive metal oxide may be abbreviated as indium oxide (In ₂ O ₃ ), tin oxide (SnO ₂ ), zinc oxide (ZnO), indium tin oxide (In ₂ O ₃ —SnO ₂ , ITO). ), Indium zinc oxide (In ₂ O ₃ —ZnO), or a metal oxide material containing silicon or silicon oxide can be used. The gate electrode can be formed using a single layer or stacked layers using the above materials. There is no particular limitation on the formation method, and various film formation methods such as an evaporation method, a CVD method, a sputtering method, and a spin coating method can be used.

Further, as one layer of the gate electrode 110 in contact with the gate insulating film, a metal oxide containing nitrogen, specifically, an In—Ga—Zn—O film containing nitrogen, an In—Sn—O film containing nitrogen, In—Ga—O film containing nitrogen, In—Zn—O film containing nitrogen, Sn—O film containing nitrogen,
An In—O film containing nitrogen or a metal nitride film (InN, SnN, or the like) can be used. These films have a work function of 5 eV (electron volt), preferably 5.5 eV (electron volt) or more, and when used as a gate electrode layer, the threshold voltage of the electrical characteristics of the transistor can be made positive. In other words, a so-called normally-off switching element can be realized.

Next, a resist mask is formed over the conductive film 109 by a photolithography process, and selective etching is performed to form the gate electrode 110 and the gate insulating film 108, and then the resist mask is removed (FIG. 3B). reference.). Further, a resist mask for forming the gate electrode 110 and the gate insulating film 108 may be formed by an inkjet method. When the resist mask is formed by an ink-jet method, a manufacturing cost can be reduced because a photomask is not used. Note that the etching of the gate electrode 110 and the gate insulating film 108 may be dry etching or wet etching, or both may be used.

Next, impurity ions 130 having a function of reducing the resistance value of the oxide semiconductor film 106 are added to the oxide semiconductor film 106 by an ion doping method or an ion implantation method. At this time, since the gate electrode 110 and the gate insulating film 108 function as a mask, the low-resistance region 106c is formed in the oxide semiconductor film 106 in a self-aligned manner (see FIG. 3C). In addition,
As the impurity ions 130, group 15 elements (typically phosphorus (P), arsenic (As), and antimony (Sb)), boron (B), aluminum (Al), nitrogen (N), argon (Ar) , Helium (He), neon (Ne), indium (In), fluorine (F), chlorine (Cl), titanium (Ti), and zinc (Zn) can be used. . Since the ion implantation uses a mass separator that extracts only necessary ions, only the impurity ions 130 can be selectively added to the object. Therefore, it is preferable because impurities (eg, hydrogen) are less mixed into the oxide semiconductor film 106 as compared with the case where the impurity is added by an ion doping method. However, the ion doping method is not excluded. Note that the low-resistance region 106c includes the oxide semiconductor film 106 (first region 106a
And the second region 106b) are formed by the implantation of the impurity ions 130.
However, the region 106 is not included in the low resistance region 106c as shown in FIG.
a and region 106b exist.

Next, a conductive film used for a source electrode and a drain electrode (including a wiring formed using the same layer) is formed over the oxide semiconductor film 106. As the conductive film used for the source electrode and the drain electrode, for example, a metal film containing an element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten, or a metal nitride film containing the above-described element as a component ( A titanium nitride film, a molybdenum nitride film, a tungsten nitride film, or the like can be used. Further, a refractory metal film such as titanium, molybdenum, or tungsten or a metal nitride film thereof (titanium nitride film, molybdenum nitride film, tungsten nitride film) on one or both of the lower side or upper side of a metal film such as aluminum or copper It is good also as a structure which laminated | stacked. Further, the conductive film used for the source electrode and the drain electrode may be formed using a conductive metal oxide. Examples of conductive metal oxides include indium oxide (In ₂ O ₃ ), tin oxide (SnO ₂ ), and zinc oxide (Z
nO), indium tin oxide (In ₂ O ₃ —SnO ₂ , abbreviated as ITO), and indium zinc oxide (In ₂ O ₃ —ZnO) can be used. The conductive film used for the source electrode and the drain electrode can be formed as a single layer or stacked layers using any of the above materials. There is no particular limitation on the formation method, and various film formation methods such as an evaporation method, a CVD method, a sputtering method, and a spin coating method can be used.

Then, a resist mask is formed over the conductive film by a photolithography process, selective etching is performed to form the source electrode 114a and the drain electrode 114b, and then the resist mask is removed, whereby the transistor 150 is formed ( (See FIG. 3D). Ultraviolet light, KrF laser light, or ArF laser light is preferably used for light exposure for forming the resist mask in the photolithography process. Here, the gap width between the lower end portion of the source electrode 114a and the lower end portion of the drain electrode 114b adjacent to each other on the oxide semiconductor film 106 is determined as follows.
The channel length L of the transistor is determined. Therefore, when exposure with a channel length L of less than 25 nm is performed, for example, ultra-ultraviolet (Extre) having a very short wavelength of several nm to several tens of nm.
It is preferable to perform exposure at the time of forming a resist mask in a photolithography process using me Ultraviolet. Exposure by extreme ultraviolet light has a high resolution and a large depth of focus. Therefore, the channel length L of a transistor to be formed later can be reduced, and the operation speed of the circuit can be increased.

Note that from the viewpoint of suppressing reduction in on-state current of the transistor 150, the oxide semiconductor film 10
6 between the end of the portion overlapping with the gate electrode 110 and the end of the oxide semiconductor film 106 in contact with the source electrode 114a closest to the gate electrode (FIG. 3D and FIG. 1).
X part of (A). In the present specification, this portion is referred to as “Loff width”. ) And an end portion of the oxide semiconductor film 106 overlapping with the gate electrode 110, and the oxide semiconductor film 1
06, the gap between the portion in contact with the drain electrode 114b and the end closest to the gate electrode (the Y portion in FIG. 3D and FIG. 1A). This portion is also referred to as “Loff width” in this specification. It is preferable that the above is reduced as much as possible. As a method for reducing the X portion and the Y portion in FIG. 3D, for example, the source electrode 114a and the drain electrode 114b may be formed using different photomasks. Accordingly, during the exposure, alignment can be performed so that only one of the source electrode 114a and the drain electrode 114b is as close as possible to the gate electrode 110, so that the Loff width can be reduced.

From the viewpoint of reducing the tact and cost of the transistor 150, it is preferable to reduce the number of photomasks and the number of steps used in the photolithography step. As a method for reducing the number of masks and the number of steps, for example, an etching step may be performed using a resist mask formed by a multi-tone mask which is an exposure mask in which transmitted light has a plurality of intensities. A resist mask formed using a multi-tone mask has a shape with a plurality of thicknesses, and the shape can be further deformed by etching. Therefore, the resist mask can be used for a plurality of etching processes for processing into different patterns. . Therefore, a resist mask corresponding to at least two kinds of different patterns can be formed by using one multi-tone mask. Therefore, the number of exposure masks can be reduced, and the corresponding photolithography process can be reduced, so that the process can be simplified.

Note that it is preferable that etching conditions be optimized so that the oxide semiconductor film 106 is not etched and divided when the conductive film is etched. However, it is difficult to obtain a condition that only the conductive film is etched and the oxide semiconductor film 106 is not etched at all, and only part of the oxide semiconductor film 106 is etched when the conductive film is etched. 5% or more and 50% or less of the film thickness of the semiconductor film 106 may be etched, whereby the oxide semiconductor film 106 having a groove (concave portion) may be formed.

In the case where an oxide semiconductor material is used for a conductive film used for a source electrode and a drain electrode (including a wiring formed using the same layer), the conductive film is etched to form the source electrode 114a.
In forming the drain electrode 114b, an oxide semiconductor material that is less easily etched than the oxide semiconductor film 106 needs to be used as the conductive film so that the oxide semiconductor film 106 is not etched as much as possible.

In the case where an oxide semiconductor material is used for the source electrode 114a and the drain electrode 114b, the source electrode 114a and the drain electrode 1 depend on the material of the oxide semiconductor film 106 and the deposition conditions.
The interface between 14b and the oxide semiconductor film 106 may be unclear. In the case where the interface is unclear, the source electrode 114a, the drain electrode 114b, and the oxide semiconductor film 106
A portion that can be called a mixed region or a mixed layer is sometimes formed.

Note that as the conductive film used for the source electrode 114a and the drain electrode 114b, a conductive material or a semiconductor material in which impurity ions are introduced to reduce resistance can be used.

Through the above process, the transistor 150 is formed. In the transistor 150, impurities (for example, silicon which is an element included in the gate insulating film 108) in the region 106 a of the oxide semiconductor film 106 are reduced by formation of the gate insulating film 108. Accordingly, a decrease in on-state current of the transistor 150 can be suppressed. Thus, the operating characteristics of the semiconductor device including the transistor 150 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved.

Further, an insulating film may be provided over the transistor 150. As the insulating film, the same material and film formation method as those for the gate insulating film 108 can be used.
8 contents can be taken into consideration. Note that since the aluminum oxide film has a high effect of suppressing entry of impurities such as moisture and hydrogen from the outside, it is desirable and more preferable to form an aluminum oxide film or a stacked film including the aluminum oxide film as the insulating film. It is desirable to use an aluminum oxide film having a film density of 3.2 g / cm ³ or more, preferably 3.6 g / cm ³ or more. Accordingly, impurities such as moisture and hydrogen can be prevented from entering the oxide semiconductor film 106.

Further, a planarization insulating film may be provided over the transistor 150. Spin coating method, printing method,
An insulating material may be applied using a dispensing method or an inkjet method, and a curing process (for example, a heat treatment or a light irradiation process) according to the applied material may be performed. Note that the insulating material can be formed using an organic resin such as an acrylic resin, a polyimide resin, a polyamide resin, a polyamideimide resin, or an epoxy resin. Further, a low dielectric constant material (low-k material), a siloxane resin, PSG (phosphorus glass), BPSG (phosphorus boron glass), or the like can be used. Note that a plurality of insulating films formed using these materials may be stacked. Note that since the planarization insulating film often contains a relatively large amount of impurities such as moisture, the planarizing insulating film is preferably formed over the above-described insulating film (eg, a stacked film containing aluminum oxide or aluminum oxide).

As described above, according to one embodiment of the disclosed invention, impurities contained in an oxide semiconductor film in the vicinity of an interface with a gate insulating film can be reduced in a semiconductor device including an oxide semiconductor. Further, according to one embodiment of the disclosed invention, the performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved.

The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

(Embodiment 2)
In this embodiment, one embodiment of a semiconductor device having a structure different from that in Embodiment 1 and a method for manufacturing the semiconductor device will be described with reference to FIGS.

<Configuration example of semiconductor device>
4A and 4B illustrate an example of a plan view and a cross-sectional view of a top-gate transistor as an example of a semiconductor device. 4A is a plan view and FIG. 4B is a plan view of FIG.
It is sectional drawing of the EF cross section in (A). Note that in FIG. 4A, some components (eg, the substrate 100) of the transistor 650 are omitted in order to avoid complexity.

The transistor 650 of this embodiment is different from the transistor described in Embodiment 1 in that the conductive film 602 is provided on the same plane as the insulating film 102 and adjacent to the insulating film 102.

In general, a transistor using an oxide semiconductor film as an active layer tends to have a high contact resistance at a contact portion between the oxide semiconductor film and the conductive film. The electrode 114a and the drain electrode 114b are formed of the oxide semiconductor film 1
The oxide semiconductor film 1 is electrically connected not only on the front surface side of 06 but also on the back surface side.
06 and the contact resistance between the source electrode 114 a and the oxide semiconductor film 106 and the drain electrode 114.
The contact resistance of b can be reduced, and the variation in contact resistance can be reduced. This
Since a high-performance transistor with high on-state current and suppressed variation in threshold voltage can be obtained, the structure is one of structures suitable for a transistor including an oxide semiconductor.
One can say.

<Manufacturing Process of Transistor 650>
An example of a manufacturing process of the transistor 650 illustrated in FIGS. 4A to 4C will be described with reference to FIGS.

First, a conductive film is formed over the substrate 100, a resist mask is formed over the conductive film by a photolithography process, selective etching is performed to form a conductive film 602, and then the resist mask is removed (FIG. 5 (A).) As for a material used for the conductive film 602, the gate electrode 110 and the source electrode 114a (or the drain electrode 114b) of the above embodiment mode.
You can refer to the explanation.

Next, the insulating film 102 is formed over the substrate 100 and the conductive film 602 (see FIG. 5B).
. Here, the surface of the insulating film 102 is preferably at least a position higher than the surface of the conductive film 602, and the surface of the conductive film 602 and the insulating film 10 are formed by performing planarization treatment described below.
The two surfaces can be substantially the same. Accordingly, the oxide semiconductor film 1 is formed in a later process.
When the layer 06 is formed, a problem that the oxide semiconductor film is cut off due to a step between the conductive film 602 and the insulating film 102 can be suppressed, and the thickness of the oxide semiconductor film 106 can be extremely thin. Therefore, it can be said that the planarization treatment is one of effective means for miniaturization of a transistor.

Next, planarization treatment is performed on the insulating film 102, so that the insulating film 102 having a surface substantially flush with the surface of the conductive film 602 is formed (see FIG. 5C). Note that the planarization treatment of the insulating film 102 is performed by chemical mechanical polishing (Chemical Mechanical Polishing).
g: CMP) treatment is preferably used. Here, the CMP process is a technique for flattening the surface by a combined chemical and mechanical action based on the surface of the workpiece. In general, a polishing cloth is attached on the polishing stage, and the polishing stage and the workpiece are rotated or swung while supplying slurry (abrasive) between the workpiece and the polishing cloth. In this method, the surface of the workpiece is polished by the chemical reaction between the slurry and the workpiece surface and the mechanical polishing of the polishing cloth and the workpiece.

The CMP process may be performed once or a plurality of times. When performing the CMP process in a plurality of times, it is preferable to perform primary polishing at a low polishing rate after performing primary polishing at a high polishing rate. By combining polishing with different polishing rates in this manner, the flatness of the surface of the conductive film 602 and the surface of the insulating film 102 can be further improved.

Further, a dry etching process or the like can be applied as the planarization process of the insulating film 102. As an etching gas, a chlorine-based gas such as chlorine, boron chloride, silicon chloride, or carbon tetrachloride, a fluorine-based gas such as carbon tetrafluoride, sulfur fluoride, or nitrogen fluoride, oxygen, or the like can be used as appropriate. For example, reactive ion etching (RIE: Reactive I)
on Etching), ICP (Inductively Coupled Pla)
sma) Etching, ECR (Electron Cyclotron Resona)
nce) A dry etching method such as an etching method, a parallel plate type (capacitive coupling type) etching method, a magnetron plasma etching method, a two-frequency plasma etching method or a helicon wave plasma etching method can be used. In particular, when the insulating film 102 includes an inorganic insulating material containing a large amount of nitrogen, such as silicon nitride or silicon nitride oxide, it may be difficult to remove the inorganic insulating material containing a large amount of nitrogen only by CMP treatment. Etc. are preferably used in combination.

Further, plasma treatment or the like can be applied as planarization treatment of the insulating film 102. The plasma treatment is performed by introducing an inert gas such as argon gas into a vacuum chamber and applying an electric field with the surface to be treated as a cathode. The principle is the same as that of the plasma dry etching method, but by using an inert gas, it can be processed in a normal sputter deposition chamber and is a simple method. That is, this plasma treatment is a treatment for irradiating the surface to be treated with ions of an inert gas and flattening fine irregularities on the surface by a sputtering effect. Therefore, in this specification, this plasma treatment is also referred to as “reverse sputtering”.

Note that the conductive film 602 and the insulating film 102 may be formed in an island shape as illustrated in FIG. Further, in FIG. 5C, the conductive film 602 is formed in a so-called forward taper shape in which the end portion is narrowed toward the surface, but the end portion is closer to the surface as illustrated in FIG. You may form in what is called a reverse taper shape which has spread.

The subsequent steps may be performed in consideration of FIGS. 2A to 3D and the description of the drawings.

Through the above steps, the transistor 650 illustrated in FIG. 4B can be manufactured. In addition to the characteristics described in Embodiment 1, the transistor 650 includes the contact resistance between the oxide semiconductor film 106 and the source electrode 114a and the oxide semiconductor film 106 and the drain electrode 1 as described above.
Since the contact resistance of 14b can be reduced and variations in contact resistance can be reduced, a high-performance transistor with high on-current and suppressed variation in threshold voltage can be obtained. Thus, the operating characteristics of the semiconductor device including the transistor 650 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved. In addition, as described above, the surface of the conductive film 602 and the surface of the insulating film 102 can be substantially the same, and the thickness of the oxide semiconductor film 106 can be extremely thin, which is suitable for transistor miniaturization. It can be said that this is one of the structures.

The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

(Embodiment 3)
In this embodiment, one embodiment of a semiconductor device having a different structure from the above embodiment and a method for manufacturing the semiconductor device will be described with reference to FIGS.

<Configuration example of semiconductor device>
FIGS. 6A and 6B illustrate an example of a plan view and a cross-sectional view of a top-gate transistor as an example of a semiconductor device. 6A is a plan view and FIG. 6B is a plan view of FIG.
It is sectional drawing of the GH cross section in (A). Note that in FIG. 6A, some components of the transistor 850 (eg, the substrate 100) are omitted to avoid complexity.

A transistor 850 illustrated in FIGS. 6A and 6B includes an insulating film 10 over a substrate 100.
2, oxide semiconductor film 106, insulating film 107, gate electrode 110 overlapping at least the oxide semiconductor film, interlayer insulating film 800, interlayer insulating film 802, insulating film 107, interlayer insulating film 800, and interlayer A source electrode 114 a and a drain electrode 114 b which are electrically connected to the oxide semiconductor film 106 through an opening in the insulating film 802 are provided.

In the transistor 850, the insulating film 107 is formed so as to cover the oxide semiconductor film 106, and the source electrode 114a and the drain electrode 114b pass through the openings of the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802. It is different from the structure of the transistor described in the above embodiment in that it is electrically connected to the oxide semiconductor film 106.

When the transistor 850 has a structure in which the insulating film 107 covers the oxide semiconductor film 106, entry of impurities such as moisture into the oxide semiconductor film 106 can be suppressed. In addition, when the impurity ions 130 are added to the oxide semiconductor film 106, the insulating film 107 exists over the oxide semiconductor film 106;
For example, occurrence of lattice defects in the oxide semiconductor film 106 can be reduced.

In the transistor 850, the source electrode 114a and the drain electrode 114b are formed in the oxide semiconductor film 1 through the openings of the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802.
The oxide semiconductor film 106 is subjected to etching treatment after the oxide semiconductor film 106 is formed (for example, an etching gas and plasma during dry etching or an etchant during wet etching). The only portion exposed to the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802 is exposed to the transistor 850 due to a substance generated by the etching process (for example, used during dry etching). Since the metal compound generated when the etching gas reacts with the metal element of the oxide semiconductor film 106 may have conductivity, it may be a leak path of the source electrode 114a and the drain electrode 114b. it can. Even when part of the source electrode 114 a and the drain electrode 114 b overlaps with the gate electrode 110, an interlayer insulating film exists between the source electrode 114 a and the gate electrode 110, the drain electrode 114 b, and the gate electrode 110. And is not electrically connected. This
Since the source electrode 114a and the drain electrode 114b can be formed as close to the gate electrode 110 as possible, it can be said to be one of structures suitable for miniaturization of a transistor.

<Manufacturing Process of Transistor 850>
An example of a manufacturing process of the transistor 850 illustrated in FIGS. 6A to 6C will be described with reference to FIGS.

First, the insulating film 102, the oxide semiconductor film 106, and the insulating film 107 are formed over the substrate 100 (see FIG. 7A). Note that this step may be performed in consideration of FIGS. 2A to 2D and the description of the drawings.

Next, the gate electrode 110 is formed over the insulating film 107, and impurity ions 130 are added into the oxide semiconductor film 106 using the gate electrode 110 as a mask, so that the low-resistance region 106c is self-aligned in the oxide semiconductor film 106. (See FIG. 7B). The process is shown in FIG.
This may be done in consideration of (A) to FIG. 3 (C) and the description of the drawing.

Next, the interlayer insulating film 800 and the interlayer insulating film 8 are formed on the insulating film 107 and the gate electrode 110.
02 is formed (see FIG. 7C).

The interlayer insulating film 800 can be formed using the same material and deposition method as the gate insulating film 108, so that the contents of the gate insulating film 108 described in the above embodiment can be referred to. Note that since the aluminum oxide film has a high effect of suppressing entry of impurities such as moisture and hydrogen from the outside, it is desirable and more preferable to form an aluminum oxide film or a stacked film including the aluminum oxide film as the insulating film. It is desirable to use an aluminum oxide film having a film density of 3.2 g / cm ³ or more. Accordingly, impurities such as moisture and hydrogen can be prevented from entering the oxide semiconductor film 106.

As the interlayer insulating film 802, an insulating material is applied by using a spin coating method, a printing method, a dispensing method, an ink jet method, or the like, and a curing process (for example, a heat treatment or a light irradiation process) according to the applied material. )). Note that the insulating material can be formed using an organic resin such as an acrylic resin, a polyimide resin, a polyamide resin, a polyamideimide resin, or an epoxy resin. In addition, low dielectric constant materials (l
ow-k material), siloxane-based resin, PSG (phosphorus glass), BPSG (phosphorus boron glass), or the like can be used. Note that a plurality of insulating films formed using these materials may be stacked. Note that since the interlayer insulating film contains a relatively large amount of impurities such as moisture, the interlayer insulating film is preferably formed over the above-described insulating film (for example, a stacked film containing aluminum oxide or aluminum oxide).

Note that a stacked structure of the interlayer insulating film 800 and the interlayer insulating film 802 is formed in this embodiment mode.
Only one of them may be formed.

Next, after an opening is formed in at least part of the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802 in a region overlapping with the oxide semiconductor film, the oxide semiconductor film 106 is electrically connected to the oxide semiconductor film 106 through the opening. A connected source electrode 114a and drain electrode 114b are formed (see FIG. 8A).

Note that the etching of the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802 may be dry etching, wet etching, or both. In addition, it is preferable that etching conditions be optimized so that the oxide semiconductor film 106 is not etched and divided during the etching treatment. However, the insulating film 107 and the interlayer insulating film 800
In addition, it is difficult to obtain a condition that only the interlayer insulating film 802 is etched and the oxide semiconductor film 106 is not etched at all. When the conductive film is etched, only part of the oxide semiconductor film 106 is etched. In some cases, 5% to 50% of the thickness of the physical semiconductor film 106 is etched, whereby the oxide semiconductor film 106 having a groove (concave portion) is formed.

The formation process of the source electrode 114a and the drain electrode 114b may be performed in consideration of FIG. 3D and the description of the drawing. In addition, after the step, the source electrode 114a
The planarization treatment may be performed on the drain electrode 114b and the interlayer insulating film 802. Thus, in the case where transistors are further stacked over the transistor 850, formation surfaces (that is, the source electrode 114a, the drain electrode 114b, and the interlayer insulating film 80) are formed.
Since the flatness of the surface (2) is high, a transistor can be easily manufactured. Note that for the planarization treatment, the planarization treatment method described in the above embodiment can be referred to.

Through the above steps, the transistor 850 illustrated in FIG. 6B can be manufactured. In addition to the characteristics described in Embodiment 1, the transistor 850 reduces damage (for example, generation of lattice defects in the oxide semiconductor film 106) caused in the oxide semiconductor film 106 due to ion addition as described above. can do. Further, as described above, the portion where the oxide semiconductor film 106 is exposed to the etching treatment can be limited; thus, contamination of the transistor due to the etching treatment can be suppressed. Thus, the operating characteristics of the semiconductor device including the transistor 850 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved. In addition, as described above, even if part of the source electrode 114a and the drain electrode 114b is formed so as to overlap with the gate electrode 110, the source electrode 114a and the drain electrode 114b are not connected to the gate electrode 110 as much as possible. This can be said to be one of the structures suitable for miniaturization of transistors.

Alternatively, as illustrated in FIG. 8B, a structure in which the conductive film 602 is included in the insulating film 102 may be employed. With the structure of the transistor 850 illustrated in FIG. 8B, when the opening is formed in part of the insulating film 107, the interlayer insulating film 800, and the interlayer insulating film 802, the oxide semiconductor film 106 in the opening can be formed. Even when the source electrode 114a and the drain electrode 114b are removed by overetching, the oxide semiconductor film 106 is not electrically connected to the side wall portion of the oxide semiconductor film 106, but is connected to the oxide semiconductor film 106 through the conductive film 602. Therefore, a favorable contact resistance can be maintained even during over-etching, and thus a structure suitable for a case where the oxide semiconductor film 106 is thin (that is, miniaturization of a transistor) It can be said.

(Embodiment 4)
In this embodiment, one embodiment of a semiconductor device having a different structure from the above embodiment and a method for manufacturing the semiconductor device will be described with reference to FIGS.

<Configuration example of semiconductor device>
9A and 9B illustrate an example of a plan view and a cross-sectional view of a top-gate transistor as an example of a semiconductor device. 9A is a plan view, and FIG. 9B is a plan view of FIG.
It is sectional drawing of the IJ cross section in (A). Note that in FIG. 9A, some components of the transistor 1150 (eg, the substrate 100) are omitted to avoid complexity.

A transistor 1150 illustrated in FIGS. 9A and 9B includes an insulating film 1 over a substrate 100.
02, the oxide semiconductor film 106, the gate insulating film 108, the gate electrode 110 overlapping with at least the oxide semiconductor film, the insulating film 1101, the sidewall insulating film 1102, and the oxide semiconductor film 106 are electrically connected. A source electrode 114a and a drain electrode 114b.

In the transistor 1150, an insulating film 1101 is provided over the gate electrode 110, a side wall insulating film 1102 is provided on a side surface of the gate electrode 110, and a source electrode 114a and a drain electrode 114b are provided in contact with the side wall insulating film 1102. In this respect, the structure of the transistor described in the above embodiment is different.

Although the transistor 1150 will be described in a manufacturing method of the transistor 1150, which will be described later, a conductive film used as the source electrode 114a and the drain electrode 114b is formed as the oxide semiconductor film 10
6. After the insulating film 1101 and the sidewall insulating film 1102 are formed, the conductive film is planarized (also referred to as a polishing process) and part of the conductive film is removed, whereby the source electrode 114a.
And the drain electrode 114b is formed. Therefore, it is not necessary to use a photolithography process for forming the source electrode 114a and the drain electrode 114b, and the Loff width can be made extremely small without being affected by the accuracy of the exposure machine and the alignment shift of the photomask. A decrease in on-state current of the transistor 1150 can be suppressed. Further, this structure can be said to be one of structures suitable for transistor miniaturization.

<Manufacturing Process of Transistor 1150>
An example of a manufacturing process of the transistor 1150 illustrated in FIGS. 9A to 9C will be described with reference to FIGS.

First, the insulating film 102, the oxide semiconductor film 106, and the insulating film 107 are formed over the substrate 100 (see FIG. 10A). Note that this step may be performed in consideration of FIGS. 2A to 2D and the description of the drawings.

Next, a conductive film 109 for forming the gate electrode 110 (including a wiring formed of the same layer as this) and an insulating film 1100 for forming the insulating film 1101 are formed (FIG. 10 (FIG. 10).
See B). ). Note that the insulating film 1100 can be formed using the same material and deposition method as the gate insulating film 108; therefore, the contents of the gate insulating film 108 described in the above embodiment can be referred to.

Next, the conductive film 109 and the insulating film 1100 are processed into island shapes by a photolithography step, so that the gate electrode 110 and the insulating film 1101 are formed (see FIG. 10C). Further, a resist mask for forming the gate electrode 110 and the insulating film 1101 may be formed by an inkjet method. When the resist mask is formed by an ink-jet method, a manufacturing cost can be reduced because a photomask is not used. Note that the etching of the conductive film 109 and the insulating film 1100 may be dry etching or wet etching, or both may be used.

Note that in this embodiment, the conductive film 109 and the insulating film 1100 are formed and then processed to form the gate electrode 110 and the insulating film 1101, and then the sidewall insulating film 1102 is formed in this order. Although the insulating film 1101 and the sidewall insulating film 1102 are described as separate components as shown in FIG. 9B, the insulating film 1101 and the sidewall insulating film 1102 may be the same film. In order to make the insulating film 1101 and the sidewall insulating film 1102 the same film, first, after forming the gate electrode 110, an insulating film functioning as the insulating film 1101 and the sidewall insulating film 1102 is formed so as to cover the gate electrode 110. do it.

Next, impurity ions 130 having a function of reducing the resistance value of the oxide semiconductor film 106 are added to the oxide semiconductor film 106 by an ion doping method or an ion implantation method. At this time, since the gate electrode 110 and the insulating film 1101 function as a mask, the oxide semiconductor film 10
6 is formed in a self-aligned manner (see FIG. 11A).

Next, an insulating film is formed using a material and a method similar to those of the insulating film 102, and the sidewall insulating film 1102 is formed by etching the insulating film. The sidewall insulating film 1102 can be formed in a self-aligned manner by performing a highly anisotropic etching process on the insulating film. For example, it is preferable to use a dry etching method. Examples of the etching gas used for the dry etching method include a gas containing fluorine such as trifluoromethane, octafluorocyclobutane, and tetrafluoromethane. A rare gas or hydrogen may be added to the etching gas. The dry etching method is preferably a reactive ion etching method (RIE method) in which a high frequency voltage is applied to the substrate.

Then, after the sidewall insulating film 1102 is formed, the gate insulating film 108 can be formed by processing the insulating film 107 using the gate electrode 110, the insulating film 1101, and the sidewall insulating film 1102 as a mask (see FIG. 11B). Note that the gate insulating film 108 may be formed in the same step as the formation of the sidewall insulating film 1102.

Note that in this embodiment, the impurity ions 130 are added to the oxide semiconductor film 106 in the step immediately after the formation of the gate electrode 110 and the insulating film 1101 using the gate electrode 110 and the insulating film 1101 as a mask. After the formation of the insulating film 1102, the gate electrode 110,
The impurity ions 130 may be added to the oxide semiconductor film 106 using the insulating film 1101 and the sidewall insulating film 1102 as masks.

Next, a conductive film 1104 for forming a source electrode 114a and a drain electrode 114b (including a wiring formed using the same layer) is formed over the oxide semiconductor film 106, the insulating film 1101, and the sidewall insulating film 1102. Then, an interlayer insulating film 802 is formed over the conductive film 1104 (
Refer to FIG. ). Note that as the conductive film 1104, for example, a metal film containing an element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten, or a metal nitride film containing any of the above-described elements (a titanium nitride film, A molybdenum nitride film, a tungsten nitride film, or the like can be used. Further, a refractory metal film such as titanium, molybdenum, or tungsten or a metal nitride film thereof (titanium nitride film, molybdenum nitride film, tungsten nitride film) on one or both of the lower side or upper side of a metal film such as aluminum or copper It is good also as a structure which laminated | stacked. Further, the conductive film used for the source electrode and the drain electrode may be formed using a conductive metal oxide. As the conductive metal oxide, indium oxide (In ₂ O
₃ ), tin oxide (SnO ₂ ), zinc oxide (ZnO), indium tin oxide (In ₂ O ₃₎
-SnO _2, abbreviated to ITO), indium zinc oxide _{(In 2} O 3 -ZnO). The conductive film used for the source electrode and the drain electrode can be formed as a single layer or stacked layers using any of the above materials. There is no particular limitation on the formation method, and various film formation methods such as an evaporation method, a CVD method, a sputtering method, and a spin coating method can be used. In addition,
For the interlayer insulating film 802, the material and the deposition method of the interlayer insulating film 802 described in Embodiment 3 can be referred to.

Next, planarization treatment is performed on the conductive film 1104 from above, and at least part of the conductive film 1104 and at least part of the interlayer insulating film 802 over the insulating film 1101 and the sidewall insulating film 1102 are removed. The conductive film 1104 is divided at least over the insulating film 1100 or the sidewall insulating film 1102 so that the source electrode 114a and the drain electrode 114b sandwich the gate electrode 110 (see FIG. 12A). The planarization process here is
The content of the planarization treatment performed on the insulating film 102 described in Embodiment 1 can be referred to.

Note that the planarization treatment may be performed not only on the conductive film 1104 and the interlayer insulating film 802 but also on the insulating film 1101 and the sidewall insulating film 1102.

Note that in FIG. 12A, the surfaces of the source electrode 114a and the drain electrode 114b and the surfaces of the insulating film 1101 and the interlayer insulating film 802 are located on the same plane, but the source electrode 114a and the drain electrode 114b are formed by a CMP apparatus. And when the insulating film 1101 is polished,
Source electrode 114a and drain electrode 114b, insulating film 1101 and interlayer insulating film 8
When the polishing speed of 02 is different, the surfaces of the source electrode 114a and the drain electrode 114b and the surfaces of the insulating film 1101 and the interlayer insulating film 802 may be different in height and may have a level difference. For example, the source electrode 114a and the drain electrode 114b The surface of the insulating film 1101
In some cases, the surface becomes lower (concave).

Through the above steps, the transistor 1150 illustrated in FIG. 12A can be manufactured.
In addition to the characteristics described in Embodiment 1, the transistor 1150 can suppress a decrease in on-state current of the transistor as described above. Therefore, the operating characteristics of the semiconductor device including the transistor 1150 can be improved. In addition, performance of a transistor including an oxide semiconductor film or a semiconductor device including the transistor can be improved. In addition, it is not necessary to use a photolithography process for forming the source electrode 114a and the drain electrode 114b, and the Loff width can be made extremely small without being affected by the accuracy of the exposure apparatus and the alignment deviation of the photomask. It can be said that it is one of the structures suitable for miniaturization.

Further, an insulating film may be provided over the transistor 1150. As the insulating film, the same material and film formation method as those for the gate insulating film 108 can be used.
The contents of 08 can be taken into consideration. Note that since the aluminum oxide film has a high effect of suppressing entry of moisture from the outside, it is desirable to form an aluminum oxide film or a stacked film including the aluminum oxide film as the insulating film, and more preferably, the film density is 3.2 g / c
It is desirable to use an aluminum oxide film of m ³ or more, preferably 3.6 g / cm ³ or more. Note that the insulating film may be formed before the transistor 1150 is formed. For example, after the sidewall insulating film 1102 is formed, the conductive film 1104, the insulating film, and the interlayer insulating film 802 may be sequentially formed, and then planarization treatment such as CMP may be performed. In the case of the structure in FIG. 9B, even if impurities such as moisture and hydrogen are mixed in the interlayer insulating film 802, the impurities can be prevented from reaching the oxide semiconductor film 106. preferable.

Note that the transistor 1150 includes a conductive film 60 in the insulating film 102 as illustrated in FIG.
2 may be used. With the structure of the transistor 1150 illustrated in FIG. 12B, the source electrode 114a and the drain electrode 114b are formed of the oxide semiconductor film 106.
The oxide semiconductor film 106 is electrically connected not only on the front surface side but also on the back surface side.
The contact resistance between the source electrode 114a and the contact resistance between the oxide semiconductor film 106 and the drain electrode 114b can be reduced, and the variation in contact resistance can be reduced. Accordingly, a high-performance transistor with high on-state current and low variation in threshold voltage can be obtained; thus, the structure can be said to be one of structures suitable for a transistor including an oxide semiconductor. .

(Embodiment 5)
In this embodiment, one embodiment of a semiconductor device having a structure different from that of the above embodiment and a method for manufacturing the semiconductor device will be described with reference to FIGS.

<Configuration example of semiconductor device>
FIGS. 13A and 13B illustrate an example of a plan view and a cross-sectional view of a top-gate transistor as an example of a semiconductor device. FIG. 13A is a plan view, and FIG.
FIG. 14 is a cross-sectional view taken along a line KL in FIG. Note that in FIG. 13A, some components of the transistor 1350 (eg, the substrate 100) are omitted to avoid complexity.

A transistor 1350 illustrated in FIGS. 13A and 13B includes an insulating film 102, an oxide semiconductor film 106, and a source electrode 114a and a drain which are electrically connected to the oxide semiconductor film 106 over a substrate 100. The electrode 114b, the gate insulating film 108, and the gate electrode 110 overlapping with at least the oxide semiconductor film are provided.

The transistor 1350 is different from the structure of the transistor described in the above embodiment in that the gate insulating film 108 is formed over the entire oxide semiconductor film 106.

In the structure in which the gate insulating film is formed only on part of the oxide semiconductor film 106 as in the above embodiment mode, even if the gate insulating film 108 is a film that releases oxygen by heat treatment, the gate insulating film Since oxygen (excess oxygen in the gate insulating film 108) is released from an end portion of the film 108, an effect of reducing oxygen vacancies in the oxide semiconductor film 106 may be small.

However, as described in this embodiment, with the structure in which the gate insulating film 108 is formed over the entire oxide semiconductor film 106, oxygen released by heat treatment is released from an end portion of the gate insulating film 108. The above-mentioned problems can be solved because there is no such a problem.

<Manufacturing Process of Transistor 1350>
An example of a manufacturing process of the transistor 1350 illustrated in FIG. 13 will be described with reference to FIGS.

First, the insulating film 102 and the oxide semiconductor film 106 are formed over the substrate 100 (FIG. 14A).
reference. ). Note that this step may be performed in consideration of FIGS. 2A to 2C and the above embodiment corresponding to the description of the drawings.

Next, the source electrode 114a and the drain electrode 114b in contact with the oxide semiconductor film 106 are formed, and the oxide semiconductor film 106, the source electrode 114a, and the drain electrode 114b are formed.
A gate insulating film 108 is formed thereover (see FIG. 14B). Note that the source electrode 114a
The drain electrode 114b may be formed with reference to FIG. 3D and the description of the drawing, and the gate insulating film 108 may be formed with reference to FIG. 2D and the description of the drawing. Just do it.

Note that in this embodiment, the gate insulating film 108 is formed after the source electrode 114a and the drain electrode 114b are formed over the oxide semiconductor film 106; therefore, the formation position of the first region 106a is different from that in the above embodiment. The oxide semiconductor film 106 and the gate insulating film 10 are different.
8 is formed in a region in direct contact.

Next, the gate electrode 110 is formed over the gate insulating film 108 in a region overlapping with the oxide semiconductor film 106.
(See FIG. 14C). Note that this step may be performed in consideration of FIG. 3B and the description of the drawing.

Through the above steps, the transistor 1350 illustrated in FIG. 14C can be manufactured.
In addition to the characteristics described in Embodiment 1, the transistor 1350 includes the gate insulating film 1 when the gate insulating film 108 is a film that releases oxygen by heat treatment as described above.
Since oxygen released from 08 can be efficiently added to the oxide semiconductor film 106,
The oxygen deficiency reducing effect can be enhanced.

(Embodiment 6)
In this embodiment, an example of a semiconductor device that uses the transistor described in any of Embodiments 1 to 5 and can store stored data even when power is not supplied and has no limit on the number of writing times. This will be described with reference to the drawings.

FIG. 15 illustrates an example of a structure of a semiconductor device. 15A is a cross-sectional view of the semiconductor device, FIG. 15B is a plan view of the semiconductor device, and FIG. 15C is a circuit diagram of the semiconductor device. Here, FIG. 15A corresponds to a cross section taken along lines KL and MN in FIG.

The semiconductor device illustrated in FIGS. 15A and 15B includes a transistor 1760 using a first semiconductor material in a lower portion and a transistor 1762 using a second semiconductor material in an upper portion. . As the transistor 1762, the transistor structure described in any of the above embodiments can be used. Here, an example in which the transistor 1150 of Embodiment 4 is used will be described.

Here, it is desirable that the first semiconductor material and the second semiconductor material have different band gaps. For example, the first semiconductor material is a semiconductor material other than an oxide semiconductor (such as silicon).
And the second semiconductor material can be an oxide semiconductor. A transistor including a material other than an oxide semiconductor can easily operate at high speed. On the other hand, a transistor including an oxide semiconductor can hold charge for a long time due to its characteristics.

Note that although all the above transistors are described as n-channel transistors, it goes without saying that p-channel transistors can be used. In addition, a transistor 1762 as described in Embodiment 4 in which an oxide semiconductor is used for retaining information.
In addition to the above, the specific structure of the semiconductor device such as a material used for the semiconductor device and a structure of the semiconductor device is not necessarily limited to that shown here.

A transistor 1760 in FIG. 15A includes a channel formation region 1716 provided in a substrate 1700 containing a semiconductor material (eg, silicon) and a channel formation region 1716.
An impurity region 1720 provided so as to sandwich the gate electrode, an intermetallic compound region 1724 in contact with the impurity region 1720, a gate insulating film 1708 provided on the channel formation region 1716,
A gate electrode 1710 provided over the gate insulating film 1708. Note that in the drawing, the source electrode and the drain electrode may not be explicitly provided, but for convenience, the state may be referred to as a transistor. In this case, in order to describe the connection relation of the transistors, the source and drain electrodes including the source and drain regions may be expressed. That is, in this specification, the term “source electrode” can include a source region.

An element isolation insulating layer 1706 is provided over the substrate 1700 so as to surround the transistor 1760, and an insulating layer 1728 and an insulating layer 1730 are provided so as to cover the transistor 1760. Note that in the transistor 1760, a sidewall insulating layer (sidewall insulating layer) is provided on a side surface of the gate electrode 1710, and the impurity region 17 includes regions having different impurity concentrations.
It may be 20.

The transistor 1760 using a single crystal semiconductor substrate can operate at high speed. For this reason,
By using the transistor as a reading transistor, information can be read at high speed. Two insulating films are formed so as to cover the transistor 1760. As a treatment before the formation of the transistor 1762 and the capacitor 1764, CM is formed on the two insulating films.
By performing P treatment, planarized insulating layers 1728 and 1730 are formed, and the upper surface of the gate electrode 1710 is exposed at the same time.

The insulating layer 1728 and the insulating layer 1730 are typically a silicon oxide film, a silicon oxynitride film,
Aluminum oxide film, aluminum oxynitride film, silicon nitride film, aluminum nitride film,
An inorganic insulating film such as a silicon nitride oxide film or an aluminum nitride oxide film can be used.
The insulating layers 1728 and 1730 can be formed by a plasma CVD method, a sputtering method, or the like.

Alternatively, an organic material such as polyimide, acrylic resin, or benzocyclobutene resin can be used. In addition to the organic material, a low dielectric constant material (low-k material) or the like can be used. In the case of using an organic material, the insulating layer 1728 and the insulating layer 1730 may be formed by a wet method such as a spin coating method or a printing method.

Note that in this embodiment, a silicon nitride film is used as the insulating layer 1728, and a silicon oxide film is used as the insulating layer 1730.

Planarization treatment is preferably performed on the formation region of the oxide semiconductor film 1744 over the surface of the insulating layer 1730. In this embodiment, the oxide semiconductor film 1744 is formed over the insulating layer 1730 (preferably the average surface roughness of the surface of the insulating layer 1730 is 0.15 nm or less) sufficiently planarized by polishing treatment (eg, CMP treatment). .

A transistor 1762 illustrated in FIG. 15A is a transistor in which an oxide semiconductor is used for a channel formation region. Here, the oxide semiconductor film 1744 included in the transistor 1762
As described in the above embodiment, it is preferable that impurities such as moisture and hydrogen are removed as much as possible to be highly purified. Moreover, it is preferable that oxygen deficiency is fully compensated. By using such an oxide semiconductor, a transistor 1762 with extremely excellent off characteristics can be obtained.

Since the transistor 1762 has extremely low off-state current, stored data can be held for a long time by using the transistor 1762. In other words, since it is possible to obtain a semiconductor memory device that does not require a refresh operation or has a very low frequency of the refresh operation, power consumption can be sufficiently reduced.

In the manufacturing process of the transistor 1762, the gate electrode 1748, the insulating film 1737, and the conductive film provided over the sidewall insulating film 1736 a and the sidewall insulating film 1736 b are removed by a chemical mechanical polishing process. Electrode film 1 that functions as
742a and an electrode film 1742b are formed.

Therefore, the Loff width of the transistor 1762 can be reduced, so that the on-state characteristics of the transistor 1762 can be improved.

In the process of removing the conductive film over the gate electrode 1748 in the formation process of the electrode film 1742a and the electrode film 1742b, an etching process using a resist mask is not used.
Precise machining can be performed accurately. Thus, in a manufacturing process of a semiconductor device, a transistor having a fine structure with little variation in shape and characteristics can be manufactured with high yield.

Over the transistor 1762, an interlayer insulating film 1735 and an insulating film 1750 are provided as a single layer or a stacked layer. In this embodiment, an aluminum oxide film is used as the insulating film 1750. High density aluminum oxide film (film density of 3.2 g / cm ³ or more, preferably 3.6 g / cm
When the thickness is greater than or equal to cm ³ , stable electric characteristics can be imparted to the transistor 1762.

In addition, a conductive layer 1753 is provided in a region overlapping with the electrode film 1742a of the transistor 1762 with the interlayer insulating film 1735 and the insulating film 1750 interposed therebetween. The electrode film 1742a, the interlayer insulating film 1735, and the insulating film 1750 are provided. And the conductive layer 1753, the capacitive element 17
64 is configured. In other words, the electrode film 1742 a of the transistor 1762
The conductive layer 1753 functions as the other electrode of the capacitor 1764. Note that in the case where a capacitor is not necessary, the capacitor 1764 can be omitted. Further, the capacitor 1764 may be provided over the transistor 1762 separately.

An insulating film 1752 is provided over the transistor 1762 and the capacitor 1764. Over the insulating film 1752, a transistor 1762 and a wiring 1756 for connecting another transistor are provided. Although not illustrated in FIG. 15A, the wiring 1756 is electrically connected to the electrode film 1742b through an electrode formed in an opening formed in the interlayer insulating film 1735, the insulating film 1750, the insulating film 1752, and the like. Here, the electrode is preferably provided so as to overlap with at least part of the oxide semiconductor film 1744 of the transistor 1762.

In FIGS. 15A and 15B, the transistor 1760 and the transistor 176
2 is provided so that at least part thereof overlaps with each other, and preferably, the source or drain region of the transistor 1760 and part of the oxide semiconductor film 1744 overlap with each other. Further, the transistor 1762 and the capacitor 1764 are provided so as to overlap with at least part of the transistor 1760. For example, the capacitive element 1764
The conductive layer 1753 is provided so as to overlap with at least part of the gate electrode 1710 of the transistor 1760. By adopting such a planar layout, the occupation area of the semiconductor device can be reduced, and thus high integration can be achieved.

Note that the electrical connection between the electrode film 1742 b and the wiring 1756 is the same as that of the electrode film 1742 b and the wiring 1.
Alternatively, 756 may be directly contacted, or an electrode may be provided on an insulating film between the electrode film 1742b and the wiring 1756 and the electrode may be interposed therebetween. A plurality of electrodes may be interposed therebetween.

Next, an example of a circuit configuration corresponding to FIGS. 15A and 15B is illustrated in FIG.

In FIG. 15C, the first wiring (1st Line) and the source electrode of the transistor 1760 are electrically connected, and the second wiring (2nd Line) and the transistor 176 are electrically connected.
The 0 drain electrode is electrically connected. In addition, the third wiring (3rd Line
) And one of the source electrode and the drain electrode of the transistor 1762 are electrically connected, and the fourth wiring (4th Line) and the gate electrode of the transistor 1762 are electrically connected. The gate electrode of the transistor 1760 and the transistor 17
One of the source electrode and the drain electrode 62 is electrically connected to the other electrode of the capacitor 1764, and the fifth wiring (5th Line) and one of the electrodes of the capacitor 1764 are electrically connected. .

In the semiconductor device illustrated in FIG. 15C, information can be written, held, and read as follows by utilizing the feature that the potential of the gate electrode of the transistor 1760 can be held.

Information writing and holding will be described. First, the potential of the fourth wiring is set to a potential at which the transistor 1762 is turned on, so that the transistor 1762 is turned on. Accordingly, the potential of the third wiring is set to the gate electrode of the transistor 1760 and the capacitor 176.
4 is given. That is, predetermined charge is supplied to the gate electrode of the transistor 1760 (writing). Here, it is assumed that one of two charges (hereinafter, referred to as low level charge and high level charge) that gives two different potential levels is given. Then the fourth
The potential of the wiring of the transistor 1762 is set to a potential at which the transistor 1762 is turned off.
When 62 is turned off, the charge given to the gate electrode of the transistor 1760 is held (held).

Since the off-state current of the transistor 1762 is extremely small, the charge of the gate electrode of the transistor 1760 is held for a long time.

Next, reading of information will be described. When an appropriate potential (read potential) is applied to the fifth wiring in a state where a predetermined potential (constant potential) is applied to the first wiring, the first wiring is changed according to the amount of charge held in the gate electrode of the transistor 1760. The two wirings have different potentials. In general, when the transistor 1760 is an n-channel transistor, the apparent threshold value V _{th_H in the} case where a high-level charge is applied to the gate electrode of the transistor 1760 is
This is because the gate electrode becomes lower than the apparent threshold value _{Vth_L} when a low level charge is applied to the gate electrode. Here, the apparent threshold voltage means that the transistor 1760 is “
It means the potential of the fifth wiring which is necessary to make it “on”. Accordingly, the potential of the fifth wiring is set to the potential V ₀ between V _{th_H} and V _{th_L} , whereby the transistor 1
The charge applied to the gate electrode 760 can be discriminated. For example, in writing, High
In the case where the h-level charge is _supplied , the transistor 1760 is turned “on” if the potential of the fifth wiring is V ₀ (> V th — _H ). In the case where a low-level charge is _supplied , the transistor 1760 is _supplied even if the potential of the fifth wiring is V ₀ (<V _{th_L} ).
Remains in the “off state”. Therefore, the held information can be read by looking at the potential of the second wiring.

Note that in the case of using memory cells arranged in an array, it is necessary to read only information of a desired memory cell. In the case where information is not read out in this manner, a potential at which the transistor 1760 is turned “off” regardless of the state of the gate electrode, that is, V th — _H
A smaller potential may be supplied to the fifth wiring. _{Alternatively} , a potential that turns on the transistor 1760 regardless of the state of the gate electrode, that is, a potential higher than V _{th_L} may be _supplied to the fifth wiring.

In the semiconductor device described in this embodiment, stored data can be held for an extremely long time by using a transistor with an extremely small off-state current that uses an oxide semiconductor for a channel formation region. That is, the refresh operation is not necessary or the frequency of the refresh operation can be extremely low, so that power consumption can be sufficiently reduced. In addition, stored data can be held for a long time even when power is not supplied (note that a potential is preferably fixed).

In addition, in the semiconductor device described in this embodiment, high voltage is not needed for writing data and there is no problem of deterioration of elements. For example, there is no need to inject electrons into the floating gate or withdraw electrons from the floating gate unlike conventional nonvolatile memories.
There is no problem of deterioration of the gate insulating film. That is, in the semiconductor device according to the disclosed invention, the number of rewritable times that is a problem in the conventional nonvolatile memory is not limited, and the reliability is dramatically improved. Further, since data is written depending on the on / off state of the transistor, high-speed operation can be easily realized.

As described above, a semiconductor device which is miniaturized and highly integrated and has high electrical characteristics, and a method for manufacturing the semiconductor device can be provided.

The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

(Embodiment 7)
In this embodiment, the transistor described in any of Embodiments 1 to 5 is used,
A structure different from the structure described in Embodiment 6 is described with reference to FIGS. 16 and 17 for a semiconductor device which can retain stored contents even when power is not supplied and has no limitation on the number of writing operations. Do.

FIG. 16A illustrates an example of a circuit configuration of a semiconductor device, and FIG. 16B is a conceptual diagram illustrating an example of a semiconductor device. First, the semiconductor device illustrated in FIG. 16A will be described, and then the semiconductor device illustrated in FIG. 16B will be described below.

In the semiconductor device illustrated in FIG. 16A, the bit line BL and the source electrode or the drain electrode of the transistor 1762 are electrically connected, and the word line WL and the gate electrode of the transistor 1762 are electrically connected. The source electrode or drain electrode of the capacitor and the first terminal of the capacitor 1764 are electrically connected.

Next, the case where data is written to and retained in the semiconductor device (memory cell 1850) illustrated in FIG.

First, the potential of the word line WL is set to a potential at which the transistor 1762 is turned on, so that the transistor 1762 is turned on. As a result, the potential of the bit line BL is changed to the capacitive element 17.
64 is supplied to the first terminal (writing). After that, the potential of the first terminal of the capacitor 1764 is held (held) by setting the potential of the word line WL to a potential at which the transistor 1762 is turned off and the transistor 1762 being turned off.

A transistor 1762 including an oxide semiconductor has a feature of extremely low off-state current. Therefore, the capacitor 1764 is turned off, so that the capacitor 1764
The potential of the first terminal (or the charge accumulated in the capacitor 1764) can be held for an extremely long time.

Next, reading of information will be described. When the transistor 1762 is turned on, the bit line BL in a floating state and the capacitor 1764 are brought into conduction, and the bit line BL and the capacitor 17 are connected.
The charge is redistributed between 64. As a result, the potential of the bit line BL changes. Bit line B
The amount of change in the potential of L depends on the potential of the first terminal of the capacitor 1764 (or the capacitor 1764).
It takes different values depending on the electric charge accumulated in).

For example, the potential of the first terminal of the capacitor 1764 is V, the capacitor of the capacitor 1764 is C, the capacitor component of the bit line BL (hereinafter also referred to as bit line capacitor) is CB, and before the charge is redistributed. When the potential of the bit line BL is VB0, the potential of the bit line BL after the charge is redistributed is (CB × VB0 + C × V) / (CB + C). Therefore, if the potential of the first terminal of the capacitor 1764 is two states of V1 and V0 (V1> V0) as the state of the memory cell 1850, the bit line BL in the case where the potential V1 is held. Potential (= CB × VB0
+ C × V1) / (CB + C)) is the potential of the bit line BL when the potential V0 is held (
= CB * VB0 + C * V0) / (CB + C)).

Then, information can be read by comparing the potential of the bit line BL with a predetermined potential.

As described above, the semiconductor device illustrated in FIG. 16A can hold charge that is accumulated in the capacitor 1764 for a long time because the off-state current of the transistor 1762 is extremely small. That is, the refresh operation is not necessary or the frequency of the refresh operation can be extremely low, so that power consumption can be sufficiently reduced. Further, stored data can be retained for a long time even when power is not supplied.

Next, the semiconductor device illustrated in FIG. 16B is described.

A semiconductor device illustrated in FIG. 16B includes memory cell arrays 1851a and 1851b each including a plurality of memory cells 1850 illustrated in FIG. 16A as memory circuits in an upper portion, and a memory cell array 1851 (memory cell arrays 1851a and 1851a and lower) in a lower portion. The peripheral circuit 1853 necessary for operating 1851b) is included. Note that the peripheral circuit 1853 includes the memory cell array 1.
851 is electrically connected.

With the structure shown in FIG. 16B, the peripheral circuit 1853 is replaced with the memory cell array 18.
51 (memory cell arrays 1851a and 1851b) can be provided directly below, so that the semiconductor device can be downsized.

The transistor provided in the peripheral circuit 1853 is preferably formed using a semiconductor material different from that of the transistor 1762 in Embodiment 6. For example, silicon, germanium, silicon germanium, silicon carbide, gallium arsenide, or the like can be used, and a single crystal semiconductor is preferably used. In addition, an organic semiconductor material or the like may be used. A transistor using such a semiconductor material can operate at a sufficiently high speed. Therefore, various transistors (logic circuits, drive circuits, etc.) that require high-speed operation can be suitably realized by the transistors.

Note that the semiconductor device illustrated in FIG. 16B illustrates a structure in which two memory cell arrays 1851 (a memory cell array 1851a and a memory cell array 1851b) are stacked; however, the number of stacked memory cells is not limited thereto. . A configuration in which three or more memory cells are stacked may be employed.

Next, a specific structure of the memory cell 1850 illustrated in FIG. 16A will be described with reference to FIGS.

FIG. 17 shows an example of the structure of the memory cell 1850. FIG. 17A shows a memory cell 185.
A cross-sectional view of 0 is shown, and a plan view of the memory cell 1850 is shown in FIG. Here, FIG. 17A corresponds to a cross section taken along OP and QR in FIG.

The transistor 1762 illustrated in FIGS. 17A and 17B can have the same structure as that described in Embodiments 1 to 4.

An insulating film 1750 is provided as a single layer or a stacked layer over the transistor 1762. A conductive layer 1753 is provided in a region overlapping with the electrode film 1742 a of the transistor 1762 with the insulating film 1750 provided therebetween. The electrode film 1742 a, the interlayer insulating film 1735, the insulating film 1750, and the conductive layer 1753 Thus, a capacitive element 1764 is formed. In other words, the electrode film 1742a of the transistor 1762 functions as one electrode of the capacitor 1764, and the conductive layer 1753 functions as the other electrode of the capacitor 1764.

An insulating film 1752 is provided over the transistor 1762 and the capacitor 1764. A memory cell 1850 and a wiring 1756 for connecting the adjacent memory cell 1850 are provided over the insulating film 1752. Although not illustrated, the wiring 1756 is electrically connected to the electrode film 1742b of the transistor 1762 through an opening formed in the insulating film 1750, the insulating film 1752, the interlayer insulating film 1735, and the like. However, another conductive layer may be provided in the opening, and the wiring 1756 and the electrode film 1742b may be electrically connected through the other conductive layer. Note that the wiring 1756 corresponds to the bit line BL in the circuit diagram of FIG.

In FIGS. 17A and 17B, an electrode film 1742b of the transistor 1762 is
It can also function as a source electrode of a transistor included in an adjacent memory cell. By adopting such a planar layout, the occupation area of the semiconductor device can be reduced, and thus high integration can be achieved.

By adopting the planar layout shown in FIG. 17A, the area occupied by the semiconductor device can be reduced, so that high integration can be achieved.

As described above, the plurality of memory cells formed in multiple layers in the upper portion are formed using transistors including an oxide semiconductor. Since a transistor including an oxide semiconductor has a small off-state current, stored data can be held for a long time by using the transistor. That is, the frequency of the refresh operation can be made extremely low, so that power consumption can be sufficiently reduced.

As described above, a peripheral circuit using a transistor using a material other than an oxide semiconductor (in other words, a transistor capable of sufficiently high-speed operation) and a transistor using an oxide semiconductor (in a broader sense, sufficiently off) By integrally including a memory circuit using a transistor having a small current, a semiconductor device having characteristics that have never been achieved can be realized. Further, the peripheral circuit and the memory circuit have a stacked structure, whereby the semiconductor device can be integrated.

As described above, a semiconductor device which is miniaturized and highly integrated and has high electrical characteristics, and a method for manufacturing the semiconductor device can be provided.

This embodiment can be implemented in appropriate combination with the structures described in the other embodiments.

(Embodiment 8)
In this embodiment, an example in which the semiconductor device described in any of the above embodiments is applied to a portable device such as a mobile phone, a smartphone, or an e-book reader will be described with reference to FIGS.

In portable devices such as mobile phones, smartphones, and electronic books, SRAM or DRAM is used for temporary storage of image data. The reason why SRAM or DRAM is used is that the flash memory has a slow response and is not suitable for image processing.
On the other hand, when SRAM or DRAM is used for temporary storage of image data, it has the following characteristics.

In an ordinary SRAM, as shown in FIG.
Or six transistors of a transistor 2006, which are driven by an X decoder 2007 and a Y decoder 2008. The transistors 2003 and 2005 and the transistors 2004 and 2006 constitute an inverter and can be driven at high speed. However, since one memory cell is composed of 6 transistors, there is a disadvantage that the cell area is large. SR, where F is the minimum design rule dimension
The memory cell area of the AM is usually a 100~150F ^2. For this reason, SRAM has the highest unit price per bit among various memories.

On the other hand, in the DRAM, the memory cell has a transistor 2011 as shown in FIG.
, A storage capacitor 2012, which includes an X decoder 2013 and a Y decoder 20
14 is driven. One cell has one transistor and one capacitor, and has a small area. The memory cell area of DRAM is usually 10F ² or less. However, D
The RAM always needs refreshing and consumes power even when rewriting is not performed.

However, the memory cell area of the semiconductor device described in the above embodiment is around 10F ² and frequent refreshing is not necessary. Therefore, the memory cell area can be reduced and the power consumption can be reduced.

FIG. 19 shows a block diagram of a portable device. 19 includes an RF circuit 2101, an analog baseband circuit 2102, a digital baseband circuit 2103, and a battery 210.
4, power supply circuit 2105, application processor 2106, flash memory 211
0, display controller 2111, memory circuit 2112, display 2113,
A touch sensor 2119, an audio circuit 2117, a keyboard 2118, and the like are included. A display 2113 includes a display unit 2114, a source driver 2115, and a gate driver 2.
116. The application processor 2106 is a CPU 2107.
, DSP 2108, and interface 2109 (also referred to as IF). In general, the memory circuit 2112 is configured by SRAM or DRAM, and by adopting the semiconductor device described in the above embodiment for this portion, writing and reading of information can be performed at high speed and long-term storage can be performed. In addition, power consumption can be sufficiently reduced.

FIG. 20 shows an example in which the semiconductor device described in any of the above embodiments is used for the memory circuit 2250 of the display. A memory circuit 2250 illustrated in FIG. 20 includes a memory 2252 and a memory 225.
3, a switch 2254, a switch 2255, and a memory controller 2251. The memory circuit also has image data (input image data) input from a signal line.
, Memory 2252, and display controller 2256 that reads and controls data (stored image data) stored in memory 2253, and display controller 2
A display 2257 that displays in response to a signal from 256 is connected.

First, certain image data is formed by an application processor (not shown) (input image data A). The input image data A is stored in the memory 225 via the switch 2254.
2 is stored. The image data (stored image data A) stored in the memory 2252 is displayed on the display 22 via the switch 2255 and the display controller 2256.
Sent to 57 and displayed.

When there is no change in the input image data A, the stored image data A is normally stored in the display controller 2256 from the memory 2252 via the switch 2255 at a cycle of about 30 to 60 Hz.
Read from.

Next, for example, when the user performs an operation of rewriting the screen (that is, the input image data A
The application processor forms new image data (input image data B). The input image data B is stored in the memory 2253 via the switch 2254. During this time, the stored image data A is periodically sent from the memory 2252 via the switch 2255.
Has been read. When new image data (stored image data B) is stored in the memory 2253, the stored image data B is read from the next frame of the display 2257,
Via the switch 2255 and the display controller 2256, the display 22
The stored image data B is sent to 57 and displayed. This reading is continued until new image data is stored in the memory 2252 next time.

In this manner, the memory 2252 and the memory 2253 display the display 2257 by alternately writing image data and reading image data. Note that the memory 2252 and the memory 2253 are not limited to different memories, and one memory may be divided and used. By employing the semiconductor device described in any of the above embodiments for the memory 2252 and the memory 2253, information can be written and read at high speed, data can be stored for a long time, and power consumption can be sufficiently reduced. it can.

FIG. 21 shows a block diagram of an electronic book. FIG. 21 shows a battery 2301 and a power supply circuit 2302.
, A microprocessor 2303, a flash memory 2304, an audio circuit 2305, a keyboard 2306, a memory circuit 2307, a touch panel 2308, a display 2309, and a display controller 2310.

Here, the semiconductor device described in any of the above embodiments can be used for the memory circuit 2307 in FIG. The role of the memory circuit 2307 has a function of temporarily holding the contents of a book. An example of a function is when a user uses a highlight function. When a user is reading an electronic book, the user may want to mark a specific part. This marking function is called a highlight function, and is to show the difference from the surroundings by changing the display color, underlining, making the character thicker, or changing the font of the character. This is a function for storing and holding information on a location designated by the user. If this information is stored for a long time, it may be copied to the flash memory 2304. Even in such a case, by adopting the semiconductor device described in the above embodiment, writing and reading of information can be performed at high speed, long-term storage can be performed, and power consumption can be sufficiently reduced. Can do.

As described above, the portable device described in this embodiment includes the semiconductor device according to any of the above embodiments. This realizes a portable device that can read data at high speed, can store data for a long period of time, and has low power consumption.

The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

(Embodiment 9)
The semiconductor device disclosed in this specification and the like can be applied to a variety of electronic devices (including game machines). Examples of the electronic device include a television device (also referred to as a television or a television receiver), a monitor for a computer, a camera such as a digital camera or a digital video camera, a digital photo frame, a mobile phone (a mobile phone or a mobile phone). Large-sized game machines such as portable game machines, portable information terminals, sound reproduction apparatuses, and pachinko machines. Examples of electronic devices each including the liquid crystal display device described in the above embodiment will be described.

FIG. 22A illustrates a laptop personal computer, which includes a main body 2501 and a housing 250.
2, a display unit 2503, a keyboard 2504, and the like. By applying the semiconductor device described in any of the above embodiments, a highly reliable laptop personal computer can be obtained.

FIG. 22B illustrates a personal digital assistant (PDA). A main body 2511 includes a display portion 2513,
An external interface 2515, operation buttons 2514, and the like are provided. There is a stylus 2512 as an accessory for operation. By applying the semiconductor device described in any of the above embodiments, a highly reliable personal digital assistant (PDA) can be obtained.

FIG. 22C illustrates an example of an electronic book. For example, the electronic book 2520 includes a housing 25.
21 and a housing 2523. A housing 2521 and a housing 252
3 is integrated with a shaft portion 2522 and can be opened and closed with the shaft portion 2522 as an axis. With such a configuration, an operation like a paper book can be performed.

A display portion 2525 is incorporated in the housing 2521 and a display portion 2527 is incorporated in the housing 2523. The display unit 2525 and the display unit 2527 may be configured to display a continued screen or may be configured to display different screens. By adopting a configuration in which different screens are displayed, for example, a sentence is displayed on the right display unit (display unit 2525 in FIG. 22C) and an image is displayed on the left display unit (display unit 2527 in FIG. 22C). Can be displayed. By applying the semiconductor device described in any of the above embodiments, a highly reliable electronic book 2520 can be obtained.

FIG. 22C illustrates an example in which the housing 2521 is provided with an operation portion and the like. For example,
A housing 2521 is provided with a power source 2526, operation keys 2528, a speaker 2529, and the like. Pages can be sent with the operation keys 2528. Note that a keyboard, a pointing device, or the like may be provided on the same surface as the display portion of the housing. In addition, an external connection terminal (such as an earphone terminal or a USB terminal), a recording medium insertion portion, or the like may be provided on the rear surface or side surface of the housing. Further, the electronic book 2520 may have a structure having a function as an electronic dictionary.

Further, the e-book reader 2520 may have a configuration capable of transmitting and receiving information wirelessly. By radio
It is also possible to purchase desired book data from an electronic book server and download it.

FIG. 22D illustrates a smartphone, which includes a housing 2530, buttons 2531, a microphone 2532, a display portion 2533 including a touch panel, a speaker 2534, and a camera lens 2535, and is a portable phone. As a function. By applying the semiconductor device described in any of the above embodiments, a highly reliable smartphone can be obtained.

In the display portion 2533, the display direction can be appropriately changed depending on a usage pattern. In addition, the display portion 2533
Since the camera lens 2535 is provided on the same plane, a videophone can be used. The speaker 2534 and the microphone 2532 can be used for videophone calls, recording and playing sound, and the like as well as voice calls.

The external connection terminal 2536 can be connected to an AC adapter and various types of cables such as a USB cable, and charging and data communication with a personal computer are possible. Further, a recording medium can be inserted into an external memory slot (not shown), and a larger amount of data can be stored and moved.

In addition to the above functions, an infrared communication function, a television reception function, or the like may be provided.

FIG. 22E illustrates a digital video camera which includes a main body 2541, a display portion 2542, operation switches 2543, a battery 2544, and the like. By applying the semiconductor device described in any of the above embodiments, a highly reliable digital video camera can be obtained.

FIG. 22F illustrates an example of a television set. The television device 2550
A display portion 2553 is incorporated in the housing 2551. Images can be displayed on the display portion 2553. Here, a structure in which the housing 2551 is supported by the stand 2555 is shown. By applying the semiconductor device described in any of the above embodiments, a highly reliable television set 2550 can be obtained.

The television device 2550 can be operated with an operation switch provided in the housing 2551 or a separate remote controller. Further, the remote controller may be provided with a display unit that displays information output from the remote controller.

Note that the television set 2550 is provided with a receiver, a modem, and the like. General TV broadcasts can be received by the receiver, and connected to a wired or wireless communication network via a modem, so that it can be unidirectional (sender to receiver) or bidirectional (sender and receiver). It is also possible to perform information communication between each other or between recipients).

The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.

In this embodiment, an oxide semiconductor film containing silicon is manufactured, the sheet resistance measurement result of the oxide semiconductor film, and X-ray photoelectron spectroscopy (XPS: X-ray Photoselect)
The results of composition analysis using ron spectroscopy) will be described.

In this example, sputtering was performed at different gas flow rates (oxygen 33%, oxygen 100%) for targets to which different concentrations of SiO ₂ (0 wt%, 2 wt%, 5 wt%) were added, and oxides were obtained. A semiconductor film was formed on a glass substrate to prepare a sample.

As a sputtering target, IG of In: Ga: Zn = 1: 1: 1 [atomic ratio]
A target obtained by adding ₂ % by weight of SiO ₂ to an IGZO target of In: Ga: Zn = 1: 1: 1 [atomic ratio], and In: Ga: Zn = 1: 1: 1 [number of atoms] Ratio] IGZO target with 5 wt% SiO ₂ added.

For each target, the gas flow rate _O 2 = 10 sccm or Ar _/ O 2 = 10
An oxide semiconductor film was formed by sputtering at sccm / 5 sccm. The other film formation conditions were common to all samples, and the substrate temperature was 200 ° C., the film formation power was 100 W (DC power supply), the film formation pressure was 0.4 Pa, and the film thickness was 100 nm.

That is, Sample L was deposited with 100% oxygen atmosphere using a target without the addition of SiO _2, samples were deposited in an atmosphere of 100% oxygen using a target in which the SiO ₂ was added 2 wt% M, the SiO ₂ 5 wt% added samples N by using a target was deposited in an atmosphere of 100% oxygen, the sample O was deposited with oxygen 33% atmosphere using a target without the addition of SiO _2, the SiO ₂ was added 2 wt% Sample P was formed in an atmosphere of 33% oxygen using a target, and sample Q was formed in an atmosphere of 33% oxygen using a target to which 5% by weight of SiO ₂ was added.

Further, samples L to Q were introduced into an electric furnace using a resistance heating element and subjected to heat treatment. The heat treatment is performed by heating at 450 ° C. in an N ₂ atmosphere for 1 hour, and then at 450 ° C. for O 2.
Heating was performed for 1 hour in _two atmospheres.

Sheet resistance was measured for samples L to Q subjected to the above treatment. The measurement results of the sheet resistance of samples L to Q are shown in the graph of FIG. In FIG. 23, the vertical axis represents the sheet resistance (Ω / □), and the horizontal axis represents the SiO ₂ concentration (wt%) in the target.
).

From the graph of FIG. 23, the sheet resistance of the oxide semiconductor film tends to increase as the SiO ₂ concentration in the target increases. In Sample L and Sample O in which SiO ₂ is not added to the target, the sheet resistance is about 8 × 10 ⁵ Ω / □ to 1 × 10 ⁶ Ω / □, and can be used as an active layer of a transistor or the like. It became. Also,
Sample M and sample P having a SiO ₂ concentration of 2% by weight in the target also have a sheet resistance of about 1 × 10 ⁶ Ω / □ to 3 × 10 ⁶ Ω / □ and can be used as an active layer of a transistor or the like. It became sheet resistance. However, in Sample N and Sample Q having a SiO ₂ concentration of 5% by weight in the target, the sheet resistance is larger than the upper limit of measurement, and the on-current may be lowered when used as an active layer such as a transistor.

As described above, the SiO ₂ concentration in the target used for forming the oxide semiconductor film of the transistor is preferably low. For example, the SiO ₂ concentration in the target may be about 2 wt% or less.

Further, in this example, an oxide semiconductor film was formed over a silicon substrate under the same conditions as those of Sample M and Sample N, a sample was manufactured, and composition analysis was performed using XPS.

As a sputtering target, IG of In: Ga: Zn = 1: 1: 1 [atomic ratio]
A target obtained by adding 2 wt% SiO ₂ to a ZO target; and In: Ga: Zn = 1:
A target in which 5% by weight of SiO ₂ was added to a 1: 1 [atomic ratio] IGZO target was used.

The film formation conditions are: gas flow rate: O ₂ = 10 sccm, substrate temperature: 200 ° C., film formation power: 100 W
(DC power supply), film forming pressure: 0.4 Pa, film thickness: 15 nm.

That is, sample R was deposited in an atmosphere of 100% oxygen using a target obtained by adding SiO ₂ 2 wt%, the sample S was deposited in an atmosphere of 100% oxygen using a target obtained by adding SiO ₂ 5 wt% Produced.

Sample R and sample S were subjected to composition analysis using XPS.
The concentration of silicon in the oxide semiconductor film was 1.1 atomic%, and the concentration of silicon in the oxide semiconductor film of Sample S was 2.6 atomic%. That is, the concentration of silicon in the oxide semiconductor film using the target to which 2 wt% of SiO ₂ is added is 1.1 atomic%, and Si
The silicon concentration in the oxide semiconductor film using the target to which 5% by weight of O ₂ is added is 2.
It was 6 atomic%.

As described above, when an impurity such as silicon is mixed in the vicinity of the interface between the oxide semiconductor film and the gate insulating film by mixing or the like, the resistance of the channel formation region may increase, and the on-state current of the transistor may be reduced. Therefore, it is important to reduce the silicon concentration as described above in the vicinity of the interface between the oxide semiconductor film and the gate insulating film.

As described in Embodiment 1, the oxide semiconductor film used in the above embodiment includes C
Although an AAC-OS film is preferably used, there is a concern that the crystal structure of the CAAC-OS film may be changed by mixing silicon into the CAAC-OS film.

Therefore, in this example, the calculation result of the concentration of silicon mixed in an oxide semiconductor film having high crystallinity such as a CAAC-OS film loses the crystal structure of the oxide semiconductor film is calculated. Will be described.

In the calculation in this example, “classical molecular dynamics method” was used as the calculation method, and “SCIGRESS-ME” from Fujitsu Limited was used for the calculation.

In addition, as a film having high crystallinity, a single crystal structure model (see FIG. 24A) of InGaZnO _{4 having} 1680 atoms was used. The density of the model is 6.36 g / cm ³ .

For the above model, in a constant temperature and constant pressure state (pressure: 1 atm, temperature: 300 ° C.), a sample in which 2 In atoms, 2 Ga atoms, 2 Zn atoms and 8 oxygen atoms are replaced with Si atoms (hereinafter, Described as Sample A), 3 In atoms, 3 Ga atoms, Zn
For a sample in which 3 atoms and 12 oxygen atoms were replaced with Si atoms (hereinafter referred to as sample B), the initial structure and the structure after 2 nsec were calculated.

In addition, Si substituted by the sample A is 0.83 atomic% (0.
52% by weight) and Si substituted by Sample B is 1.25 atomic% (0.7%) of the entire structure.
9% by weight).

First, the structure of sample A and the structure of sample B in the initial state (0 nsec) are shown in FIG.
4 (A) and FIG. 24 (B), and FIG. 24 (C) shows In atom, Ga atom, Zn
The structure of a sample (hereinafter referred to as sample C) in which atoms and O atoms are not substituted with Si atoms is shown.

From FIG. 24, it is confirmed that in the initial state, both sample A and sample B have high crystallinity like sample C.

Next, the crystal states of Sample A and Sample B after 2 nsec will be described with reference to FIG.

First, FIG. 25A shows the crystal state of sample A after 2 nsec. In order to investigate whether or not the structure has crystallinity, the radial distribution function g (r
)

The above-mentioned “radial distribution function g (r)” is a function representing the probability density that other atoms exist at a position r away from a certain atom, and when the correlation between the atoms disappears, g (
r) approaches 1.

The calculation result of the radial distribution function in sample A is shown in FIG. FIG. 25 (B)
The horizontal axis is the distance r (nm), and the vertical axis is the radial distribution function g (r). The solid line in the figure is a line representing the radial distribution function of sample A, and the broken line is a line representing the radial distribution function of sample C.

From FIG. 25B, the radial distribution function of sample A after 2 nsec is ordered even if r (nm) becomes a long distance in the same manner as the radial distribution function of sample C (also expressed as having a peak). it can.). This suggests that crystallinity is maintained.

Similarly, FIG. 26A shows the crystal state of sample B after 2 nsec, and FIG. 26B shows the calculation result of the radial distribution function g (r) in the structure. Note that the solid line in FIG. 26B is a line representing the radial distribution function of sample B, and the broken line is a line representing the radial distribution function of sample C.

FIG. 26A shows that the structure of sample B after 2 nsec clearly changes compared to the structure of sample B in the initial state shown in FIG.

Also, looking at FIG. 26 (B) showing the radial distribution function of sample B after 2 nsec, r
As the distance of (nm) becomes longer, the order is lost and a flat line is formed (it can also be expressed that the peak disappears). This suggests that the crystallinity is not maintained (that is, amorphous).

In this specification, in a semiconductor device using an oxide semiconductor film as a semiconductor layer, a region in which a silicon concentration is distributed at a concentration of 1.1 atomic% or less from an interface with a gate insulating film toward an oxide semiconductor film In the case where an oxide semiconductor film having high crystallinity such as a CAAC-OS film is used as a semiconductor layer from the result of this example,
It was confirmed that a structure having a region in which the silicon concentration is distributed at a concentration of 0.83 atomic% or less from the interface with the gate insulating film toward the oxide semiconductor film is confirmed.

100 substrate 102 insulating film 106 oxide semiconductor film 106a region 106b region 106c low resistance region 107 insulating film 108 gate insulating film 109 conductive film 110 gate electrode 114a source electrode 114b drain electrode 130 impurity ions 150 transistor 602 conductive film 650 transistor 800 interlayer insulation Film 802 interlayer insulating film 850 transistor 1100 insulating film 1101 insulating film 1102 sidewall insulating film 1104 conductive film 1150 transistor 1350 transistor 1700 substrate 1706 element isolation insulating layer 1708 gate insulating film 1710 gate electrode 1716 channel formation region 1720 impurity region 1724 intermetallic compound region 1728 Insulating layer 1730 Insulating layer 1735 Interlayer insulating film 1736a Side wall insulating film 1736b Side wall insulating film 1737 Insulating film 174 a electrode film 1742b electrode film 1744 oxide semiconductor film 1748 gate electrode 1750 insulating film 1752 insulating film 1753 conductive layer 1756 wiring 1760 transistor 1762 transistor 1764 capacitor 1850 memory cell 1851 memory cell array 1851a memory cell array 1851b memory cell array 1853 peripheral circuit 2001 transistor 2002 Transistor 2003 Transistor 2004 Transistor 2005 Transistor 2006 Transistor 2007 X decoder 2008 Y decoder 2011 Transistor 2012 Storage capacitor 2013 X decoder 2014 Y decoder 2101 RF circuit 2102 Analog baseband circuit 2103 Digital baseband circuit 2104 Battery 2105 Power supply circuit 2106 Application processor 2107 CPU
2108 DSP
2109 Interface 2110 Flash memory 2111 Display controller 2112 Memory circuit 2113 Display 2114 Display unit 2115 Source driver 2116 Gate driver 2117 Audio circuit 2118 Keyboard 2119 Touch sensor 2250 Memory circuit 2251 Memory controller 2252 Memory 2253 Memory 2254 Switch 2255 Switch 2256 Display controller 2257 Display 2301 Battery 2302 Power supply circuit 2303 Microprocessor 2304 Flash memory 2305 Audio circuit 2306 Keyboard 2307 Memory circuit 2308 Touch panel 2309 Display 2310 Display controller 2501 Main body 2502 Case 2503 Display unit 2504 Key Main body 2512 Main body 2512 Stylus 2513 Display unit 2514 Operation button 2515 External interface 2520 Electronic book 2521 Case 2522 Shaft unit 2523 Case 2525 Display unit 2526 Power supply 2527 Display unit 2528 Operation key 2529 Speaker 2530 Case 2531 Button 2532 Microphone 2533 Display unit 2534 Speaker 2535 Camera lens 2536 External connection terminal 2541 Main body 2542 Display unit 2543 Operation switch 2544 Battery 2550 Television apparatus 2551 Case 2553 Display unit 2555 Stand

Claims (2)

An oxide semiconductor film;
A gate insulating film on the oxide semiconductor film;
A gate electrode overlapping with at least the oxide semiconductor film on the gate insulating film;
The gate insulating film comprises carbon;
The oxide semiconductor film has a first region in which a concentration of carbon is distributed at a concentration of 1.0 × 10 ²⁰ atoms / cm ³ or less from the interface on the gate insulating film side toward the oxide semiconductor film. ,
The oxide semiconductor film has a second region different from the first region,
The semiconductor device wherein the concentration of carbon contained in the second region is smaller than the concentration of carbon contained in the first region. An oxide semiconductor film;
A gate insulating film on the oxide semiconductor film;
A gate electrode overlapping with at least the oxide semiconductor film on the gate insulating film;
The gate insulating film comprises carbon;
The oxide semiconductor film has a first region and a second region,
The first region is located closer to the gate insulating film than the second region,
The concentration of carbon contained in the first region is 1.0 × 10 ²⁰ atoms / cm ³ or less,
The semiconductor device wherein the concentration of carbon contained in the second region is smaller than the concentration of carbon contained in the first region.